JPS5847663B2 - Gas detection element with selectivity of detection gas - Google Patents
Gas detection element with selectivity of detection gasInfo
- Publication number
- JPS5847663B2 JPS5847663B2 JP50055109A JP5510975A JPS5847663B2 JP S5847663 B2 JPS5847663 B2 JP S5847663B2 JP 50055109 A JP50055109 A JP 50055109A JP 5510975 A JP5510975 A JP 5510975A JP S5847663 B2 JPS5847663 B2 JP S5847663B2
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- JP
- Japan
- Prior art keywords
- gas
- filter
- detection
- gas sensing
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
本発明は検知ガスの選択性を有するガス検知素子に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas detection element having selectivity of a detection gas.
金属酸化物半導体の抵抗値が雰囲気気体により変化する
ことは広く知られ、特許第568957号等により種々
の用途が提案されている。It is widely known that the resistance value of metal oxide semiconductors changes depending on the atmospheric gas, and various applications have been proposed in Japanese Patent No. 568,957 and the like.
一般にこの種金属酸化物半導体を用いたガス検知素子は
、各種ガスに対して無差別に感応するものであったため
、これを警報器その他のガス検出装置に組込んで実際に
使用する場合、その用途に応じて検出すべきガスの種類
は当然ある程度限定されるべきであるにもかかわらず、
それ以外のガスにも感応してしまって装置を誤動作させ
る虞れがあった。Generally, gas detection elements using metal oxide semiconductors of this kind are sensitive to various gases indiscriminately, so when they are actually used by incorporating them into alarms or other gas detection devices, Although the type of gas to be detected should naturally be limited to some extent depending on the application,
There was a risk that the device would become sensitive to other gases and cause the device to malfunction.
すなわち、例えば一般家庭用のプロパンガスのガス洩れ
などを検出する装置に上記素子が用いられた場合、かか
る装置は、本来、家庭用プロパンガス燃料の戊分てある
プロパンやブタン等の系統のガスが雰囲気中に含まれた
時だけ動作すべきであるにもかかわらず、一般家庭に存
する酒類等から発生するアルコールや調理中に生ずる煙
などの検出を要しないガスにまで上記素子が感応し、こ
れに起因して装置が本来の目的と違った誤動作を起して
しまうことが往々にしてあった。In other words, if the above-mentioned element is used in a device that detects gas leaks from propane gas for general household use, such a device would originally detect gases such as propane and butane, which are classified as household propane gas fuel. Although the device should only operate when gas is included in the atmosphere, the device is sensitive to gases that do not require detection, such as alcohol generated from alcoholic beverages in ordinary households and smoke generated during cooking. This often causes the device to malfunction in a way that is not intended for its intended purpose.
従来、この問題の対策として、特開昭49−12959
6号公報に、吸着活性剤からなるフィルターまたはパラ
ジウム石綿等の燃焼式フィルターを用いて、ガス感知部
に送られるガスを弁別する方法が提案され、かつ、この
方法に用いるフィルター付き素子が示されている。Conventionally, as a countermeasure to this problem, Japanese Patent Application Laid-Open No. 49-12959
Publication No. 6 proposes a method of discriminating gas sent to a gas sensing section using a filter made of an adsorption activator or a combustion filter made of palladium asbestos, and also discloses an element with a filter used in this method. ing.
この公報に示された素子は、第5図のように、台座22
上に3本のピン23で支持された金属酸化物半導体ガス
感知部21と、該ガス感知部21に接触しないように一
定間隔をおいてガス感知部21を囲繞するパラジウム石
綿24と、モレキュラーシーブ吸着剤25、金網26、
金属製キャップ27を備えている。The device shown in this publication has a pedestal 22 as shown in FIG.
A metal oxide semiconductor gas sensing section 21 supported by three pins 23 on top, palladium asbestos 24 surrounding the gas sensing section 21 at a constant interval so as not to come into contact with the gas sensing section 21, and a molecular sieve. adsorbent 25, wire mesh 26,
A metal cap 27 is provided.
しかし、この構造によると、フィルター(パラジウム石
綿24)がガス感知部21から離間しているため、ガス
感知部21を支持する台座22とは別にフィルターを所
定形状に保持する手段が必要となって製作が面倒である
。However, according to this structure, since the filter (palladium asbestos 24) is separated from the gas sensing section 21, a means for holding the filter in a predetermined shape is required in addition to the pedestal 22 that supports the gas sensing section 21. Manufacturing is troublesome.
