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JPS5836076B2 - Manufacturing method of anodized electric wire - Google Patents
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JPS5836076B2 - Manufacturing method of anodized electric wire - Google Patents

Manufacturing method of anodized electric wire

Info

Publication number
JPS5836076B2
JPS5836076B2 JP13052380A JP13052380A JPS5836076B2 JP S5836076 B2 JPS5836076 B2 JP S5836076B2 JP 13052380 A JP13052380 A JP 13052380A JP 13052380 A JP13052380 A JP 13052380A JP S5836076 B2 JPS5836076 B2 JP S5836076B2
Authority
JP
Japan
Prior art keywords
acid
film
aluminum
anodic oxide
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13052380A
Other languages
Japanese (ja)
Other versions
JPS5757892A (en
Inventor
光一 猿渡
和夫 石禾
正受 前嶋
清造 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Cable Works Ltd
Original Assignee
Fujikura Cable Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Cable Works Ltd filed Critical Fujikura Cable Works Ltd
Priority to JP13052380A priority Critical patent/JPS5836076B2/en
Publication of JPS5757892A publication Critical patent/JPS5757892A/en
Publication of JPS5836076B2 publication Critical patent/JPS5836076B2/en
Expired legal-status Critical Current

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  • Insulating Bodies (AREA)
  • Electrochemical Coating By Surface Reaction (AREA)

Description

【発明の詳細な説明】 この発明はアルミニウムあるいはアルミニウム合金の陽
極酸化皮膜の電気絶縁性を向上させたアルマイト電線の
製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing an alumite electric wire in which the electrical insulation properties of an anodic oxide film of aluminum or aluminum alloy are improved.

アルミニウムあるいはアルミニウム合金を陽極酸化する
ことによって生成する陽極酸化皮膜はバリャ層と呼ばれ
る緻密な無孔性皮膜と、この上に形威された多孔質のγ
−アルミナからなる皮膜とから構成されており、バリャ
層は厚みが1μ以下で、電気絶縁性が非常に高い。
The anodized film produced by anodizing aluminum or aluminum alloy consists of a dense non-porous film called a barrier layer and a porous γ film formed on top of this.
- The barrier layer has a thickness of 1 μm or less and has very high electrical insulation properties.

多孔質皮膜は厚み5〜100μで、外径10〇一数io
o人の微細孔が1011個/d程度存在している。
The porous film has a thickness of 5 to 100 μm and an outer diameter of 100 io
There are approximately 1011 micropores/d.

したがって、陽極酸化皮膜は電気絶縁性を有している。Therefore, the anodic oxide film has electrical insulation properties.

この陽極酸化皮膜の電気絶縁性は、例えば絶縁破壊電圧
を指標として見た場合、陽極酸化皮膜の厚みに比例して
増加し、皮膜に存在する微細子L クラックや欠陥など
の空洞部に存在する残存電解質、水分、空気などによっ
て影響をうけて低下する。
The electrical insulation property of this anodic oxide film increases in proportion to the thickness of the anodic oxide film, for example when looking at dielectric breakdown voltage as an indicator. It decreases due to the influence of residual electrolytes, moisture, air, etc.

また、陽極酸化皮膜を曲げ加工などの加工を施こしたり
した場合にも、上記クラツクや欠陥が増加して絶縁破壊
電圧が低下する。
Furthermore, when the anodic oxide film is subjected to processing such as bending, the cracks and defects described above increase and the dielectric breakdown voltage decreases.

ところで、陽極酸化皮膜の膨張係数は約 5XI O−’17Gで、アルミニウムあるいはアルミ
ニウム合金ではほぼ25X10−’1/℃とアルミニウ
ムあるいはアルミニウム合金の方が約5倍大きく、陽極
酸化皮膜が一度加熱されると膨張係数の差により、皮膜
中のバリャ一層および多孔質層にクラツクが発生し、し
たがって電気絶縁性が大きく低下してしまう。
By the way, the expansion coefficient of the anodic oxide film is about 5XI O-'17G, and for aluminum or aluminum alloy it is approximately 25X10-'1/℃, which is about 5 times larger for aluminum or aluminum alloy, and once the anodic oxide film is heated. Due to the difference in expansion coefficient, cracks occur in the barrier layer and the porous layer in the coating, resulting in a significant decrease in electrical insulation.

