JPS5811083B2 - Instrument module resistor and its manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an instrument module resistor used as a calculation resistor in an analog electric circuit such as a self-balancing recorder, and a method for manufacturing the same.

In instruments such as self-balancing recorders, various calculated resistors are used when constructing analog electric circuits, and the resistance values vary depending on the specifications such as the range and span of the product.

For example, with an automatic balancing recorder, the standard range alone is approximately 30
There are zero types, and these various ranges are matched by combining the resistance values of several to more than ten operational resistors.

For this reason, some calculation resistors have a resistance value that changes significantly by a factor of about 103.

Moreover, the value of the calculated resistor must be adjusted to a predetermined value extremely accurately, and the temperature coefficient of each resistor is required to be small and have little variation.

Therefore, wire-wound resistors such as manganin wire, which have an extremely small temperature coefficient, are generally used as operational resistors for meters.

Moreover, each of these winding resistances is manually adjusted to a specified value using a precision bridge or the like, and is assembled into a circuit after being subjected to aging to remove the effects of distortion and the like that occur during winding.

For this reason, a large amount of lost time and cost were involved from determining the specifications to obtaining a calculated resistor with a desired resistance value.

On the other hand, module resistors in which a plurality of resistors are formed on an insulating substrate using a resistance pattern of tantalum nitride or the like are used in various fields.

Modular resistors not only have small dimensions, but also have outstanding electrical and mechanical stability.

Generally, each resistance element of a module resistor is formed by connecting one fixed resistance pattern that approximates a specified resistance value and one or more adjustment resistance patterns in series or parallel to form a composite resistance pattern. Conductor patterns are provided at both ends of these composite resistance patterns, and the adjustment resistance pattern is adjusted to a specified value by trimming while measuring the composite resistance value of the composite resistance pattern.

In this way, conventional module resistors are configured to be mass-produced in which the resistance values of multiple resistor elements are predefined, and the resistance values of the multiple resistor elements vary depending on the specifications. Not suitable for one-piece production.

For this reason, in instruments such as self-balancing recorders, mass-produced module resistors are used only for calculated resistors whose resistance values change stepwise according to specifications, and specifications are satisfied by external wiring. A wire-wound resistor is also used as the operational resistor.

One of the objects of the present invention is to form a resistance range from low resistance values to high resistance values necessary for arithmetic resistors for meters in a common pattern, and then trim the resistance range based on specifications using an automatic trimming device using a computer. The present invention provides a method for manufacturing a module resistor for a one-piece instrument by adjusting the resistance value to a desired value.

In addition, since the temperature coefficient of resistance of a conductor pattern is generally larger than that of a resistor pattern, it is desirable to have as few resistors as possible with a conductor pattern that has a low resistance value. If an attempt is made to form a common pattern for a resistance range up to 1, the resistor of the conductor pattern at a low resistance value will become relatively large.

For this reason, it is necessary to increase the width of the conductor pattern,
Does increasing the width of the fluid pattern result in a higher resistance value? Therefore, the area of the conductor pattern becomes relatively large.

Another object of the invention is therefore to realize a modular resistor for measuring instruments which is free from these drawbacks.

FIG. 1 is a plan view showing one embodiment of the module resistor of the present invention, in which two resistance elements R0 represent a plurality of resistance elements.
, R1.

2 in the figure, T is an insulating substrate such as ceramic, A1, A2
, B1 and B2 are electrode patterns made of gold or the like, L is a conductor pattern made of gold or the like, r0 to r12 are resistance patterns made of tantalum nitride or the like, C is a display pattern made of gold or the like, Dl and D2 are positioning patterns made of gold or the like. It is.

Electrodes, conductors, resistors, display and positioning patterns are deposited on the insulating substrate by sputtering or other means.

The resistance element R0 is formed of a resistance pattern r0 having a prescribed resistance value and connected between the electrodes A1 and B1.

This resistance element R0 is a monitor resistance that manages the resistance value and temperature coefficient of a plurality of resistance elements formed on the same substrate.

In other words, a resistor pattern formed by sputtering etc. cannot necessarily be produced as designed due to errors that occur during patterning for resistor formation, differences in the composition of the resistor, etc., and has a resistance value and temperature coefficient that vary within a certain range. .

Furthermore, since the manufacturing process for resistive elements on the same substrate is the same, the resistance value error from the designed value and the temperature coefficient take approximately the same values.

Therefore, by measuring the resistance value 3 and temperature coefficient of the monitor resistor R0, the quality of a plurality of resistance elements on the same substrate is inspected.