また、性能上も、ガス感知部21にふれるガス以外のガ
ス(単にガス感知部21とフィルターとの間の空間を通
過するガス)まで弁別されてフィルターに余分な負担を
かける欠点がある。In addition, in terms of performance, there is a drawback that gases other than the gas that comes into contact with the gas sensing section 21 (gas that simply passes through the space between the gas sensing section 21 and the filter) are discriminated, which places an extra burden on the filter.
さらに、ガス感知部21とフィルターとの間の空間によ
って熱伝導がさまたげられるため、単にガス感知部21
が加熱されることによる放射熱でフィルターが加熱され
るだけでは、フィルターにパラジウム石綿24等の燃焼
式フィルターを用いた場合に、実際上、触媒の活性化に
適した温度までフィルターが加熱され難く、ガス選択検
出機能が充分に発揮されないという大きな問題があった
。Furthermore, since heat conduction is hindered by the space between the gas sensing section 21 and the filter, the gas sensing section 21 simply
If the filter is simply heated by the radiant heat generated by the heating, it is actually difficult to heat the filter to a temperature suitable for activating the catalyst when a combustion type filter such as palladium asbestos 24 is used as the filter. However, there was a major problem in that the gas selection detection function was not fully demonstrated.
なお、先願の特願昭49−24777号(特開昭50−
120298号)に、ガス検知用半導体と一体に酸化触
媒フィルターを設けたものが示されているが、これは、
フィルターにガス検知用半導体と同種の素材を用いてい
たため、フィルター素材の選択の自由度に乏しく、安価
で酸化活性にすぐれた材料を選ぶことが難しいという欠
点があった。In addition, the earlier patent application No. 1983-24777
No. 120298) shows a device in which an oxidation catalyst filter is integrated with a gas detection semiconductor;
Since the filter used the same type of material as the gas detection semiconductor, there was little freedom in selecting the filter material, and it was difficult to choose a material that was inexpensive and had excellent oxidation activity.
この先願の発明は、原子価制御理論等により異種の金属
酸化物を一体化すると両者の間の固相反応で変質を生じ
るという推論に基づき、フィルターにガス検知用半導体
と同種の素材を用いることとしたものである。The invention of this earlier application is based on the inference that when different types of metal oxides are integrated based on valence control theory, deterioration occurs due to a solid phase reaction between the two, and the filter uses the same type of material as the semiconductor for gas detection. That is.
つまり、従来では上記推論にとらわれて、金属酸化物半
導体ガス検知部に一体的に酸化触媒フィルターを用いる
場合はフィルターとガス感知部とを同種素材とし、また
、ガス感知部とフィルターとを異種の素材で形成する場
合は両者を離間させることが常識となっており、このた
め、上記のような各従来技術の欠点を解消することがで
きなかった。In other words, conventionally, based on the above reasoning, when an oxidation catalyst filter is used integrally with a metal oxide semiconductor gas detection section, the filter and the gas sensing section are made of the same material, and the gas sensing section and the filter are made of different materials. It is common knowledge that when they are made of raw materials, they are separated from each other, and for this reason, the above-mentioned drawbacks of each of the prior art techniques have not been able to be overcome.
しかし、当発明者は、金属酸化物半導体ガス感知部に異
種の金属酸化物触媒を一体的に被覆しても、従来におい
て推測されていたほどの顕著な固相反応を生じず、少な
くともガス感知部の内部にまで影響を及ぼさないことを
実験的に見出した。However, the present inventor has found that even if the metal oxide semiconductor gas sensing portion is integrally coated with different metal oxide catalysts, no significant solid phase reaction as previously assumed occurs, and at least the gas sensing portion is It was experimentally discovered that this effect does not affect the inside of the body.
本発明はこのような事実に基づき、ガス感知部としての
金属酸化物半導体とフィルターとによって特定種類のガ
スを選択的に検出し得るようにすると共に、とくに、フ
ィルターに安価ですぐれた酸化活性を有する遷移金属酸
化物触媒を用い、かつ、このフィルターとガス感知部と
を一体化することにより製作を容易にし、性能も向上し
、しかも、固相反応等による悪影響を生じることのない
ガス検知素子を提供するものである。Based on these facts, the present invention makes it possible to selectively detect a specific type of gas by using a metal oxide semiconductor as a gas sensing part and a filter, and in particular, provides the filter with inexpensive and excellent oxidation activity. A gas sensing element that uses a transition metal oxide catalyst with a transition metal oxide catalyst and integrates this filter and a gas sensing part, which facilitates production and improves performance, and which does not cause adverse effects due to solid phase reactions, etc. It provides:
すなわち、本発明は、ガスにより抵抗値が変化する金属
酸化物半導体に一対の電極を接続したガス検知素子本体
と、上記半導体とは異種の遷移金属酸化物触媒を用いた
ガス選択透過性フィルターとを備え、該フィルターを、
上記電極間の電流経路より外方に位置させて実質的に電
流経路と分離させた形で、ガス検知素子本体に直接に被
覆し、かつ、ガス検知素子とフィルターとを加熱するヒ
ーターを設けたことを特徴とする。That is, the present invention includes a gas detection element main body in which a pair of electrodes are connected to a metal oxide semiconductor whose resistance value changes depending on gas, and a gas selective permeability filter using a transition metal oxide catalyst different from the semiconductor. and the filter,
A heater is provided which is located outward from the current path between the electrodes and is substantially separated from the current path, and which directly covers the gas sensing element body and heats the gas sensing element and the filter. It is characterized by
本発明において用いられるガス選択透過性フィルターの
素材としては、Nip,Co203,Cod,ZnO,
Fe203,V205,Ag20,CuO等の各種遷移
金属酸化触媒や、これらの遷移金属酸化物にPd,Pt
,Ag,Rh,Ir,Ru等の貴金属の一員乃至複数員
を添加したものを採用し得る。Materials for the gas selective permeability filter used in the present invention include Nip, Co203, Cod, ZnO,
Various transition metal oxidation catalysts such as Fe203, V205, Ag20, CuO, etc., and Pd, Pt in these transition metal oxides
, Ag, Rh, Ir, Ru, or the like may be added.
かかるフィルターは、その酸化触媒としての能力に応じ
、特定種類の可燃性ガスに対しては大気中の02でもっ
て酸化して不活性ガスに変えることによりその可燃性ガ
スとしての透過を阻止し、酸化されにくいガスだけを選
択的に透過させるものであり、この場合、フィルターを
選択的に透過するガスの種類は、フィルター素材の種類
やフィルターの加熱温度などの条件によって定まるフィ
ルターの酸化能力に依存する。Depending on its ability as an oxidation catalyst, such a filter oxidizes a specific type of flammable gas with 02 in the atmosphere and converts it into an inert gas, thereby preventing its passage as a combustible gas. It selectively allows only gases that are difficult to oxidize to pass through. In this case, the type of gas that selectively passes through the filter depends on the oxidizing ability of the filter, which is determined by conditions such as the type of filter material and the heating temperature of the filter. do.
このようなフィルターによるガスの選択的透過性を明ら
かにするため、先ず第1図に、酸化触媒を用いたフィル
ターの酸化能力と各種ガスに対する透過性との関係を示
すグラフを掲げておく。In order to clarify the selective gas permeability of such a filter, FIG. 1 is a graph showing the relationship between the oxidation ability of a filter using an oxidation catalyst and the permeability to various gases.
同グラフにおいて、縦軸はガス透過率を、横軸はフィル
ターの酸化能力即ち酸化触媒としての活性度を表わして
おり、同グラフ中の曲線A〜Eはそれぞれ、AがCOガ
ス、B fJ5H2ガス、Cがエタノール、Dがイソブ
タン、Eがメタンに対するフィルターの酸化能力と透過
率との関係を示す。In the same graph, the vertical axis represents the gas permeability, and the horizontal axis represents the oxidation ability of the filter, that is, the activity as an oxidation catalyst. Curves A to E in the same graph represent CO gas and B fJ5H2 gas, respectively. , C shows the relationship between the filter's oxidizing ability and transmittance for ethanol, D for isobutane, and E for methane.
同グラフに示す如く、これらの各ガスの中では、COガ
スが最も容易に酸化され、次いでH2ガス、エタノール
、イソブタン、メタンという順で酸化反応性が低くなる
ので、フィルターの酸化能力に応じてこれに阻止される
ガスとこれを透過するガスの種類が定まる。As shown in the same graph, among these gases, CO gas is most easily oxidized, followed by H2 gas, ethanol, isobutane, and methane, which have lower oxidation reactivity in that order. This determines the type of gas that is blocked and the type of gas that passes through it.
つまり、フィルターの酸化能力が、例えば同グラフ中に
符号aで示した程度の低いものであれば、COガスは酸
化されてCO2に変わるのでCOガスとしての透過は殆
んど阻止され、他のガスは殆んどそのまま透過される。In other words, if the oxidation ability of the filter is low, for example as indicated by the symbol a in the same graph, CO gas will be oxidized and converted to CO2, so the permeation as CO gas will be almost completely blocked, and other The gas passes through almost unchanged.
またこれよりも少し高い符号bで示した程度のものであ
ればCOガスと共にこの次に酸化され易いH2ガスがH
20に変って透過が阻止され、これら以外のガスが選択
的に透過される。In addition, if it is a level indicated by a slightly higher sign b than this, H2 gas, which is the next most easily oxidized together with CO gas, is H2 gas.
20, the permeation is blocked, and gases other than these are selectively permeated.
さらに符号Cで示した程度ではアルコールをも酸化して
イソブタンとメタンを透過し、符号dで示した程度では
メタンのみを選択的に透過することとなるわけである。Furthermore, at the level indicated by symbol C, alcohol is also oxidized and isobutane and methane are permeated, and at the degree indicated by symbol d, only methane is selectively transmitted.
また、ガス感知部の素材としては、各種の金属酸化物半
導体を採用し得るが、特にSnO2やIn203を用い
れば高感度なものが得られて好ましい。In addition, various metal oxide semiconductors can be used as the material for the gas sensing portion, but it is particularly preferable to use SnO2 or In203 because high sensitivity can be obtained.
このようなフィルターとガス感知部とを一体化して形戒
したものが本発明の素子であり、以下、本発明の実施例
を図面に依拠して詳説する。An element of the present invention is an integrated form of such a filter and a gas sensing section, and embodiments of the present invention will be described in detail below with reference to the drawings.
第2図において、1はセラミック或いはガラス等の絶縁
性材料にて形或した円筒状の容器で、その周壁からガス
透過することがないように適当な密度並びに厚みを持た
せ、両端を開口させて形戒してある。In Fig. 2, 1 is a cylindrical container made of an insulating material such as ceramic or glass, which has an appropriate density and thickness to prevent gas from permeating through its peripheral wall, and is open at both ends. There is a formal precept.
該容器1の内部中央部には、還元性ガスを吸着すること
によって抵抗値が変わる金属酸化物半導体を主材料とす
るガス感知部2を充填してある。The center of the interior of the container 1 is filled with a gas sensing section 2 whose main material is a metal oxide semiconductor whose resistance value changes by adsorbing a reducing gas.
該感知部2の両側端部には、ALI I P t 2P
d等の貴金属を用いた通気性を有する程度のポーラスな
電極3,3を装備している。ALI I P t 2P is provided at both ends of the sensing section 2.
It is equipped with porous electrodes 3, 3 made of a noble metal such as d, etc., which are sufficiently porous to have air permeability.
この電極3,3は、例えばきめの粗いアルミナやガラス
等の戊型物に水に溶かしたAu,Pt,Pd等の塩化物
を含浸させて焼付け、あるいは、金ペーストにアルミナ
粉やガラス粉を適当な配合で混入させて焼上げるなどの
方法で或形される。The electrodes 3, 3 are made by impregnating a rough-textured alumina or glass material with chloride such as Au, Pt, or Pd dissolved in water and baking it, or by baking alumina powder or glass powder into gold paste. It is shaped into a certain shape by mixing it with an appropriate mixture and baking it.
上記ガス感知部2と電極3,3とで構戒されるガス検知
素子本体に対し、電極3,3間の電流経路より外方に遷
移金属酸化物触媒を用いたフィルター4,4が一体的に
被覆され、当実施例では、容器1内における両電極3,
3の外側にフィルター4,4が充填されている。Filters 4, 4 using a transition metal oxide catalyst are integrated with the gas sensing element main body, which is composed of the gas sensing section 2 and electrodes 3, 3, outward from the current path between the electrodes 3, 3. In this embodiment, both electrodes 3,
Filters 4, 4 are filled on the outside of 3.
電極3,3に接続したリード線3a ,3aはフィルタ
ー4,4の外部に導出されている。Lead wires 3a, 3a connected to the electrodes 3, 3 are led out to the outside of the filters 4, 4.
また、容器1の外周面にはコイル状のヒーター5が設け
られ、これによってガス感知部2およびフィルター4,
4が適当な温度に加熱されている。Further, a coil-shaped heater 5 is provided on the outer peripheral surface of the container 1, which allows the gas sensing section 2 and the filter 4,
4 is heated to an appropriate temperature.
なお、図例ではヒーター5を容器1の外周面全体に一定
間隔で巻きつけてガス感知部2とフィルター4,4とを
均一加熱するようにしているが、容器外周面の中央部と
両端部とでヒーターのコイル間隔を変えたり、容器外周
面中央部または両端部に部分的にヒーターを装備するな
どにより、ガス感知部2とフィルター4,4とで温度条
件を異ならせることもできる。In the illustrated example, the heater 5 is wound around the entire outer circumferential surface of the container 1 at regular intervals to uniformly heat the gas sensing part 2 and the filters 4, 4, but the heater 5 is wound around the entire outer circumferential surface of the container 1 at regular intervals to uniformly heat the gas sensing part 2 and the filters 4, 4. It is also possible to make the temperature conditions different between the gas sensing section 2 and the filters 4, 4 by changing the spacing between the heater coils, or by partially equipping the center or both ends of the outer peripheral surface of the container with a heater.
第3図は本発明の素子の別の実施例を示す。FIG. 3 shows another embodiment of the device of the invention.
この実施例では、円筒状の容器11の中軸部にセラミッ
クやガラス等の絶縁性素材にて形威した棒状の芯体16
が挿通され、この芯体16の周面に中央部分だけを残し
た状態でAu,Pt,Pd等の貴金属を素材とする電極
13,13が被着され、この芯体16と上記容器11の
周壁との間の空間の中央部に、上記両電極13,13に
跨がってガス感知部12が充填され、その両側にフィル
ター14,14が充填されている。In this embodiment, a rod-shaped core body 16 formed of an insulating material such as ceramic or glass is attached to the center axis of the cylindrical container 11.
is inserted, and electrodes 13, 13 made of noble metals such as Au, Pt, Pd, etc. are adhered to the circumferential surface of the core body 16, leaving only the central part, and the core body 16 and the container 11 are connected to each other. A gas sensing section 12 is filled in the center of the space between the gas sensing section 12 and the surrounding wall, spanning both the electrodes 13, 13, and filters 14, 14 are filled on both sides thereof.
また、上記容器1の外周面には膜状のヒーター15が塗
着されている。Further, a film-like heater 15 is coated on the outer peripheral surface of the container 1.
これは前述せる如きコイル状のヒーターであってもよい
が、膜ヒーターを用いれば高抵抗のものが得られるので
、商用電源をトランスを用いずにそのまま使用できる利
点がある。This may be a coil-shaped heater as described above, but if a membrane heater is used, a high resistance one can be obtained, so there is an advantage that a commercial power source can be used as is without using a transformer.
このような素子は、例えば、先ず上記芯体16に電極1
3,13を印刷等によって被着し、次に上記ガス感知部
12の素材をやはり印刷等の手段で所定の厚みを持たせ
た状態で塗着して焼或し、さらにその両側にフィルター
14.14をコーティングし、然る後にこれらを上記容
器1に圧大して最終的な焼上げを行なうというような方
法によって戒形される。In such an element, for example, an electrode 1 is first attached to the core body 16.
3 and 13 by printing or the like, then the material of the gas sensing part 12 is applied to a predetermined thickness by printing or other means and then baked, and then the filters 14 are attached on both sides. .14 and then compressed into the container 1 for final baking.
この構造による場合、上記両電極13,13が芯体16
に担持された状態で素子の外部に導出しているので、こ
の部分を止め付け並びにリード用のピン17.17によ
り挾持させておくようにすれば回路への組込みに便利で
ある。In this structure, both the electrodes 13, 13 are connected to the core 16.
Since it is led out of the element in a state where it is carried by a holder, it is convenient to incorporate it into a circuit if this part is clamped by pins 17 and 17 for leads.
第4図はさらに別の実施例を示し、これは第3図に示す
如き構造のものにおいて、芯体16′をパイプ状にし、
その中にコイルヒーター15′を挿入したものであり、
その他の構造や戊形手段は、上記第3図に示す実施例の
場合とほぼ同様である。FIG. 4 shows yet another embodiment, in which the core body 16' is shaped like a pipe in the structure shown in FIG.
A coil heater 15' is inserted into it.
Other structures and cutting means are substantially the same as those in the embodiment shown in FIG. 3 above.
これら第3図および第4図の各実施例でも、フィルター
14,14がガス感知部12の両側に被覆されてガス検
知素子本体と一体化し、かつ、フィルター14.14が
電極13,13間の電流経路よりも外方に位置して実質
的に電流経路と分離した構造となっている。In each of the embodiments shown in FIG. 3 and FIG. It has a structure located outward from the current path and substantially separated from the current path.
このように構威された素子によれば、用途に応じて特定
種類のガスを選択的に検出し得る。According to the element configured in this way, a specific type of gas can be selectively detected depending on the application.
すなわち、フィルター4,4または14,14により、
その酸化能力によっては酸化されない特定の一乃至数種
のガスだけが透過されて、ガス感知部2または12に感
知される。That is, by the filters 4, 4 or 14, 14,
Depending on its oxidizing ability, only one or several specific gases that cannot be oxidized are transmitted and sensed by the gas sensing section 2 or 12.
この場合のフィルターの酸化能力は、例えば同一設定温
度でも貴金属の添加により高められてその添加量ととも
に増大し、また、同一素材でも加熱温度を高くする程高
められる。In this case, the oxidizing ability of the filter is increased by the addition of noble metals even at the same set temperature, and increases with the amount of the added amount, and even with the same material, the higher the heating temperature is, the higher the oxidation ability is.
従って、フィルター4,4または14,14の素材や加
熱温度を適宜選定して、例えば第1図のグラフに符号C
で示す程度の酸化能力をもたせておけば、イソブタン、
メタン類が選択的に検出されて、プロパンガスのガス洩
れ検出装置に適する。Therefore, by appropriately selecting the material and heating temperature of the filters 4, 4 or 14, 14, for example, the symbol C in the graph of FIG.
If it has the oxidizing ability shown in , isobutane,
Since methane is selectively detected, it is suitable for a propane gas leak detection device.
また、第1図のグラフ中に符号dで示す程度の酸化能力
をもたせておけばメタンガス専用のガス検出装置に適す
る等、各種用途に応じた選択的ガス検出機能が得られる
。Further, if the device has an oxidizing ability as indicated by the symbol d in the graph of FIG. 1, a selective gas detection function suitable for various uses, such as being suitable for a gas detection device exclusively for methane gas, can be obtained.
本発明ではとくに、このようなガス選別機能を有する素
子の製作性および性能が格段に向上される。In particular, the present invention significantly improves the manufacturability and performance of an element having such a gas selection function.
すなわち、フィルター4,4または14,14に安価で
すぐれた酸化活性を有する遷移金属酸化物触媒を用い、
かつ、該フィルター4,4または14,14を、金属酸
化物半導体ガス感知部2または12と電極3,3または
13,13とからなるガス検知素子本体に直接被覆して
一体化している。That is, using a transition metal oxide catalyst that is inexpensive and has excellent oxidation activity in the filters 4, 4 or 14, 14,
In addition, the filters 4, 4 or 14, 14 are directly coated and integrated with the main body of the gas sensing element consisting of the metal oxide semiconductor gas sensing section 2 or 12 and the electrodes 3, 3 or 13, 13.
このため、構造が簡単でコンパクトになると共に、フィ
ルターの取付けが簡単になって、製作が容易である。Therefore, the structure is simple and compact, and the filter can be easily attached and manufactured.
さらに、フィルター4,4または14,14がガス感知
部2または12に触れるガスだけを選別することとなる
ので、フィルターに余分な負担がかからない。Furthermore, since the filters 4, 4 or 14, 14 select only the gas that comes into contact with the gas sensing section 2 or 12, no extra burden is placed on the filters.
また、フィルターがヒーターによる加熱作用ならびにガ
ス検知素子本体からの熱伝導によって効率よく加熱され
るため、触媒性能も向上される。Further, since the filter is efficiently heated by the heating action of the heater and the heat conduction from the gas detection element body, the catalyst performance is also improved.
また、この素子において、コーティングによって異種金
属同志が接触してもそれほど大きな固相反応が生じない
という、当発明者が着目した事実に加え、フィルター4
,4または14,14を、電極間の電流経路の外方に位
置させて実質的に電流経路と接触しない形で被覆してい
るため、構造的にもガス感知部の変質などの悪影響が確
実に防止される。In addition to the fact that the present inventor has noted that in this element, even if dissimilar metals come into contact with each other due to the coating, the filter 4
, 4 or 14, 14 are located outside the current path between the electrodes and are covered in a manner that does not substantially contact the current path, so structurally speaking, it is certain that there will be no adverse effects such as deterioration of the gas sensing part. is prevented.
すなわち、第2図に示す構造によれば、ポーラスな電極
3,3によりガス感知部2とフィルター4,4とが仕切
られて、固相反応が防止される。That is, according to the structure shown in FIG. 2, the gas sensing section 2 and the filters 4, 4 are partitioned by the porous electrodes 3, 3, and solid phase reactions are prevented.
また、第3図および第4図のように、フィルター4,4
がガス感知部2に直接接触する状態に被覆されても、異
種金属酸化物が均一的に混合される場合ほど顕著な反応
は生じず、かつ、両者の境界部分で多少の固相反応が生
じても、この部分が電流経路より外方に位置するため、
ガス検出機能に側ら悪影響を及ぼすことはない。In addition, as shown in FIGS. 3 and 4, filters 4 and 4
Even if the metal oxide is coated in direct contact with the gas sensing part 2, the reaction will not be as pronounced as when dissimilar metal oxides are mixed uniformly, and some solid phase reaction will occur at the boundary between the two. However, since this part is located outside the current path,
There is no side effect on the gas detection function.
なお、本発明の素子は上記各実施例以外にも種種設計変
更可能であって、例えば前記容器1または11を用いず
に、内部に電極およびヒーターを埋設した金属酸化物半
導体ガス感知部の表面全体に、遷移金属酸化物半導体か
らなるフィルターを被覆するような構造も採用し得る。In addition, the device of the present invention can be modified in various designs in addition to the above-mentioned embodiments. For example, the device may be designed without using the container 1 or 11, and with the surface of a metal oxide semiconductor gas sensing portion having an electrode and a heater embedded therein. A structure may also be adopted in which the entire filter is covered with a transition metal oxide semiconductor.
また、本発明の素子を各種の電気作動物等と組合わせて
ガス検出装置を形或する場合、従来において知られてい
るような種々のガス検出回路0構或を任意に採用するこ
とによって、この素子がガスを検知した時にそれに応じ
て電気作動物を動作せしめることができるわけであるが
、それ以外の回路構戒も種々考えられる。Furthermore, when forming a gas detection device by combining the element of the present invention with various electric actuators, etc., by arbitrarily adopting various gas detection circuit configurations as known in the past, When this element detects gas, it is possible to operate the electric actuator accordingly, but various other circuit configurations are also possible.
例えば、本発明の素子と従来の素子の2個の素子にそれ
ぞれ抵抗を接続すると共にその間に電気作動物を配設し
てブリッジ回路を組むことにより、両素子において共に
検知されるガスに対する出力が相殺されるようにしてお
けば、電気作動物を動作せしめるための出力としては、
逆に本発明の素子が感知しないガスに対する出力だけが
取出され、この場合には酸化吸収され易いCOガス等を
選択的に検出することができる。For example, by connecting a resistor to each of two elements, the element of the present invention and the conventional element, and arranging an electric actuator between them to form a bridge circuit, the output for the gas detected by both elements can be adjusted. If it is canceled out, the output for operating the electrically actuated object will be:
Conversely, only the output for gases that are not sensed by the element of the present invention is extracted, and in this case, it is possible to selectively detect CO gas and the like that are easily oxidized and absorbed.
或いは、本発明の素子を2個用いて上述せる如きブリッ
ジ回路を組み、且つ、両素子におけるフィルターの酸化
能力を相違せしめて両素子のガス選択性の程度を異なら
しめておくことにより、一方の素子には検知されて他方
の素子には検知されない特定ガスのみに対応する出力が
取出されるようにしておけば、任意の特定単一ガスの検
出なども可能となる。Alternatively, by assembling a bridge circuit as described above using two elements of the present invention, and making the oxidation abilities of the filters in both elements different to make the degree of gas selectivity of both elements different, one element can be If an output corresponding to only a specific gas that is detected by one element and not detected by the other element is extracted, it becomes possible to detect any specific single gas.