このように陽極酸化皮膜の電気絶縁性は取扱い条件によ
って大巾に変化し、不安定であるため、これを改善して
、安定で、高い電気絶縁性を得るために種々の方策が行
われてきた。
The electrical insulation properties of the anodic oxide film vary widely depending on the handling conditions and are unstable, so various measures have been taken to improve this and obtain stable and high electrical insulation properties. Ta.

例えば、各種物質を微細孔中に含浸封孔したり、酸化皮
膜を厚くしたり、電解液を工夫したり、2段電解で封孔
したりしているが効果は不充分であり、更には陽極酸化
皮膜を持つアルミニウムあるいはアルミニウム合金をそ
の重要な用途である耐熱電線として用いると上記熱膨張
の差によるクラックの発生をさけることはできなかった
For example, attempts have been made to seal the micropores by impregnating them with various substances, thickening the oxide film, devising electrolytes, and sealing the pores by two-stage electrolysis, but the effects are insufficient. When aluminum or aluminum alloys with anodic oxide coatings are used for heat-resistant wires, which is an important use thereof, it is impossible to avoid the occurrence of cracks due to the above-mentioned difference in thermal expansion.

この発明は上記事情に鑑みてなされたもので、その目的
とするところは、加熱や加工に対して安定で高い電気絶
縁性を有するアルマイト電線の製造方法を提供すること
にあり、アルミニウムあるいはアルミニウム合金線を陽
極酸化処理することによって生成する陽極酸化皮膜を金
属のチオ酸のアンモニウム塩を含む電解浴中で陽極とし
て二次電解し、ついで封孔処理するか、または陽極酸化
皮膜に加熱処理、ホーニング処理により積極的にクラツ
クを発生せしめ、ついでこの皮膜を金属のチオ酸塩を主
成分とする電解浴中で二次電解を行わしめ微細孔中に金
属硫化物を含浸せしめさらに封孔処理を行なうことを特
徴とするものである。
This invention was made in view of the above circumstances, and its purpose is to provide a method for manufacturing an alumite electric wire that is stable against heating and processing and has high electrical insulation properties, and is made of aluminum or aluminum alloy. The anodized film produced by anodizing the wire is subjected to secondary electrolysis as an anode in an electrolytic bath containing an ammonium salt of a metal thioacid, and then subjected to a sealing treatment, or the anodized film is heat-treated and honed. Cracks are actively generated through treatment, and then this film is subjected to secondary electrolysis in an electrolytic bath containing a metal thioate as a main component to impregnate the fine pores with metal sulfide, followed by sealing treatment. It is characterized by this.

以下、この発明を詳しく説明する。This invention will be explained in detail below.

この発明のアルミニウムあるいはアルミニウム合金線の
陽極酸化皮膜は、アルミニウムあるいはアルミニウム合
金線を酸性浴、アルカリ浴、非水浴に浸漬し、これを陽
極とし、直流、交流、直交重畳流などによって電解して
得られるもので、緻密なバリア層とその上に形成された
5〜100μ厚のγ−アルミナからなる多孔質膜からな
るものである。
The anodic oxide film of aluminum or aluminum alloy wire of this invention can be obtained by immersing aluminum or aluminum alloy wire in an acid bath, alkaline bath, or non-aqueous bath, using this as an anode, and electrolyzing it with direct current, alternating current, orthogonal superimposed current, etc. It consists of a dense barrier layer and a porous film made of γ-alumina with a thickness of 5 to 100 μm formed thereon.

このようにして得られた陽極酸化皮膜は、ついで金属の
チオ酸塩を主成分とする電解浴中で前記床膜を陽極とし
て二次電解される。
The anodic oxide film thus obtained is then subjected to secondary electrolysis in an electrolytic bath containing a metal thioate as a main component, using the bed film as an anode.

