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JPS581560B2 - Heat-resistant composite printed board - Google Patents
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JPS581560B2 - Heat-resistant composite printed board - Google Patents

Heat-resistant composite printed board

Info

Publication number
JPS581560B2
JPS581560B2 JP8585078A JP8585078A JPS581560B2 JP S581560 B2 JPS581560 B2 JP S581560B2 JP 8585078 A JP8585078 A JP 8585078A JP 8585078 A JP8585078 A JP 8585078A JP S581560 B2 JPS581560 B2 JP S581560B2
Authority
JP
Japan
Prior art keywords
printed board
ceramic
multilayer printed
board
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8585078A
Other languages
Japanese (ja)
Other versions
JPS5511883A (en
Inventor
園田眞夫
森秀夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8585078A priority Critical patent/JPS581560B2/en
Publication of JPS5511883A publication Critical patent/JPS5511883A/en
Publication of JPS581560B2 publication Critical patent/JPS581560B2/en
Expired legal-status Critical Current

Links

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  • Laminated Bodies (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【発明の詳細な説明】 本発明は樹脂多層プリント板の表面及び又は裏面にセラ
ミックをコーティングしてなるプリント板の構造に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a printed board structure in which the front and/or back surfaces of a resin multilayer printed board are coated with ceramic.

近時多層プリント板は複雑な配線作業の簡略化と誤配線
防止を得るものとして電子機器等に多用されている。
Recently, multilayer printed boards have been widely used in electronic devices and the like to simplify complicated wiring work and prevent wiring errors.

ところで、従来の多層プリント板は第1図に示すような
構造であり、以下の工程により製造される。
By the way, a conventional multilayer printed board has a structure as shown in FIG. 1, and is manufactured by the following steps.

銅張りエポキシ樹脂などからなるプリント板両面(又は
片面)にネガフイルムで焼付けエッチングをして所定の
パターンを形成した中間層を作る。
A printed board made of copper-clad epoxy resin or the like is printed on both sides (or one side) with a negative film and etched to form an intermediate layer in a predetermined pattern.

次にこの中間層を何層か積み上げ間にエポキシ系(例え
ばガラスクロスにエポキシレヂンな含浸させたもの)の
接着剤を介在させたのち、熱間プレスで加熱圧着して多
層プリント板4とし、次に所定位置に該プリント基板を
貫通し透孔し、孔6の内壁面および開口周縁に導電層た
とえば銅メッキを施し、内層配線パターン1,2,3を
電気的に接続する。
Next, several layers of this intermediate layer are stacked and an epoxy adhesive (for example, glass cloth impregnated with epoxy resin) is interposed between them, and then they are bonded under heat using a hot press to form a multilayer printed board 4. Next, holes are made through the printed circuit board at predetermined positions, and a conductive layer, such as copper plating, is applied to the inner wall surface of the hole 6 and the periphery of the opening, and the inner layer wiring patterns 1, 2, and 3 are electrically connected.

以上のような構造のものが従来の樹脂多層プリント板で
あり、誘電率が小さいので伝送特性に於いて、セラミッ
クに比べて優れているが耐熱性及び表面平滑性に於いて
は劣っている。
The structure described above is a conventional resin multilayer printed board, which has a small dielectric constant and is superior in transmission characteristics compared to ceramics, but is inferior in heat resistance and surface smoothness.

又、今後の電子計算機等ではその大型化に伴いLSI等
の集積回路部品の高密度実装の必要があり、かかる従来
の樹脂多層プリント板では現状より実装密度をより多く
望むことは期待できず、このため回路部品の発熱に耐え
うる耐熱性の優れたプリント板の開発が望まれる。
Furthermore, as future electronic computers and the like become larger, integrated circuit components such as LSIs will need to be mounted at a higher density, and such conventional resin multilayer printed boards cannot be expected to have higher mounting density than the current situation. Therefore, it is desired to develop a printed board with excellent heat resistance that can withstand the heat generated by circuit components.

本発明の目的は樹脂多層プリント板の伝送特性、製造性
を失わずに、又セラミックの如き耐熱性、表面平滑性を
有する多層複合プリント板を提供するにある。
An object of the present invention is to provide a multilayer composite printed board that has heat resistance and surface smoothness similar to ceramics without sacrificing the transmission characteristics and manufacturability of resin multilayer printed boards.

