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JPS5848500B2 - Oriented sintered body - Google Patents
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JPS5848500B2 - Oriented sintered body - Google Patents

Oriented sintered body

Info

Publication number
JPS5848500B2
JPS5848500B2 JP49087662A JP8766274A JPS5848500B2 JP S5848500 B2 JPS5848500 B2 JP S5848500B2 JP 49087662 A JP49087662 A JP 49087662A JP 8766274 A JP8766274 A JP 8766274A JP S5848500 B2 JPS5848500 B2 JP S5848500B2
Authority
JP
Japan
Prior art keywords
sintered body
orientation
zno
oriented
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49087662A
Other languages
Japanese (ja)
Other versions
JPS5116317A (en
Inventor
公一 釘宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49087662A priority Critical patent/JPS5848500B2/en
Publication of JPS5116317A publication Critical patent/JPS5116317A/ja
Publication of JPS5848500B2 publication Critical patent/JPS5848500B2/en
Expired legal-status Critical Current

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  • Compositions Of Oxide Ceramics (AREA)

Description

【発明の詳細な説明】 本発明は結晶方位と特定の関係を有する、針状または短
冊状または板状粒子からなる酸化亜鉛が主体であり、微
量の副成分が添加され、各粒子の特定の結晶学的な結晶
面が高度2こ同一方向に配列している配向性焼結体に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention mainly consists of zinc oxide consisting of needle-shaped, strip-shaped, or plate-shaped particles having a specific relationship with the crystal orientation. This relates to an oriented sintered body in which two crystallographic crystal planes are aligned in the same direction.

一般に焼結体とは、微小な粒子の集合体であって、各粒
子の結晶学的な方位は、ほゾ無秩序な方向に向いており
、全体として等方性を示している。
Generally, a sintered body is an aggregate of minute particles, and the crystallographic orientation of each particle is oriented in a tenonally disordered direction, exhibiting isotropy as a whole.

このために、結晶異方性を示すような物質であっても上
述のように焼結体としては等方性を示す。
For this reason, even if a substance exhibits crystal anisotropy, the sintered body exhibits isotropy as described above.

等方性は焼結体として一つの長所でもありまた短所にも
なっている。
Isotropy is both an advantage and a disadvantage as a sintered body.

長所というのは、例えば等方性の材料では方位を考えず
lこ〃n工ができるということであり、一方短所という
のは、例えば、局所的に見た場合、異った方向を向いて
いる微小な粒子微結晶が隣接しているため、その接合部
に応力が発生し、このために最終的には性能の劣化につ
ながるというようなことが挙げられる。
The advantage is that, for example, isotropic materials can be constructed without considering orientation, while the disadvantages are, for example, when viewed locally, they can be oriented in different directions. As the microcrystalline particles are adjacent to each other, stress is generated at their joints, which ultimately leads to performance deterioration.

本発明は焼結体を構戒する各粒子の特定の結晶学的方位
が、一定の方向に向いた配向性ZnO焼結体を提供し、
その異方性を利用した新しい応用を可能とするものであ
るoZnOは六方晶系に属し、それに起因する異方性を
有している。
The present invention provides an oriented ZnO sintered body in which the specific crystallographic orientation of each particle constituting the sintered body is oriented in a certain direction,
oZnO, which enables new applications utilizing its anisotropy, belongs to a hexagonal crystal system and has anisotropy due to this.

本発明による配向性ZnO焼結体は、或形の工程で方位
が確定しており、容易に方位が判明し、容易に加工がな
される0さらに結晶軸が一定の方向に向いているため、
特性に異方性が生じており、その異方性を利用する新し
い応用の考えられる材料である。
The orientation of the oriented ZnO sintered body according to the present invention is determined by a certain process, and the orientation can be easily determined and processed. Furthermore, since the crystal axis is oriented in a certain direction,
It has anisotropy in its properties, and it is a material that can be used for new applications that utilize this anisotropy.

