JPS5820119B2 - density sensor - Google Patents
density sensorInfo
- Publication number
- JPS5820119B2 JPS5820119B2 JP49079556A JP7955674A JPS5820119B2 JP S5820119 B2 JPS5820119 B2 JP S5820119B2 JP 49079556 A JP49079556 A JP 49079556A JP 7955674 A JP7955674 A JP 7955674A JP S5820119 B2 JPS5820119 B2 JP S5820119B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- power supply
- electron beam
- scanning power
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Description
【発明の詳細な説明】
本発明は、電子線照射装置に係り、平常運転時の走査電
源のほかに予備走査電源を設けて、停電時においても電
子源部からの電子発生がなくなるまで電子線の走査を行
なえるようにしたものに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electron beam irradiation device, which is provided with a backup scanning power source in addition to a scanning power source during normal operation, so that even during a power outage, the electron beam irradiation device can be used until electrons are no longer generated from the electron source. This relates to a device that can perform scanning.
一般に電子線照射装置においては、停電が走ると同時に
走査電源も停止し、電子線の走査は行なわれない。Generally, in an electron beam irradiation device, the scanning power supply is also stopped at the same time as a power outage occurs, and scanning with the electron beam is not performed.
しかし、このとき電子源部に設けられているフィラメン
トからはその熱的時定数により電子の放出が継続される
。However, at this time, the filament provided in the electron source continues to emit electrons due to its thermal time constant.
このため、停電が発生すると電子線の走査が行なわれな
いので、薄い金属箔で構成された電子線取出窓に電子線
が局部的に集中して当ることになり、この取出窓が過熱
によって破損されることとなる。For this reason, when a power outage occurs, scanning of the electron beam is not performed, and the electron beam is locally concentrated and hits the electron beam extraction window made of thin metal foil, causing damage to the extraction window due to overheating. It will be done.
本発明は、上述の点に鑑み゛なされたもので、正常運転
時の走査電源の他に、停電時暫時発生される電子がなく
なるまでの間、電子線を走査させるための予備走査電源
を設けた電子線照射装置を提供するものである。The present invention has been made in view of the above points, and in addition to the scanning power supply during normal operation, a backup scanning power supply is provided to scan the electron beam until the electrons temporarily generated during a power outage are exhausted. The present invention provides an electron beam irradiation device.
以下、図に示す一実施例に基づいて説明すると、図中点
線で囲まれた部分が従来の正常運転時における走査電源
回路であって、１は交流電源、２は整流回路を備えた走
査電源（以下、走査電源という）、３は走査波形発生回
路、４は走査コイルである。Hereinafter, an explanation will be given based on an embodiment shown in the figure. The part surrounded by dotted lines in the figure is a conventional scanning power supply circuit during normal operation, where 1 is an AC power supply and 2 is a scanning power supply equipped with a rectifier circuit. (hereinafter referred to as a scanning power supply), 3 is a scanning waveform generation circuit, and 4 is a scanning coil.
本発明に従がい、走査電源２の入力側に電磁リレー６、
遅延リレー７を設ける。According to the invention, an electromagnetic relay 6 is provided on the input side of the scanning power supply 2;
A delay relay 7 is provided.
そして、走査電源２の出力側に予備走査電源５を設ける
。A preliminary scanning power source 5 is provided on the output side of the scanning power source 2.
この予備走査電源５は蓄電池又は大容量コンデンサによ
って構成され、正常運転時は整流器８、抵抗９を介して
充電されるよう構成してあり、過充電とならないよう抵
抗１０とツ・エナーダイオード１１を直列接続したもの
が並列に接続されである。This preliminary scanning power supply 5 is composed of a storage battery or a large-capacity capacitor, and is configured to be charged via a rectifier 8 and a resistor 9 during normal operation.A resistor 10 and a double-energized diode 11 are connected to prevent overcharging. Those connected in series are connected in parallel.
また、前記整流器８、抵抗９の直列接続した回路に並列
に電磁リレー６の常開接点１２および遅延リレー７の常
開接点１３を直列接続したものが設けられる。Further, a normally open contact 12 of an electromagnetic relay 6 and a normally open contact 13 of a delay relay 7 are connected in series in parallel to the circuit in which the rectifier 8 and the resistor 9 are connected in series.
常開接点１３は遅延リレー７が消勢されると一定時間遅
れて復帰する。The normally open contact 13 returns after a certain period of time when the delay relay 7 is deenergized.
なお、１４は整流器である。Note that 14 is a rectifier.
このように構成したものにおいて、交流電源１が正常な
ときには、走査電源２からの直流が走査波形発生回路３
に与えられ、この回路３によって走査コイル４が駆動さ
れる。In this configuration, when the AC power supply 1 is normal, the DC from the scanning power supply 2 is applied to the scanning waveform generation circuit 3.
The scanning coil 4 is driven by this circuit 3.
