JPS5743975B2 - - Google Patents
Info
- Publication number
- JPS5743975B2 JPS5743975B2 JP49099237A JP9923774A JPS5743975B2 JP S5743975 B2 JPS5743975 B2 JP S5743975B2 JP 49099237 A JP49099237 A JP 49099237A JP 9923774 A JP9923774 A JP 9923774A JP S5743975 B2 JPS5743975 B2 JP S5743975B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49099237A JPS5743975B2 (en) | 1974-08-29 | 1974-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49099237A JPS5743975B2 (en) | 1974-08-29 | 1974-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5126472A JPS5126472A (en) | 1976-03-04 |
| JPS5743975B2 true JPS5743975B2 (en) | 1982-09-18 |
Family
ID=14242066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49099237A Expired JPS5743975B2 (en) | 1974-08-29 | 1974-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5743975B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62267464A (en) * | 1986-05-15 | 1987-11-20 | Nissin Electric Co Ltd | Apparatus for forming thin film by ionic vapor deposition |
| JPH0678584B2 (en) * | 1990-05-31 | 1994-10-05 | 株式会社島津製作所 | Contamination prevention wafer rotating tool |
-
1974
- 1974-08-29 JP JP49099237A patent/JPS5743975B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5126472A (en) | 1976-03-04 |