その製造法は、後述するように、従来の焼結体とかなり
共通の点があるので従来から使用されている装置を使用
することができる。
As will be described later, the manufacturing method thereof has much in common with conventional sintered bodies, and therefore conventional equipment can be used.

本発明の配向性ZnO焼結体は、特定の形状をもったZ
nO粒子を主原料とするものである。
The oriented ZnO sintered body of the present invention has ZnO having a specific shape.
The main raw material is nO particles.

ZnO粒子の形状は、無定形、針状、板状、六角板状、
その他いろいろの形状のものがあるが、針状、板状、六
角板状などの粒子の結晶方位が、結晶粒子と特定の関係
にあるものが必要である。
The shape of ZnO particles is amorphous, needle-like, plate-like, hexagonal plate-like,
There are various other shapes, but it is necessary that the crystal orientation of the particles has a specific relationship with the crystal grains, such as needle-like, plate-like, and hexagonal plate-like shapes.

例えば500℃〜1350℃の温度でZnを酸化し、微
結晶粒子をつくった場合、第1図に示すような、短冊状
ないしは薄板状のZnO粒子が得られ、かつ第1図の平
坦にみられる粒子の面は、(110)一面である特有の
ZnO粒子が得られる。
For example, when Zn is oxidized at a temperature of 500°C to 1350°C to produce microcrystalline particles, strip-like or thin-plate-like ZnO particles as shown in Figure 1 are obtained, and the flat-looking ZnO particles shown in Figure 1 are obtained. A unique ZnO particle having one (110) plane is obtained.

この粒子を主原料とした場合には、ZnOの(110)
−−cifiが一定方向に配列した配向性ZnO焼結体
が得られる。
When this particle is used as the main raw material, the (110) of ZnO
An oriented ZnO sintered body in which --cifi is arranged in a certain direction is obtained.

また1400℃以上の温度でつくられたZnO粒子は、
第2図に示したように理想的には六角板状とみなされる
ものであって、その六角板面は(001)一面に対応し
ている。
In addition, ZnO particles made at a temperature of 1400°C or higher are
As shown in FIG. 2, it is ideally considered to have a hexagonal plate shape, and the hexagonal plate surface corresponds to one (001) surface.

このようなZnO粒子を主原料とした場合には、ZnO
の結晶の(001)一面が一定方向に配列した配向性Z
nO焼結体が得られる。
When such ZnO particles are used as the main raw material, ZnO
Orientation Z in which one (001) face of the crystal is aligned in a certain direction
An nO sintered body is obtained.

本発明による配向性ZnO焼結体の製造方法は次の通り
である。
The method for producing an oriented ZnO sintered body according to the present invention is as follows.

特定の形状を有するZnO粉末に、所望の副成分を加え
、水、アルコールなどの媒体中(こ浸し、十分に混合す
る。
Desired subcomponents are added to ZnO powder having a specific shape, and thoroughly mixed by soaking in a medium such as water or alcohol.

得た泥状の混合物を一軸性の加圧によって戒形し、戒形
体を適当な雰囲気中で焼成する。
The obtained mud-like mixture is shaped by uniaxial pressure, and the shaped body is fired in an appropriate atmosphere.

このようにして得た焼結体の整列した配向面は、或形時
の一軸性の加圧方向に直角となっており、容易(こ配向
軸の判定がなされる○混合、戒形を乾式で行なっても同
様の結果が得られるが、取り扱いの方法、環境を考慮し
た場合には湿式の方がすぐれているといえる。
The aligned orientation planes of the sintered body obtained in this way are perpendicular to the uniaxial pressing direction during shaping, and the orientation axis can be easily determined. Although similar results can be obtained by using a wet method, the wet method is superior when handling methods and environment are taken into account.

ZnOの粒径は大きい方が望ましいが、0.1μ以上で
あれば50%程度の配向性のものが得られる。
It is desirable that the particle size of ZnO be larger, but if the particle size is 0.1 μ or more, an orientation of about 50% can be obtained.

