JPS5853739B2 - Kanenseigaskenchisoshi - Google Patents
KanenseigaskenchisoshiInfo
- Publication number
- JPS5853739B2 JPS5853739B2 JP13694175A JP13694175A JPS5853739B2 JP S5853739 B2 JPS5853739 B2 JP S5853739B2 JP 13694175 A JP13694175 A JP 13694175A JP 13694175 A JP13694175 A JP 13694175A JP S5853739 B2 JPS5853739 B2 JP S5853739B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature
- mol
- fe2o3
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- 229910052593 corundum Inorganic materials 0.000 claims description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 77
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 26
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 25
- 238000010438 heat treatment Methods 0.000 description 21
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 17
- 238000000034 method Methods 0.000 description 16
- 230000007704 transition Effects 0.000 description 15
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 14
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 14
- 229910052697 platinum Inorganic materials 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 239000001294 propane Substances 0.000 description 7
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052573 porcelain Inorganic materials 0.000 description 5
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000002505 iron Chemical class 0.000 description 3
- 239000001282 iso-butane Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910021577 Iron(II) chloride Inorganic materials 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010908 decantation Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 1
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- 229910005230 Ga2 O3 Inorganic materials 0.000 description 1
- 229910005267 GaCl3 Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004455 differential thermal analysis Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910021513 gallium hydroxide Inorganic materials 0.000 description 1
- UPWPDUACHOATKO-UHFFFAOYSA-K gallium trichloride Chemical compound Cl[Ga](Cl)Cl UPWPDUACHOATKO-UHFFFAOYSA-K 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- ZMFWDTJZHRDHNW-UHFFFAOYSA-N indium;trihydrate Chemical compound O.O.O.[In] ZMFWDTJZHRDHNW-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910021506 iron(II) hydroxide Inorganic materials 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
本発明は可燃性ガス検知素子、特にスピネル型結晶構造
のγ−Fe2O3を主成分相として含む焼結体を、ガス
感応体とする可燃性ガス検知素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a combustible gas detection element, and particularly to a combustible gas detection element that uses a sintered body containing γ-Fe2O3 with a spinel type crystal structure as a main component phase as a gas sensitive body. .
近年、ガス機器の普及に従って、ガスによる事故が多発
するようになり、事故を未然に防止するため、種々の方
策が検討されている。BACKGROUND ART In recent years, with the spread of gas appliances, accidents caused by gas have been occurring frequently, and various measures are being considered to prevent accidents.
そのひとつとして、ガス漏れを検知し、警報を発する装
置をあげることができる。One example is a device that detects gas leaks and issues an alarm.
本発明は、このガス漏れを検知するための素子を提供し
ようとするものである。The present invention aims to provide an element for detecting this gas leak.
γ−Fe2O3はn型の酸化物半導体であり、高温度下
で還元性ガスに接触すると、電気抵抗が急激に低下する
という性質をもっている。γ-Fe2O3 is an n-type oxide semiconductor, and has the property that its electrical resistance rapidly decreases when it comes into contact with a reducing gas at high temperature.
現在、この性質を利用して、γ−Fe2O3をガス感応
体としたガス検知素子の開発が、進められている。Currently, by utilizing this property, development of a gas detection element using γ-Fe2O3 as a gas sensitive material is underway.
このγ−Fe2O3は、250〜400℃の温度範囲で
、良好なガス感応性を示す。This γ-Fe2O3 exhibits good gas sensitivity in the temperature range of 250 to 400°C.
感度と応答速度は、温度に対して反対の傾向を示し、2
50〜300℃では感度はよいけれども、応答速度が若
干遅く、また400℃に近づくと、応答速度が速くなる
けれども、感度が若干低下する。Sensitivity and response speed show opposite trends with temperature, 2
At 50 to 300°C, the sensitivity is good, but the response speed is a little slow, and as the temperature approaches 400°C, the response speed is faster, but the sensitivity is slightly lower.
したがって、この種の材料は、350℃前後の温度で使
用することが望ましい。Therefore, it is desirable to use this type of material at temperatures around 350°C.
ところで、ガス漏れを検知するための素子には、爆発を
未然に防ぐためと、誤動作があってはならないことから
、かなりせまいガス濃度域で動作することが要求される
ようになって来ており、動作点のきわめて安定している
ことが必要とさth、)。By the way, elements for detecting gas leaks are now required to operate in a fairly narrow gas concentration range in order to prevent explosions and to prevent malfunctions. , it is necessary that the operating point be extremely stable.
したがって、半導体の抵抗変化を利用して力′スを検出
する素子は、ガスにより抵抗がすみやかに変化するもの
でなければならず、抵抗値が設定値に達した後も、徐々
に変化して行くことの許されないものである。Therefore, an element that detects force by utilizing changes in the resistance of a semiconductor must have a resistance that changes quickly due to gas, and even after the resistance value reaches the set value, the resistance does not change gradually. It is not allowed to go.
ガスに対してすみやかに応答をするためには、ガス感応
部分は、ある程度高い温度下で、安定に動作しなければ
ならない。In order to respond quickly to gas, the gas-sensitive part must operate stably at a relatively high temperature.
しかしながら、γ−F e 20sは、高い温度では不
安定な相であり、長時間、高温度下におくと、高温度下
でも安定なα−Fe203に相転移してしまう。However, γ-Fe20s is an unstable phase at high temperatures, and if left at high temperatures for a long time, it undergoes a phase transition to α-Fe203, which is stable even at high temperatures.
