JPS5853731B2 - Reflectance transmittance measuring device - Google Patents
Reflectance transmittance measuring deviceInfo
- Publication number
- JPS5853731B2 JPS5853731B2 JP50143757A JP14375775A JPS5853731B2 JP S5853731 B2 JPS5853731 B2 JP S5853731B2 JP 50143757 A JP50143757 A JP 50143757A JP 14375775 A JP14375775 A JP 14375775A JP S5853731 B2 JPS5853731 B2 JP S5853731B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- pulse
- laser
- test object
- modulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002834 transmittance Methods 0.000 title claims description 9
- 230000010355 oscillation Effects 0.000 claims description 2
- 238000005286 illumination Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
本発明はガラスその他の物質における光学的特性である
反射率及び透過率の測定法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring reflectance and transmittance, which are optical properties of glass and other materials.
従来の技術を第1図に示す透過率測定の例によって説明
すると、安定な光源1により発せられる光を測定光学系
2を介して被検物3に導き、これより反射又は透過せる
光を光電変換器4の光電流に変換し、電流計5によって
読みとっていた。To explain the conventional technology using an example of transmittance measurement shown in FIG. The photocurrent was converted into a photocurrent by a converter 4 and read by an ammeter 5.
このような測定法では、測定しつる反射率、透過率が光
電変換器4の直線性と信号対雑音比に依存するために光
電変換器4及び電流計5に入射する光の弱い領域の測定
が困難であった。In such a measurement method, since the measured reflectance and transmittance depend on the linearity and signal-to-noise ratio of the photoelectric converter 4, it is necessary to measure a weak region of light incident on the photoelectric converter 4 and the ammeter 5. was difficult.
そこで本発明においては光源1にレーザ装置を用い、レ
ーザ光をパルス幅変調することによってみかけ上の強さ
を変えた光を被検物3に導き、光電変換装置4に入る光
量を常に一定にすることによって、低反射率、低透過率
の測定範囲を広めようとするものである。Therefore, in the present invention, a laser device is used as the light source 1, and by pulse width modulating the laser light, light with varying apparent intensity is guided to the test object 3, and the amount of light entering the photoelectric conversion device 4 is always constant. By doing so, it is intended to expand the measurement range of low reflectance and low transmittance.
以下図面に基づき本発明を説明する。The present invention will be explained below based on the drawings.
第2図において、11はレーザ発振装置であり、レーザ
光12はビームスプリッタ−13によって2分され、一
方は光電変換器14に入り、他方は変調器15によりパ
ルス幅変調された後光学系16を介して被検物17に入
射する。In FIG. 2, 11 is a laser oscillation device, a laser beam 12 is split into two by a beam splitter 13, one enters a photoelectric converter 14, and the other is pulse width modulated by a modulator 15 and then optical system 16. The light enters the test object 17 via the.
被検物17を反射又は透過した光は光電変換器18によ
って検出される。The light reflected or transmitted through the test object 17 is detected by a photoelectric converter 18.
コンパレーター19は光電変換器14によって検出され
たレーザ光12の強さと、光電変換器18によって検出
された被検物17の反射光又は透過光の強さ及びあらか
じめ設定された基準量の3者を比較し照明光20を囚強
める、(B)そのままでよい、(C)弱める、等の判断
をし、その指令をパルス発生器21に送る。The comparator 19 uses three factors: the intensity of the laser beam 12 detected by the photoelectric converter 14, the intensity of the reflected light or transmitted light of the object 17 detected by the photoelectric converter 18, and a preset reference amount. By comparing the values, it is determined whether the illumination light 20 should be strengthened, (B) it can be left as it is, (C) it should be weakened, etc., and the command is sent to the pulse generator 21.
ビームスプリッタ−13と光電変換器14は測定値がレ
ーザ光出力の変動の影響を受けないように保障するため
に設置されている。The beam splitter 13 and the photoelectric converter 14 are installed to ensure that the measured values are not affected by variations in the laser light output.
パルス発生器21は所定のくり返し周波数のパルスを発
生し、そのパルス幅はコンパレーター19の指令で変わ
る。The pulse generator 21 generates pulses with a predetermined repetition frequency, and the pulse width changes according to a command from the comparator 19.
例えば(4)強めるの信号が入るとパルス幅は徐々に増
し、(C)弱める、の入力によってパルス幅は徐々に減
少する。For example, when a signal (4) to strengthen is input, the pulse width gradually increases, and when a signal (C) to weaken is input, the pulse width gradually decreases.
22は変調器駆動制御回路であり変調器15にパルス発
生器21の発する信号に従って電力を供給する。22 is a modulator drive control circuit that supplies power to the modulator 15 according to a signal generated by the pulse generator 21.
本発明の装置において一例としてビームスプリッタ13
によりレーザ光12が2等分されるものとし、パルス発
生器21の繰り返し周波数をIKHzとし、被検物17
を取り除いた状態においてパルス幅1マイクロ秒すなわ
ちデユーティ−1/1000でコンパレーク19が平衡
するように設定すれば、この状態において変換器18で
検出される出射光量と、変換器14で検出される参照光
量との比は1/1000となる。In the apparatus of the present invention, as an example, the beam splitter 13
The laser beam 12 is divided into two equal parts, the repetition frequency of the pulse generator 21 is IKHz, and the test object 17 is
If the comparator 19 is set to balance with a pulse width of 1 microsecond, that is, a duty of -1/1000 in a state where The ratio to the amount of light is 1/1000.