本発明の特徴は樹脂多層プリント板の片面又は両面にセ
ラミックをコーティングして後該セラミックの表面に金
属付着層を形成し、該金属付着層を通して、前記樹脂多
層プリント板に突き出して設けられている導電部より配
線パターンを引き出すようにして、電気的に接続してい
る。
A feature of the present invention is that after coating one or both sides of a resin multilayer printed board with ceramic, a metal adhesion layer is formed on the surface of the ceramic, and the metal adhesion layer is provided so as to protrude onto the resin multilayer printed board through the metal adhesion layer. Electrical connection is made by drawing out the wiring pattern from the conductive part.

このような構造にすることにより多層プリント板の表面
はセラミックの耐熱性と平滑性が得られ、内層配線パタ
ーン部では樹脂多層プリント板の伝送特性のよい複合さ
れた性質のものが得られる。
By adopting such a structure, the surface of the multilayer printed board can have the heat resistance and smoothness of ceramic, and the inner layer wiring pattern portion can have the combined properties of the resin multilayer printed board with good transmission characteristics.

以下、本発明を図面により説明する。Hereinafter, the present invention will be explained with reference to the drawings.

第2図は本考案による実施例である。FIG. 2 shows an embodiment according to the present invention.

第2図に於いて内層配線パターン1,2,3をメクラス
ルホール導体15により電気的に接続している。
In FIG. 2, inner layer wiring patterns 1, 2, and 3 are electrically connected by a mesh through-hole conductor 15.

樹脂多層プリント板40両面にセラミック5がコーティ
ングされ、そのセラミック上面にセラミックとの密着性
をよくするため下地金属タングステン、チタン等をスパ
ッタリング法等により金属膜7を付着させ、次にその金
属膜7の上に金属付着層8(Au等)を電気メッキなど
により数μ付着させている。
Ceramic 5 is coated on both sides of the resin multilayer printed board 40, and a metal film 7 is deposited on the top surface of the ceramic by sputtering a base metal such as tungsten or titanium to improve adhesion to the ceramic. A metal adhesion layer 8 (Au or the like) of several micrometers is deposited on the surface by electroplating or the like.

以上の本発明の複合プリント板にエッチングマスクをし
て、エッチングすれば必要な表面パターンを作成するこ
とが出来る。
A necessary surface pattern can be created by applying an etching mask to the above-described composite printed board of the present invention and etching it.

以上は本発明に係る複合多層プリント板の構造であるが
、次にその多層プリント板の概略製造について説明する
The structure of the composite multilayer printed board according to the present invention has been described above. Next, the outline of manufacturing of the multilayer printed board will be explained.

第3図はプリント基板の概略製造フローを示す。FIG. 3 shows a schematic manufacturing flow of the printed circuit board.

第3図1は銅張りエポキシプリント板(両面)9にネガ
フイルムを焼付けてからエッチングを行い配線パターン
10を有する中間層を作成する。
In FIG. 3, a negative film is printed on a copper-clad epoxy printed board (both sides) 9 and then etched to create an intermediate layer having a wiring pattern 10.

第3図2は上記中間層を何層か積み上げて、その間にエ
ポキシ系(例えばガラスクロスにエポキシレヂンを含浸
させたもの)の接着剤11を入れて熱間プレスし多層プ
リント基板4とする(第3図2)。
In FIG. 3, several layers of the above-mentioned intermediate layers are stacked up, and an epoxy adhesive 11 (for example, glass cloth impregnated with epoxy resin) is placed between them and hot pressed to form a multilayer printed circuit board 4 ( Figure 3 2).

第3図3は所定位置に多層プリント基板4に貫通した孔
6をドリルにより孔明する。
3. In FIG. 3, a hole 6 penetrating the multilayer printed circuit board 4 is drilled at a predetermined position.

第4図4は貫通された孔6を持つ多層プリント基板4を
導電層たとえば銅メツキ13を施し、メッキを厚くしメ
クラスルーホールとする。
4. In FIG. 4, a multilayer printed circuit board 4 having a through hole 6 is coated with a conductive layer, for example, copper plating 13, and the plating is thickened to form a blank through hole.

これにより、孔内部及び多層プリント基板外面にメッキ
される。
As a result, the inside of the hole and the outer surface of the multilayer printed circuit board are plated.

又、Auメツキレジストのスルーホールでは孔6内壁に
薄く金メッキされた第3図4の状態で、金メッキされた
ピン15′を圧入することも出来る(第3図5″)。
Further, in the through-hole of the Au plating resist, the inner wall of the hole 6 is thinly plated with gold as shown in FIG. 3, and a gold-plated pin 15' can also be press-fitted therein (FIG. 3, 5'').