このγ相からα相への相転移は非可逆的なものであり、
一旦、7’ Fe2O3からα−F e 203に転
移してしまうと、それを再びγ−Fe2O3に転移させ
ることは、容易なことではない。This phase transition from γ phase to α phase is irreversible,
Once 7' Fe2O3 has been transferred to α-Fe203, it is not easy to transfer it back to γ-Fe2O3.
α−Fe203は、可燃性ガスに対する感応性のきわめ
て低いものであり、またその電気抵抗も高いものである
。α-Fe203 has extremely low sensitivity to combustible gases and also has high electrical resistance.
したがって、γ−Fe2O3からα−Fe203に相転
移をしてしまうと、Fe2O3はガス感応体としての機
能を失なってしまう。Therefore, when a phase transition occurs from γ-Fe2O3 to α-Fe203, Fe2O3 loses its function as a gas sensitive material.
γ−F e 203がα−F e 203に相転移をす
る温度は、その作製条件lこよって異なるが、はぼ40
0〜330℃の温度範囲内にある。The temperature at which γ-F e 203 undergoes a phase transition to α-F e 203 varies depending on the production conditions, but is approximately 40
It is within the temperature range of 0 to 330°C.
たとえば、沈澱法によってマグネタイ) (Fe304
)の微粒子を作り、これを、空気中において、150
〜400’Cの範囲内の温度で加熱することにより、酸
化すると、γ−F 6203が得られる。For example, by precipitation method magnetite) (Fe304
) is made into fine particles of 150
Oxidation by heating at temperatures in the range ˜400′C provides γ-F 6203.
このようにして作ったγ−F e 203は、相転移温
度が低く、特にマグネタイトを作る際の沈澱時のアルカ
リ濃度が低いものほど、それが低温度側へずれる。The γ-F e 203 produced in this manner has a low phase transition temperature, and in particular, the lower the alkali concentration during precipitation during magnetite production, the lower the temperature.
またα−F e 203を還元してFe3O4とし、こ
れを、不活性雰囲気中において、高温度たとえば900
℃で焙焼し、さらにioo〜700℃の範囲内の温度で
加熱して、酸化しても、γ−Fe2O3を得ることがで
きる。Additionally, α-Fe 203 is reduced to Fe3O4, which is then heated at a high temperature, e.g. 900℃, in an inert atmosphere.
γ-Fe2O3 can also be obtained by roasting at a temperature of 0.degree. C. and further heating at a temperature in the range of ioo to 700.degree.
この方法で得たγ−Fe2O3は、αFe2O3への転
移温度が比較的高いものである。γ-Fe2O3 obtained by this method has a relatively high transition temperature to αFe2O3.
γ−Fe203可燃性ガス検知素子は、前述したように
、感度や応答速度などの関係から、ガス感応部分をかな
り痛い温度に保持しておかなければならないものである
。As mentioned above, in the γ-Fe203 combustible gas detection element, the gas sensitive part must be kept at a very painful temperature due to sensitivity, response speed, etc.
γ−Fe2O3は高温度下でα−Fe203に相転移を
するのはもちろんのこと、相転移温度よりかなり低い温
度でも、長時間放置しておくと、徐々に相転移をする。γ-Fe2O3 not only undergoes a phase transition to α-Fe203 at high temperatures, but also undergoes a gradual phase transition if left for a long time even at a temperature considerably lower than the phase transition temperature.
したがって、γ−F e 203をそのままガス感応部
分に使用するには、その相転移温度が十分に高いとは言
えない。Therefore, it cannot be said that the phase transition temperature of γ-F e 203 is high enough to use it as it is in a gas-sensitive part.
ガス感応部分はかなり高い温度に保って使用されるので
、長時間作動温度で放置されても、ガス感応性の安定し
ていることが必要とされることから、前記の相転移温度
をなんらかの方法でより高めなければならない。Since the gas-sensitive part is used at a fairly high temperature, it is required that the gas-sensitivity remains stable even if it is left at the operating temperature for a long time. We have to raise it even higher.
γ−Fe2O3の製造方法は、大別して、次のふたつの
方法がある。Methods for producing γ-Fe2O3 can be broadly classified into the following two methods.
そのひとつはγ−Fe00Hの脱水による方法であり、
他のひとつはF e s 04の酸化による方法である
。One of them is a method by dehydration of γ-Fe00H,
Another method is the oxidation of Fe s 04.
γ−Fe00Hを作製する方法としては、第一鉄塩を緩
慢に酸化する方法、Fe(OH)2を緩慢(こ酸化する
方法、あるいは同じ結晶構造のFe0CIの結晶を水中
で加熱する方法などがある。Methods for producing γ-Fe00H include a method of slowly oxidizing ferrous salt, a method of slowly oxidizing Fe(OH)2, or a method of heating Fe0CI crystals with the same crystal structure in water. be.
Fe3O4を作製する方法としては、α−Fe203ま
たはα−Fe00Hを水素などで還元する方法、第一鉄
塩と第二鉄塩とをアルカリ性溶液中で共沈させる方法、
またはF e 20sあるいはF e COsなどを、
水蒸気中もしくは窒素中で加燃する方法などがある。Methods for producing Fe3O4 include a method of reducing α-Fe203 or α-Fe00H with hydrogen or the like, a method of co-precipitating a ferrous salt and a ferric salt in an alkaline solution,
Or F e 20s or F e COs etc.
There are methods such as combustion in water vapor or nitrogen.
このような方法で作製したγ−F e 203は、前述
したように、相転移温度がたかだか630℃である。γ-F e 203 produced by such a method has a phase transition temperature of 630° C. at most, as described above.
この相転移温度を高める方法として、異種元素の導入が
考えられる。One possible way to increase this phase transition temperature is to introduce a different element.