以上のように、本発明の素子は、遷移金属酸化物触媒を
用いたフィルターのガス選別作用で特定種類のガスを選
択的に検出することができ、その上特に、ガス検知素子
本体における電極間の電流経路より外方に上記フィルタ
ーを一体に被覆しているため、製作性を向上してコスト
を低廉にし得、フィルターの性能も向上し、しかも、ガ
ス感知部の変質等の悪影響を防止することができるもの
である。As described above, the element of the present invention is capable of selectively detecting a specific type of gas by the gas screening effect of the filter using a transition metal oxide catalyst, and moreover, in particular, Since the above-mentioned filter is integrally coated on the outside of the current path, manufacturing efficiency can be improved and costs can be reduced, the performance of the filter has also been improved, and adverse effects such as deterioration of the gas sensing part can be prevented. It is something that can be done.
第1図は本発明の素子において用いられるフィルターの
酸化能力と各種ガスに対する透過性との関係を示すグラ
フ、第2図乃至第4図はそれぞれ本発明の素子の実施例
を示す断面図、第5図は従来の素子の一例を示す断面図
である。
2,12・・・・・・ガス感知部、3,13・・・・・
・電極、4
14・・・・・・フィルター。FIG. 1 is a graph showing the relationship between the oxidizing ability of the filter used in the device of the present invention and the permeability to various gases, and FIGS. 2 to 4 are cross-sectional views showing examples of the device of the present invention, and FIG. FIG. 5 is a sectional view showing an example of a conventional element. 2, 12... Gas sensing section, 3, 13...
・Electrode, 4 14... Filter.
Claims (1)
対の電極を接続したガス検知素子本体と、上記半導体と
は異種の遷移金属酸化物触媒を用いたガス選択透過性フ
ィルターとを備え、該フィルターを、上記電極間の電流
経路より外方に位置させて実質的に電流経路と分離させ
た形で、ガス検知素子本体に直接に被覆し、かつ、ガス
感知素子とフィルターとを加熱するヒーターを設けたこ
とを特徴とする検知ガスの選択性を有するガス検知素子
。1. A gas detection element body comprising a pair of electrodes connected to a metal oxide semiconductor whose resistance value changes depending on gas, and a gas selective permeability filter using a transition metal oxide catalyst different from the semiconductor, the filter is located outward from the current path between the electrodes and is substantially separated from the current path, and is directly coated on the gas sensing element body, and a heater that heats the gas sensing element and the filter. 1. A gas detection element having selectivity of a detection gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50055109A JPS5847663B2 (en) | 1975-05-07 | 1975-05-07 | Gas detection element with selectivity of detection gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50055109A JPS5847663B2 (en) | 1975-05-07 | 1975-05-07 | Gas detection element with selectivity of detection gas |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19932482A Division JPS5892850A (en) | 1982-11-12 | 1982-11-12 | Detecting element of gas having selectivity of detecting gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51130299A JPS51130299A (en) | 1976-11-12 |
| JPS5847663B2 true JPS5847663B2 (en) | 1983-10-24 |
Family
ID=12989573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50055109A Expired JPS5847663B2 (en) | 1975-05-07 | 1975-05-07 | Gas detection element with selectivity of detection gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5847663B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2926756C2 (en) * | 1979-07-03 | 1984-03-22 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Schottky diode arrangement |
| JPS56119837A (en) * | 1980-02-27 | 1981-09-19 | Yazaki Corp | Gas sensor of semiconductor |
| JPS56162041A (en) * | 1980-05-16 | 1981-12-12 | Fuji Electric Co Ltd | Oxygen sensor |
| JPS5710446A (en) * | 1980-06-20 | 1982-01-20 | Nec Corp | Gas detecting element |
| JPS6146455Y2 (en) * | 1980-06-24 | 1986-12-27 | ||
| JPS6165151A (en) * | 1984-09-07 | 1986-04-03 | Shinkosumosu Denki Kk | gas detection element |
| JPS61149855A (en) * | 1984-12-25 | 1986-07-08 | Shinkosumosu Denki Kk | Flammable gas detection element |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49129596A (en) * | 1973-04-13 | 1974-12-11 |
-
1975
- 1975-05-07 JP JP50055109A patent/JPS5847663B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51130299A (en) | 1976-11-12 |
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