この金属のチオ酸塩としては、チオモリブデン酸、チオ
タングステン酸、チオスズ酸、チオアンチモン酸のアン
モニウム塩、のうち少なくとも一種が用いられ、これら
チオ酸塩は脱塩水に濃度0.01〜30wtφに溶解さ
れ、pHを4〜12に調整されて二次電解浴とされる。
At least one of the ammonium salts of thiomolybdic acid, thiotungstic acid, thiostannic acid, and thioantimonic acid is used as the thioate salt of this metal, and these thioate salts are added to demineralized water at a concentration of 0.01 to 30 wtφ. It is dissolved and the pH is adjusted to 4 to 12 to form a secondary electrolytic bath.

ついで、上記陽極酸化皮膜はこの電解浴中で、連続ある
いは断続であっても陽極になるように電源に接続され、
電解される。
Next, the anodic oxide film is connected to a power source in this electrolytic bath so as to become an anode, whether continuously or intermittently.
electrolyzed.

対極は適当な不溶出の導電材料を用いる。The counter electrode uses a suitable non-eluting conductive material.

電解電流は直流電流 不完全整流波形電流、交直重畳電
流、交直併用電流、交流電流パルス波形電流、矩形波電
流、三角波電流などの周期波形電流が用いられる。
As the electrolytic current, periodic waveform currents such as direct current, imperfectly rectified waveform current, AC/DC superimposed current, AC/DC combined current, AC current pulse waveform current, rectangular wave current, triangular wave current, etc. are used.

電解浴の温度は08C〜100℃の範囲である。The temperature of the electrolytic bath ranges from 08C to 100C.

直流電解では、電流密度10rrIA/dm2〜IA/
dm2、電解時間1分〜1時間が好ましい電解条件であ
る。
In DC electrolysis, the current density is 10rrIA/dm2 to IA/
Preferred electrolysis conditions are dm2 and electrolysis time of 1 minute to 1 hour.

このようにして金属硫化物が、陽極酸化皮膜中の孔およ
び微細クラツク中に生或含浸される。
In this way, metal sulfides are formed or impregnated into the pores and fine cracks in the anodic oxide film.

この金属硫化物が生或する理由については、次のように
考えられる。
The reason why this metal sulfide is produced is thought to be as follows.

チオ酸塩は電解浴中で解離して負に帯電したチオ酸イオ
ンを生ずる。
The thioate salt dissociates in the electrolytic bath to produce negatively charged thioate ions.

陽極酸化皮膜が電解中に陽極になっていると、金属のチ
オ酸イオンは電気泳動で微細クラックおよび孔中に浸入
していく。
When the anodic oxide film acts as an anode during electrolysis, metal thioate ions penetrate into minute cracks and pores by electrophoresis.

一方、孔およびクラックの底ではバリャ一層形成型のア
ルミニウムの陽極酸化反− 1 + 応とOH−1−−i02+H +2eの電極反応とがお
+ きてH が放出される。
On the other hand, at the bottom of the pores and cracks, an anodic oxidation reaction of barrier single-layer aluminum and an electrode reaction of OH-1--i02+H +2e occur, and H is released.

このH+により孔内は酸性となり、金属のチオ酸イオン
は分解されて金属硫化物となって微卿クラツクおよび孔
内に沈着される。
The inside of the pore becomes acidic due to this H+, and the metal thioate ion is decomposed to become metal sulfide, which is deposited in the microcrack and inside the pore.

この金属硫化物の沈着は、H+の放出源である孔の底で
始まり、開口部に向って進行する。
This metal sulfide deposition begins at the bottom of the pore, which is the source of H+ release, and progresses toward the opening.

以上のように二次電解処理された陽極酸化皮膜は、更に
その電気絶縁性を向上させるために封孔処理が行われる
The anodic oxide film subjected to the secondary electrolytic treatment as described above is further subjected to a sealing treatment in order to improve its electrical insulation properties.

この封孔処理は主に沸とう水封孔処理が好ましく、脱塩
水中で30分〜2時間程度行われる。
This sealing treatment is mainly preferably a boiling water sealing treatment, which is carried out in demineralized water for about 30 minutes to 2 hours.

その他には酢酸ニッケル塩封孔も同様の効果がある。In addition, nickel acetate sealing has a similar effect.

また、陽極酸化皮膜にあらかじめ、加熱処理やホーニン
グ処理などによって微細クラックを発生せしめたのち、
上述の金属のチオ酸塩による二次電解処理および封孔処
理を行うこともできる。
In addition, after generating fine cracks in the anodized film through heat treatment or honing treatment,
Secondary electrolytic treatment and sealing treatment using the above-mentioned metal thioate salts can also be performed.

