JPS5853843B2 - How to measure rotational accuracy of rotating shaft - Google Patents
How to measure rotational accuracy of rotating shaftInfo
- Publication number
- JPS5853843B2 JPS5853843B2 JP53140195A JP14019578A JPS5853843B2 JP S5853843 B2 JPS5853843 B2 JP S5853843B2 JP 53140195 A JP53140195 A JP 53140195A JP 14019578 A JP14019578 A JP 14019578A JP S5853843 B2 JPS5853843 B2 JP S5853843B2
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- Prior art keywords
- rotating shaft
- displacement
- workpiece
- accuracy
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
この発明は工作機械の主軸やタービンの回転軸等の回転
軸の回転精度を測定する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring the rotation accuracy of a rotating shaft such as a main shaft of a machine tool or a rotating shaft of a turbine.
なか、この明細書において回転精度とは、JIS、B、
6201−1973に示されるような回転軸の振れ及び
または回転中の軸方向の動きを意味する。In this specification, rotational accuracy refers to JIS, B,
6201-1973 refers to the runout of the rotating shaft and/or axial movement during rotation.
例えば旋盤等の工作機械においては、主軸の回転精度が
被剛材の加工精度と密接な関連をもつための主軸の回転
精度を向上させるために多くの努力がはられてきており
、またこれにとも々って主軸の回転精度を測定し主軸の
回転精度が良くなるように設計に反−映させることが必
要とされる。For example, in machine tools such as lathes, many efforts have been made to improve the rotational accuracy of the spindle because the rotational accuracy of the spindle is closely related to the machining accuracy of the rigid material. Therefore, it is necessary to measure the rotational accuracy of the spindle and reflect it in the design so that the rotational accuracy of the spindle is improved.
主軸の回転精度を測定する方法としては従来から各種の
ものが開発されてきているが、例えば旋盤等にあ・いて
加工中の被削材の回転を測定するものVCアっては、測
定結果に主軸の回転精度成分(主軸の回転振れによるも
の)と被削材の形状成分(被削材の形状に原因する振れ
によるもの)との両者が含1れており、したがって主軸
の回転精度成分だけを正確に知ることが困難であった。Various methods have been developed to measure the rotational accuracy of the main spindle. For example, VC is a method that measures the rotation of the workpiece being machined in a lathe, etc. includes both the rotational accuracy component of the spindle (due to rotational runout of the spindle) and the shape component of the workpiece (due to runout caused by the shape of the workpiece). Therefore, the rotational accuracy component of the spindle It was difficult to know exactly.
そこで次に、真円とみなし得る程度の高精度に加工した
測定用のリング或いは球を主軸に取り付けこのリング若
しくは球の回転を測定する方法が開発されている。Next, a method has been developed in which a measurement ring or ball that is processed with high precision and can be considered to be a perfect circle is attached to the main shaft and the rotation of this ring or ball is measured.
しかしながらこの方法は加工中における回転精度の評価
が必ずしも容易でないこと、測定用のリング若しくは球
の真円度が測定結果に影響を与えること、軸の剛性低下
を招く場合があること、及び測定用リング或いは球の中
心と軸の中心とを正確に一致させることが必ずしも容易
でないこと等の問題があり、なお回転軸の回転精度を正
確に測定することが困難であった。However, with this method, it is not always easy to evaluate the rotational accuracy during machining, the roundness of the measurement ring or sphere may affect the measurement results, it may cause a decrease in the rigidity of the shaft, and the measurement There are problems in that it is not always easy to accurately align the center of the ring or sphere with the center of the shaft, and it is also difficult to accurately measure the rotation accuracy of the rotating shaft.
また、回転軸の端面の軸方向の出入り(アキシャルモー
ション)に関する回転精度の測定をする場合にも、回転
軸の端面の形状、表面状態に影響されることなく、回転
精度だけを正確に測定することは相当に困難である。Also, when measuring the rotational accuracy of the end face of the rotating shaft in the axial direction (axial motion), only the rotational accuracy can be accurately measured without being affected by the shape or surface condition of the end face of the rotating shaft. This is quite difficult.
