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JPS5841983B2 - Contact detection device for tool and workpiece - Google Patents
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JPS5841983B2 - Contact detection device for tool and workpiece - Google Patents

Contact detection device for tool and workpiece

Info

Publication number
JPS5841983B2
JPS5841983B2 JP52115723A JP11572377A JPS5841983B2 JP S5841983 B2 JPS5841983 B2 JP S5841983B2 JP 52115723 A JP52115723 A JP 52115723A JP 11572377 A JP11572377 A JP 11572377A JP S5841983 B2 JPS5841983 B2 JP S5841983B2
Authority
JP
Japan
Prior art keywords
circuit
tool
workpiece
coil
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52115723A
Other languages
Japanese (ja)
Other versions
JPS5449691A (en
Inventor
鏡二 伊藤
邦彦 衛藤
秀夫 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Koki KK
Original Assignee
Toyoda Koki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Koki KK filed Critical Toyoda Koki KK
Priority to JP52115723A priority Critical patent/JPS5841983B2/en
Publication of JPS5449691A publication Critical patent/JPS5449691A/en
Publication of JPS5841983B2 publication Critical patent/JPS5841983B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)

Description

【発明の詳細な説明】 本発明は相対運動を行う導電性の工具とワークとの接触
を検出する装置に関するものであり、その目的は前記2
物体の接触を高精度に安定して検出することである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for detecting contact between a conductive tool and a workpiece that are in relative motion, and its purpose is to
The goal is to detect the contact of an object with high precision and stability.

従来における接触検出装置は、交流電源に接続されたコ
イルを工具の周囲に装着し、工具とワークが接触すると
誘導電流流路が形成されて前記コイルのインピーダンス
の変化により、前記コイルを流れる電流及び電圧に変化
が生じ、この電流変化或いは電圧変化の電気信号を予め
定めた設定信号と比較して接触の有無を検出していた。
In a conventional contact detection device, a coil connected to an AC power source is attached around a tool, and when the tool and workpiece come into contact, an induced current flow path is formed and the impedance of the coil changes, causing the current flowing through the coil and A change occurs in the voltage, and the electrical signal of this current change or voltage change is compared with a predetermined setting signal to detect the presence or absence of contact.

この具体例を第1図及び第2図a ”−cにて説明する
A specific example of this will be explained with reference to FIGS. 1 and 2 a"-c.

第1図は相対運動を行う工具1とワーク2を備えた加工
機10を示し、第2図aは接触検出の回路構成を示して
いる。
FIG. 1 shows a processing machine 10 equipped with a tool 1 and a workpiece 2 that perform relative motion, and FIG. 2a shows a circuit configuration for contact detection.

鉄心11に巻かれたコイル12には抵抗13を介して交
流電源14が接続されており、前記工具1とワーク2と
の接触により誘導電流流路15が形成される。
An AC power source 14 is connected to a coil 12 wound around an iron core 11 via a resistor 13, and an induced current flow path 15 is formed by contact between the tool 1 and the workpiece 2.

16は前記誘導電流流路15の全体の抵抗、17は前記
コイル12と交流電源14との間に接続された検出部で
ある。
16 is the overall resistance of the induced current flow path 15, and 17 is a detection section connected between the coil 12 and the AC power source 14.

第2図すは前記検出部17の詳細を示すブロック線図、
第2図Cは各部信号状態を示しており、図において、2
0は前記抵抗13の両端の電圧イが入力されこの電圧イ
を第2図Cの口のように整流する全波整流器、21は平
滑回路で、これにより前記口はハのように平滑化される
FIG. 2 is a block diagram showing details of the detection unit 17,
Figure 2C shows the signal status of each part, and in the figure, 2
0 is a full-wave rectifier to which the voltage A across the resistor 13 is input and rectifies this voltage A as shown in FIG. Ru.