加熱処理としては15.0〜300℃で10〜20分間
程度加熱炉などによって行われる。
The heat treatment is performed in a heating furnace or the like at 15.0 to 300° C. for about 10 to 20 minutes.

ホーニング処理は#200〜4P400のホーンを用い
て圧力3〜lokg/iの条件で行われる。
The honing process is performed using a #200 to 4P400 horn at a pressure of 3 to 100 kg/i.

その他、低温硬質アルマイトのように陽極酸化皮膜化成
時に微細クラツクを発生させる方法もある。
In addition, there are methods such as low-temperature hard alumite that generate fine cracks during anodic oxide film formation.

微細クラックを発生せしめられた陽極酸化皮膜は、つい
で前述の金属チオ酸塩による二次電解処理および封孔処
理が行われる。
The anodic oxide film in which fine cracks have been generated is then subjected to the above-mentioned secondary electrolytic treatment and sealing treatment using a metal thioate salt.

このようにして形成された二次電解陽極酸化皮膜は、バ
リャ一層が増厚強化され、かつ金属硫化物が微細クラツ
クおよび孔中に含浸、充填され、かつ封孔された構造に
なっている。
The secondary electrolytic anodized film thus formed has a structure in which the barrier layer is thickened and strengthened, and the metal sulfide is impregnated and filled into the fine cracks and pores, and the pores are sealed.

従って、このアルマイト電線は加熱されたり、加工され
たりした際、陽極酸化皮膜に作用する応力がランダムに
分散され、かつ酸化物がクッション材として働き、クラ
ツクの発生が非常に少なくなる。
Therefore, when this alumite electric wire is heated or processed, the stress acting on the anodic oxide film is randomly dispersed, and the oxide acts as a cushioning material, so that the occurrence of cracks is extremely reduced.

また微細クラツクおよび孔中の電気絶縁性の金属硫化物
が充填されているので、湿気や残存電解質の影響をうけ
て電気絶縁性が低下することがない。
Furthermore, since the fine cracks and pores are filled with electrically insulating metal sulfide, the electrical insulation will not deteriorate due to the influence of moisture or residual electrolyte.

更に皮膜が平滑化されるので突起放電がなくなる。Furthermore, since the film is smoothed, protrusion discharges are eliminated.

以下、参考例および実施例に基づいてこの発明を具体的
に説明する。
The present invention will be specifically described below based on Reference Examples and Examples.

参考例 IXIOOXIOO間の半硬質isアルミニウム板に、
20’Cで、15vol%硫酸、5 W t %蓚酸の
2種の電解浴中で15μの厚さの陽極酸化皮膜を化成し
た。
Reference example: On the semi-rigid aluminum plate between IXIOOXIOO,
An anodic oxide film having a thickness of 15 μm was formed at 20° C. in two types of electrolytic baths: 15 vol % sulfuric acid and 5 W t % oxalic acid.

陽極酸化皮膜を化成されたアルミニウム板の一部は20
0℃の加熱炉中で10分間加熱して微細クラツクを発生
させた。
Some of the aluminum plates that have been chemically anodized are 20
Fine cracks were generated by heating for 10 minutes in a heating furnace at 0°C.

ついで、0.5wt%のチオモリブデン酸アンモニウム
、チオタングステン酸アンモニウム、チオスズ酸アンモ
ニウム水溶液中で5 0 mA7’ dm2で陽極とし
て10分間直流電解し、これらの一部を沸とう水中で1
時間封孔処理した。
Next, direct current electrolysis was performed as an anode at 50 mA7' dm2 in a 0.5 wt% aqueous solution of ammonium thiomolybdate, ammonium thiotungstate, and ammonium thiostannate.
Time-sealed.

得られた試験片を25℃60φRHの条件下で交流絶縁
破壊試験と絶縁抵抗測定を行い、同時に表面のクラツク
発生について観察した。
The obtained test piece was subjected to an AC dielectric breakdown test and an insulation resistance measurement under conditions of 25°C and 60φRH, and at the same time, the occurrence of cracks on the surface was observed.