この発明は上記の如き事情に鑑みてなされたものであっ
て、被削材の加工中においても回転軸の回転精度の高精
度i測定が可能であり、かつその測定を自動化すること
ができ、かつ測定リング、測定球等を必要とすることの
ない回転軸の回転精度測定方法を提供することを目的と
するものである。This invention was made in view of the above circumstances, and it is possible to perform high-precision measurement of the rotation accuracy of a rotating shaft even during processing of a workpiece, and the measurement can be automated. Another object of the present invention is to provide a method for measuring rotational accuracy of a rotating shaft that does not require a measuring ring, a measuring ball, or the like.
この目的に対応してこの発明の回転軸の回転精度測定方
法は、同一平面内に位置する3個以上の非接触型の変位
計を回転体の面に対向させて固定位置に配設し、前記回
転体の運動を前記変位計によって測定し、前記回転体の
回転軸の回転精度成分と回転体の形状成分とを含む前記
変位計の出力信号から前記形状成分を検出して区別し、
前記変位計の変位出力信号を前記回転体の形状に基づく
変位について補正することによって前記回転体の回転軸
の回転精度を測定することを特徴としている。In order to achieve this purpose, a method for measuring rotational accuracy of a rotating shaft according to the present invention includes arranging three or more non-contact displacement meters located in the same plane at fixed positions facing the surface of a rotating body, Measuring the motion of the rotating body with the displacement meter, detecting and distinguishing the shape component from the output signal of the displacement meter that includes a rotation accuracy component of a rotation axis of the rotating body and a shape component of the rotating body,
The present invention is characterized in that the rotational accuracy of the rotating shaft of the rotating body is measured by correcting the displacement output signal of the displacement meter with respect to the displacement based on the shape of the rotating body.
以下この発明の詳細を一実施例を示す図面について説明
する。The details of this invention will be explained below with reference to the drawings showing one embodiment.
第1図、第2図、第3図及び第4図はこの発明を回転軸
のラジアルモーションに関する回転精度の測定に適用し
た実施例を示している。FIGS. 1, 2, 3, and 4 show an embodiment in which the present invention is applied to measurement of rotation accuracy regarding radial motion of a rotating shaft.
第1図に於いて、1は回転精度を測定しようとする回転
軸2に取り付けられた被削材であり、被削材1の特定断
面を含む平面内に3個の変位計AB、及びCを配置する
。In Fig. 1, 1 is a workpiece attached to a rotating shaft 2 whose rotation accuracy is to be measured, and three displacement gauges AB and C are installed in a plane including a specific cross section of the workpiece 1. Place.
変位計A、 B、及びCとしては静電容量型変位計、渦
電流形変位形、その他任意の変位計を使用することがで
きる。As the displacement meters A, B, and C, a capacitive displacement meter, an eddy current displacement meter, or any other displacement meter can be used.
回転中の被削材1の運動を変位計A、B、Cによって測
定する。The movement of the rotating workpiece 1 is measured by displacement meters A, B, and C.
変位計A、 B、及びCの出力には回転軸の回転精度
成分だけでなく被削材1の形状成分も含まれる。The outputs of the displacement meters A, B, and C include not only the rotation accuracy component of the rotating shaft but also the shape component of the workpiece 1.
変位計の出力から形状成分を検出し、その分を変位計の
出力について補正する。A shape component is detected from the output of the displacement meter, and the output of the displacement meter is corrected accordingly.
この実施例では被削材形状の検出に3点式真円度測定法
を応用し、したがって被削材の形状の検出は次の演算に
よってなされる。In this embodiment, a three-point roundness measuring method is applied to detect the shape of the workpiece, and therefore the shape of the workpiece is detected by the following calculation.