22はレベル比較器で、前記ハとレベル設定器23から
の設定信号二とが比較され、前記工具1とワーク2とが
接触して前記信号ハが設定信号二を越した際に接触検出
信号ホを出力するようになっている。
Reference numeral 22 denotes a level comparator, which compares the signal C with the setting signal 2 from the level setter 23, and generates a contact detection signal when the tool 1 and the workpiece 2 come into contact and the signal C exceeds the setting signal 2. It is designed to output e.

ところが、電源電圧の変動、温度ドリフト等により接触
を検出する電圧イが大きく変動して、前記設定信号二の
レベル設定が難しく、正確な接触検出が安定的に行えな
いという欠点があった。
However, there has been a drawback that the voltage A for detecting contact fluctuates greatly due to fluctuations in power supply voltage, temperature drift, etc., making it difficult to set the level of the setting signal 2, and making it impossible to stably and accurately detect contact.

また、上記のような誘導コイル式の接触検出装置におい
ては、工具1とワーク2とが接触して誘導電流流路15
に電流が流れると、コイル12に流れる電流が増加する
だけでなく、電流波形の位相も変化するため、この位相
変化も検出した方がより高感度に接触検出が行なえるが
、従来のものでは、この電流波形の位相変化を全く検出
することができず、高感度な接触検出を行うことはでき
なかった。
In addition, in the induction coil type contact detection device as described above, when the tool 1 and the workpiece 2 come into contact with each other, the induced current flow path 15
When a current flows through the coil 12, not only does the current flowing through the coil 12 increase, but the phase of the current waveform also changes.If this phase change is also detected, contact detection can be performed with higher sensitivity. However, it was not possible to detect any phase change in this current waveform, and highly sensitive contact detection was not possible.

本発明はかかる従来の欠点をなくすために、工具とワー
クとが接触しないときの検出波形と同一の実効値と位相
を有する基準波形を交流電源から出力される交流電圧よ
り創成し、前記基準波形と検出波形とζこ実高値もしく
は位相のいずれかの違いが生じたことにより前記2物体
の接触を検出するようlこしたことを特徴とするもので
ある。
In order to eliminate such conventional drawbacks, the present invention creates a reference waveform from an AC voltage output from an AC power source, which has the same effective value and phase as the detected waveform when the tool and workpiece do not contact each other, and The present invention is characterized in that contact between the two objects is detected based on a difference between the detected waveform and either the high value or the phase of the ζ value.

以下、本発明の実施例について説明する。Examples of the present invention will be described below.

第1図には、主軸頭3のスピンドルに装着された工具1
に対して、ワーク2を載置するテーブル5がベッド4上
を進退運動する加工機の例が示されており、主軸頭3の
端面にコイル12が鉄心11に巻かれて装着されている
FIG. 1 shows a tool 1 attached to the spindle of the spindle head 3.
In contrast, an example of a processing machine is shown in which a table 5 on which a workpiece 2 is placed moves back and forth on a bed 4, and a coil 12 is wound around an iron core 11 and attached to the end face of the spindle head 3.

このコイル12は交番電流(こて励磁されるとコイル巻
線の中心部を貫通する環状の閉じた磁束を発生し、この
磁束は工具1の周囲を取巻いているため、工具1の軸線
方向に誘導電流を誘起させる。
This coil 12 generates an alternating current (when the iron is excited, it generates an annular closed magnetic flux that passes through the center of the coil winding, and since this magnetic flux surrounds the tool 1, it is directed in the axial direction of the tool 1. induces an induced current.

工具1とワーク2が接触することにより、導電性材料か
らなる工具1、ワーク2、主軸頭3、ベッド4、テーブ
ル5等を通じて加工機本体10内に閉ループ状の誘導電
流流路15を形成し、また工具1とワーク2が接触して
いなければ閉ループ状の誘導電流流路15は形成されな
い。
When the tool 1 and the workpiece 2 come into contact, a closed-loop induced current flow path 15 is formed in the processing machine body 10 through the tool 1 made of conductive material, the workpiece 2, the spindle head 3, the bed 4, the table 5, etc. Further, unless the tool 1 and the workpiece 2 are in contact with each other, the closed-loop induced current flow path 15 is not formed.

