JPS5836808B2 - Image tube manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an image pickup tube, and in particular to a method for manufacturing a signal extraction electrode for an image pickup tube target, and more particularly to a single type image pickup tube such as a three-electrode type, a phase separation type, or a frequency separation type. Signal current (hereinafter referred to as signal)
The present invention relates to a method for manufacturing a signal extraction electrode for extracting .

FIGS. 1A and 1B are a sectional view and a plan view of a main part showing an example of a face plate structure of a conventionally used single-type phase separation type image pickup tube.

In these figures, reference numeral 1 denotes a translucent face plate made of, for example, a transparent glass plate, and metal wires 2a and 2b having an expansion coefficient close to that of the face plate 1 are placed at predetermined positions on the face plate 1.
is arranged through the terminal, forming a part of the signal extraction terminal.

In this case, the metal wires 2a and 2b are arranged on the front and back surfaces of the face plate 1 with their end surfaces exposed.

In addition, optical filters 3 divided into R (red), G (green), and B (blue) are adhered to the surface of the face plate 1, and a thin glass plate 5 is attached to the upper surface of the optical filter 3 with a transparent adhesive 4 interposed therebetween. is located.

A transparent conductive film (hereinafter referred to as NESA film) 6 formed in a stripe shape is deposited on the surface of the thin glass 5 so as to face each of the R, G, and B stripes in the optical filter 3. A photoconductive film 7 is formed on the surface thereof.

Further, the metal wires 2a, 2b are electrically connected to the Nesa membrane 6 via bonding terminals 8a, sb made of metal lumps, and in this case, the bonding terminals 8a, ab are
, a perforation is provided at a predetermined position of the transparent adhesive 4, that is, a position corresponding to the metal wires 2a and 2b, and an In metal lump is pressed into the perforation and embedded, thereby forming the Nesa film 6 and the metal wire 2a.
, 2b are electrically connected to form a signal extraction electrode.

Here, the coupling terminals 8a, sb and the metal wires 2a, 2b
As a processing method for electrically connecting the two, before forming the optical electrical film 7 on the thin glass 5, a photocurable resin is applied and dried on the surface of the thin glass 5 on which the Nesa film 6 has been formed, and a predetermined mask is applied. The metal wires 2a, 2b and the corresponding portions are made opaque by exposure, and the unexposed portions of the photocuring resin are dissolved by treatment with a solvent, and the predetermined positions of the thin glass 5, that is, the coupling terminals 8a, 8b, are exposed. A hole having a predetermined diameter is formed in the portion to be formed, and the position thereof is selectively exposed.

Furthermore, the exposed thin glass 5 and transparent adhesive 4 are selectively removed by chemical treatment, thereby forming perforations deep enough to reach the metal wires 2a and 2b.

Next, after removing the photocurable resin remaining on the surface of the thin glass plate 5, In metal is pressed into the perforated portion with great force and embedded, thereby forming the Nesa film 6 and the metal wires 2a, 2.
b were electrically connected.

However, in the face plate structure having the above configuration, in order to form the signal extraction electrodes on the face plate 1, the metal wires 2a and 2b are buried and penetrated through the transparent face plate 1 using a glass processing method. This greatly increased complexity and significantly reduced productivity.

Furthermore, since a chemical etching method is used to perforate the thin glass plate 5, the workability is significantly reduced.

Furthermore, since the In metal lump is pressed and embedded in the perforated portion of the thin sheet glass 5 with great force, there is a high risk that the thin sheet glass 5 will be damaged during this press-bonding, and the adhesion is poor, making it difficult to maintain airtightness at the perforated portion. reliability was significantly reduced.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method for manufacturing an image pickup tube that eliminates the above-mentioned drawbacks, improves airtightness, simplifies the production process, and reduces production costs.

DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing an image pickup tube according to the present invention will be described in detail below with reference to the drawings.

FIG. 2 is a cross-sectional view of essential parts showing an example of the image pickup tube according to the present invention, particularly its face plate structure equipped with a signal extraction electrode. The same symbols as in FIGS. do.

In the figure, a perforation 1a is formed penetrating through a predetermined position of the face plate 1, and a transparent adhesive 4, a thin glass plate 5, and a Nesa membrane 6 disposed on the upper surface of the face plate 1 are formed in the perforation 1a. A continuous through-hole portion 9 is formed.

Inside the perforations 1a and 9 is a metal solder 10 having a special multi-component composition containing Pb-Sn as a main component and adding Zn, Sb, Al, Ti, Si, Cu, etc.
For example, when Cerasolza (trade name) is filled and solidified, Nesa Membrane 6
A signal extraction electrode 11 is constructed by electrically connecting the end portions of the two ends to each other.