本発明は、可燃性ガス感応体としてのγ−Fe2O3の
変成に適した元素、および素子の組成について、種々研
究検討を重ねた結果、完成したものである。The present invention was completed as a result of various research studies regarding elements suitable for metamorphosis of γ-Fe2O3 as a combustible gas sensitive material and the composition of an element.
すなわち、本発明にかかる可燃性ガス検知素子は、80
〜99.8モル%のγ−F6203に、添加物としてA
l2O3,Ga2O3およびIn2O3の三種の酸化物
群から選択された少くとも一種を0.2〜20モル%の
比率で含む焼結体をガス感応体とし、これに電気抵抗測
定用の1対の電極と加熱用のヒータを付与して可燃性ガ
スの濃度変化により、前記ガス感応体の電気抵抗値が変
化することを用いて可燃性ガスを検知することを特徴と
する可燃性ガス検知素子である。That is, the combustible gas detection element according to the present invention has 80
~99.8 mol% of γ-F6203 with A as an additive
A sintered body containing at least one selected from the three oxide groups of l2O3, Ga2O3 and In2O3 at a ratio of 0.2 to 20 mol% is used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance is attached to this. A combustible gas detection element is characterized in that it detects a combustible gas by applying a heater for heating and changing the electrical resistance value of the gas sensitive body due to a change in the concentration of the flammable gas. .
以下、実施例にもとづいて、本発明にかかる素子につい
て詳細に説明する。Hereinafter, the device according to the present invention will be described in detail based on Examples.
実施例 l
FeCl2.FeCl3およびA I (N03) s
をそれぞれ1モル、2モルおよび0.05モル正確に秤
取して、これらを11の純水に溶解させた。Example l FeCl2. FeCl3 and A I (N03)s
1 mol, 2 mol, and 0.05 mol of each were accurately weighed out, and these were dissolved in 11 pure water.
この混合溶液を、NaOH16モルを11の純水中に溶
解した溶液中に、ゆっくり滴下した。This mixed solution was slowly dropped into a solution of 16 moles of NaOH dissolved in 11 moles of pure water.
これによって、次の反応が生じた。This resulted in the following reaction.
FeCl2+ 2 FeCl3+0.05 AI (N
O3)3+8.15NaOH−+F e3Alo、o5
04,075+8.15NaCl + 4.075 H
20上記反応式によれば、NaOHは8.15モル必要
であるが、溶液の水素イオン濃度(pH)の変動を小さ
くするために、過剰のNaOHを添加した。FeCl2+ 2 FeCl3+0.05 AI (N
O3)3+8.15NaOH-+F e3Alo, o5
04,075+8.15NaCl+4.075H
20 According to the above reaction formula, 8.15 mol of NaOH is required, but an excess of NaOH was added in order to reduce fluctuations in the hydrogen ion concentration (pH) of the solution.
このように過剰のNaOHを加えておくだけでなく、鉄
塩混合浴液の滴下と同時に、NaOHを消費された量だ
け補うことにより、常に一定のpH値に維持してもよい
。In addition to adding excess NaOH in this manner, the pH value may always be maintained at a constant value by supplementing the consumed amount of NaOH at the same time as the iron salt mixed bath liquid is added dropwise.
鉄塩溶液の滴下が完了したのち、この液の濾過沈澱物を
傾瀉法により洗浄した。After the addition of the iron salt solution was completed, the filtered precipitate of this solution was washed by decantation.
洗浄液中のCI濃度が5X10−5M以下になったとき
、洗浄を中止し、沢過して、得られた物質を乾燥機を用
いて80〜100℃の温度で4〜10時間乾燥させた。When the CI concentration in the washing solution was below 5×10 −5 M, washing was stopped, filtered, and the obtained material was dried in a drier at a temperature of 80-100° C. for 4-10 hours.
乾燥物を乳鉢で粉砕してから、粉末を300〜400℃
の温度で1〜3時間加熱して酸化処理した。Grind the dried material in a mortar and then heat the powder to 300-400°C.
Oxidation treatment was carried out by heating at a temperature of 1 to 3 hours.
この酸化処理によって、AIで変成されたγ−Fe2O
3を得ることができた。Through this oxidation treatment, γ-Fe2O modified with AI
I was able to get 3.
このγ−Fe2O3を化学分析したところ、A 120
3が1.62モル%含まれていた。Chemical analysis of this γ-Fe2O3 revealed that A 120
3 was contained in an amount of 1.62 mol%.
また、X線粉末回折によってα−Fe203の存在ヲ調
べたところ、α−F e 203の存在を認めることが
できなかった。Further, when the presence of α-Fe203 was investigated by X-ray powder diffraction, the presence of α-Fe203 could not be recognized.
さらに、示差熱分析によって求めたγFe2O3からα
−Fe203への相転移温度は、添加しないときに比ベ
ロ6℃上昇した。Furthermore, from γFe2O3 obtained by differential thermal analysis, α
-The phase transition temperature to Fe203 increased by 6° C. when not added.
上述のようIこして得られたU変成γ−Fe203を細
かく粉砕し、有機バインダーを加えてペースト状にした
。The U-modified γ-Fe203 obtained by I straining as described above was finely ground, and an organic binder was added thereto to form a paste.
一方、5iiX 5iiX 0.5mmの寸法のアルミ
ナ磁器板の主面に、焼付用金ペーストを、0、5 mm
の間隔をもつ櫛形に印刷し、800℃の温度で焼きつけ
て、電極をあらかじめ形成した。On the other hand, on the main surface of an alumina porcelain plate with dimensions of 5iiX 5iiX 0.5mm, a baking gold paste was applied to
The electrodes were preformed by printing a comb shape with a spacing of , and baking it at a temperature of 800°C.