The resistance element R1 has weighted resistance patterns r1, r2, r3, r4, r5, r6, r7, r8, respectively.
, r9, rlo, rll, and r12.

In this example, r1=1Ω, r2=2Ω, r3=4Ω.

r4=8Ω, r5=10Ω, r6=20Ω, r7=40
Ω, r8=80Ω, r9=100Ω, r10=200Ω
, r11=400Ω, r12=800Ω.

The resistance pattern is 1Ω place (r1~r4), 10Ω place (
r5 to r8), are grouped every 100Ω (r9 to r12), and both ends of each resistance pattern within the group are short-circuited with a conductor pattern, and both ends of each group are also short-circuited with a wide conductor pattern. It is connected.

Also, the wide conductor pattern is electrode A2. A3 is short-circuited.

FIG. 2 is an equivalent circuit diagram illustrating the resistance of the conductor pattern of such a resistance element R1 as being sufficiently small.

Although this example shows an example of a resistance element having 12 resistance patterns, in an actual resistance element,
The number and weighting of resistance patterns are selected depending on the resistance range and setting accuracy.

In the resistance element R1 having such a configuration, the electrodes A2. Any resistance value from several ohms to several thousand ohms can be obtained between A3.

(1) When obtaining a resistance value of 10Ω or less In this case, first, terminal A2. Measure the initial resistance value between B2.

Then, it calculates how many Ω lower the measured value is than the desired value, and selectively cuts off the predetermined short-circuit connection portions a=d of the resistance patterns r1 to r4 according to the calculated value.

As a result, terminal A2. Resistance patterns r1 to r4 of the order of 1Ω are selectively connected in series between B2,
Terminal A2. A desired resistance value of 10Ω or less can be obtained between B2.

(2) When obtaining a resistance value of 10 to 100 Ω In this case, first, the short-circuit connection e between the 1 Ω resistance patterns r1 to r4 and the 10 Ω resistance patterns r5 to r8 is cut off.

As a result, there are resistance patterns r1 to r4 of 1Ω and resistance patterns r5 to r8 of 10Ω between terminals A2 and B2.
will be connected in series.

After that, terminal A2. Measure the initial resistance value between B2 and calculate the difference from the desired value.

Then, by selectively cutting out predetermined short-circuit connections a=d, g to j of the resistance patterns r1 to r8 according to the calculated values, the resistance patterns r1 to r4 of the 1Ω order and the resistance patterns of the 10Ω order are created. r5 to r8 are selectively connected in series, and a desired resistance value of 10 to 100 Ω is obtained between terminals A2 and B2.

(3) When obtaining a resistance value of 100Ω or more In this case, first, the short-circuit connection e between the resistance patterns r1 to r4 of 1Ω and the resistance patterns r5 to r8 of 10Ω
Resistance pattern r5 to r8 and 100Ω in the order of 8 and 10Ω
The short-circuit connection part f with the resistance patterns r9 to r12 is cut off.

As a result, resistance patterns r1 to r4 of 1Ω and resistance patterns r5 to r8 of 10Ω are connected between terminals A2 and 82.
and resistance patterns r, ˜r1□ of about 100Ω are connected in series.

Thereafter, the initial resistance value between terminals A2 and B2 is measured, and the difference from the desired value is calculated.

Then, resistance patterns r1 to r12 according to the calculated values
selectively cutting out predetermined short-circuit connections a=d, g to n.

As a result, resistance patterns r5 to r4 of 1Ω and 10Ω
The resistance patterns r5 to r8 in the 100 ohm digit and the resistance patterns r9 to r12 in the 100 ohm digit are selectively connected, and the terminal A
A desired resistance value of 100Ω or more and about 1500Ω can be obtained between B2 and B2.

With this configuration, in the case of a relatively low resistance value, the length of the conductor pattern 2 becomes shorter and the area becomes larger than in the case of a high resistance value, and the terminal A2. The amount of resistance of the conductor pattern 2 between B2 becomes relatively small.

This causes terminal A2. The influence of the temperature coefficient of resistance of the conductor pattern 2 between B2 can be reduced.

Furthermore, in the case of a high resistance value, the area of the conductor pattern is smaller than in the case of a low resistance value, and a common pattern can be used to realize a resistor element with excellent characteristics and a relatively wide range of resistance values. .

Furthermore, according to this embodiment, since the resistance pattern is not directly trimmed, the physical stability of the resistance pattern is not impaired.