3個の変位計A、 B、 Cの中心をOとし、変位計間
の角度をφ、τとする。The centers of the three displacement meters A, B, and C are O, and the angles between the displacement meters are φ and τ.
また点Oを通る直角座標系をx−yとし、y軸からの軸
の回転角度をθとする。Further, let the rectangular coordinate system passing through point O be x-y, and let the rotation angle of the axis from the y-axis be θ.
被削材の回転中心αは一般には点Oと一致しないがαは
0点の近傍にあたるため、被削材の平均半径をr。The rotation center α of the workpiece generally does not coincide with the point O, but α is close to the 0 point, so the average radius of the workpiece is r.
とじて、被削材の形状は次のように表わされる。Therefore, the shape of the workpiece is expressed as follows.
ここでRa t Rb t Rcは各変位計と点Oの間
の距離、X、yは被削材の変位成分、すなわち軸の回転
精度成分に対応するものである。Here, Ra t Rb t Rc corresponds to the distance between each displacement meter and point O, and X and y correspond to the displacement component of the workpiece, that is, the rotation accuracy component of the shaft.
つぎに各変位計の出力に係数L at bを乗じて加
え合わせると、合計出力は次のようになる。Next, when the output of each displacement meter is multiplied by the coefficient L at b and added together, the total output is as follows.
S(θトーク(θ+r )−ycosτ−xs in
τ・・(11)式(11)より被削材の変位成分、すな
わち主軸の回転誤差成分の推定量が次のように求められ
る。S(θtalk(θ+r)−ycosτ−xs in
τ...(11) From equation (11), the estimated amount of the displacement component of the workpiece, that is, the rotational error component of the main shaft, is obtained as follows.
以上の場合に、各変位計A、B、Cとして静電容量型変
位計(DISA TYPE 51D11)を使用し、変
位計Aと変位計B及び変位計Aと変位計C間の角度をそ
れぞれφ−134°、τ−122゜と設定している。In the above case, capacitance type displacement meters (DISA TYPE 51D11) are used as each displacement meter A, B, and C, and the angle between displacement meter A and displacement meter B and between displacement meter A and displacement meter C is φ. -134° and τ-122°.
また主軸の回転角の検出には主軸端に取りつげた1回転
2000分割のロータリーエンコーダ(NIKON R
X−2000)を用い、出力パルス分周回路により12
5,250,5001000及び2000パルス/re
vyのうちの任意の分割数で変位計出力信号のサンプリ
ングを行なっている。In addition, to detect the rotation angle of the main shaft, a rotary encoder (NIKON R
X-2000), the output pulse frequency divider circuit
5,250,5001000 and 2000 pulses/re
The displacement meter output signal is sampled using an arbitrary division number of vy.
変位計出力信号は一旦トランジェントレコーダ(BIO
MATION 1015)に記録した後、紙テープデー
タに変換し、ミニコンピユータ(YHP 2100A
)を使用して解析を行なった。The displacement meter output signal is first transferred to a transient recorder (BIO).
MATION 1015), convert it to paper tape data, and input it to a minicomputer (YHP 2100A).
) was used for analysis.
実施例 旋盤の工具切込方向のラジアルモーションを測定した。Example The radial motion of the lathe in the cutting direction of the tool was measured.
直径50間、長さ150mff1の545C被削材をチ
ャックに上り片持支持し、被削材端面より45mmの位
置でのラジアルモーションを測定した。A 545C workpiece with a diameter of 50mm and a length of 150mff1 was cantilevered onto a chuck, and the radial motion at a position 45mm from the end surface of the workpiece was measured.
測定に先だち被削材をチャックに取り付ける際に生じた
偏心分を極力小さなものとするために軽切削を行なった
。Prior to measurement, light cutting was performed to minimize eccentricity that occurred when attaching the workpiece to the chuck.
また変位計は旋盤の心押台の方向からみて第1図と同じ
となるように配置し、工具切込方向をX軸に一致させて
いる。Furthermore, the displacement gauges are arranged in the same manner as shown in FIG. 1 when viewed from the direction of the tailstock of the lathe, and the tool cutting direction is aligned with the X-axis.