このアルミナ磁器板の電極焼付面上に、さらにAI変変
成−Fe203を厚さ20μ扉に塗布した。On the electrode-baked surface of this alumina porcelain plate, AI modified Fe203 was further applied to a door thickness of 20 μm.
これを加熱して、ひびがはいらないように注意して徐徐
に温度を高め、350℃の温度で2時間保持してから、
冷却した。Heat this, gradually raise the temperature being careful not to create any cracks, hold it at a temperature of 350℃ for 2 hours, and then
Cooled.
焼付けを完了したAl変変成Fe2O3皮膜に接触しな
いように、アルミナ磁器板の他方の主面に白金発熱体を
接触させ、全体を100メツシユのステンレススチール
製の金網で囲って、可燃性ガス検知素子を完成した。A platinum heating element was brought into contact with the other main surface of the alumina porcelain plate so as not to come into contact with the baked Al modified Fe2O3 film, and the whole was surrounded by a 100-mesh stainless steel wire mesh to form a combustible gas detection element. completed.
第1図にこの可燃性ガス検知素子の構造を示す。FIG. 1 shows the structure of this combustible gas detection element.
図において、1はアルミナ磁器板、2は皮膜状のAl変
変成−Fe203ガス感応体、3はくし形の金電極、4
は白金発熱体、5,6はリード線で、それぞれ電極3、
白金発熱体4に接続されている。In the figure, 1 is an alumina porcelain plate, 2 is a film-like Al metamorphosed Fe203 gas sensitive body, 3 is a comb-shaped gold electrode, and 4 is a comb-shaped gold electrode.
is a platinum heating element, 5 and 6 are lead wires, and are connected to electrodes 3 and 6, respectively.
It is connected to a platinum heating element 4.
白金発熱体4に通電し、γ−Fe203ガス感応体2を
、300℃の温度に保持した。Electricity was applied to the platinum heating element 4, and the γ-Fe203 gas sensitive body 2 was maintained at a temperature of 300°C.
このときの空気中における電極3の間の抵抗値は、■5
.5MΩであった。At this time, the resistance value between the electrodes 3 in the air is ■5
.. It was 5MΩ.
これを、1容量%のプロパンガスを含む空気中に置いた
とき、その抵抗値が1,2MΩであった。When this was placed in air containing 1% by volume of propane gas, its resistance value was 1.2 MΩ.
これから、可燃性ガスの存在によって、抵抗値が著しく
変化することがわかる。It can be seen from this that the resistance value changes significantly due to the presence of combustible gas.
次に、白金発熱体4への通電を断ち、400’Cの温度
に保持された電気炉中に、1000時間放置した。Next, the power supply to the platinum heating element 4 was cut off, and the platinum heating element 4 was left in an electric furnace maintained at a temperature of 400'C for 1000 hours.
その後、再び白金発熱体4Iこ通電して、γ−F e
203ガス感応注皮膜2を、300℃の温度に保持して
、空気中で抵抗値を測定したところ、13.4MΩであ
った。After that, the platinum heating element 4I is energized again to generate γ-F e
The resistance value of the 203 gas-sensitive injection film 2 was measured in air while being maintained at a temperature of 300° C., and it was found to be 13.4 MΩ.
そして、■容量%のプロパンガスを含む空気中では、抵
抗値が1.IMΩであった。In air containing propane gas of % by volume, the resistance value is 1. It was IMΩ.
実施例 2
実施例1と同じ手順で、At(NO3)3の添加量を変
えて、各種の試料を作成した。Example 2 Various samples were prepared in the same manner as in Example 1, but with different amounts of At(NO3)3 added.
これら試料のそれぞれについて、実施例1と同じ条件で
、特性を測定した。The characteristics of each of these samples were measured under the same conditions as in Example 1.
第2図に、Al2O3含有量と抵抗(RG)との関係、
およびA t 203含有量と(RA/RG)との関係
をそれぞれ示す。Figure 2 shows the relationship between Al2O3 content and resistance (RG),
and the relationship between At 203 content and (RA/RG), respectively.
なを、RGは可燃性ガスを含む空気中での値であり、R
Aはそれを含んでいない空気中での値である。Note that RG is the value in air containing flammable gas, and R
A is the value in air that does not contain it.
図において、曲線Iは可燃性ガスを含む空気中での、素
子の初期抵抗値特性を示す。In the figure, curve I shows the initial resistance value characteristic of the element in air containing flammable gas.
曲線■は初期感度特性を示す。Curve ■ shows the initial sensitivity characteristics.
また、曲線■は、素子を一旦400℃の温度に1000
時間保持してからの、抵抗値特性を示す。In addition, curve (■) shows that the device is heated to 400°C for 1000°C.
It shows the resistance value characteristics after holding for a certain period of time.
曲線■は同じく感度特性を示す。Similarly, the curve ■ shows the sensitivity characteristics.
これから明らかなようlこ、Al2O3含有量が多くな
るに従って、高温放置による特性劣化が小さく、特定の
安定していることがわかる。As is clear from this, it can be seen that as the Al2O3 content increases, the deterioration of characteristics due to high temperature storage becomes smaller and the properties become more stable.
そして、ガス感度についてみると(曲線■、■)、Al
2O3含有量がγ−Fe203焼結体中に、0.1〜2
0モル%含まれているとき、著しく改善されていること
がわかる。Looking at the gas sensitivity (curves ■, ■), Al
The 2O3 content is 0.1 to 2 in the γ-Fe203 sintered body.
It can be seen that when the content is 0 mol%, there is a significant improvement.