その時はメクラスルホールはいらなくなり第3図6の状
態になる。
At that time, the Meclastle Hole is no longer needed and the state shown in Fig. 3 6 will occur.

第3図5は必要部分にマスク14をして、表面層エッチ
ングを行い、その他の部分をエッチングにより銅メツキ
13を取除き、メクラスルホール15を形成する(第3
図5“)。
In FIG. 3, the surface layer is etched using a mask 14 in the necessary parts, and the copper plating 13 is removed by etching other parts to form a metal hole 15 (third
Figure 5 “).

第3図6はセラミックをプラズマ溶射するものでセラミ
ックの厚さは50μ〜200μ程度としメクラスルホー
ル15にセラミックコーティング16がかふった状態で
ある。
In FIG. 3, a ceramic is plasma-sprayed, and the thickness of the ceramic is about 50 to 200 microns, and the ceramic coating 16 is covered over the metal hole 15.

第3図7は表面研磨で、ポリシングマシンの砥石の回転
により研磨しセラミック16の凸部を取り除く、この時
にメクラスルホール15のCu面が完全に露出するまで
研磨する。
FIG. 3 and 7 show surface polishing, in which the convex portions of the ceramic 16 are removed by polishing by rotating the grindstone of the polishing machine, and at this time, the surface is polished until the Cu surface of the Meclasp hole 15 is completely exposed.

これは次に付着させる金属と電気的に完全につなげるた
めである。
This is to ensure a complete electrical connection with the metal that will be deposited next.

第3図8はセラミック16上面にセラミックと密着性を
よくするための下地金属タングステン、モリブデン等の
金属膜をスパッタリング法により形成する。
In FIG. 3, a metal film of tungsten, molybdenum, or the like as a base metal is formed on the upper surface of the ceramic 16 by sputtering to improve adhesion to the ceramic.

第3図9は次に下地金属膜Iの上に金属層8(例えばA
u等)を電気メッキ等により数μの厚さに付着させる。
3. Next, a metal layer 8 (for example, A
etc.) is deposited to a thickness of several microns by electroplating or the like.

第3図10必要部分にエッチングマスク17を被覆後表
面層をエッチングすることにより必要な表面パターン1
8を作成する(第3図10’)。
FIG. 3 10 A necessary surface pattern 1 is formed by coating the necessary portions with an etching mask 17 and then etching the surface layer.
8 (Fig. 3, 10').

以上の工程により本考案の複合プリント板は作成される
が、第3図1〜4工程は従来の樹脂多層プリント板の製
造方法と全く同様である。
The composite printed board of the present invention is produced through the above steps, but the steps 1 to 4 in FIG. 3 are exactly the same as the conventional method for manufacturing a resin multilayer printed board.

従って製造方法は安定している。Therefore, the manufacturing method is stable.

又、回路基板は樹脂積層板とセラミックの熱膨張係数の
差を考えて、両面に均一にセラミックをコーティングし
、そり等の外力をバランスさせる方法をとることが望ま
しい。
Furthermore, considering the difference in thermal expansion coefficient between the resin laminate and ceramic, it is desirable to uniformly coat both sides of the circuit board with ceramic to balance external forces such as warping.

又、セラミックは樹脂基板の耐熱性、密着性を考慮し、
低融点のガラス系を使い付着面はガラス繊維を露出させ
るなど接着性への配慮が必要である。
In addition, considering the heat resistance and adhesion of ceramic to the resin substrate,
Consideration must be given to adhesion, such as using a glass system with a low melting point and exposing the glass fibers on the attachment surface.

以上実施例により本発明を説明したが本発明によれば樹
脂多層プリント板の片面又は両面にセラミックをコーテ
ィングした後、該セラミックの表面に金属付着層を形成
し、その金属に接続した導電部により内層配線パターン
を引き出す構造にすることにより、表面の耐熱性を向上
させ、しかも表面の状態が平滑になり細線が引けるよう
になり、パターン密度を上げることが可能となった。
The present invention has been described above with reference to examples, but according to the present invention, after coating one or both sides of a resin multilayer printed board with ceramic, a metal adhesion layer is formed on the surface of the ceramic, and a conductive part connected to the metal is formed. By creating a structure in which the inner layer wiring patterns are drawn out, the heat resistance of the surface is improved, and the surface is smoother, allowing thin lines to be drawn, making it possible to increase pattern density.

さらに表面にセラミック層を得ることにより、表面が硬
くなり、TCボンデイングが出来るようになり半導体の
チップレベルの実装が可能となった。
Furthermore, by providing a ceramic layer on the surface, the surface became hard and TC bonding became possible, making it possible to package semiconductors at the chip level.

