JPS5824166B2 - Mobile liquid “filtration” supply device - Google Patents

Description

[Detailed description of the invention] TECHNICAL FIELD This invention relates to mobile liquid filtration and dispensing devices.

More specifically, the present invention relates to a mobile filtration device capable of filtering and supplying liquid substances containing fine solid particles as impurities.

In recent years, the work of filtering and supplying liquid substances containing fine solid particles as impurities has become extremely important in various technical fields.

In other words, in the inorganic chemical industry, organic chemical industry, food industry, pharmaceutical industry, microbial chemical industry, fermentation industry, electronic industry, etc., fine solid particles contained in various drugs, foods, and other liquid materials are treated as so-called dust ( The task of removing contaminants (solid particles) occupies an important position.

In particular, in addition to removing contaminant solid particles from the liquid material itself, transporting the liquid material into the clean working room provided for each technical field is important, as is the container used for transport and its storage. The cleaning process for workers who bring in items becomes quite frequent, and the equipment required for the cleaning process,
Reducing costs and working time has become an important issue to be solved in various technical fields.

Conventionally, as a method for supplying so-called dust-free liquid substances, a pipe conveying method using pipe laying has been adopted as an excellent method, but it requires a place for laying the pipe and the installation cost is enormous. However, there are disadvantages in that they are prone to disasters such as natural disasters and accidents caused by earthquakes, etc., and there is a need for alternative measures.

The inventors of the present invention have conducted various studies to solve this problem, and as a result, have completed the mobile overfeeding device of the present invention.

That is, the present invention is directed to fine particles. The present invention provides a mobile filtration and feeding device capable of filtering and feeding a liquid substance containing solid particles as impurities.

With the device of the present invention, liquid materials can be extremely easily supplied in a so-called dust-free state immediately before use, eliminating the need for a pipe supply system and simplifying various cleaning treatment equipment. Because of the advantages of
Many excellent effects are brought about, such as increased work efficiency, labor savings, and cost reductions.

The present invention will be explained in detail below.

The mobile sump supply device of the present invention includes a main body 16 having a pressurized gas supply port 1 and a liquid substance discharge port 2, a container 3 containing a liquid substance, and a pressurized gas flowing into the container. It has a built-in gas passage 4 from the supply port and a liquid passage 5 leading from the container 3 to the liquid substance discharge port 2, and the main body 16 is directly or indirectly equipped with casters 7 having an antistatic function. The gas passage 4 is provided with a safety valve 10, a swell means 6, and an on-off valve 11, and the liquid passage 5 is provided with a r
The gas passage 4 and the liquid passage 5 are detachably connected to the container 3, and a detector is provided to notify the amount of liquid remaining in the container 3. 13.

A quick connector 8 is normally connected to the pressurized gas supply port 1 and the liquid substance discharge port 2.

Nitrogen gas is normally used as this pressure-feeding gas.

A safety valve 10, a filter 6 for cleaning the pressurized gas, and an on-off valve 11 are provided in the middle of the gas passage 4 from the pressurized gas supply port 1 to the container 3 containing the liquid substance. .

A pressure gauge 9 is usually set in the middle of this passage, and this pressure gauge is attached to the main body 16 at a position where it can be read from the outside.

Further, the on-off valve 11 described above can be opened and closed from the outside of the main body 16 using a cock 17 or the like.

The above-mentioned passage is provided by ordinary piping, but a flexible coil hose 12 can be used at a desired location, such as just before leading to the liquid delivery container 3, and a quick connector 8 can be used at the connection between the container 3 and the passage 4. can be used.

The material of the liquid delivery container 3 is usually stainless steel, and a material coated with Teflon is preferably used.

A passage 5 leading from a container 3 containing a liquid substance to a liquid substance outlet 2 is provided with an f-filtering means 6 and an opening/closing body 11, and the filtration means 6 removes fine solid particles and removes dust particles. A small amount of purified liquid substance will be supplied to the outside of the main body.

The above-mentioned on-off valve 11 can also be opened and closed from the outside of the main body 16 by a cock 17 or the like, similar to the above-mentioned on-off valve.

The liquid passage 5 from the liquid delivery container 3 is also connected to the gas passage 4 described above.
As in the case of , it is provided with normal piping, but a flexible coil hose 12 can be used immediately after it comes out of the liquid delivery container 3, and a quick connector 8 can be used at the connection between the container 3 and the passage 5. can be used.

Furthermore, the mobile liquid oversupply device of the present invention is equipped with a detector 13 for notifying the amount of liquid remaining in the liquid delivery container.

Examples of the detector include an electrostatic sensor, a pressure sensor, a float sensor, and a weight sensor.

Further, an indicating device 14 or the like can be provided in association with this detector.

Further, the main body 16 is directly or indirectly equipped with casters 7 having an antistatic function.

In this case, "equipped indirectly" means that the main body 16 is placed on a table equipped with casters T.

The container 3 containing the liquid substance contained in the main body can be replaced at any time since the gas passage 4 and the liquid passage 5 are removably connected to the container.

If a part of the main body 16 is formed into a sliding container installation stand 15 as shown in FIG. 4, the container 3 can be pulled out to the outside of the main body.

This pull-out container installation stand 15 allows the liquid delivery container 3
The operation of exchanging the parts becomes extremely easy.

The device of the present invention can be used efficiently, for example, as follows.

■ The device of the present invention is installed near the locations where liquid substances are used in the factory.

■ When the liquid substance in the container is gradually used and the detector indicates that the amount of liquid remaining in the container is zero or very small, the gas passage 4 and liquid passage 5 are removed from the empty container. The container is then replaced with another container previously filled with a liquid substance, and the gas passageway and the liquid passageway are connected to the new container.

(2) Move the device of the present invention to the required location within the factory as needed.

The device of the present invention is particularly useful as a chemical supply container for the electronic industry, and as an oversupply device for chemicals used in semiconductor manufacturing processes, printed circuit manufacturing processes, resist printing plate making processes, and the like.

[Brief explanation of the drawing]

FIG. 1 is a flow sheet of the mobile liquid filtration and supply device of the present invention, and FIGS. 2 and 3 are external views showing one embodiment of the mobile liquid filtration and supply device of the present invention, FIG. 4 is a partial external view for explaining a case where a pull-out container installation stand is provided, which is an embodiment of the mobile liquid overflow supply device of the present invention, and FIG. FIG. 2 is a partial cross-sectional view of an example of a liquid substance delivery container. 1... Gas supply port for pressure feeding, 2... Liquid substance discharge port, 3... Container, 11... Opening/closing valve, 4...・Gas passage, 12...Flexible coil hose, 5...Liquid passage, 13
...Detector, 6...Water means, 14.
...Instruction device, 7...Caster, 15
... Container installation stand, 8 ... Quick connector, 16 ... Main body, 9 ... Pressure gauge, 17 ... Cock, 10. ·····safety valve.

Claims (1)

[Claims] 1 A mobile filtration and supply device capable of supplying a liquid substance containing fine solid particles as impurities by passing it through the filter, which is equipped with a pressure-feeding gas supply port 1 and a liquid substance discharge port 2, and is equipped with a pressure feeding gas supply port 1 and a liquid substance discharge port 2. Casters 7 having an antistatic function are directly attached to the main body 16, which has a built-in container 3, a gas passage 4 from a pressurized gas supply port leading into the container, and a liquid passage 5 leading from the container 3 to the liquid substance discharge port 2. Alternatively, the gas passage 4 is equipped with a safety valve 10, a filtration means 6, and an on-off valve 11.
The liquid passage 5 is provided with a filtration means 6 and an on-off valve 11, the gas passage 4 and the liquid passage 5 are detachably connected to the container 3,
A mobile liquid oversupply device characterized by comprising a detector 13 for notifying the amount of liquid remaining in the container 3.