このようなγ−Fe2O3に対する添加効果は、Ga2
O3またはIn2O3、またはA l 203 、Ga
2O3およびIn2O3の2種以上を組合わせたものを
添加しても、はぼ同じ傾向を示した。This effect of addition to γ-Fe2O3 is due to Ga2
O3 or In2O3, or A l 203 , Ga
Even when a combination of two or more of 2O3 and In2O3 was added, almost the same tendency was observed.
実験結果を次表にまとめて示す。The experimental results are summarized in the table below.
実施例 3
平均粒径0,1μ扉のF e 304の粉末を1モル、
In(OH)3を0.05モル、Ga(OH)3を0.
05モル秤取し、水を加えて十分に粉砕し混合した。Example 3 1 mol of Fe 304 powder with an average particle size of 0.1μ,
0.05 mol of In(OH)3 and 0.05 mol of Ga(OH)3.
05 mol was weighed out, water was added thereto, and the mixture was thoroughly ground and mixed.
混合物を室温で真空乾燥したのち、正方形状に圧縮成型
した。The mixture was vacuum dried at room temperature and then compression molded into a square shape.
成型体を、窒素気流中(こおいて、温度850℃で焼結
した。The molded body was sintered in a nitrogen stream at a temperature of 850°C.
焼結体を冷却してから、徐徐に昇温しで、酸化性雰囲気
中において、400℃の温度に保持し、γ−F e 2
03を主成分とする焼結体を得た。After cooling the sintered body, the temperature was gradually raised and maintained at a temperature of 400°C in an oxidizing atmosphere, and γ-F e 2
A sintered body containing 03 as a main component was obtained.
このようにして作製した焼結体の主面のひとつに、金を
蒸着して、1対の櫛形の電極を形成した。Gold was deposited on one of the main surfaces of the sintered body thus produced to form a pair of comb-shaped electrodes.
そして、他の主面には、白金発熱体を無機接着剤で貼り
つけて、可燃性ガス検知素子とした。Then, a platinum heating element was attached to the other main surface with an inorganic adhesive to form a combustible gas detection element.
第3図は、上述のようにして作製した、可燃性ガス検知
素子の構造の一例を示す斜視図である。FIG. 3 is a perspective view showing an example of the structure of the combustible gas detection element manufactured as described above.
図において、11はγ−Fe2O3を主体とするバルク
状焼結体からfよる可燃性ガス感応体である。In the figure, numeral 11 is a combustible gas sensitive material made of a bulk sintered body mainly composed of γ-Fe2O3.
12は対をなす櫛型電極、13は無機接着剤、14は白
金発熱体、15.16はそれぞれ櫛型電極12白金抵抗
体14に接続されたリード線である。12 is a pair of comb-shaped electrodes, 13 is an inorganic adhesive, 14 is a platinum heating element, and 15 and 16 are lead wires connected to the comb-shaped electrodes 12 and the platinum resistor 14, respectively.
この素子全体を、ステンレススチール製の金網で覆って
、白金発熱体14に通電し、γ−Fe203焼結体11
を350℃の温度に加熱保持した。This entire element was covered with a stainless steel wire mesh, and the platinum heating element 14 was energized, and the γ-Fe203 sintered body 11
was heated and maintained at a temperature of 350°C.
このときの可燃性ガス検知素子の、空気中での抵抗値は
57KQであった。At this time, the resistance value of the combustible gas detection element in air was 57KQ.
これを、0.5容量%のイソブタンを含む空気中におい
たところ、抵抗値は4.IKΩであり、可燃性ガスの存
在によってその抵抗値が大きく変化した。When this was placed in air containing 0.5% by volume of isobutane, the resistance value was 4. IKΩ, and its resistance value changed significantly due to the presence of flammable gas.
次に、この素子を、400℃の温度に保たれた電気炉中
に1000時間放置した。Next, this element was left in an electric furnace maintained at a temperature of 400° C. for 1000 hours.
それから、γFe2O3焼結体11を350℃の温度に
保って、空気中、および0.5容量%のイソブタンを含
む空気中におけるときの、抵抗値を測定したところ、そ
れぞれ63にΩ、5.2にΩであった。Then, when the γFe2O3 sintered body 11 was kept at a temperature of 350°C and the resistance values were measured in air and in air containing 0.5% by volume of isobutane, the resistance values were 63Ω and 5.2Ω, respectively. It was Ω.
実施例 4
FeCI□、およびGaCl3をそれぞれ1モルおよび
0.01モル秤量し、■lの純水に溶解させた。Example 4 1 mol and 0.01 mol of FeCI□ and GaCl3 were weighed, respectively, and dissolved in 1 liter of pure water.
これとは別に、(I’JH4)2C204を1.2モル
秤取し、11の純水に溶解させた。Separately, 1.2 mol of (I'JH4)2C204 was weighed out and dissolved in 11 pure water.
この(NH4) 2 C204溶液に、前記鉄塩混合溶
液を撹拌しながら加えた。The above iron salt mixed solution was added to this (NH4) 2 C204 solution with stirring.
5〜10分間撹拌して、黄色の沈澱物を生成させ、これ
を傾瀉法で洗浄した。Stirring for 5-10 minutes produced a yellow precipitate, which was washed by decantation.
CI−濃度が5X10−5M以下となったとき、洗浄を
やめて、濾過した。When the CI concentration was below 5×10 −5 M, the washing was stopped and filtered.
これにより得られた物質を乾燥させた。The resulting material was dried.
洗浄が長弓くと第一鉄が酸化して第二鉄となって溶解し
、上澄液が橙色に着色するので、洗浄には十分注意しな
ければならない。If cleaning is prolonged, ferrous iron will oxidize and become ferric iron, which will dissolve and turn the supernatant liquid orange, so care must be taken when cleaning.