成形に用いられる圧力は、所望する配向度、密度によっ
て決定されるが、1 0 0kg/iないし数ton/
Cr?Lであり、高い方が望ましい○焼或後の粒径は大
きい方が望ましいが、50%程度の配向度を得るため(
こは5μ程度の大きさが望ましい。
The pressure used for molding is determined depending on the desired degree of orientation and density, but may range from 100 kg/i to several tons/i.
Cr? The larger the grain size after sintering, the more desirable it is, but in order to obtain a degree of orientation of about 50% (
The size of this is preferably about 5μ.

微量の副戒分により効果が認められる理由は定かではな
いが、粒界に析出し、粒成長を促進する際に配向性を向
上させるものと思われる。
Although it is not clear why a small amount of sub-compound is effective, it is thought that it precipitates at grain boundaries and improves orientation when promoting grain growth.

上記のよう(こして得た配向性ZnO焼結体の配向度は
、50〜80係であるが焼結温度を上げ、粒径の大きな
焼結体とした場合には、90係以上になることが確認さ
れている。
As mentioned above (the degree of orientation of the oriented ZnO sintered body obtained in this way is 50 to 80 coefficients, but when the sintering temperature is increased to produce a sintered body with a large grain size, the degree of orientation becomes 90 coefficients or more) This has been confirmed.

配向度は、配列した面の(ioo)および(002)の
X線回折強度htooおよびh002を求め、次式によ
って算定した0 上式中、a=1.27であって無配向のZnO材料のh
loo/ho02の値である。
The degree of orientation is calculated by calculating the X-ray diffraction intensities htoo and h002 of (ioo) and (002) of the aligned planes and using the following formula. h
This is the value of loo/ho02.

上述したような方法で得た配向性ZnO焼結体は、異方
性によるいろいろの特徴を有し、新しい応用面を有する
新規な材料である。
The oriented ZnO sintered body obtained by the method described above has various characteristics due to its anisotropy, and is a novel material with new applications.

以下に従来例(例1)および本発明の実施例(例2〜例
5)を示す。
A conventional example (Example 1) and examples of the present invention (Examples 2 to 5) are shown below.

例1 第1図の電子顕微鏡写真に示されているような結晶の形
を有するZnO粉末を用い、これCとアルコールを加え
て湿式混合し、1000kg/一の圧力で成形した後、
1350’Cにおいて焼威し、結晶の粒径約2μの焼結
体を得た。
Example 1 Using ZnO powder having a crystal shape as shown in the electron micrograph of Fig. 1, C and alcohol were added, wet mixed, and molded at a pressure of 1000 kg/1.
It was fired at 1350'C to obtain a sintered body with a crystal grain size of about 2μ.

この焼結体の(110)一面の配向度は30%であった
The degree of orientation of the (110) plane of this sintered body was 30%.

以上のように例1では配向度は低いが、以下の例に示す
ように本発明に従って微量の副成分を添加したものは非
常に高い配向度を示していることが分る○例2 例1に用いたZnO粉末99.7モルφと酸化ビスマス
(Bi203)0.3モル多とを用い、これ(こアルコ
ールを加えて湿式混合し、500ky/fflの圧力で
湿式戒形した後、1300゜Cにおいて焼成し、結晶の
粒径約30μ、(110)一面の配向度65係の焼結体
を得た。
As mentioned above, the degree of orientation is low in Example 1, but as shown in the example below, it can be seen that the product to which a small amount of subcomponent is added according to the present invention shows a very high degree of orientation. ○Example 2 Example 1 Using 99.7 moles of ZnO powder used in C. to obtain a sintered body with a crystal grain size of approximately 30 μm and a (110) one-plane orientation degree of 65.

例3 例2に用いたZnO−Bi203の混合物に0.3%の
酸化べIJ IJウム(Bed)を加え、例2の場合と
同じよう{こ処理して、結晶の粒径約65μ(iio)
一面の配向度約80俤の焼結体を得た。
Example 3 To the ZnO-Bi203 mixture used in Example 2, 0.3% of Bed was added and treated in the same manner as in Example 2 to give a crystal grain size of about 65μ (IIO). )
A sintered body with a degree of orientation of about 80 degrees on one side was obtained.