In this example, explanation regarding trimming accuracy is omitted, but the setting accuracy corresponds to the resistance pattern of the predetermined order (for example, 0.1Ω, 0.01Ω, etc.) of the 1Ω order of this example. It can be applied in the same way as the resistor pattern.

Moreover, the weighting of each resistance pattern can be appropriately set according to the purpose.

In addition, as a resistance element with a relatively wide resistance range, each resistance pattern is a fixed resistance pattern r as shown in Figure 3.
1c to rnc and adjustment resistance patterns r1T to rnT
Both ends of each of these resistance patterns formed as a composite resistance pattern are commonly short-circuited by a conductor pattern L.

FIG. 4 is an equivalent circuit diagram of the resistor shown in FIG. 3, assuming that the resistance of the conductor pattern l is sufficiently small.

Here, the subscript of each resistance pattern is 1 (i=1.2...
, n), the resistance values ri with the same subscript i can be expressed as ri=ric+riT(1) or (2), and these resistance values ri each have a coded weight (for example, 1-2 -4-8.1-4-4
-6, etc.) or carried weights (0, 1-1-10-10, etc.)
0, 10-100-100-1000, etc.).

In such a configuration, by selectively cutting off and insulating the short-circuit connection portion made of the conductor pattern L that commonly short-circuits both ends of each resistor pattern r, as shown by the dashed-dotted lines a to e, Terminal A2. A resistor with a resistance pattern corresponding to the cut short-circuit connection is connected in series between B2.

In this way, one or more fixed resistance patterns are connected to terminal A2 so that the resistance value approximates the desired resistance value.
．． After connecting them in series between B2, the adjustment resistor patterns connected in series or parallel to these fixed resistor patterns are partially cut out as shown by broken lines to adjust the resistance to a desired value.

Terminal A2 configured in this manner. The resistance value between B2 is the sum of the resistance pattern expressed by equation (1) and the resistance pattern expressed by equation (2).

Note that the minimum resistance value of a resistor using such a pattern is the resistance value when no short-circuit connection is removed.
The maximum resistance value is the sum of the resistance values of all resistance patterns with all short-circuited connections removed.

FIG. 5 is a plan view showing another embodiment, in which adjustment resistance patterns r1T and rmT are provided as a group of a plurality of fixed resistance patterns.

That is, the adjustment resistance pattern r1T is applied in parallel to the series circuit of the fixed resistance patterns r1cr2c and r3c, and the adjustment resistance pattern rmT is applied in series with the fixed resistance patterns r(n-1)c and rnc. to terminal A2. It is attached between B2.

Note that the resistance values of the adjustment resistor patterns r1T and rmT are always set to a value (approximately 30%) that can stably realize the overall resistance.

In such a configuration, the resistance value between terminals A2B2 is
Similar to the embodiment shown in FIG. 3, the short-circuit connection portions of the desired resistance pattern are selectively cut out as shown by the dashed-dotted lines a to f, and the adjustment resistance pattern is further partially cut out as shown by the broken line. It can be adjusted by

Furthermore, symbols indicating specifications such as a Rondo number and a range are written on the display pattern C during trimming as shown by dotted lines, so that the module resistor can be identified.

Note that the display pattern C is provided at a position where it can be seen from the outside even when the resistor pattern etc. is covered with a metal cap for the purpose of protecting it from the outside world.

In addition, display pattern C and positioning pattern D1 during trimming. D2 may be formed of tantalum nitride or the like in the same manner as the resistor pattern.

Next, a method of manufacturing such a module resistor will be explained.

First, a resistance pattern such as tantalum nitride, a conductor such as gold, and an electrode pattern have the resistance value, resistance range, and accuracy required for the monitoring resistance element and the plurality of calculation resistance elements.
Then, it is formed on an insulating substrate by sputtering or the like so as to form a desired circuit connection.

At the same time, a display pattern and a positioning pattern of gold or the like are formed on the insulating substrate.

Next, the resistance value and temperature coefficient of the monitoring resistance element formed on the insulating substrate are measured, and it is checked whether the resistance value and temperature coefficient of the plurality of calculation resistance elements are within the desired range. .

Thereafter, the resistance pattern on the insulating substrate is oxidized by heat, and the error in the resistance value of each resistance element is adjusted to within 7%, for example.

In this case, the time required for oxidation is determined by the measurement result of the resistance value of the monitoring resistance element.

Through the steps up to this point, a module resistor that is common to various specifications such as range and span of instruments such as recorders is manufactured.