乾燥後、空気を遮断して、水蒸気を飽和させた窒素気流
中において、400’Cの温度で3時間熱分解させた。After drying, air was shut off and thermal decomposition was carried out at a temperature of 400'C for 3 hours in a nitrogen stream saturated with water vapor.
これを、空気を遮断したママ冷却して、Ga2O3を含
むFe3O4を得た。This was cooled with air shut off to obtain Fe3O4 containing Ga2O3.
次に、このFe3O4を空気中において、100〜15
0℃の温度で、ゆっくり酸化させて、Gaで変成された
γ−Fe2O3を得た。Next, this Fe3O4 was placed in the air at a concentration of 100 to 15
Slow oxidation was performed at a temperature of 0°C to obtain γ-Fe2O3 modified with Ga.
そして、実施例1と同じ手順で可燃性ガス検知素子を作
った。Then, a combustible gas detection element was manufactured using the same procedure as in Example 1.
この可燃性ガス検知素子のガス感応性皮膜を、温度30
0℃に加熱して、空気中で抵抗値を測定したところ、3
.2MΩであった。The gas-sensitive film of this combustible gas detection element was coated at a temperature of 30
When heated to 0℃ and measured the resistance value in air, it was 3.
.. It was 2MΩ.
さらに、■容量%のプロパンガスを含む空気中における
抵抗値は45にΩであった。Furthermore, the resistance value in air containing propane gas at volume % was 45Ω.
次に、電気炉を用いて、400℃の温度で1000時間
加熱してから、前述と同様にして抵抗値を測定した。Next, after heating at a temperature of 400° C. for 1000 hours using an electric furnace, the resistance value was measured in the same manner as described above.
その結果、空気中では2,3MΩであり、1容量%のプ
ロパンガスを含む空気中では46にΩであった。As a result, it was 2.3 MΩ in air, and 46Ω in air containing 1% by volume of propane gas.
実施例 5
FeC12およびAlCl3をそれぞれ0.8モルおよ
び0.2モル正確に秤量し、これらを11の純水に溶解
し、これを5N−NaOH溶液ll中に滴下した。Example 5 0.8 mol and 0.2 mol of FeC12 and AlCl3, respectively, were accurately weighed, dissolved in 11 parts of pure water, and this was dropped into 1 l of 5N-NaOH solution.
次に、空気を0.517分の割合で送り込み、酸化した
。Next, air was fed in at a rate of 0.517 minutes for oxidation.
得られた沈澱物を洗浄、乾燥し、AI変変成−Fe00
Hを得た。The obtained precipitate was washed, dried, and transformed into AI-Fe00
I got H.
これをペースト化し、金電極を形成したアルミナ磁器板
に塗布して、実施例1と同様に可燃性ガス検知素子を作
製した。This was made into a paste and applied to an alumina porcelain plate on which a gold electrode was formed, to produce a combustible gas detection element in the same manner as in Example 1.
発熱体に電流を流し、ガス感応部を350°Cに保持し
た。A current was passed through the heating element to maintain the gas sensitive part at 350°C.
このときの素子の空気中での電気抵抗値は、23.4M
Ωであり、0.4容量□のプロパンガスを含む空気中で
の値は4.7MΩであった。At this time, the electrical resistance value of the element in air is 23.4M
Ω, and the value in air containing 0.4 volume □ of propane gas was 4.7 MΩ.
次にこの素子の発熱体への通電を断ち、400℃の温度
の電気炉中に1000時間放置した。Next, the power supply to the heating element of this element was cut off, and the element was left in an electric furnace at a temperature of 400°C for 1000 hours.
それから、先と同様の測定を行なったところ、その抵抗
値は空気中では37MΩで、0.4容量□のプロパンガ
スを含む空気中では5.4MΩであった。Then, the same measurements as above were performed, and the resistance value was 37 MΩ in air and 5.4 MΩ in air containing 0.4 volume □ of propane gas.
以上のように、Al2O3、G a 20 sおよびI
n2O3の酸化物群から選ばれた少なくとも1種を、0
.1〜20モル%含む、γ−Fe2O3は、ガス感応特
性に優れているとともに、高温放置に対して特性がきわ
めて安定している。As mentioned above, Al2O3, Ga 20 s and I
At least one selected from the oxide group of n2O3 is
.. γ-Fe2O3 containing 1 to 20 mol% has excellent gas sensitivity characteristics and is extremely stable when left at high temperatures.
高温放置に関しては、上記実施例では無通電で空気中に
放置という条件下での結果についてのみ述べたが、通電
加熱状態で放置しても、あるいは可燃性ガスを含む空気
中に放置しても、特性の安定性に優れていた。Regarding high-temperature storage, in the above example, only the results were described under the condition of leaving the product in the air with no electricity applied, but even if the product was left in an electrically heated state or in an air containing flammable gas. , and had excellent stability of characteristics.
そして煮沸や混生放置、混生電圧印加などの試験におい
ても良好な結果が得られた。Good results were also obtained in tests such as boiling, leaving the mixture in a mixed state, and applying a mixed voltage.
r Fe2O3系のガス感応体の検知素子としての劣化
には、主として熱によるものであるが、大きくわけて(
1)ガス含有雰囲気中の焼結体の抵抗値の上昇と(2)
ガス感応特注(ガスによる抵抗変化率)の減少の2種が
あリ、これらの二つの劣化は同時に進むことが多い。r The deterioration of Fe2O3-based gas sensitive materials as sensing elements is mainly due to heat, but there are two main causes: (
1) Increase in the resistance value of the sintered body in a gas-containing atmosphere and (2)
There are two types of deterioration: gas-sensitive customization (resistance change rate due to gas), and these two types of deterioration often proceed at the same time.
