JPS5729877B2 - - Google Patents
Info
- Publication number
- JPS5729877B2 JPS5729877B2 JP12628072A JP12628072A JPS5729877B2 JP S5729877 B2 JPS5729877 B2 JP S5729877B2 JP 12628072 A JP12628072 A JP 12628072A JP 12628072 A JP12628072 A JP 12628072A JP S5729877 B2 JPS5729877 B2 JP S5729877B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628072A JPS5729877B2 (en) | 1972-12-18 | 1972-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628072A JPS5729877B2 (en) | 1972-12-18 | 1972-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4982967A JPS4982967A (en) | 1974-08-09 |
| JPS5729877B2 true JPS5729877B2 (en) | 1982-06-25 |
Family
ID=14931290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12628072A Expired JPS5729877B2 (en) | 1972-12-18 | 1972-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5729877B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162908A (en) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | Operation controller for equipment with person sensor |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MY151553A (en) | 2009-08-18 | 2014-06-13 | Multitest Elektronische Syst | Two abutting sections of an align fixture together floatingly engaging an electronic component |
| EP2302399B1 (en) | 2009-08-18 | 2012-10-10 | Multitest elektronische Systeme GmbH | System for post-processing of electronic components |
| MY160276A (en) | 2009-08-18 | 2017-02-28 | Multitest Elektronische Systeme Gmbh | An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture |
| MY152834A (en) * | 2009-08-18 | 2014-11-28 | Multitest Elektronische Syst | An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture |
| JP5818711B2 (en) * | 2012-02-14 | 2015-11-18 | 三菱電機株式会社 | Wafer holding structure and vapor deposition apparatus having the same |
-
1972
- 1972-12-18 JP JP12628072A patent/JPS5729877B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162908A (en) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | Operation controller for equipment with person sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4982967A (en) | 1974-08-09 |