よってこのように工具1とワーク2の接触の有無によっ
て誘導電流流路15が開閉されることによりコイル12
のインピーダンスが変化する。
Therefore, as the induced current flow path 15 is opened and closed depending on the presence or absence of contact between the tool 1 and the workpiece 2, the coil 12
impedance changes.

このインピーダンスの変化によりコイル12を流れる電
流が変化し、これに伴って電圧等の電気信号が変化する
Due to this change in impedance, the current flowing through the coil 12 changes, and electrical signals such as voltage change accordingly.

上記工具とワークの接触によって生じた電気信号の変化
を検出する回路が第3図a 、 b#こ示されており、
第3図a 、 b?こおいて前記第2図a、bと同一構
成、同一機能のものには同じ符号を付しである。
A circuit for detecting a change in the electrical signal caused by the contact between the tool and the workpiece is shown in FIGS. 3a and 3b.
Figure 3 a, b? Components having the same configuration and function as those in FIGS. 2a and 2b are given the same reference numerals.

第3図aにおいて30は基準電圧波形を得る第1回路で
、可変抵抗31と直列に抵抗32を接続し、この直列回
路を交流電源14と並列に接続しており、工具1とワー
ク2とが非接触のとき前記可変抵抗31を調整して抵抗
13の両端の電圧波形VBの実効値に対して前記可変抵
抗31の一端と電圧取出口との間の電圧波形VAの実効
値を等しくさせるようにしている。
In FIG. 3a, 30 is a first circuit for obtaining a reference voltage waveform, in which a resistor 32 is connected in series with a variable resistor 31, and this series circuit is connected in parallel with an AC power source 14, and the tool 1 and workpiece 2 are When the variable resistor 31 is in a non-contact state, the variable resistor 31 is adjusted to make the effective value of the voltage waveform VA between one end of the variable resistor 31 and the voltage outlet equal to the effective value of the voltage waveform VB across the resistor 13. That's what I do.

尚前記可変抵抗31を前記コイル12と同じ仕様のコイ
ルに代えても良い。
Note that the variable resistor 31 may be replaced with a coil having the same specifications as the coil 12.

このようにした場合には第1回路30から出力される交
流波形の位相が、工具1とワーク2とが接触しない時に
電流検出用の抵抗13の両端に発生する電圧波形の位相
とほぼ一致するため、後述する第2回路34は不要とな
る。
In this case, the phase of the AC waveform output from the first circuit 30 almost matches the phase of the voltage waveform generated across the current detection resistor 13 when the tool 1 and the workpiece 2 are not in contact. Therefore, the second circuit 34 described later becomes unnecessary.

第3図すは検出部及び基準電圧を得る第2回路のブロッ
ク線図、第3図Cはその信号状態を示す。
FIG. 3 is a block diagram of the detection section and the second circuit for obtaining the reference voltage, and FIG. 3C shows the signal state thereof.

33はノイズフィルタ、34は基準電圧波形を得る第2
回路で、この回路34には可変抵抗35が接続されてお
り、工具1とワーク2とが非接触のとき前記可変抵抗3
5を調整してコイル12を含むため位相遅れを生じてい
る前記電圧波形■Bに対して前記電圧波形VAの位相を
遅らせ両者の位相を合致させるようにしている。
33 is a noise filter, 34 is a second filter for obtaining a reference voltage waveform.
A variable resistor 35 is connected to this circuit 34, and when the tool 1 and the workpiece 2 are not in contact with each other, the variable resistor 3
5 is adjusted to delay the phase of the voltage waveform VA with respect to the voltage waveform B, which has a phase lag because it includes the coil 12, so that their phases match.

前記電圧波形VBと遅相用の第2回路34を通過後の電
圧波形VA1とは比較器36に入力さへこの比較器36
の出力VB−VA、はピーク検出回路3γへ入力される
The voltage waveform VB and the voltage waveform VA1 after passing through the second circuit 34 for slow phase are input to a comparator 36.
The output VB-VA is input to the peak detection circuit 3γ.