従ってこの両者は互に関連があると考えられ、rFe2
O3の相転移によって説明出来る。Therefore, these two are considered to be related to each other, and rFe2
This can be explained by the phase transition of O3.
一方、高湿中通室や煮沸処理などを組み合わせると上述
の如き劣化は促進されるが、これらのことは湿度が直接
ガスは間接的に上記相転移に影響を与えるものと考える
と理解しやすい。On the other hand, the above-mentioned deterioration is accelerated when combined with a high-humidity chamber or boiling treatment, but this is easy to understand if you consider that humidity directly affects gas, and gas indirectly affects the above-mentioned phase transition. .
そのときにはγ−Fe2O3の耐熱性を向上させる添加
物は耐湿性をも向上させる可能性が太きい。In that case, there is a strong possibility that the additive that improves the heat resistance of γ-Fe2O3 also improves the moisture resistance.
さらに、温度サイクルや振動に対しても、安定しており
、バルク状あるいは皮膜状の焼結体としての特徴が十分
得られた。Furthermore, it was stable against temperature cycles and vibrations, and had sufficient characteristics as a bulk or film-like sintered body.
そして、その形状は、使用目的や使用場所などに応じて
、バルク状あるいは皮膜状のいずれかにもすることがで
きる。The shape can be either a bulk shape or a film shape depending on the purpose of use and the place of use.
また、ガス感応後の抵抗値復帰時間を、使用温度を高め
ることができるため、AIなどを含まないものに比べて
、3分の1〜5分の1に短縮することができた。Furthermore, since the operating temperature can be increased, the time required for the resistance value to recover after gas sensitivity can be reduced to one-third to one-fifth of that of a material that does not contain AI or the like.
出発材料としては、実施例に示した化合物に限られるも
のではなく、最終的にγ−Fe2O3に、Al2O3、
Ga2O3およびI n 203のうちの少なくとも1
種が含まれている焼結体になるものであればよい。The starting materials are not limited to the compounds shown in the examples, but ultimately γ-Fe2O3, Al2O3,
At least one of Ga2O3 and I n 203
Any material that forms a sintered body containing seeds may be used.
実施例におけるような焼結の際の雰囲気は、窒素に限ら
れるものではなく、アルゴンをはじめとする不活性ガス
、炭酸ガス、あるいは少量の水素を含む不活性なガスな
どの非酸化性雰囲気、または真空であってもよい。The atmosphere during sintering as in the examples is not limited to nitrogen, but may also be a non-oxidizing atmosphere such as an inert gas such as argon, carbon dioxide gas, or an inert gas containing a small amount of hydrogen. Or it may be a vacuum.
そして、バルク状のγ−Fe203焼結体を作製するた
めの焼成温度は、500〜1200℃の範囲内とするこ
とが推奨される。The firing temperature for producing the bulk γ-Fe203 sintered body is recommended to be within the range of 500 to 1200°C.
焼結温度が500℃より低くなると、焼結が不十分にな
り、機械的強度や耐水性、耐湿性が低下する。When the sintering temperature is lower than 500° C., sintering becomes insufficient and mechanical strength, water resistance, and moisture resistance decrease.
また、それが1200℃を越えると粒成長が著しくなり
、Fe3O4を酸化してγ−F e 203とすること
が困難になるとともに、応答時間と復帰時間が長くなる
。Furthermore, if the temperature exceeds 1200° C., grain growth becomes significant, making it difficult to oxidize Fe3O4 to γ-Fe 203, and lengthening the response time and recovery time.
そして、この場合、変成Fe3O4を酸化して、γ−F
e2O3を得るときの酸化温度は、700℃以下とする
ことが、望ましい。In this case, the modified Fe3O4 is oxidized to produce γ-F
The oxidation temperature when obtaining e2O3 is desirably 700°C or lower.
それが700℃を越えると、α−Fe203が多量に析
出するようになる。If the temperature exceeds 700°C, a large amount of α-Fe203 will precipitate.
量産するときには、100〜200℃の比較的低い温度
から徐々に高めることがよく、このような酸化処理をす
ると、焼結体にひび割れを生じたりするようなことはな
くなる。For mass production, it is preferable to gradually increase the temperature from a relatively low temperature of 100 to 200°C, and by performing such an oxidation treatment, cracks will not occur in the sintered body.
また、皮膜状の焼結体とするときには、変成γFe2O
3の粉末は、0.1μ瓶以下の粒径とすることが望まし
い。In addition, when making a film-like sintered body, modified γFe2O
It is desirable that the powder of No. 3 has a particle size of 0.1μ or less.
あまり粒径が大きくなると、基板に対する接着性が悪く
なり、容易に剥離してしまう。If the particle size becomes too large, the adhesion to the substrate will deteriorate and it will be easily peeled off.
そして、その焼結温度は500℃を越えないことが望ま
しい。It is desirable that the sintering temperature does not exceed 500°C.
それが高すぎると、変成γFe2O3の粒径が小さいた
め、過燐酸になりやすく、可燃性ガスに対する感応性が
悪くなる。If it is too high, the particle size of the modified γFe2O3 is small, so it tends to become superphosphoric acid, and the sensitivity to flammable gas deteriorates.
以上説明したように、本発明にかかる素子は、80〜9
9.8モル%の7’−Fe203に、添加物としてAl
2O3,Ga2O3およびIn2O3の三種の酸化物群
から選択された少くとも一種を0.2〜20モル%の比
率で含む焼結体をガス感応体とし、これに電気抵抗測定
用の1対の電極と加熱用のヒータを付与して可燃性ガス
の濃度変化により、前記ガス感応体の電気抵抗値が変化
することを用いて可燃性ガスを検知することを特徴とす
る可燃性ガス検知素子である。As explained above, the element according to the present invention has an 80 to 9
9.8 mol% of 7'-Fe203 was added with Al as an additive.