例4 例3において用いたZnOの代りに第2図の電子顕微鏡
写真に示されているような結晶の形を有するZnO粉末
を用いた以外は例3の場合と同じように処理して、結晶
の粒径約70μ、(001)一面の配向度約80%の焼
結体を得た。
Example 4 The same process as in Example 3 was carried out except that ZnO powder having the crystal shape as shown in the electron micrograph of FIG. 2 was used in place of the ZnO used in Example 3. A sintered body with a grain size of about 70 μm and a (001) orientation of about 80% was obtained.

例5 例4で得た戒形体を用い、1350℃、150kg/a
itの条件でホットプレス焼結を行ない、結晶の粒径約
120μの緻密な焼結体を得た。
Example 5 Using the pre-shaped body obtained in Example 4, 1350℃, 150kg/a
Hot press sintering was carried out under the conditions of IT to obtain a dense sintered body with a crystal grain size of about 120 μm.

この焼結体の(ooi)一面の配向度は約95φであっ
た。
The orientation degree of one surface (ooi) of this sintered body was about 95φ.

以上のことから明らかなように、本発明は次のような顕
著な効果を奏するものである。
As is clear from the above, the present invention has the following remarkable effects.

(1)本発明による配向性焼結体では、その結晶配向性
が電気的特性の配向性{こ関連し、従って電気的特性の
改善が可能となる〇 (2)従来の焼結体では機械的異方性があって方位が整
夕1ルていなかったために、粒界で異なった方位が対向
しており、強度の劣化を招来したが、本発明による配向
性焼結体ではそのようなことがない。
(1) In the oriented sintered body according to the present invention, the crystal orientation is related to the orientation of the electrical properties, thus making it possible to improve the electrical properties. (2) In the conventional sintered body, the mechanical Because the grains had anisotropy and the orientations were not uniform, different orientations faced each other at the grain boundaries, leading to deterioration of strength, but the oriented sintered body according to the present invention does not Never.

(3)微量戒分の添加によって大巾に配向度が向上する
(3) The degree of orientation is greatly improved by adding a small amount of preservatives.

Claims (1)

【特許請求の範囲】[Claims] 1 結晶方位と特定の関係を有する、針状または短冊状
または板状粒子からなる酸化亜鉛が主体であり、微量の
副或分が添加され、各粒子の特定の結晶面が高度に同一
方向に配列していることを特徴とする配同性焼結体。
1 Mainly composed of zinc oxide consisting of needle-shaped, strip-shaped, or plate-shaped particles that have a specific relationship with the crystal orientation, and a small amount of secondary particles are added to ensure that the specific crystal planes of each particle are highly aligned in the same direction. A homozygous sintered body characterized by being arranged in an array.
JP49087662A 1974-07-31 1974-07-31 Oriented sintered body Expired JPS5848500B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49087662A JPS5848500B2 (en) 1974-07-31 1974-07-31 Oriented sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49087662A JPS5848500B2 (en) 1974-07-31 1974-07-31 Oriented sintered body

Publications (2)

Publication Number Publication Date
JPS5116317A JPS5116317A (en) 1976-02-09
JPS5848500B2 true JPS5848500B2 (en) 1983-10-28

Family

ID=13921148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49087662A Expired JPS5848500B2 (en) 1974-07-31 1974-07-31 Oriented sintered body

Country Status (1)

Country Link
JP (1) JPS5848500B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4502493B2 (en) * 2000-10-10 2010-07-14 京セラ株式会社 Zinc oxide sintered body and method for producing the same
JP2011179056A (en) * 2010-02-26 2011-09-15 Taiheiyo Cement Corp Sputtering target

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4825195A (en) * 1971-08-06 1973-04-02
JPS5519045B2 (en) * 1971-11-01 1980-05-23
JPS515360A (en) * 1974-07-02 1976-01-17 Yoshiaki Sakai HORIESUTERUKESHOBANNO SEIZOHO

Also Published As

Publication number Publication date
JPS5116317A (en) 1976-02-09

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