JPS5814876B2 - Electron beam evaporation method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron beam evaporation force method in which a deposition material is heated and deposited by electron beam bombardment.

When depositing an evaporation material onto a material to be deposited, it is desirable to reduce the angle of incidence of the evaporation material onto the evaporation surface in order to increase the reflectance of the evaporation surface and increase peeling resistance.

In such a case, if the shape of the evaporation surface of the evaporation source is close to a spherical surface, if the material to be evaporated is arranged so as to form a sphere concentric with the spherical surface,
The material to be deposited can form a deposition surface with a uniform thickness and an incident angle of almost 0.

Therefore, evaporation sources whose evaporation surfaces are spherical have been conventionally used.

Conventionally, for example, as shown in FIG. 1, a needle wire 1 sent at a predetermined speed is guided to the center of an annular thermionic filament 2 that emits an electron beam, and the thermionic electrons 3 irradiated by the thermionic filament 2 are emitted. The needle wire 1 was heated and melted, and evaporation was performed from the small spheres 4 which became spherical due to surface tension.

However, in such a method, unless the feeding speed table of the needle wire and the electric power supplied to the thermionic filament are not strictly controlled, the molten portion at the tip of the needle wire will fall, resulting in poor operational stability.

The present invention provides a novel electronic vino vapor deposition method that solves the drawbacks of the conventional method, and embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 2 shows an example of an apparatus for carrying out the present invention. In the drawing, 5 is an electron gun, and an electron beam 6 generated by the electron gun 5 is deflected by a magnetic field type deflector 7.

The magnetic field type deflector 7 consists of a pair of magnetic poles attached to sandwich a water-cooled holder 8.

The water-cooled holder is provided with a flow path (not shown) for flowing cooling water therein, and is made of copper or the like.

A liner 9 is provided on the upper part of the water-cooled holder 8, and the upper surface of the liner 9 receives the deflected electron beam 6.
shocked by.

The liner 9 is made of a high melting point material, such as graphite, which has suitable wettability to the evaporating material, such as aluminum, which is heated to a high temperature and melted.

A passage hole 11 communicating with the upper surface of the liner is provided through the liner 9 and the water-cooled holder 8, and through the passage hole 11, a needle wire 10 made of an evaporative material reaches the vicinity of the liner surface. It is derived as follows.

12 is a roller for feeding the needle wire 10 in the direction of the surface force of the liner, which is the direction of the arrow 13, and the roller is rotated by a driving source 14 such as a motor.

Using the above-mentioned apparatus, the needle wire 10 is first led out to about the surface of the liner 9, and the electron beam 6 is generated from the electron gun 5.

The electron beam 6 impacts not only the surface of the liner 9 but also the tip of the needle wire 10, and as a result, the tip of the needle wire 10 is heated, melted, and begins to evaporate.

In order to compensate for the evaporation material scattered by evaporation, the needle wires 10 are sequentially led out through the passage holes 10, and the portions of the needle wires that reach the vicinity of the liner surface are sequentially melted by electron impact heating.

Under operating conditions in which the speed at which the needle wire 10 is drawn out and the electric power supplied to the electron gun 5 are appropriate, the amount of evaporation material that is scattered by evaporation and the amount of evaporation material that is newly melted when the needle wire 10 is drawn out are in balance. The amount of melted evaporative material remains constant over time.

When the feeding speed of the needle wire 10 is slightly increased while the power of the electron beam projected onto the liner is kept constant, the amount of melted evaporation material increases as shown in FIG. This forms small spheres 15 on the liner surface.

Since the surface of the small sphere 15 is directly bombarded by the electron beam, it becomes the highest temperature, and evaporation occurs more actively from the surface of the small ball, and the evaporated material is deposited on a material to be evaporated (not shown).

FIG. 4 is a drawing to show a further developed embodiment. In the above-mentioned embodiment, the upper surface of the liner was formed of a single material, but in this embodiment, the surface tension is weak, so a spherical surface is formed. In order to carry out the present invention for evaporation materials that are difficult to make, a liner whose upper surface is formed of two types of materials is used.

In FIG. 4, 16 is a liner attached to the water-cooled holder 8, and 17 is an evaporative material needle made of copper, for example.

The center portion 18 of the liner 16 is made of a material such as molybdenum, which has wettability with respect to copper, which is the material of the needle wire 17, and the peripheral portion 19 is made of copper, which is the material of the diagonal lines. It is made of graphite, which has no wettability.

When the tip of the needle wire 17 is melted by electron beam impact using such a device, the tip portion will melt;
The melted portion spreads over the surface of the central portion 18 that has wettability to the molten evaporation material, and forms a peripheral portion 19 that does not have wettability.
Since it does not spread, even the evaporative material with a relatively small surface tension forms the globules 20.

If the upper surface of the liner is made of two types of materials, one with good wettability and one with poor wettability, it is possible to easily form globules even on evaporative materials with low surface tension, and the size of globules can be limited. In addition to being convenient for carrying out various operations, the formed globules can be made more stable.

In the vapor deposition force method based on the present invention as described above, small spheres of evaporative material are formed on the liner surface, and the liner surface has appropriate wettability with respect to the molten evaporative material. Furthermore, since the liner surface is cooled by a water-cooled holder, it does not reach as high a temperature as the spherical part of the small balls, and therefore the small balls do not scatter or move as in the conventional case, but instead stay on the liner surface. Exists at the low location.

As described above, according to the present invention, extremely stable evaporation from a spherical point evaporation source can be performed.

[Brief explanation of drawings]

Fig. 1 is a diagram for explaining the prior art, Fig. 2 is a diagram for explaining an embodiment of the present invention, and Fig. 3 is a diagram for explaining small balls on the liner surface during operation. 4 is a diagram for explaining still another embodiment. 1,10...Needle wire, 2...Thermionic filament, 3...Thermionic, 4,15.20...
...Small ball, 5...Electron gun, 6...
Electron beam, 7... Magnetic field deflector, 8... Water cooling holder, 9.16... Liner, 11...
... Passing hole, 12 ... Roller, 14 ...
...7 driving source, 17...needle line, 18...
...center, 19...periphery.

Claims (1)

[Claims] 1. Guide out a needle-like evaporator through a passage hole communicating with the liner surface so that its tip reaches near the liner surface, heat the liner surface and the tip of the evaporator by electron impact, and The tip of the evaporator is melted by the melted evaporator, a small sphere is formed on the liner surface by the melted evaporator, and the evaporator is evaporated from the surface of the small sphere and deposited on the material to be evaporated. The electron beam evaporation force method is characterized by: