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JPS5834405B2 - Method for producing silicon carbide mainly composed of β-type crystals - Google Patents
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JPS5834405B2 - Method for producing silicon carbide mainly composed of β-type crystals - Google Patents

Method for producing silicon carbide mainly composed of β-type crystals

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Publication number
JPS5834405B2
JPS5834405B2 JP52100348A JP10034877A JPS5834405B2 JP S5834405 B2 JPS5834405 B2 JP S5834405B2 JP 52100348 A JP52100348 A JP 52100348A JP 10034877 A JP10034877 A JP 10034877A JP S5834405 B2 JPS5834405 B2 JP S5834405B2
Authority
JP
Japan
Prior art keywords
raw material
silicon carbide
type crystals
range
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52100348A
Other languages
Japanese (ja)
Other versions
JPS5433899A (en
Inventor
亮 榎本
隆夫 横山
道博 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP52100348A priority Critical patent/JPS5834405B2/en
Publication of JPS5433899A publication Critical patent/JPS5433899A/en
Publication of JPS5834405B2 publication Critical patent/JPS5834405B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は、シリカと炭素を出発原料として微細なβ型結
晶よりなる炭化珪素を連続的に製造するための方法に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for continuously producing silicon carbide consisting of fine β-type crystals using silica and carbon as starting materials.

現在、炭化珪素の工業的な製造方法は古典的なアチェソ
ン型の電気抵抗炉を用いた非連続式のものであり、作業
性が悪く熱効率も低いなどの諸欠点を有し、しかもα型
炭化珪素と不純物の含有率が低く、粒径が均一で微細な
β型結晶よりなる炭化珪素を大量にかつ高収率で生産す
ることはできなかった。
Currently, the industrial manufacturing method for silicon carbide is a discontinuous method using a classical Acheson-type electric resistance furnace, which has various drawbacks such as poor workability and low thermal efficiency. It has not been possible to produce silicon carbide in large quantities and at a high yield, which has a low content of silicon and impurities, and is composed of fine β-type crystals with uniform particle size.

従来、炭化珪素を連続的に製造する方法が数多く提案さ
れ、例えば西ドイツ特許第1186447号にα型炭化
珪素を得ることを目的とし、中間工程で垂直炉を用いて
β型炭化珪素を連続製造する方法が開示されているが、
該方法は連続化のために珪砂を炭材で被覆する原料処理
に特徴があり、後で詳しく述べるところのSiOガスの
挙動が考慮されていないので、原料収率と熱効率が低く
なり、さらにSiOガスの析出反応により排ガス通路が
閉塞されるため安定した連続操業には不適当である。
Conventionally, many methods for continuously producing silicon carbide have been proposed. For example, in West German Patent No. 1186447, the aim is to obtain α-type silicon carbide, and a vertical furnace is used in an intermediate step to continuously produce β-type silicon carbide. Although the method has been disclosed,
This method is characterized by raw material processing in which silica sand is coated with carbonaceous material for continuity, and the behavior of SiO gas, which will be discussed in detail later, is not taken into consideration, resulting in low raw material yield and thermal efficiency, and furthermore, SiO Since the exhaust gas passage is blocked by the gas precipitation reaction, it is unsuitable for stable continuous operation.

以上述べた如く経済的でかつ工業的な規模におけるβ型
結晶よりなる炭化珪素を連続製造するための方法は未だ
知られていない。
As mentioned above, an economical and industrial-scale method for continuously producing silicon carbide comprising β-type crystals has not yet been known.

このような観点に立ち、本発明者等は先に特願昭49−
126425号(特開昭5l−57800)によりβ型
炭化珪素の連続的製造方法に、寸た特願昭51−605
01号(特開昭52−142697)により主としてβ
型結晶よりなる炭化珪素の連続的製造方法に係る発明を
提案している。
From this point of view, the inventors of the present invention previously filed a patent application filed in 1973-
Patent Application No. 126425 (Japanese Unexamined Patent Publication No. 51-57800) published a patent application No. 51-605 on a method for continuous production of β-type silicon carbide.
No. 01 (Japanese Unexamined Patent Publication No. 52-142697), mainly β
This paper proposes an invention related to a method for continuously producing silicon carbide made of molded crystals.

本発明は、前記本発明者等が先に発明し特許出願した方
法の改良に係り、本発明は予熱帯に釦ける熱効率と装入
された原料の自動降下性をよくし、安定した炉況を維持
しかつ低い電力原単位で主としてβ型結晶よりなる炭化
珪素を連続的に製造する方法を提供することを目的とし
、シリカと炭素をC/SiO2モル比で3.2〜5.0
の範囲内に配合[〜た原料を予熱帯と加熱帯と冷却帯を
有する反応容器内で連続的あるいは間歇的に自重降下さ
せつつ1650〜2100℃の温度に間接電気加熱して
SiC化反応を行なわせる主としてβ型結晶よりなる炭
化珪素の製造方広に釦いて前記配合原料の嵩比重を0.
45〜0.90の範囲内となし、また、前記予熱帯にお
ける原料充てん層の高さを0.2〜0.9mの範囲内に
維持しながら操業することによって本発明の目的を遠戚
することができる。
The present invention relates to an improvement of the method previously invented and patented by the present inventors, and the present invention improves the thermal efficiency of the preheating zone and the automatic lowering of the charged raw materials, thereby stabilizing the furnace condition. The purpose of the present invention is to provide a method for continuously producing silicon carbide mainly composed of β-type crystals while maintaining a low power consumption, and silica and carbon are mixed at a C/SiO2 molar ratio of 3.2 to 5.0.
The SiC formation reaction is carried out by indirectly electrically heating the raw materials mixed within the range of 1,650 to 2,100°C while continuously or intermittently lowering the weight of the raw materials in a reaction vessel having a pre-heating zone, a heating zone, and a cooling zone. The bulk specific gravity of the blended raw materials is 0.
The object of the present invention can be distantly achieved by maintaining the height of the raw material filling layer in the preheating zone within the range of 0.2 to 0.9 m. be able to.

次に本発明の詳細な説明する。Next, the present invention will be explained in detail.

シリカと炭素から生成される炭化珪素の反応式は一般に
下記(1)式によって示される。
The reaction formula of silicon carbide produced from silica and carbon is generally shown by the following formula (1).

5i02+3C−+SiC+2CO・・・・・・(1)
しかしながら実際に主体となる生成機構は下記の(2)
式によってSiOガスが生成し、該SiOガスと炭素が
(3)式にしたがって反応し炭化珪素が生成することが
知られている。
5i02+3C-+SiC+2CO...(1)
However, the actual main generation mechanism is (2) below.
It is known that SiO gas is generated according to the formula, and the SiO gas and carbon react according to the formula (3) to generate silicon carbide.

Sio2+C−+SiO+CO・・・・・・・・・(2
)SiO+2C−’)SiC化反応 ・・・・・・
・・・(3)本発明にむいては、出発原料として珪石、
珪砂あるいはそれらの粉末から選択された高純度のシリ
カと、各種の粒状または粉状の炭材から選択された炭素
とを用いる。
Sio2+C-+SiO+CO・・・・・・・・・(2
)SiO+2C-')SiC formation reaction...
...(3) For the present invention, silica stone,
High-purity silica selected from silica sand or powder thereof, and carbon selected from various granular or powdered carbon materials are used.

この原料を配合するに際し、アチェソン炉を用いる従来
法にむける配合比の如く、炭素のシリカに対する配合比
が化学当量に近いかあるいは低い配合原料とすることは
好捷しくない。
When blending this raw material, it is not desirable to use a blended raw material in which the blending ratio of carbon to silica is close to or low in chemical equivalent, as in the conventional method using an Acheson furnace.

なぜならば本発明に釦いて、このような従来法に近い配
合原料を使用すると、前記(2)式に従って生成するS
iOガスのうちSiC化されないものが多くなり反応容
器内のSiOガス量が増加す、る。
This is because, in accordance with the present invention, if a blended raw material similar to that of the conventional method is used, S produced according to the above formula (2)
More of the iO gas is not converted into SiC, and the amount of SiO gas in the reaction vessel increases.

該SiOガスは予熱帯で下記の(4)式、(5)式、(
6)式に示す反応を生起する。
The SiO gas is generated in the preheating zone according to the following equations (4), (5), and (
6) The reaction shown in the formula is caused.

2S iO−+S iO2+S i ・・・
・・・(4)SiO+CO−+SiO+C・・・・・・
(5)3SiO+CO→2Si02+SiC・・・・・
・(6)この結果5in2 、Si、SiC,C等の混
合した半溶融物の析出量を増加させる。
2S iO−+S iO2+S i ・・・
...(4) SiO+CO-+SiO+C...
(5) 3SiO+CO → 2Si02+SiC...
-(6) As a result, the amount of precipitated semi-molten material mixed with 5in2, Si, SiC, C, etc. is increased.

前記析出物は粘着性を持つため、原料が互いに凝結し、
炭化珪素を連続的に製造するために最も重要な原料の円
滑な移動降下が著しく阻害され、長期間の安定した連続
操業は困難になる。
Since the precipitate is sticky, the raw materials coagulate with each other,
The smooth movement and descent of the most important raw material for the continuous production of silicon carbide is significantly hindered, making stable continuous operation over a long period of time difficult.

したがって本発明によれば、前記シリカと炭素からなる
配合原料はシリカ粉と炭素粒の混合物、シリカ粉と炭素
粉を混合し団粒状に成形した物あるいは該団粒に例えば
木片、籾殻、ヤシ殻、木炭粒、コークス粒、石灰粒の何
れか1種または2種以上を添加した物を使用することが
できるが、前記配合原料は炭素過剰に配合し、その配合
モル比C/SiO2ば3.2〜5.0の範囲内とする必
要がある。
Therefore, according to the present invention, the blended raw material consisting of silica and carbon is a mixture of silica powder and carbon particles, a mixture of silica powder and carbon powder and formed into aggregates, or the aggregates include wood chips, rice husks, coconut shells, etc. , charcoal grains, coke grains, and lime grains can be used. However, the blended raw materials are blended with an excess of carbon, and the blended molar ratio C/SiO2 is 3. It needs to be within the range of 2 to 5.0.

その理由は前記配合比が32より小さいとシリカを十分
に反応させるとともに前述した如く原料の円滑な自重降
下を長期間にわたって維持することが難しくなり、他方
5.0より大きいと反応に寄与しない炭素を高温に加熱
するために熱効率が低くなるし、炭素原料に要する費用
が増加するので経済的にβ型炭化珪素を製造するには好
1しくないことに有る。
The reason for this is that if the blending ratio is smaller than 32, it becomes difficult to react the silica sufficiently and maintain the smooth fall of the raw material over a long period of time as described above, while if the blending ratio is larger than 5.0, the carbon does not contribute to the reaction. This is not favorable for economically producing β-type silicon carbide because the thermal efficiency is lowered due to heating to a high temperature and the cost required for the carbon raw material increases.

本発明に釦いて、前記C/ S i 02モル比で3.
2〜5.0に配合された原料の嵩比重を0.45〜0.
90の範囲内に限定する理由は、嵩比重は軽い方が通気
性その他の点で好ましいが0.45より小さい配合原料
となすためには高価な木炭、木片を大量に使用するか、
あるいは団粒の粒径を極めて均一に揃える必要があり、
原料製造コストの著しい増大につながるので好1しくな
く、他方嵩比重が0.90より大きいと反応生成ガスの
通気性が悪く高温ガスと原料との熱交換が十分に行なわ
れず、昔た前記SiOガスよりの析出物の影響を敏感に
受は易くなり原料の円滑な自重降下が著しく阻害され長
期間の安定した操業が保たれないから、配合原料の嵩比
重を0.45〜0.90の範囲内に限定する必要があり
、0.55〜0.80の範囲内において最も良い結果が
得られる。
According to the present invention, the C/S i 02 molar ratio is 3.
The bulk specific gravity of the raw materials blended to 2-5.0 is 0.45-0.
The reason for limiting the bulk specific gravity to within the range of 90 is that a lighter bulk specific gravity is preferable in terms of breathability and other aspects, but in order to make a blended raw material with a lower bulk specific gravity than 0.45, large amounts of expensive charcoal and wood chips must be used.
Or, it is necessary to make the particle size of the aggregates extremely uniform,
On the other hand, if the bulk specific gravity is larger than 0.90, the permeability of the reaction product gas will be poor and heat exchange between the high temperature gas and the raw material will not be carried out sufficiently. The bulk specific gravity of the blended raw materials should be adjusted to between 0.45 and 0.90 because they are susceptible to the influence of precipitates from gases, which significantly impedes the smooth fall of the raw material's own weight, making it difficult to maintain stable operation over a long period of time. It is necessary to limit the value within the range, and the best results are obtained within the range of 0.55 to 0.80.

前記の如く配合された原料を、予熱帯、加熱帯釦よび冷
却帯を有する反応容器の上部より連続的あるいは間歇的
に予熱帯に装入し、装入された原料を前記反応容器の予
熱帯内を連続的あるいは間歇的に自重降下させつつ加熱
帯に至らせ、加熱帯内で水平方向に間接電気加熱して1
650〜2100℃の温度範囲内でSiC化反応を行な
わせるに際し、本発明にむいて最も重要なことは予熱帯
にも・ける原料充てん層の高さを0.2〜0.9mの範
囲内に維持することである。
The raw materials blended as described above are continuously or intermittently charged into the preheating zone from the upper part of the reaction vessel, which has a preheating zone, a heating zone button, and a cooling zone, and the charged raw materials are charged into the preheating zone of the reaction vessel. The interior is brought to the heating zone while continuously or intermittently lowering its own weight, and indirect electrical heating is performed horizontally within the heating zone.
When carrying out the SiC formation reaction within the temperature range of 650 to 2100°C, the most important thing for the present invention is to keep the height of the raw material packed layer, which is also used in the preheating zone, within the range of 0.2 to 0.9 m. It is important to maintain this.

前記原料層てん層の高さを0.2mより低く操業すると
、高温のCOガスが原料と充分に熱交換されずして系外
に放出され、また反応容器を伝達して予熱帯で放散する
熱量も増加するので熱効率が低下すると同時に、COガ
スと共に系外に放出されるSiOガスの量が増加するた
め熱損失と原料損失が大きくなり経済的にβ型炭化珪素
を製造することが難しく、一方前記原料充てん層の高さ
を0.9mより高く操業すると、加熱帯より上昇してき
たSiOガスのほとんどが前記析出物となり系外に放出
されないために次第に反応容器内のSiOガス分圧が上
昇し、予熱帯に耘ける析出量が増加する結果、原料の円
滑な自重降下が著しく阻害され長期間の安定した連続操
業が困難となるので、予熱帯における原料層てん層の高
さを0.2〜0.9mの範囲内に維持する必要があり、
0,3〜0.7 mの範囲内に釦いて最も良い結果が得
られる。
If the height of the raw material layer is lower than 0.2 m, high-temperature CO gas will not be sufficiently exchanged with the raw material and will be released outside the system, and will also be transmitted through the reaction vessel and dissipated in the pre-heating zone. Since the amount of heat increases, the thermal efficiency decreases, and at the same time, the amount of SiO gas released outside the system along with the CO gas increases, resulting in large heat loss and raw material loss, making it difficult to economically produce β-type silicon carbide. On the other hand, if the height of the raw material-filled layer is set higher than 0.9 m, most of the SiO gas rising from the heating zone becomes the precipitates and is not released outside the system, so the SiO gas partial pressure inside the reaction vessel gradually increases. However, as the amount of precipitation in the preheating zone increases, the smooth descent of the raw material under its own weight is significantly inhibited, making stable continuous operation for a long period of time difficult. It is necessary to maintain within the range of 2 to 0.9 m,
Best results are obtained with a button within the range of 0.3 to 0.7 m.

な3本発明において、前記予熱帯内に釦ける原料層てん
層の高さは加熱帯内の装入物を間接電気加熱する手段、
すなわち発熱体の発熱部あるいは誘導コイルの上端より
原料層てん層の表面1での垂直の長さのことである。
3. In the present invention, the height of the raw material layer buttoned in the preheating zone is determined by means for indirectly electrically heating the charge in the heating zone;
That is, it is the vertical length from the heating part of the heating element or the upper end of the induction coil to the surface 1 of the top layer of the raw material layer.

本発明において前記原料層てん層の高さの範囲内で長時
間に渡り原料層てん層表面を一定の位置に保持するか、
あるいは間歇的に原料層てん層表面の位置を脈動させる
こともできる。
In the present invention, the surface of the raw material layer is held at a constant position for a long time within the height range of the raw material layer, or
Alternatively, the position of the surface of the raw material layer may be pulsated intermittently.

前記SiC化反応を行なわせるための反応温度を165
0〜2100’Cに限定する理由は、2100’Cより
高いと虫取したβ型炭化珪素が結晶成長し、α型炭化珪
素に転移して焼結塊となるので連続操業が難しく、一方
1650’Cより低いと反応速度が極めて遅く経済的で
ないので、前記反応温度は1650〜2100°Cの範
囲内に限定する必要がある。
The reaction temperature for carrying out the SiC conversion reaction was set to 165
The reason for limiting the temperature to 0 to 2100'C is that if the temperature is higher than 2100'C, the removed β-type silicon carbide will grow crystals and transform into α-type silicon carbide, forming a sintered mass, making continuous operation difficult. If it is lower than C, the reaction rate is extremely slow and uneconomical, so the reaction temperature needs to be limited within the range of 1650 to 2100°C.

本発明に耘いて、予熱帯における原料層てん層の高さを
0.2〜0.9mの範囲内に維持するとともに、前記予
熱帯における原料層てん層を通過するCOガスの質量速
度を500kg/m”・hr 以下で操業することが
好ましい。
In accordance with the present invention, the height of the top layer of the raw material layer in the preheating zone is maintained within the range of 0.2 to 0.9 m, and the mass velocity of CO gas passing through the top layer of the raw material layer in the preheating zone is set to 500 kg. It is preferable to operate at less than /m”·hr.

前記質量速度を500kg/m2・hrより大きく操業
すると原料層てん層の単位水平断面を通過するSiOガ
スの量が増加し、原料層でSiCガスからの析出物が高
濃度で凝縮することになり、原料の円滑な自重降下を長
期間に渡って維持することが難しくなるからである。
If the mass speed is increased above 500 kg/m2・hr, the amount of SiO gas passing through a unit horizontal cross section of the top layer of the raw material layer will increase, and precipitates from the SiC gas will condense in the raw material layer at a high concentration. This is because it becomes difficult to maintain the smooth weight fall of the raw material over a long period of time.

すなわち縦方向に長い反応容器を用いて生産量の増大を
計ることは本発明に釦いて原料の自重降下性を悪くする
結果となるので好捷しくない。
In other words, it is undesirable to increase the production amount by using a vertically long reaction vessel, since this results in a worsening of the weight-lowering properties of the raw materials.

また前記質量速度を余り小さく操業すると単位製造装置
にむける時間当りの製造量が少なく経済的でなくなるの
で、前記質量速度は150〜400に9/m2・hrの
範囲が最も好ましい。
Furthermore, if the mass speed is too low, the amount of production per hour for the unit production equipment will be low and it will be uneconomical, so the mass speed is most preferably in the range of 150 to 400.9/m2.hr.

次に本発明を実施するに用いることのできる製造装置の
1例を図面について説明する。
Next, an example of a manufacturing apparatus that can be used to carry out the present invention will be described with reference to the drawings.

本発明の方法で使用する装置は、第1図に示す如く原料
装入口1と予熱帯2と加熱帯3と冷却帯4と密閉自在の
生成物排出口5とを有し、それらが縦方向にそれぞれ連
設されてなる反応容器6であって、前記加熱帯を形成す
る筒8は黒鉛製であり、加熱帯の装入物を間接電気加熱
する手段10゜11.12を具備し、少なくとも前記加
熱帯3の外側に炭素あるいは黒鉛質微粉よりなる断熱層
9を有するものである。
As shown in FIG. 1, the apparatus used in the method of the present invention has a raw material charging port 1, a pre-heating zone 2, a heating zone 3, a cooling zone 4, and a sealable product discharge port 5, which are arranged vertically. The tubes 8 forming the heating zone are made of graphite and are equipped with means 10, 11, 12 for indirect electrical heating of the charge in the heating zone, and are equipped with at least A heat insulating layer 9 made of carbon or graphite fine powder is provided on the outside of the heating zone 3.

前記反応容器6は装置の中心部に設置され、間接加熱手
段10.IL 12は加熱帯を形成する筒8の外側に垂
設された黒鉛製発熱体10と、前記発熱体100発熱部
11の外側に近接して、かつ前記断熱層の内側に設けら
れた黒鉛製反射筒12からなる。
The reaction vessel 6 is installed in the center of the apparatus, and is provided with indirect heating means 10. The IL 12 includes a graphite heating element 10 vertically installed on the outside of a cylinder 8 forming a heating zone, and a graphite heating element 10 installed close to the outside of the heat generating part 11 of the heating element 100 and inside the heat insulating layer. It consists of a reflecting tube 12.

前記黒鉛製発熱体10はU字型の形状を有し、加熱帯を
形成する筒の外側に近接して、発熱体の発熱部11が加
熱帯域の垂直方向に対応するように、かつ加熱帯内の装
入物をできるだけ均一に加熱するように設けられている
The graphite heating element 10 has a U-shape, and is placed close to the outside of the cylinder forming the heating zone so that the heat generating part 11 of the heating element corresponds to the vertical direction of the heating zone, and It is designed to heat the charge inside as uniformly as possible.

黒鉛製発熱体10は加熱帯を形成する筒8と黒鉛製反射
筒12により取り囲1れた空間内にあり、前記空間内に
は非酸化性ガス封入口13より例えばアルゴン、ヘリウ
ム、窒素、−酸化炭素、水素その他の非酸化性ガスが封
入され、空気の侵入による黒鉛製発熱体の酸化消耗を防
止することができる。
The graphite heating element 10 is located in a space surrounded by a cylinder 8 forming a heating zone and a graphite reflection cylinder 12, and into the space, for example, argon, helium, nitrogen, - Carbon oxide, hydrogen, and other non-oxidizing gases are sealed to prevent oxidative consumption of the graphite heating element due to air intrusion.

次に本発明の実施例について説明する。Next, examples of the present invention will be described.

実施例 1 シリカ粉(S102二99.7宏 80メツシユ以下)
100重量部、石油コークス粉、(C二98.7%、灰
分二05係、325メツシユ以下)76重量部、及び高
ピッチ粉(C=50.4%。
Example 1 Silica powder (S102 299.7 hiro 80 mesh or less)
100 parts by weight, 76 parts by weight of petroleum coke powder (C298.7%, ash content 205 parts, 325 mesh or less), and high pitch powder (C=50.4%).

200メツシユ以下)7重量部を配合し、縦型スクリュ
ー混合機に入れて10分間混合した。
7 parts by weight (200 mesh or less) were mixed in a vertical screw mixer for 10 minutes.

前記配合原料にカルボメチルセルロース0.5係水溶液
をスプレーしながら皿型造粒機を用いて成形し、篩とバ
ーグリズリ−で整粒した後、バンド型通気乾燥機に入れ
て150Cの熱風で90分間乾燥して平均粒径10.5
yfIm、嵩比重0.60 、 C/5i02モル比が
4.0の成形原料を得た。
The raw materials were molded using a dish granulator while spraying a 0.5% aqueous solution of carbomethylcellulose, sized with a sieve and a burr grizzly, and then placed in a band-type ventilation dryer for 90 minutes with hot air at 150C. Dry average particle size 10.5
A molding raw material having yfIm, bulk specific gravity of 0.60, and C/5i02 molar ratio of 4.0 was obtained.

な3該成形原料を第1表に示した仕様の製造装置の上部
より装入し、原料層の予熱帯における充てん層の高さを
0.5m、COガスの質量速度を250〜2601<g
/m”・hrの範囲内に維持し、黒鉛製筒の外壁温度が
2150℃に制御された加熱帯内を降下させつつ、間接
電気加熱して約1850℃でSiC化反応を行なわせ、
生成したCOガス中で450℃迄冷却した後、排出口よ
り反応生成物を連続的に排出させた。
3. The forming raw material is charged from the top of the manufacturing equipment having the specifications shown in Table 1, the height of the filled layer in the pre-heating zone of the raw material layer is 0.5 m, and the mass velocity of CO gas is 250 to 2601<g.
/m”・hr, while lowering the temperature of the outer wall of the graphite tube in a heating zone controlled to 2150°C, indirect electrical heating is performed to perform the SiC formation reaction at about 1850°C,
After cooling to 450° C. in the generated CO gas, the reaction product was continuously discharged from the discharge port.

得られた生成物の不純物を除いた組成比は5iC71,
6係、5i022.3宏遊離炭素(F、C0)26.1
係であり、前記SiCのうちβ型結晶であるものは96
.5%であり、その平均粒径ば10.3μであった。
The composition ratio of the obtained product excluding impurities is 5iC71,
Section 6, 5i022.3 Hiroshi Free Carbon (F, C0) 26.1
Of the SiC, those that are β-type crystals are 96
.. 5%, and its average particle size was 10.3μ.

※実施例2及び比較例1 実施例1と同じ配合原料を使用し、粒度分布を変えるこ
とによって嵩比重を変えて、実施例1と同じ操作を行っ
た。
*Example 2 and Comparative Example 1 The same operations as in Example 1 were performed using the same blended raw materials as in Example 1 and changing the bulk specific gravity by changing the particle size distribution.

それらの結果を第2表に示す。本発明法による実施例1
,2に釦いては長期間にわたって極めて順調に連続操業
ができた。
The results are shown in Table 2. Example 1 according to the method of the present invention
, 2, we were able to operate extremely smoothly and continuously for a long period of time.

嵩比重の大きな原料を使用した比較例1の場合には、S
iOガス及び原料粒子間に析出物が少量析出しただけで
も、すぐ原料粒子間に凝着物による架橋が生じ、原料の
自重降下が著しく悪化し、ガス及び原料の吹き上げ現象
が著しく多発し、連続操業が困難で、さらには作業上の
面で安全性についても問題があった。
In the case of Comparative Example 1 using raw materials with large bulk specific gravity, S
Even if only a small amount of precipitates are deposited between iO gas and raw material particles, crosslinking due to the agglomerates will immediately occur between the raw material particles, the weight drop of the raw material will be significantly worsened, the blow-up phenomenon of gas and raw materials will occur significantly, and continuous operation will be interrupted. It was difficult to do so, and there were also safety issues in terms of work.

実施例3及び比較例2 実施例1で使用したと同一の、製造装置でもって、原料
層の予熱帯に釦ける充てん層の高さをかえて、実施例1
と同じ操作を行った。
Example 3 and Comparative Example 2 Using the same manufacturing equipment as used in Example 1, Example 1 was produced by changing the height of the filling layer in the preheating zone of the raw material layer.
performed the same operation.

それらの結果を第3表に示す。The results are shown in Table 3.

実施例1.3−1.3−2の如く本発明方法によれば、
長期間にわたって極めて順調に連続操業を行うことがで
きた。
According to the method of the present invention as in Example 1.3-1.3-2,
The plant was able to operate extremely smoothly and continuously for a long period of time.

比較例2−1の如く原料層を低く維持して操業すると、
高温状態のCOガスが排出され、捷た、同時に系外に排
出されてし1うSiOガスが顕著に観察され、電力原単
位が悪く経済的ではなかった。
When operating with the raw material layer kept low as in Comparative Example 2-1,
High-temperature CO gas was discharged and shattered, and at the same time, SiO gas was discharged outside the system, and the electric power consumption was poor and it was not economical.

また比較例2−2の如く原料層が高い場合には反応生成
ガスと原料間に釦ける熱交換効率の向上が期待されるが
実際には反応生成ガス中のSiOガスを必要以上に予熱
帯で析出させる結果となり析出物が増加し、原料粒子間
の粘着、凝着によるトラブルが多発するため原料の自重
降下が停滞し連続操業は困難であった。
In addition, when the raw material layer is high as in Comparative Example 2-2, it is expected that the heat exchange efficiency between the reaction product gas and the raw material will be improved, but in reality, the SiO gas in the reaction product gas is transferred to the preheating zone more than necessary. As a result, the amount of precipitates increased, and troubles due to adhesion and adhesion between raw material particles occurred frequently, resulting in a stagnation in the weight fall of the raw materials, making continuous operation difficult.

以上、説明した如く、本発明の方法によれば、α型炭化
珪素と不純物の含有率が低く、粒径が均一で微細なβ型
結晶よりなる炭化珪素を長期間安定した炉況でしかも高
収率で連続製造できる効果を奏するものであり、工業上
極めて有用なものである。
As explained above, according to the method of the present invention, silicon carbide consisting of fine β-type crystals with a uniform particle size and a low content of α-type silicon carbide and impurities can be produced in a stable furnace condition for a long period of time, and at a high temperature. It has the effect of allowing continuous production with high yield, and is extremely useful industrially.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の実施例および比較例に訃いて使用し
た縦型連続製造装置の縦断面図、第2図は、上記第1図
に示した製造装置のA−A線に沿う横断面図である。 1・・・原料装入口、2・・・予熱帯、3・・・加熱帯
、4・・・冷却帯、5・・・生成物排出口、6・・・反
応容器、8・・・加熱帯を形成する筒、9・・・断熱層
、10・・・黒鉛製発熱体、11・・・黒鉛製発熱体の
発熱部、12・・・黒鉛製反射筒、13・・・非酸化性
ガス封入口、14・・・案内電極、15・・・フスバー
16・・・測温孔、18・・・生成ガス排出口。
FIG. 1 is a vertical cross-sectional view of a vertical continuous manufacturing apparatus used in Examples and Comparative Examples of the present invention, and FIG. 2 is a cross-sectional view of the manufacturing apparatus shown in FIG. It is a front view. DESCRIPTION OF SYMBOLS 1... Raw material charging port, 2... Pre-preparation zone, 3... Heating zone, 4... Cooling zone, 5... Product discharge port, 6... Reaction vessel, 8... Processing Cylinder forming a tropical zone, 9... Heat insulating layer, 10... Graphite heating element, 11... Heat generating part of graphite heating element, 12... Graphite reflective tube, 13... Non-oxidizing Gas filling inlet, 14...Guiding electrode, 15...Fusbar 16...Temperature measurement hole, 18...Produced gas discharge port.

Claims (1)

【特許請求の範囲】 1 シリカと炭素をC/5i02モル比で3.2〜5.
0の範囲内に配合した原料を予熱帯と加熱帯と冷却帯を
有する反応容器内で連続的あるいは間歇的に自重降下さ
せつつ、1650〜2100℃の温度に間接電気加熱し
てSiC化反応を行なわせる、主としてβ型結晶よりな
る炭化珪素の製造方法において前記配合原料の嵩比重を
0.45〜0.90の範囲内となしまた前記予熱帯にト
ける原料充てん層の高さを0.2〜0.9mの範囲内に
維持しながら操業することを特徴とする主としてβ型結
晶よりなる炭化珪素の製造方法。 2 前記予熱帯に釦ける原料充てん層の高さを03〜0
.7mの範囲内に維持することを特徴とする特許請求の
範囲第1項記載の主としてβ型結晶よりなる炭化珪素の
製造方法。 3 前記原料充てん層を通過するCOガスの質量速度を
500kg/m″・nr以下とすることを特徴とする特
許請求の範囲第1あるいは第2項記載の主としてβ型結
晶よりなる炭化珪素の製造方法。 4 前記原料充てん層を通過するCOガスの質量速度を
150〜400kg/m′・nrの範囲内とすることを
特徴とする特許請求の範囲第1〜3項の倒れかに記載の
主としてβ型結晶よりなる炭化珪素の製造方法。
[Claims] 1. Silica and carbon in a C/5i02 molar ratio of 3.2 to 5.
The raw materials blended within the range of 0 are indirectly electrically heated to a temperature of 1,650 to 2,100°C to carry out the SiC reaction while continuously or intermittently lowering their own weight in a reaction vessel having a pre-heating zone, a heating zone, and a cooling zone. In the method for producing silicon carbide mainly composed of β-type crystals, the bulk specific gravity of the blended raw materials is set within the range of 0.45 to 0.90, and the height of the raw material-filled layer entering the preheating zone is set to 0.45 to 0.90. A method for producing silicon carbide mainly consisting of β-type crystals, characterized in that the operation is carried out while maintaining the crystal diameter within a range of 2 to 0.9 m. 2. Set the height of the raw material filling layer in the preheating zone to 03 to 0.
.. A method for producing silicon carbide mainly composed of β-type crystals according to claim 1, characterized in that the crystal diameter is maintained within a range of 7 m. 3. Production of silicon carbide mainly composed of β-type crystals according to claim 1 or 2, characterized in that the mass velocity of the CO gas passing through the raw material-filled layer is 500 kg/m''·nr or less Method 4. The main method according to claims 1 to 3, characterized in that the mass velocity of the CO gas passing through the raw material-filled layer is within the range of 150 to 400 kg/m'·nr. A method for producing silicon carbide consisting of β-type crystals.
JP52100348A 1977-08-22 1977-08-22 Method for producing silicon carbide mainly composed of β-type crystals Expired JPS5834405B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52100348A JPS5834405B2 (en) 1977-08-22 1977-08-22 Method for producing silicon carbide mainly composed of β-type crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52100348A JPS5834405B2 (en) 1977-08-22 1977-08-22 Method for producing silicon carbide mainly composed of β-type crystals

Publications (2)

Publication Number Publication Date
JPS5433899A JPS5433899A (en) 1979-03-12
JPS5834405B2 true JPS5834405B2 (en) 1983-07-26

Family

ID=14271592

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPS5834405B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638911B2 (en) * 1986-03-08 1994-05-25 日本セメント株式会社 Method for producing non-oxide powder
JP2012046401A (en) * 2010-08-30 2012-03-08 Sumitomo Osaka Cement Co Ltd Method for manufacturing silicon carbide precursor, and method for manufacturing silicon carbide powder
JPWO2013073534A1 (en) * 2011-11-17 2015-04-02 イビデン株式会社 Method for producing silicon carbide single crystal

Also Published As

Publication number Publication date
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