その結果を第1表に示す。絶縁破壊電圧測定は水銀を電
極として陽極酸化皮膜の交流破壊を行った。
The results are shown in Table 1. The dielectric breakdown voltage was measured using AC breakdown of the anodic oxide film using mercury as an electrode.

絶縁抵抗測定は超絶縁抵抗計を用いて電圧50Vで1分
間荷電した時の体積固有抵抗値を測定した。
The insulation resistance was measured by using a super insulation resistance meter to measure the volume resistivity value when charged at a voltage of 50 V for 1 minute.

クラツクの観察は20倍の拡大鏡で10in長内のクラ
ツクの数と型を測定した。
The cracks were observed by measuring the number and type of cracks within a 10 inch length using a 20x magnifying glass.

実施例 直径0. 8 mmの電気用軟アルミニウム線を15v
ol%硫酸浴中、20℃で陽極酸化処理を行い、厚さ1
0μmの陽極酸化皮膜を化成しf,このアルミニウム線
の一部を250℃の加熱炉中で5分間加熱処理して陽極
酸化皮膜に微細クラツクを発生させた。
Example diameter: 0. 8 mm electrical soft aluminum wire at 15v
Anodized at 20°C in an ol% sulfuric acid bath to a thickness of 1
A 0 μm anodic oxide film was chemically formed, and a portion of this aluminum wire was heat-treated in a heating furnace at 250° C. for 5 minutes to generate fine cracks in the anodic oxide film.

ついで、1wt%のチオモリブデン酸アンモニウム水溶
液中で、アルミニウム線を陽極と**して5分間直流電
解(二次電解)したのち、これらの一部を沸とう水中で
1時間封孔処理した。
Next, in a 1 wt % ammonium thiomolybdate aqueous solution, direct current electrolysis (secondary electrolysis) was performed for 5 minutes using the aluminum wire as an anode, and then a portion of these was sealed in boiling water for 1 hour.

これらのアルマイト電線の試験片について、往復摩耗試
験、交流絶縁破壊電圧測定および印加電圧50Vにおけ
る絶縁抵抗測定を行った。
A reciprocating abrasion test, AC breakdown voltage measurement, and insulation resistance measurement at an applied voltage of 50 V were performed on these test pieces of alumite electric wire.

なお、比較のためチオモリブデン酸アンモニウムによる
二次電解を行わないものについても同様の試験および測
定を行った。
For comparison, similar tests and measurements were also conducted on a sample that was not subjected to secondary electrolysis using ammonium thiomolybdate.

その結果を第2表に示す。The results are shown in Table 2.

往復摩耗試験は、ビーズ針を250gの荷重で、試料ア
ルマイト線上を直交して往復摺動させ、その絶縁が破壊
するまでの摺動回数で評価する方法によった。
The reciprocating abrasion test was performed by sliding a bead needle orthogonally over the sample alumite wire reciprocatingly under a load of 250 g, and evaluating the number of times the bead needle was slid until the insulation was broken.

交流絶縁破壊電圧測定は、試料アルマイト線を2本撚り
合せて行った。
AC breakdown voltage measurement was performed by twisting two sample alumite wires together.

以上、述べてきたように、この発明はアルミニウムある
いはアルミニウム合金線を陽極酸化処理して生成する多
孔質の陽極酸化皮膜あるいは、加熱処理などによって微
細クラツクを発生せしめた陽極酸化皮膜に、チオ酸のア
ンモニウム塩を主戒分とした電解浴中で二次電解せしめ
ることにより皮膜の孔および微細クラツク中に金属硫化
物を沈着含浸せしめさらに封孔処理を行なうものである
ので、陽極酸化皮膜の電気絶縁性が高く、加熱や加工の
影響をうけずに安定となり、湿度の影響をうけることも
なくなる。
As described above, the present invention applies thioacid to a porous anodic oxide film produced by anodizing aluminum or aluminum alloy wire, or to an anodized film in which fine cracks have been generated by heat treatment, etc. Metal sulfide is deposited and impregnated into the pores and fine cracks of the film through secondary electrolysis in an electrolytic bath containing ammonium salt as the main ingredient, and the pores are further sealed. It has high properties, is stable without being affected by heating or processing, and is not affected by humidity.