すなわち定数171000を設定したことになる。In other words, a constant of 171,000 is set.
次に被検物を装着すれば、出射光量は減少し参照光量と
の比は定数1/1000より小さくなるが、この値が定
数lこ等しい平衡状態に達するまで照明光20のパルス
幅が拡大変調され、光電変換器18には常に一定量の光
が入るように制御される。Next, when the test object is attached, the output light amount decreases and the ratio with the reference light amount becomes smaller than the constant 1/1000, but the pulse width of the illumination light 20 increases until it reaches an equilibrium state where this value is equal to the constant l. The light is modulated and controlled so that a constant amount of light always enters the photoelectric converter 18.
この平衡状態における照明光のデユーティ−を前記定数
で除した値は、被検物の反射あるいは透過率の逆数とな
る。The value obtained by dividing the duty of the illumination light in this equilibrium state by the constant is the reciprocal of the reflection or transmittance of the object.
上記の設定では1/1000の反射あるいは透過率の測
定まで可能である。With the above settings, it is possible to measure reflection or transmittance of up to 1/1000.
実際の装置tとおいては、ビームスプリッタ13のスプ
リット比、2つの光電変換器14.18の変換効率の比
を加味して定数が設定される。In the actual device t, a constant is set taking into account the split ratio of the beam splitter 13 and the ratio of conversion efficiencies of the two photoelectric converters 14 and 18.
またレーザ発信装置の両端から等光量のレーザ光が放射
される場合にはビームスプリッタが不要であることは明
らかである。Furthermore, it is clear that a beam splitter is not necessary when the same amount of laser light is emitted from both ends of the laser transmitter.
以上述べたように、本発明の装置によれば光電変換器に
入射する光量が常に一定値となる状態で測定が行なわれ
るため変換器の直線性に左右されることなく、極めて低
い反射あるいは透過率に至るまで高精度の測定が可能と
なる。As described above, according to the device of the present invention, measurement is performed with the amount of light incident on the photoelectric converter always being a constant value, so it is not affected by the linearity of the converter and has extremely low reflection or transmission. This makes it possible to measure with high accuracy down to the rate.
第1図は従来の技術を示す説明図。
第2図は本発明の実施例を示す説明図。
1・・・・・・光源、3・・・・・・被検物、4・・・
・・・光電変換器、5・・・・・・電流計、11・・・
・・・レーザ装置、15・・・・・・変調器、17・・
・・・・被検物、18・・・・・・光電変換器、19・
・・・・・コンパレーター、21・・・・・・パルス発
生器、22・・・・・・変調器駆動制御回路、23・・
・・・・表示器。FIG. 1 is an explanatory diagram showing a conventional technique. FIG. 2 is an explanatory diagram showing an embodiment of the present invention. 1... Light source, 3... Test object, 4...
...Photoelectric converter, 5...Ammeter, 11...
...Laser device, 15...Modulator, 17...
...Object to be tested, 18...Photoelectric converter, 19.
... Comparator, 21 ... Pulse generator, 22 ... Modulator drive control circuit, 23 ...
····display.
Claims (1)
一方を変調器により所定の周波数にもとづいてパルス幅
変調し、被検物に入射光として入射する手段と、前記被
検物から反射あるいは透過した出射光量と前記2分され
たレーザ光の他方の光量との比をあらかじめ設定された
定数と比較し、その値が等しい平衡状態となるように前
記変調器を制御して前記入射光のパルス幅を変動させる
手段と、前記平衡状態における入射光パルスのデユーテ
ィ−を前記定数値で除した値の逆数として反射あるいは
透過率を演算し表示する手段とを有する反射率透過率測
定装置。1 A means for pulse-width modulating one of the two divided laser beams oscillated by a laser oscillation device based on a predetermined frequency using a modulator, and making the modulated laser beam enter the test object as incident light, and means for reflecting or transmitting the laser light from the test object. The ratio of the output light amount and the light amount of the other of the two divided laser beams is compared with a preset constant, and the modulator is controlled so that the ratio is in an equilibrium state where the values are equal, and the pulse of the incident light is A reflectance/transmittance measuring device comprising: means for varying the width; and means for calculating and displaying reflection or transmittance as the reciprocal of a value obtained by dividing the duty of the incident light pulse in the equilibrium state by the constant value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50143757A JPS5853731B2 (en) | 1975-12-01 | 1975-12-01 | Reflectance transmittance measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50143757A JPS5853731B2 (en) | 1975-12-01 | 1975-12-01 | Reflectance transmittance measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5267384A JPS5267384A (en) | 1977-06-03 |
| JPS5853731B2 true JPS5853731B2 (en) | 1983-12-01 |
Family
ID=15346301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50143757A Expired JPS5853731B2 (en) | 1975-12-01 | 1975-12-01 | Reflectance transmittance measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853731B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120077330A (en) * | 2010-12-30 | 2012-07-10 | 삼성코닝정밀소재 주식회사 | Apparatus for measuring the degree of transmission of a patterned glass substrate |
| JP6111534B2 (en) * | 2012-05-25 | 2017-04-12 | セイコーエプソン株式会社 | Optical measuring device and control method |
| CN105699336A (en) * | 2016-03-24 | 2016-06-22 | 深圳怡化电脑股份有限公司 | Method, system and device for detecting luminousness of medium pervious to light |
-
1975
- 1975-12-01 JP JP50143757A patent/JPS5853731B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5267384A (en) | 1977-06-03 |
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