In the signal extraction electrode arranged in this way, the metal solder 10 constituting the signal extraction electrode 11 is completely adhered to the Nesa film 6, and the face plate 1 and the thin glass 5
Since the side walls and the like of the through-holes 1a and 9 are closely filled, vacuum tightness can be maintained reliably, and there has been no accident of outside air leaking.

FIG. 3 a = f is a cross-sectional view showing an embodiment of a method for manufacturing an image pickup tube according to the present invention, particularly a method for manufacturing a signal extraction electrode, and the same symbols as in FIGS. 1 a, b and 2 are used. Since they are the same element, their explanation will be omitted.

In these figures, first, as shown in figure a, perforations are made at predetermined positions on the translucent face plate 1 by a mechanical method using an ultrasonic processing machine or a chemical method using hydrogen fluoride (HF). A portion 1a is formed.

Next, the face plate 1 having the through-holes 1a is placed in a nitrogen or inert gas atmosphere containing 2 to 10% oxygen, and ultrasonic vibrations are applied to the insides of the through-holes 1a as shown in FIG. The molten metal solder 10 is injected while applying the voltage, and is filled and solidified.

In this case, it is also possible to inject and fill the through-hole portion 1a with the metal solder 10 while the face plate 1 is at room temperature. It is desirable to heat the face plate 1 to a temperature near the melting point of 10.

Next, as shown in Figure C, an optical filter 3 having a predetermined shape is attached to a predetermined position of the face plate 1, in which metal solder 10 is filled and solidified in the through-hole portion 1a and a signal extraction terminal is provided, using the photophosphorography method. take shape

Next, as shown in FIG. 4D, a NESA film 6 is formed on one side of the thin glass plate 5, and the other side is made to face the optical filter 3 and is bonded and solidified using a transparent adhesive 4.

Thereafter, as shown in FIG. d, the upper surface of the Nesa membrane 6 corresponding to the through-hole portion 1a filled with the metal solder 10 and solidified is ground using a diamond drill or a super steel drill in the direction indicated by the arrow. , Nesa membrane 6, thin glass 5,
The transparent adhesive 4 is penetrated to form a through hole 9 deep enough to expose the end surface of the metal solder 10, as shown in FIG.

Next, the face plate structure 1 that has gone through the step e above is thoroughly cleaned using a degreaser and a neutral detergent, and the grinding debris that has adhered to the Nesa membrane 6 around the through hole portion 9 is particularly thoroughly cleaned.
Molten metal solder 10 is injected into the through-hole 9 to fill it.

In this case, the molten metal solder 10 is filled at the bottom of the through-hole part 9 until it reaches the exposed end surface of the metal solder 10 that was filled and solidified in the through-hole part 1a in the previous step, and injected until electrical continuity is obtained. At the same time, as shown in the plan view in FIG. 4, the surface of the Nesa membrane 6 is raised so as to be slightly larger than the diameter of the through-hole part 9, and the adhesion area with the Nesa membrane 6 is expanded and solidified. As shown in FIG. 2, the signal extraction electrode 11 of the face plate structure is completed.

According to this manufacturing method, the through-hole portion 1a is mechanically provided at a predetermined position of the face plate 1, and the molten metal solder 10 is filled and solidified into the through-hole portion, so that the working process is extremely simple.

Furthermore, since the perforations in the thin glass 5 are formed by a mechanical method, the working process is extremely simple.

Furthermore, the molten metal solder 10 is injected while applying ultrasonic vibrations to the through-holes 1a of the face plate 1 and the through-holes 9 of the adhesive 4, the thin glass 5, and the Nesa film 6, and is filled and solidified in a vacuum-tight manner. In addition to ensuring reliability, there is no fear of breakage of the thin glass 5.

FIGS. 5a, b, and c are cross-sectional views showing main steps of another embodiment of the method of manufacturing an image pickup tube according to the present invention, particularly the method of manufacturing a signal extraction electrode, and the same symbols as in the previous figure represent the same elements. Therefore, its explanation will be omitted.

In these figures, first, as shown in figure a, a predetermined position on one side of the translucent face plate 1 is thickened by a mechanical method using an ultrasonic processing machine or a chemical method using a hydrogen fluoride solution (HF). A non-penetrating perforation portion 1c having a bottom portion 1b having a length of about 20 to 200 μm is formed.

Next, 2 to 10% of the face plate 1 having this non-penetrating perforated portion 1c is
placed in a nitrogen or inert gas atmosphere containing oxygen,
As shown in FIG. 5B, molten metal solder 10 is injected into the non-penetrating hole 1c while applying ultrasonic vibrations and is filled and solidified.