A sintered body containing at least one selected from the three oxide groups of 2O3, Ga2O3, and In2O3 at a ratio of 0.2 to 20 mol% is used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance is attached to this sintered body. A combustible gas detection element is characterized in that it detects a combustible gas by applying a heater for heating and changing the electrical resistance value of the gas sensitive body due to a change in the concentration of the flammable gas. .
この素子は、可燃性ガスに対する感応性、および特性の
安定性に優れており、また焼結体であるため、熱衝撃や
機械的振動に対しても強いものである。This element has excellent sensitivity to combustible gases and stable characteristics, and since it is a sintered body, it is resistant to thermal shock and mechanical vibration.
さらに、可燃性ガスに対する応答時間および復帰時間が
短く、特に復帰時間はγ−F e 203のみの場合に
比べて、大巾に短縮され、応答性が著しく改善される。Furthermore, the response time and recovery time to combustible gas are short, and in particular, the recovery time is greatly shortened compared to the case of only γ-F e 203, and the response is significantly improved.
外気温度の変動に対しても、素子の抵抗変化が小さく、
実用性の高いものである。The resistance change of the element is small even when the outside temperature fluctuates.
It is highly practical.
なお、本発明においては、α−Fe203成分などが焼
結体中にある程度台まれていても、その本質的な性質が
失なわれてしまうようなことがない。In addition, in the present invention, even if the α-Fe203 component or the like is contained in the sintered body to some extent, its essential properties will not be lost.
そして、より特性を向上させたり、あるいは用途により
適した性質を得たりするために、他の成分をさらに添加
含有させることも可能である。Further, in order to further improve the characteristics or obtain properties more suitable for the purpose, it is also possible to further add and contain other components.
そして可燃性ガスとしては、プロパンやイソブタン以外
に、都市ガスやエチルアルコール、メチルアルコール、
水素、アセトン、その他一般の炭化水素をはじめ、種々
の可燃性のガス状物質をあげることができる。In addition to propane and isobutane, flammable gases include city gas, ethyl alcohol, methyl alcohol,
Various flammable gaseous substances can be mentioned, including hydrogen, acetone, and other common hydrocarbons.
第1図は本発明にかかる可燃性ガス検知素子の一実施例
の構造を示す斜視図、第2図はこの素子の組成比率と抵
抗、感度との関係の一例を示す図、第3図は他の実施例
の構造を示す斜視図である。
2・・・・・・皮膜状のガス感応体、3・・・・・・電
極、4・・・・・・白金発熱体、11・・・・・・バル
ク状のガス感応体、12・・・・・・電極、14・・・
・・・白金発熱体。FIG. 1 is a perspective view showing the structure of one embodiment of the combustible gas detection element according to the present invention, FIG. 2 is a diagram showing an example of the relationship between the composition ratio, resistance, and sensitivity of this element, and FIG. FIG. 7 is a perspective view showing the structure of another embodiment. 2... Film-like gas sensitive body, 3... Electrode, 4... Platinum heating element, 11... Bulk gas sensitive body, 12... ...Electrode, 14...
...Platinum heating element.
Claims (1)
してAl2O3、Ga 20 sおよび■n203の三
種の酸化物群から選択された少くとも一種を0.2〜2
0モル%の比率で含む焼結体をガス感応体とし、これに
電気抵抗測定用の1対の電極と加熱用ヒータを付与して
可燃性ガスの濃度変化により、前記ガス感応体の電気抵
抗値が変化することを用いて可燃性ガスを検知すること
を特徴とする可燃性ガス検知素子。180 to 99.8 mol% of γ-Fe2O3, and at least one selected from the three oxide groups of Al2O3, Ga20s, and ■n203 as an additive, in an amount of 0.2 to 2
A sintered body containing 0 mol % is used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance and a heater are attached to the gas sensitive body, and the electrical resistance of the gas sensitive body is measured by changing the concentration of combustible gas. A combustible gas detection element characterized by detecting combustible gas using a change in value.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13694175A JPS5853739B2 (en) | 1975-11-13 | 1975-11-13 | Kanenseigaskenchisoshi |
| US05/738,745 US4045178A (en) | 1975-11-08 | 1976-11-03 | Reducing gas sensor |
| FR7633525A FR2331016A1 (en) | 1975-11-08 | 1976-11-05 | REDUCING GAS DETECTORS CONTAINING GAMMA FERRIC OXIDE AND AT LEAST ONE OTHER METAL OXIDE |
| DE19762651160 DE2651160C3 (en) | 1975-11-08 | 1976-11-05 | Sensor for reducing gases |
| GB46458/76A GB1527406A (en) | 1975-11-08 | 1976-11-08 | Reducing gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13694175A JPS5853739B2 (en) | 1975-11-13 | 1975-11-13 | Kanenseigaskenchisoshi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260696A JPS5260696A (en) | 1977-05-19 |
| JPS5853739B2 true JPS5853739B2 (en) | 1983-12-01 |
Family
ID=15187103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13694175A Expired JPS5853739B2 (en) | 1975-11-08 | 1975-11-13 | Kanenseigaskenchisoshi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853739B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54161993A (en) * | 1978-06-12 | 1979-12-22 | Matsushita Electric Ind Co Ltd | Inflammable gas detecting element and production thereof |
-
1975
- 1975-11-13 JP JP13694175A patent/JPS5853739B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5260696A (en) | 1977-05-19 |
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