このピーク検出回路37は交流電圧波形の最高値を検出
ホールドするものである。
This peak detection circuit 37 detects and holds the highest value of the AC voltage waveform.

22はレベル比較器で、前記ピーク検出回路31からの
入力■Xとレベル設定器23からの設定信号二とが比較
され、前記工具1とワーク2とが接触して前記ピーク検
出回路37の出力vXが設定信号二を越した際に接触検
出信号vZを出力するようにしている。
22 is a level comparator, which compares the input X from the peak detection circuit 31 with the setting signal 2 from the level setter 23, and when the tool 1 and the workpiece 2 come into contact, the output of the peak detection circuit 37 is A contact detection signal vZ is output when vX exceeds a set signal 2.

次に上記実施例の作動について説明する。Next, the operation of the above embodiment will be explained.

交流電源14により抵抗13cこは検出電圧波形VBが
発生する。
The AC power supply 14 generates a detection voltage waveform VB across the resistor 13c.

工具1とワーク2とが非接触のとき可変抵抗31を調整
して前記検出電圧波形VBの実効値と等しい電圧波形V
A且つ可変抵抗35を調整して前記検出電圧波形VBと
同位相の電圧波形■A1を形成する。
When the tool 1 and the workpiece 2 are not in contact, the variable resistor 31 is adjusted to obtain a voltage waveform V equal to the effective value of the detected voltage waveform VB.
A and the variable resistor 35 are adjusted to form a voltage waveform A1 having the same phase as the detected voltage waveform VB.

このようにして前記検出電圧波形VBと同じ電圧(実効
値)且つ同位相の基準電圧波形vA1を形成、準備する
In this way, a reference voltage waveform vA1 having the same voltage (effective value) and phase as the detected voltage waveform VB is formed and prepared.

工具1とワーク2とが接触しない場合にはVBとVAl
は同じ電圧波形となり比較器36からの出力はO■とな
り出力は出ない。
When tool 1 and workpiece 2 do not contact, VB and VAl
have the same voltage waveform and the output from the comparator 36 becomes O■ and no output is produced.

工具1とワーク2とが接触した場合には両者間の抵抗は
小さくなり、誘導電流流路15に大きな誘導電流が流れ
、これにより前記コイル12に流れる電流が増加すると
同時に、この時に増加するのは有効電流分のみであるの
で電流の位相も変化する。
When the tool 1 and the workpiece 2 come into contact, the resistance between them becomes small, and a large induced current flows in the induced current flow path 15. This causes the current flowing in the coil 12 to increase, and at the same time, the current that increases at this time increases. Since is only the effective current, the phase of the current also changes.

従って前記検出電圧波形VBは急激に増大するととも(
こその位相も変化し、その結果、検出電圧波形VBと基
準電圧波形VA1との間に実効値と位相の両方の差が生
じ、その差に応じた出力VB−VA1が比較器36から
出力される。
Therefore, the detected voltage waveform VB increases rapidly and (
The phase also changes, and as a result, a difference occurs in both the effective value and the phase between the detected voltage waveform VB and the reference voltage waveform VA1, and an output VB-VA1 corresponding to the difference is output from the comparator 36. Ru.

そして、その比較器36からの出力がピーク検出回路3
70こ入力され、その回路37からの出力VXが設定信
号二を上回ったことがレベル比較器22Gこより判定さ
れ、接触信号■Zが出力される。
The output from the comparator 36 is output from the peak detection circuit 3.
70 is input, and the level comparator 22G determines that the output VX from the circuit 37 exceeds the setting signal 2, and the contact signal 2Z is output.