このとき、電磁リレー６が付勢されてその常閉接点１２
が開くので、予備走査電源５は走査電源２からの直流に
よって充電される。At this time, the electromagnetic relay 6 is energized and its normally closed contact 12
is opened, so the preliminary scanning power supply 5 is charged by the direct current from the scanning power supply 2.
次に停電が発生すると、走査電源２からの出力はなくな
るが、フィラメント（図示しない）からの電子の発生は
しばらくの間荷なわれる。When a power outage occurs next, the output from the scanning power supply 2 is stopped, but the generation of electrons from the filament (not shown) is stopped for a while.
一方、このとき電磁リレー６及び遅延リレー７は共に消
勢されるが、今まで開いていた常時接点１２が直ちに復
帰して閉じ、さらに今まで閉じていた常開接点１３はし
ばらくの間開じているため、予備走査電源５−常開接点
１３−常閉接点１２−整流器１４−走査波形発生回路３
−予備走査電源５なる閉回路が成立し、フィラメントか
らの電子放出がなくなるまでの間、電子線を走査するこ
とができる。On the other hand, at this time, both the electromagnetic relay 6 and the delay relay 7 are deenergized, but the normally open contact 12, which had been open until now, immediately returns to close, and the normally open contact 13, which had been closed until now, remains open for a while. Therefore, the preliminary scanning power supply 5 - normally open contact 13 - normally closed contact 12 - rectifier 14 - scanning waveform generation circuit 3
- The electron beam can be scanned until a closed circuit consisting of the preliminary scanning power source 5 is established and no electrons are emitted from the filament.
従って、電子線がその取出口に局部的に集中して当るこ
とを防止することができるので、取出口が過熱により破
損されることを防止できる。Therefore, it is possible to prevent the electron beam from locally concentrating on the outlet, thereby preventing the outlet from being damaged due to overheating.
なお、電磁リレー６、遅延リレー７をサイリスク、トラ
ンジスタ等を用いてもよいことは勿論である。Note that it goes without saying that the electromagnetic relay 6 and the delay relay 7 may be made of silice, a transistor, or the like.
以上、本発明によれば、交流電源の正常時は勿論めこと
、停電時においても発生される電子線の走査を継続して
行なうことができるので電子線取出窓の破損を確実に防
止できる。As described above, according to the present invention, scanning with the generated electron beam can be continued not only when the AC power supply is normal, but also during a power outage, so that damage to the electron beam extraction window can be reliably prevented.
なお、本発明によれば、通常の電子線照射装置の運転停
止時においても同様の効果を奏する。Note that, according to the present invention, the same effect can be achieved even when the operation of a normal electron beam irradiation device is stopped.
図は本発明による走査電源回路の一例を示す結線図であ
る。
１・・・交流電源、２は整流回路を備えた走査電源、３
・・・走査波形発生回路、４・・・走査コイル、５・・
・予備走査電源、６・・・電磁リレー、７・・・遅延リ
レー、８．１４・・・整流器、９，１０．・・・抵抗、
１１・・・ツェナーダイオード、１２・・・常閉接点、
１３°°°常開接点。The figure is a wiring diagram showing an example of a scanning power supply circuit according to the present invention. 1...AC power supply, 2 is a scanning power supply equipped with a rectifier circuit, 3
...Scanning waveform generation circuit, 4...Scanning coil, 5...
- Preliminary scanning power supply, 6... Electromagnetic relay, 7... Delay relay, 8.14... Rectifier, 9, 10. ···resistance,
11... Zener diode, 12... Normally closed contact,
13°°° normally open contact.
Claims (1)
常運転時における走査電源のほかに、予備走査電源を設
け、停電と同時にリレー指令等により走査電源を切り換
えるようにしてなる電子線照射装置。1. An electron beam irradiation device that scans an electron beam from an electron source, and is provided with a backup scanning power source in addition to the scanning power source during normal operation, and the scanning power source is switched by a relay command, etc. at the same time as a power outage occurs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079556A JPS5820119B2 (en) | 1974-07-10 | 1974-07-10 | density sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079556A JPS5820119B2 (en) | 1974-07-10 | 1974-07-10 | density sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS518499A JPS518499A (en) | 1976-01-23 |
| JPS5820119B2 true JPS5820119B2 (en) | 1983-04-21 |
Family
ID=13693268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49079556A Expired JPS5820119B2 (en) | 1974-07-10 | 1974-07-10 | density sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820119B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60248113A (en) * | 1984-05-22 | 1985-12-07 | 岩村 次郎 | New method for culture of mushroom |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4553701B2 (en) * | 2004-11-30 | 2010-09-29 | 日本電子株式会社 | High voltage generator for charged particle beam equipment |
-
1974
- 1974-07-10 JP JP49079556A patent/JPS5820119B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60248113A (en) * | 1984-05-22 | 1985-12-07 | 岩村 次郎 | New method for culture of mushroom |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS518499A (en) | 1976-01-23 |
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