Next, as shown in FIG. C, a striped optical filter 3 is formed at a predetermined position on the other surface side of the face plate 1 that does not have the non-penetrating perforated portion 1c by FOL-IJ lithography. Proceeding to the step of bonding the thin glass 5 on which the Nesa film 6 is formed as shown in FIG. 3d, the signal extraction electrode 11 of the face plate structure is completed as shown in FIG. 2 in the same manner as described above.

Even in this manufacturing method, the same effects as described above can be obtained.

In the grinding process shown in FIG. 3e, a small drill 12 is used to prevent and remove cutting debris around the through-hole portion 9, as shown in the cross-sectional view of the main part in FIG.
A dust collection container 14 is installed through a vacuum packing 13,
The exhaust port 14a is connected to the high speed rotation exhaust system 15, and the small drill 12 and the high speed rotation exhaust system 15 are connected to the switch 16.
As a result, the pressure inside the dust collection container 14 is rapidly reduced, and the air 18 around the dust collection port (air suction port) 14b at the tip of the diamond drill 1γ is rapidly blown into the thin plate. The cutting waste for drilling the glass 5, the transparent adhesive 4, etc. is stored in the dust collection container 14 at the same time, so that the face plate 1 structure can accomplish the purpose of drilling without being contaminated at all.

In addition, in the phase separation type single type image pickup tube according to the above embodiment, there are two electrodes on the faceplate as index signal and video signal extraction electrodes, and in a three-electrode type single type image pickup tube, there are three electrodes because it is necessary to extract each color video signal. It is necessary to provide a signal extraction electrode in both, but the purpose can be easily achieved by the above-mentioned means.

As explained above, according to the method for manufacturing an image pickup tube according to the present invention, the vacuum tightness of the image pickup tube is ensured, quality and reliability are improved, and productivity is significantly improved and production costs are reduced. Extremely excellent effects can be obtained.

[Brief explanation of the drawing]

FIGS. 1a and 1b are a sectional view and a plan view of essential parts showing an example of the face plate structure of a conventional single-type phase separation type image pickup tube, and FIG. 2 is an image pickup tube manufactured by the manufacturing method of the present invention, particularly its signal extraction electrode A cross-sectional view of main parts showing an example of a face plate structure equipped with
f is a cross-sectional view of the essential parts showing an embodiment of the method for manufacturing an image pickup tube, particularly a signal extraction electrode, according to the present invention, FIG. 4 is a plan view of the essential parts, and FIGS. Particularly, FIG. 6 is a cross-sectional view of the main part process showing another embodiment of the method for manufacturing the signal extraction electrode, and FIG. ... Face plate, 1a ... Through-hole part, 1
b...Bottom part, 1c...Non-penetrating perforation part,
2a, 2b...metal wire, 3...optical filter, 4...adhesive, 5...thin glass, 6...transparent Conductive film (NESA film), γ・
...Photoconductive film, 8a, ab...Coupling terminal, 9...Through hole, 10...Metal solder, 11...Signal Take-out electrode, 12...
...Small drill, 13...Vacuum packing, 14...Dust collection container, 14a...Exhaust port, 14b...Dust collection port, 15 ...High-speed rotation exhaust system, 16...Switch, 1γ...
...Diamond drill, 18...Air.

Claims (1)

[Scope of Claims] 1. A step of forming a first perforation at a predetermined position of the face plate in an image pickup tube having at least a face plate and a transparent conductive film adhered to the inner surface of the face plate; a step of filling and solidifying molten metal solder while applying ultrasonic vibration to the perforation; a step of adhering and forming an optical filter at a predetermined position on the face plate; and a step of applying a glass layer to the optical filter surface on the face plate. a step of closely arranging a transparent conductive film; and a step of grinding the transparent conductive film corresponding to the first perforation in the direction of the first perforation to form a second perforation continuous with the first perforation. and a step of injecting and filling the second hole with metal solder while applying ultrasonic vibration, and electrically connecting it to the solidified metal solder filled into the first hole. manufacturing method. 2. The manufacturing method according to claim 1, wherein the first perforation is a through-hole or a non-through-hole. 3. When injecting molten metal solder into the first perforation, the entire face plate having the perforation is placed in an atmosphere of nitrogen, inert gas, or a mixture thereof containing 2 to 10% oxygen, or the area around the perforation is 2. The method for manufacturing an image pickup tube according to claim 1, wherein nitrogen, an inert gas, or a mixture thereof is sprayed.