また皮膜自体の機械的強度が向上し、皮膜表面が平滑に
なるので突起放電がなくなる。
Furthermore, the mechanical strength of the film itself is improved and the surface of the film becomes smooth, eliminating protrusion discharges.

更に処理方法が簡単で特別の設備が不要であるなどの利
点を有し、特にアルマイト電線に好適である。
Furthermore, it has advantages such as a simple processing method and no special equipment required, and is particularly suitable for alumite electric wires.

Claims (1)

【特許請求の範囲】 1 アルミニウムあるいはアルミニウム合金線の陽極酸
化皮膜をチオモリブデン酸、チオタングステン酸、チオ
スズ酸、チオアンチモン酸のアンモニウム塩の少なくと
も1種を含む電解浴中で陽極として二次電解し、ついで
封孔処理することによって前記皮膜を電気絶縁性皮膜と
することを特徴とするアルマイト電線の製造方法。 2 アルミニウムあるいはアルミニウム合金線の陽極酸
化皮膜に加熱処理、ホーニング処理などにより微細クラ
ツクを発生せしめ、ついで前記皮膜をチオモリブデン酸
、チオタングステン酸、チオスズ酸、チオアンチモン酸
のアンモニウム塩の少なくとも1種を含む電解浴中で陽
極として二次電解し、ついで封孔処理することによって
前記皮膜を電気絶縁性皮膜とすることを特徴とするアル
マイト電線の製造方法。
[Scope of Claims] 1 An anodized film of aluminum or aluminum alloy wire is subjected to secondary electrolysis as an anode in an electrolytic bath containing at least one of ammonium salts of thiomolybdic acid, thiotungstic acid, thiostannic acid, and thioantimonic acid. . A method for manufacturing an alumite electric wire, characterized in that the film is made into an electrically insulating film by subsequently performing a sealing treatment. 2. Fine cracks are generated in the anodic oxide film of aluminum or aluminum alloy wire by heat treatment, honing treatment, etc., and then the film is treated with at least one ammonium salt of thiomolybdic acid, thiotungstic acid, thiostannic acid, and thioantimonic acid. 1. A method for producing an alumite electric wire, which comprises performing secondary electrolysis as an anode in an electrolytic bath containing alumite, and then performing a sealing treatment to form the coating into an electrically insulating coating.
JP13052380A 1980-09-19 1980-09-19 Manufacturing method of anodized electric wire Expired JPS5836076B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13052380A JPS5836076B2 (en) 1980-09-19 1980-09-19 Manufacturing method of anodized electric wire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13052380A JPS5836076B2 (en) 1980-09-19 1980-09-19 Manufacturing method of anodized electric wire

Publications (2)

Publication Number Publication Date
JPS5757892A JPS5757892A (en) 1982-04-07
JPS5836076B2 true JPS5836076B2 (en) 1983-08-06

Family

ID=15036326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13052380A Expired JPS5836076B2 (en) 1980-09-19 1980-09-19 Manufacturing method of anodized electric wire

Country Status (1)

Country Link
JP (1) JPS5836076B2 (en)

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Publication number Priority date Publication date Assignee Title
EP4435154A4 (en) * 2021-11-18 2026-01-07 Art1 Inc ALUMINUM OR ALUMINUM ALLOY MATERIAL AND MANUFACTURING PROCESSES FOR IT

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Publication number Priority date Publication date Assignee Title
WO2025041542A1 (en) * 2023-08-18 2025-02-27 株式会社Uacj Surface-treated aluminum material, method for producing same, metal housing, and kitchen device
JPWO2025041409A1 (en) * 2023-08-18 2025-02-27
WO2025041408A1 (en) * 2023-08-18 2025-02-27 株式会社Uacj Surface-treated aluminum material, method for producing same, and member for semiconductor production device
JP7833581B1 (en) * 2025-02-06 2026-03-19 株式会社Uacj Method for manufacturing surface-treated aluminum material and method for manufacturing components for plasma processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4435154A4 (en) * 2021-11-18 2026-01-07 Art1 Inc ALUMINUM OR ALUMINUM ALLOY MATERIAL AND MANUFACTURING PROCESSES FOR IT

Also Published As

Publication number Publication date
JPS5757892A (en) 1982-04-07

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