測定は主軸を600 rpmで回転させた無負荷状態で
行なった。The measurement was performed in an unloaded state with the main shaft rotating at 600 rpm.
データのサンプリングはロータリエンコーダの出力パル
スに同期して行ない、各変位計につき、1回転当り25
0点で4回転分記録した。Data sampling is performed in synchronization with the output pulse of the rotary encoder, and for each displacement meter, 25
Four rotations were recorded at 0 point.
第2図は本装置により検出された被削材の形状と同被削
材を真円度測定機(ロンコム2C−07)の回転テーブ
ルにのせ、上記静電容量型変位計により測定した形状と
を対比して示したものである。Figure 2 shows the shape of the workpiece detected by this device and the shape measured by the capacitive displacement meter mentioned above when the same workpiece was placed on the rotary table of the roundness measuring machine (Loncom 2C-07). This is a comparison.
部分的に0.05μm程度の差はあるものの両者は良く
一致している。Although there is a difference of about 0.05 μm in some parts, the two agree well.
なお変位計先端部の直径は8mytと犬きく、第2図か
らも明らかなように被削材の形状成分のうち次数の高い
ものは検知されない。Note that the diameter of the tip of the displacement meter is 8 myt, which is quite large, and as is clear from FIG. 2, high-order shape components of the workpiece are not detected.
このため形状成分は5次昔で求めてかげば十分である。Therefore, it is sufficient to calculate the shape component in five orders of magnitude.
第3図は式12に従って計算したラジアルモーションの
うちのX成分、すなわち工具切込方向の成分4回転分を
式13により極座標表示したものである。FIG. 3 shows the X component of the radial motion calculated according to Equation 12, that is, the component of four rotations in the cutting direction of the tool, expressed in polar coordinates using Equation 13.
ここでX(θ)は回転角θでの軸ふれ、doは極座標表
示の際の基礎円直径であり、第3図の表わす図形はこの
旋盤により加工される被削材の真円度に対応するもので
ある。Here, X (θ) is the shaft runout at the rotation angle θ, do is the basic circle diameter when displayed in polar coordinates, and the figure shown in Figure 3 corresponds to the roundness of the workpiece processed by this lathe. It is something to do.
またX(の(0くθく8π)のパワー・スペクトルを図
4に示す。Further, the power spectrum of X((0 x θ x 8π) is shown in FIG.
4回転分の信号ヨリパワースペクトルを計算しているた
め分解能は0.25山、r e v、となっている。Since the signal power spectrum for four rotations is calculated, the resolution is 0.25 peaks, r ev.
軸の回転精度の場合重要な低い次数での分解能を高める
ためにはさらに長い信号を必要とするが、第4図より0
.5山、1山、2山および24山/rev、成分が現わ
れていることがわかる。In the case of axis rotation accuracy, a longer signal is required to improve the resolution at low orders, which is important, but from Fig. 4, 0
.. It can be seen that components of 5 peaks, 1 peak, 2 peaks, and 24 peaks/rev appear.
このうち0.5山/r e v、成分は主軸軸受に起因
した成分が現われたものと思われる。Of these, the component of 0.5 peaks/r ev appears to be due to the main shaft bearing.
また2山/rev、成分が生じていることは、第2図に
示した被削材の形状が楕円成分を含んでいることとも一
致する。Furthermore, the fact that two peaks/rev components occur also coincides with the fact that the shape of the workpiece shown in FIG. 2 includes an elliptical component.
24山rev、成分は主軸回転数が60 Or pmの
時に240H2の振動数に相当するもので、被削材主軸
系の固有振動数に一致している。The 24 peak rev component corresponds to the frequency of 240H2 when the spindle rotation speed is 60 Or pm, which corresponds to the natural frequency of the workpiece spindle system.
1山/ r e v。成分は被削材の偏心分を含むもの
と考えられる。1 pile/r.e.v. The component is thought to include the eccentricity of the work material.
次にこの発明を軸端面のアキシャルモーションに関する
回転精度の測定に適用した実施例について説明する。Next, a description will be given of an embodiment in which the present invention is applied to measurement of rotation accuracy regarding axial motion of a shaft end face.
第5図及び第6図に示す如く、回転軸2′の端面に対向
させて、同一平面内にかつ同一円周上に位置する3個の
変位計、A′、 B’、 C’を配置する。As shown in FIGS. 5 and 6, three displacement gauges A', B', and C' are placed in the same plane and on the same circumference, facing the end surface of the rotating shaft 2'. do.
前記の実施例の場合と同様に、変位計A′B’、 C’
の出力には回転軸の変位成分と回転軸の端面の形状成分
との両者が含捷れるから、変位計に「、C′の出力を前
記演算によって、回転軸の端面の形状成分について補正
することにより、回転軸のアキシャルモーションに関す
る回転精度を測定することができる。As in the previous embodiment, displacement meters A'B', C'
Since the output of includes both the displacement component of the rotating shaft and the shape component of the end face of the rotating shaft, the output of ", C' is corrected for the shape component of the end face of the rotating shaft by the above calculation on the displacement meter. By doing so, it is possible to measure the rotation accuracy regarding the axial motion of the rotating shaft.
以上の説明から明らかな通り、この発明によれば測定リ
ング、測定球等を使用することなしに、かつ被削材の加
工中に於いても、回転軸の回転精度の高度な測定及びそ
の測定の自動化を図ることが出来る。As is clear from the above description, according to the present invention, it is possible to highly measure the rotational accuracy of a rotating shaft without using a measuring ring, a measuring ball, etc., and even during machining of a workpiece. can be automated.
また従来の測定方法では渦電流形変位計は被削材等回転
体の応力分布によって出力信号が変るため、特に材料が
鉄系の場合には測定精度に問題があったが、この発明に
よれば変位計が渦電流形変位計であっても、応力分布に
起因する信号が3個の変位計A、B、C若しくは、変位
計A′「、C′にそれぞれ共通にあられれるところから
、応力分布にもとづく誤差を容易に検出することができ
、これを補正することによって正確な測定を計ることが
でき、したがって従来使用不能と考えられていた渦電流
形変位計も使用することができる。In addition, in the conventional measurement method, the output signal of the eddy current displacement meter changes depending on the stress distribution of the rotating body such as the workpiece, so there was a problem with measurement accuracy, especially when the material was iron-based. For example, even if the displacement meter is an eddy current displacement meter, the signal caused by the stress distribution is common to the three displacement meters A, B, and C, or to the displacement meters A' and C'. Errors based on stress distribution can be easily detected, and accurate measurements can be made by correcting them. Therefore, eddy current type displacement meters, which were previously thought to be unusable, can also be used.
なか以上の説明は、特に旋盤等の工作機械の主軸の回転
精度を測定する場合にこの発明を適用した例についてな
されているが、この発明はタービンの回転軸その他の回
転体の回転精度を測定する方法にもその11適用できる
のは勿論である。The above explanation has been made regarding an example in which the present invention is applied to measuring the rotational accuracy of a main shaft of a machine tool such as a lathe, but this invention is also applicable to measuring the rotational accuracy of a rotating shaft of a turbine or other rotating body. Of course, the method 11 can also be applied to the method.
第1図はこの1発明による回転軸のラジアルモーション
に関する回転精度の測定原理を示す正面説明図、第2図
は被削材の形状を示す説明図、第3図は被削材の4回転
分のラジアルモーションヲ示す説明図、第4図は被削材
のラジアルモーションのパワースペクトルを示すグラフ
、第5図はこの発明による回転軸のアキシャルモーショ
ンに関スる回転精度の測定原理を示す正面説明図、及び
第6図はこの発明による回転軸のアキシャルモーション
に関する回転精度の測定原理を示す側面説明図である。
1・・・・・・被削材、2.z・・・・・・回転軸、A
、 B、 C。
A’、 B: C’・・・・・・変位計。Fig. 1 is an explanatory front view showing the principle of measuring rotational accuracy regarding the radial motion of the rotary shaft according to this first invention, Fig. 2 is an explanatory view showing the shape of the workpiece, and Fig. 3 is an illustration of four rotations of the workpiece. FIG. 4 is a graph showing the power spectrum of the radial motion of the workpiece, and FIG. 5 is a front view showing the principle of measuring rotational accuracy related to the axial motion of the rotating shaft according to the present invention. 6 and 6 are side explanatory views showing the principle of measuring rotation accuracy regarding the axial motion of a rotating shaft according to the present invention. 1... Work material, 2. z...Rotation axis, A
, B, C. A', B: C'...Displacement meter.
Claims (1)
を回転体の面に対向させて固定位置に配設し、前記回転
体の運動を前記変位計によって測定し、前記回転体の回
転軸の回転精度成分と回転体の形状成分とを含む前記変
位計の出力信号から前記形状成分を検出して区別し、前
記変位計の変位出力信号を前記回転体の形状に基づく変
位について補正することによって前記回転体の回転軸の
回転精度を測定することを特徴とする回転軸の回転精度
測定方法。1. Three or more non-contact displacement meters located in the same plane are arranged at fixed positions facing the surface of the rotating body, and the movement of the rotating body is measured by the displacement meters, and the movement of the rotating body is measured by the displacement meters. Detecting and distinguishing the shape component from the output signal of the displacement meter including a rotation accuracy component of the rotating shaft and a shape component of the rotating body, and correcting the displacement output signal of the displacement meter for the displacement based on the shape of the rotating body. A method for measuring rotational accuracy of a rotating shaft, characterized in that the rotational accuracy of the rotating shaft of the rotating body is measured by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53140195A JPS5853843B2 (en) | 1978-11-14 | 1978-11-14 | How to measure rotational accuracy of rotating shaft |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53140195A JPS5853843B2 (en) | 1978-11-14 | 1978-11-14 | How to measure rotational accuracy of rotating shaft |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5582008A JPS5582008A (en) | 1980-06-20 |
| JPS5853843B2 true JPS5853843B2 (en) | 1983-12-01 |
Family
ID=15263113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53140195A Expired JPS5853843B2 (en) | 1978-11-14 | 1978-11-14 | How to measure rotational accuracy of rotating shaft |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853843B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4495810A (en) * | 1983-04-20 | 1985-01-29 | General Electric Company | Probe mounting system |
| JPH076786B2 (en) * | 1983-11-22 | 1995-01-30 | 工業技術院長 | Non-contact rotation accuracy measurement method |
| JPS61240106A (en) * | 1984-12-13 | 1986-10-25 | Toyoda Mach Works Ltd | Sizing equipment |
| JPS63173911A (en) * | 1987-01-14 | 1988-07-18 | Nippon Light Metal Co Ltd | Method and device for recognizing outer circumferential shape of rotating body |
| JPH02105007A (en) * | 1988-10-14 | 1990-04-17 | Topy Ind Ltd | Method and device for measuring shape of wheel rim or the like |
| JP2000283702A (en) * | 1999-03-31 | 2000-10-13 | Fotonikusu:Kk | Distance sensor and distance measuring device |
| JP4667186B2 (en) * | 2005-09-26 | 2011-04-06 | 学校法人慶應義塾 | Rotational accuracy measurement method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5288054A (en) * | 1976-01-16 | 1977-07-22 | Osaka Kiko Co Ltd | Method of and apparatus for accurately measuring inner and outer diameter of work |
-
1978
- 1978-11-14 JP JP53140195A patent/JPS5853843B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5582008A (en) | 1980-06-20 |
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