上記したように本発明においては、接触検出用のコイル
とこれを励磁する交流電源との間(こ接触検出用のコイ
ルに流れる交番電流を検出してこれに応じた交流波形を
出力する検出回路を設けるとともに、前記交流電源と並
列して交流電源から出力される交流電圧に対してレベル
調整と位相シフトを行って、工具がワークに接触しない
状態で検出回路から出力される交流波形と同じ実効値で
かつ位相も同一の基準波形を出力する基準波形発生回路
を接続し、この基準波形発生回路から出力される基準波
形と検出波形とを比較して、両者の間に実効値もしくは
位相の差が生じたことを判別する判別回路とを設けた構
成であるので、電源電圧の変動、温度ドリフト等に影響
を受けることなく安定した接触検出が行なえるだけでな
く、工具がワークに接触した際に生じる励磁電流の位相
変化も検出できるので、レベル変化だけで検出するもの
に比べ、検出感度を大幅に向上できる利点がある。
As described above, in the present invention, between the contact detection coil and the AC power supply that excites it (a detection circuit that detects the alternating current flowing through the contact detection coil and outputs an AC waveform in accordance with the alternating current flowing through the contact detection coil) At the same time, level adjustment and phase shift are performed on the AC voltage output from the AC power supply in parallel with the AC power supply, so that the same effective AC waveform as the AC waveform output from the detection circuit when the tool is not in contact with the workpiece is obtained. A reference waveform generation circuit that outputs a reference waveform with the same value and phase is connected, and the reference waveform output from this reference waveform generation circuit and the detected waveform are compared to determine the difference in effective value or phase between the two. Since the configuration is equipped with a discrimination circuit that determines when a Since it is also possible to detect phase changes in the excitation current that occur in the current, it has the advantage of greatly improving detection sensitivity compared to systems that detect only level changes.

また、本発明においては、工具がワークに接触しない状
態では加工機上に短絡電流が流れないため、消費電力を
少なくできる上、案内面に悪影響を与える恐れがない利
点もある。
Further, in the present invention, since no short-circuit current flows on the processing machine when the tool does not contact the workpiece, there is an advantage that power consumption can be reduced and there is no risk of adversely affecting the guide surface.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は接触検出を行う加工機を示す図、第2図は従来
例を示し、そのaは接触検出の回路構成を、bは検出部
のブロック線図、Cは信号状態を示す図、第3図は本発
明の一実施例を示し、そのaは接触検出の回路構成を、
bは検出部のブロック線図、Cは信号状態を示す図であ
る。 1・・・・・・工具、2・・・・・・ワーク、10・・
・・・・加工機、12・・・・・・コイル、14・・・
・・・交流電源、22・・・・・・レベル比較器、30
・・・・・・基準波形を得る第1回路、34・・・・・
・基準波形を得る第2回路、36・・・・・・比較器、
VAl・・・・・・基準電圧波形、VB・・・・・・検
出電圧波形。
Fig. 1 shows a processing machine that performs contact detection, Fig. 2 shows a conventional example, in which a shows the circuit configuration of contact detection, b shows a block diagram of the detection section, and C shows the signal state. FIG. 3 shows an embodiment of the present invention, in which a shows the circuit configuration for contact detection;
b is a block diagram of the detection unit, and C is a diagram showing signal states. 1...Tool, 2...Work, 10...
... Processing machine, 12 ... Coil, 14 ...
... AC power supply, 22 ... Level comparator, 30
...First circuit for obtaining a reference waveform, 34...
・Second circuit for obtaining the reference waveform, 36... comparator,
VAl...Reference voltage waveform, VB...Detection voltage waveform.

Claims (1)