The common module resistors made in this way are individually trimmed based on specifications using an automatic trimming device using a computer, and the resistance value of each calculation resistor element is adjusted to the desired value, and the display pattern is adjusted. Specifications such as lot number and range are entered.

The specific configuration of the automatic trimming device will be explained below using the block diagram shown in FIG.

In FIG. 6, a calculator 1 executes a program for trimming module resistors, and its memory stores programs corresponding to various specifications, and the specifications are inputted using a setting device 2 such as a keyboard. By providing the program via the interface 3, a predetermined program according to the specifications is selected and executed.

A laser beam 5 emitted from a laser oscillator 4 has its direction changed by a mirror 6 and is irradiated onto a module resistor MR fixed on a table 8.

The position of the mirror 6 is adjusted by a drive device 7.

A command 13 is given to the drive device 7 from the computer 1 via the interface 5 in accordance with the progress of the program so that the trimming positions a to n of the resistive element R1 in FIG. 1 can be sequentially irradiated with the laser beam 5, for example.

The resistance measuring device 10 measures the resistance value of the resistance element in the module resistor MR every trimming based on a command 14 from the computer 1 given via the interface 3, and sends the measurement result 15 to the computer via the interface 3. 1
send to

Calculator 1 compares the measurement results with the set values based on the specifications,
Based on the result, it is determined whether or not the trimming position should be irradiated with the laser beam 5, and a command 16 is sent to the laser oscillator 4 via the interface 3.

In this way, the calculator 1 determines whether or not to trim the trimming position determined for each calculation resistor element of the module resistor MR based on the specifications while measuring the resistance value of the resistor element. Trimming for resistance value adjustment can be performed with high precision.

Thereafter, according to a command from the computer 1, symbols indicating specifications such as the lot number and range required for the module resistor MR are entered in the display pattern by trimming.

Furthermore, the resistance value of each resistor element of the trimmed module resistor and its error from the desired value are provided from the computer 1 via the interface 3 to a display device 11 such as a type-like display or a CRT for display.

Note that geometric alignment between the module resistor MR fixed on the table and the mirror 6 is achieved by adjusting the position of the mirror 6 using the manual operation device 9 prior to trimming, and directing visible light from the laser oscillator 4 to the module resistor. This is done by irradiating a positioning pattern on the substrate of the device MR.

In this way, in the present invention, the first step is to create a common module resistor having a plurality of operational resistance elements having resistance ranges required for various specifications of the meter, and The process consists of a second process of individually trimming and adjusting the resistance value to the desired resistance value, and writing symbols indicating specifications such as loft number and range, so the common module resistance from the first process is The device can be mass-produced before the specifications are decided, and there is no wasted time from deciding the specifications to obtaining the desired module resistor, and productivity and supplyability can be significantly improved.

FIG. 7, FIG. 8, and FIG. 9 are circuit diagrams when the module resistor of the present invention is applied to an automatic balancing recorder.

The module resistor MR consists of a monitoring resistance element R0 and nine calculation resistance elements R1 to R9.

Each calculation resistance element has a prescribed resistance value and accuracy according to specifications.

R1 is likely to be connected to the feedback circuit of linear C0P2,
R2 is connected between the inverting input terminal (-) of OF2 and the reference point.

R3 and R4 are for voltage dividing the output of OF2, and in the case of DC voltage input Ei, the voltage dividing point P is shown in FIG.
is connected to the non-inverting input terminal (+) of linear IC0P1, and in the case of thermocouple input CP or resistance temperature detector input Pt, the voltage dividing point P is connected via resistor R7 as shown in FIGS. 8 and 9. Connected to the non-inverting input terminal (+) of OPl.

Note that a DC voltage input, a thermocouple input, and a resistance temperature detector input are respectively applied to the inverting input terminal (-) of OPl.

R5 is a calculation resistor for adding the reference voltage Es to the voltage dividing point P.

R6 is a calculation resistor for adding the reference voltage Es to the input of OF2.

R8 is a calculation resistor used together with R7 in the case of thermocouple input and resistance temperature detector input.

R9 is a calculation resistor for linearization used in the case of inputting a resistance temperature sensor.

In the recorder having the configuration shown in FIG. 7, OPl is the input voltage Ei
and the voltage Em from the module resistor MR is amplified,
A DC deviation voltage s is generated at its output terminal.

S is applied to the inverting input terminal (-) of OF2 via resistor R12, and is also applied to servo amplifier BA.

OF2 adds the comparison voltage Ef and S from the potentiometer PM applied to its non-inverting input terminal (+).