又樹脂多層板両面(又は片面)の表面をセラミックでコ
ーティングしているので、表面はセラミック板でありな
がら、内層は樹脂の多層板の特性を有する耐熱複合プリ
ント板を得ることができる。
Furthermore, since both surfaces (or one side) of the resin multilayer board are coated with ceramic, it is possible to obtain a heat-resistant composite printed board that has the characteristics of a multilayer board with the inner layer made of resin, although the surface is a ceramic board.

その結果樹脂多層プリント板の伝送特性のよさと製造性
のよさを備えたセラミックプリント板の耐熱性及び硬さ
と平滑性の優れた性質により、従来の樹脂多層プリント
板で出来なかった実装密度の向上と耐熱性の向上がはか
れ、LSI等のチップのダイボンデイング、ビームリー
ドボンデイング及びワイヤのTCボンデイング等を可能
にした。
As a result, thanks to the excellent heat resistance, hardness, and smoothness of ceramic printed boards, which have the good transmission characteristics and ease of manufacture of resin multilayer printed boards, it is possible to improve mounting density, which was not possible with conventional resin multilayer printed boards. The heat resistance has been improved, making it possible to perform die bonding of chips such as LSI, beam lead bonding, and TC bonding of wires.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の多層プリント板の断面図。 第2図は本発明の耐熱複合プリント板の断面図(表面パ
ターンの作成前まで)。 第3図は本発明のプリント基板の概略製造フローを示す
説明図。 1 ,2,3は内層配線パターン、4は樹脂多層プリン
ト板、5はセラミック、6は孔、7は下地金属、8は金
属層、9はエポキシプリント板、10は配線パターン、
11はエポキシ系の接着剤、13は銅メッキ、14はマ
スク、15はメクラスルホール、16はセラミックコー
ティング層、17はエッチングマスク、18は表面パタ
ーン、15′はピン。
FIG. 1 is a cross-sectional view of a conventional multilayer printed board. FIG. 2 is a cross-sectional view of the heat-resistant composite printed board of the present invention (before the surface pattern is created). FIG. 3 is an explanatory diagram showing a schematic manufacturing flow of the printed circuit board of the present invention. 1, 2, and 3 are inner layer wiring patterns, 4 is a resin multilayer printed board, 5 is a ceramic, 6 is a hole, 7 is a base metal, 8 is a metal layer, 9 is an epoxy printed board, 10 is a wiring pattern,
11 is an epoxy adhesive, 13 is copper plating, 14 is a mask, 15 is a mesh hole, 16 is a ceramic coating layer, 17 is an etching mask, 18 is a surface pattern, and 15' is a pin.

Claims (1)

【特許請求の範囲】[Claims] 1 内部配線パターンを外部に導く導電部を有する樹脂
多層プリント板の片面又は両面にセラミックな被着した
後、該セラミックの表面に金属付着層を形成し、該金属
付着層及び前記樹脂多層プリント板から突き出して設け
られている導電部を介して配線パターンを引き出すよう
にしたことを特徴とする耐熱複合プリント板。
1. After a ceramic is adhered to one or both sides of a resin multilayer printed board having a conductive part that leads an internal wiring pattern to the outside, a metal adhesion layer is formed on the surface of the ceramic, and the metal adhesion layer and the resin multilayer printed board are bonded. A heat-resistant composite printed board characterized in that a wiring pattern is drawn out through a conductive part provided protruding from the board.
JP8585078A 1978-07-14 1978-07-14 Heat-resistant composite printed board Expired JPS581560B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8585078A JPS581560B2 (en) 1978-07-14 1978-07-14 Heat-resistant composite printed board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8585078A JPS581560B2 (en) 1978-07-14 1978-07-14 Heat-resistant composite printed board

Publications (2)

Publication Number Publication Date
JPS5511883A JPS5511883A (en) 1980-01-28
JPS581560B2 true JPS581560B2 (en) 1983-01-11

Family

ID=13870341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8585078A Expired JPS581560B2 (en) 1978-07-14 1978-07-14 Heat-resistant composite printed board

Country Status (1)

Country Link
JP (1) JPS581560B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0771832B2 (en) * 1987-02-19 1995-08-02 日立化成工業株式会社 Method for manufacturing ceramic coat laminate
JP5185622B2 (en) 2005-10-11 2013-04-17 富士通株式会社 Multilayer wiring board

Also Published As

Publication number Publication date
JPS5511883A (en) 1980-01-28

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