【特許請求の範囲】 1 加工機上に相対的に接近したり離間したりする工具
及びワークを備え、前記工具に近接して主軸軸線を取囲
むように設けたコイルに交流電源を接続して工具とワー
クが接触した場合に前記加工機を介して誘導電流が流れ
るようにし、前記コイルと交流電源との間に前記コイル
に流れる交流電流を検出してこの交流電流に応じた検出
波形を出力する検出回路を設け、前記交流電源の出力波
形に対してレベル調整と位相シフトを行って前記工具と
ワークが接触しないときの検出波形と同じ実効値と位相
を有する基準波形を発生する基準波形発生回路を前記交
流電源に対して前記検出回路と前記コイルとによって形
成される直列回路と並列に接続し、且つ前記検出回路お
よび基準波形発生回路の出力を比較して前記検出波形と
基準波形との間に実効値もしくは位相の差異が生じたこ
とにより前記工具とワークの接触を判別する比較回路を
設けたことを特徴とする工具と−クの接触検出装置。 2 前記基準波形発生回路は、前記交流電源に対して前
記検出回路と前記コイルとによって形成される直列回路
と並列に接続された直列接続状態の一対の抵抗から成る
分圧回路と、この分圧回路から出力される交流信号の位
相をシフトする位相シフト回路によって構成されること
を特徴とする特許請求の範囲第1項記載の工具とワーク
の接触検出装置。 3 前記基準波形発生回路は、前記交流電源に対して前
記検出回路と前記コイルとによって形成される直列回路
と並列に接続された抵抗とコイルとより成る直列回路に
よって構成されることを特徴とする特許請求の範囲第1
項記載の工具とワークの接触検出装置。
[Scope of Claims] 1. A processing machine is provided with a tool and a workpiece that are relatively close to each other or separated from each other, and an AC power source is connected to a coil that is provided close to the tool and surrounds the spindle axis. An induced current is caused to flow through the processing machine when a tool and a workpiece come into contact, and an alternating current flowing through the coil is detected between the coil and an alternating current power source, and a detected waveform corresponding to this alternating current is output. A reference waveform generation unit includes a detection circuit that performs level adjustment and phase shift on the output waveform of the AC power source to generate a reference waveform having the same effective value and phase as the detected waveform when the tool and workpiece are not in contact. A circuit is connected to the AC power source in parallel with a series circuit formed by the detection circuit and the coil, and the outputs of the detection circuit and the reference waveform generation circuit are compared to determine whether the detected waveform and the reference waveform are the same. A contact detection device for a tool and a workpiece, characterized in that a comparison circuit is provided for determining contact between the tool and the workpiece based on a difference in effective value or phase between the two. 2. The reference waveform generation circuit includes a voltage dividing circuit including a pair of resistors connected in series connected in parallel to a series circuit formed by the detection circuit and the coil with respect to the AC power source, and a voltage dividing circuit including a pair of resistors connected in series. 2. The tool-work contact detection device according to claim 1, comprising a phase shift circuit that shifts the phase of an alternating current signal output from the circuit. 3. The reference waveform generation circuit is characterized in that it is constituted by a series circuit formed by the detection circuit and the coil with respect to the AC power source, and a series circuit comprising a resistor and a coil connected in parallel. Claim 1
Contact detection device for tool and workpiece as described in Section 2.
JP52115723A 1977-09-27 1977-09-27 Contact detection device for tool and workpiece Expired JPS5841983B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52115723A JPS5841983B2 (en) 1977-09-27 1977-09-27 Contact detection device for tool and workpiece

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52115723A JPS5841983B2 (en) 1977-09-27 1977-09-27 Contact detection device for tool and workpiece

Publications (2)

Publication Number Publication Date
JPS5449691A JPS5449691A (en) 1979-04-19
JPS5841983B2 true JPS5841983B2 (en) 1983-09-16

Family

ID=14669522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52115723A Expired JPS5841983B2 (en) 1977-09-27 1977-09-27 Contact detection device for tool and workpiece

Country Status (1)

Country Link
JP (1) JPS5841983B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174851A (en) * 1987-01-09 1988-07-19 Hitachi Metals Ltd Detecting device for contact between tool and work
JP7034847B2 (en) * 2018-06-21 2022-03-14 株式会社ニューフレアテクノロジー Dry cleaning equipment and its dry cleaning method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039107B2 (en) * 1971-09-23 1975-12-15
JPS5139715A (en) * 1974-10-02 1976-04-02 Tokyo Shibaura Electric Co KONKURIITOPAIRUSEIZONO JIDOKASOCHI

Also Published As

Publication number Publication date
JPS5449691A (en) 1979-04-19

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