Note that the potentiometer PM includes a series circuit of a slide resistor R13, a span adjustment resistor R14, and a zero adjustment resistor R15, and a negative voltage Es stabilized by a Zener diode ZD is supplied to both ends of the series circuit through a resistor R16. .

The servo amplifier SA drives the servo motor BM according to the output ε of OPl, and adjusts the slide resistance R1 so that ε becomes zero.
Displace the brush in step 3.

Therefore, the displacement amount α of the brush of the slide resistor R13 is Therefore, it is proportional to the input voltage Ei.

This displacement amount α is given to the instruction recording mechanism IR, and the input voltage Ei is recorded as an instruction.

Then, by selecting (R3)/(R4) of the module resistor, the displacement amount of the brush of slide resistor R13 can be set to 0 to 1.
The span can be adjusted to correspond to the measurement range of the input voltage Es to 00%, and (R1)/(R6) and (R3)/(
By selecting R5), it is possible to adjust the zero point so that the zero point transitions between positive and negative.

Note that the span and zero point can be further finely adjusted by resistors R14 and R15 connected in series with the slide resistor R13.

Note that the transistor Q in FIG. 8 is for generating a contact compensation voltage for the thermocouple CP.

As explained above, according to the present invention, a plurality of calculated resistance elements for meters that take various values depending on specifications are formed in patterns on an insulating substrate, and the resistance values and resistance values of the patterns of these calculated resistance elements are The resistance element pattern for temperature coefficient monitoring and the display pattern on which symbols according to the instrument specifications are written by milling are provided on the insulating substrate, reducing the time lost from determining specifications to obtaining the desired resistance value. A modular resistor is obtained which can be manufactured by the method.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing one embodiment of the module resistor of the present invention, FIG. 2 is a circuit diagram thereof, FIG. 3 is a pattern diagram of another embodiment of the resistance element of the module resistor of the present invention, and FIG. Figure 5 is a pattern diagram of another embodiment of the resistance element of the module resistor of the present invention, Figure 6 is a block diagram of the automatic milling device, and Figures 7 to 9 are the module of the present invention. FIG. 2 is a circuit diagram of a recorder using a resistor. T...Insulating substrate, A1. B,,A2. B2...
...Electrode pattern, L...Conductor pattern,
ro, r1~r12...Resistance pattern, MR・
...Module resistor, 1...Calculator,
4... Laser oscillator, 6... Bell, 10
・・・・・・Resistance measuring device.

Claims (1)

[Scope of Claims] 1. A plurality of computational resistance elements for meters formed in a pattern on an insulating substrate and whose resistance value is adjusted by trimming; and a computational resistance element for the meters formed in a pattern on the insulating substrate. A module resistor for an instrument, comprising a resistance element for monitoring the resistance value and temperature coefficient of the pattern, and a display pattern provided on the insulating substrate and on which a symbol is written by trimming. 2 The calculated resistance element pattern for meters has a specified weight. The resistor pattern has a plurality of resistor patterns, each end of which is connected to a common short-circuit by a conductor pattern, and this short-circuit connection is selectively removed by trimming to obtain a desired resistance value. An instrument module resistor according to claim 1, characterized in that the resistor is formed of a resistor module. 3. The resistance pattern of an arithmetic resistance element for meters consists of a fixed resistance pattern and an adjustment resistance pattern, or a composite resistance pattern of a fixed resistance and an adjustment resistance, and both ends of each resistance pattern are commonly connected by a conductor pattern,
Claim 1 characterized in that the connection portions of these resistance patterns are selectively removed by trimming and the adjustment patterns are partially removed to obtain a desired resistance value. Module resistor for instrumentation. 4. A step of forming a plurality of meter arithmetic resistance element patterns, a monitor resistance element pattern, and a display pattern on an insulating substrate, and forming a resistance value of the monitor resistance element pattern formed on the insulating substrate. and a step of measuring a temperature coefficient and inspecting whether the resistance value and temperature coefficient of the plurality of arithmetic resistance elements are within a desired range, and based on the measurement result of the resistance value of the monitoring resistance element. a step of oxidizing the resistance pattern formed on the insulating substrate with heat for a period of time determined by adjusting the resistance pattern of each arithmetic resistance element so that the error in the resistance value of each arithmetic resistance element is within an allowable range; and an automatic trimming device using a computer. The process of adjusting the resistance value to the desired value by trimming the pattern of each calculated resistor element based on the specifications of the instrument, and writing a symbol according to the specifications of the instrument on the display pattern by trimming. How to make the utensils.