JPS5912618B2 - Manufacturing method of electro-optic ceramics - Google Patents
Manufacturing method of electro-optic ceramicsInfo
- Publication number
- JPS5912618B2 JPS5912618B2 JP49109553A JP10955374A JPS5912618B2 JP S5912618 B2 JPS5912618 B2 JP S5912618B2 JP 49109553 A JP49109553 A JP 49109553A JP 10955374 A JP10955374 A JP 10955374A JP S5912618 B2 JPS5912618 B2 JP S5912618B2
- Authority
- JP
- Japan
- Prior art keywords
- pbtio
- tio
- yti
- xba
- electro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】
本発明は、AB03(Aは1価又は2価の陽イオン、B
は平均原子価か5価又は4価の陽イオン)タイプで表わ
されるペロブスカイト型結晶構造の強誘電性セラミック
スを透明化するための製造方法に関するものである。Detailed Description of the Invention The present invention provides AB03 (A is a monovalent or divalent cation, B
relates to a manufacturing method for making transparent ferroelectric ceramics having a perovskite crystal structure expressed by average valence, pentavalent or tetravalent cations.
透明な強誘電性セラミツクスは、すぐれた電気光学特性
を有し、各種の光変調素子あるいは画像蓄積素子用材料
としてきわめて有用なものである。Transparent ferroelectric ceramics have excellent electro-optical properties and are extremely useful as materials for various light modulation elements or image storage elements.
従来、強誘電性セラミツクスとしては、チタン酸バリウ
ム(BaTiO3)あるいはチタンジルコン酸鉛固溶体
(PbTlO3−PbZrO3)などが知られており、
これらは誘電体材料、コンデンサー、圧電材料として実
用化されているものである。しかし、これらのセラミツ
クス材料は、ほとんど透光性を有しないため、その用途
は上記特定分野に限定され、電気光学的な面への応用は
皆無であつた。最近、光の散乱が少ない透明な強誘電性
セラミツクスが開発されている。このセラミツクスは、
(Pb,La)(Zr,Tl)03の組成を有し従来知
られている圧電性セラミツクスPb(Zr,Ti)03
にLaを5〜10at%添加したもので、現存する唯一
の透明強誘電性セラミツクスである。Pb(Zr,Ti
)03のみでは、ほとんど透光性を示さないにも拘らず
、これにLaを少量固溶させることにより、透光性がい
ちじるしく増加する理由については、これまで全く解明
されていない。したがつて透明強誘電性セラミツクスを
得るためには、Laを固溶添加することが必要不可欠な
ものと考えられていた。本発明は、上述したセラミツク
スが透明化するための条件の第一として、セラミツクス
を構成している結晶粒の光学異方性が小さいこと、第二
として、可視光領域における光の吸収が小さいこと、第
3として、セラミツクス中に光散乱の原因となる残留気
孔が存在しないこと、を満足することにより、Laを含
むことなしに強誘電性セラミツクスを透明化するための
新しい製造方法を提供するものである。Conventionally, barium titanate (BaTiO3) and lead titanium zirconate solid solution (PbTlO3-PbZrO3) are known as ferroelectric ceramics.
These materials have been put to practical use as dielectric materials, capacitors, and piezoelectric materials. However, since these ceramic materials have almost no light transmittance, their use is limited to the above-mentioned specific fields, and there has been no application to electro-optical fields. Recently, transparent ferroelectric ceramics that scatter less light have been developed. This ceramics is
A conventionally known piezoelectric ceramic Pb(Zr,Ti)03 having a composition of (Pb,La)(Zr,Tl)03
It is the only existing transparent ferroelectric ceramic with 5 to 10 at% of La added to it. Pb(Zr, Ti
)03 alone exhibits almost no light transmittance, but the reason why the light transmittance is significantly increased by adding a small amount of La to it as a solid solution has not been elucidated to date. Therefore, in order to obtain transparent ferroelectric ceramics, it was considered essential to add La as a solid solution. In the present invention, the first condition for the above-mentioned ceramic to become transparent is that the optical anisotropy of the crystal grains constituting the ceramic is small, and the second condition is that light absorption in the visible light region is small. Thirdly, the present invention provides a new manufacturing method for making ferroelectric ceramics transparent without including La by satisfying the requirement that there are no residual pores that cause light scattering in the ceramics. It is.
すなわち、本発明の強誘電セラミツクスは、(1)ペロ
ブスカイト型の結晶構造を有するABO8タイプ(Aは
1価又は2価の陽イオンLl,Na,K,Pb,Ca,
Bは平均原子価が5価又は4価となるような陽イオンM
g,W,Sc,Nb,In,Ta,Cd,Zr,Ti,
Ni,Naの組合せ)の強誘電物質、または以下に示す
(2)〜(自)の固溶体強誘電物質;(2) (1−x
)KNbO3−XKTaO3O.3〈X<0.6,(3
) (1−x)PbTiO3−XCaTiO3O.4O
〈x〈0.65,(4) (1−x)BaTiO3−X
SrTiO3O.O5〈x<0.6(5) (1−X)
BaZrO3−XCaZrO3O.Ol〈x〈0.17
,(6)(Pbl−X,Bax)(Hfy,TiO−,
)0s0.15〈x〈1.0,0くy〈0.9,(7)
(Pbl−X,Srx)(Hfy,Til−,)08
0.15〈xく0.7,0くy〈0.9,(8) (1
−x)BaTiO3−XBaSnO.JO.O5〈x〈
0.20(9) (1−x)NaNbO3−XKTaO
,O.O6〈x〈0.6101(1−x)PbTiO8
−XCaSnO3O.2O〈x<0.60συ (1−
x)PbTiO3−XSrSnO,O.2O<x<0.
35(代)(Pbl−X,Bax)(Snl−,,Ti
y)030.2くx〈1.0,0.1〈y〈0.803
(1−x)PbTlOs−、([JilA,Cel/2
)TiO8O.55〈x<0.65(自)(1−x)P
bTlO3−x(Lil/2,NbV)TiO3O.5
Oくx<0.6505) (1−?C)PbTiO3−
XPb(MglA,Wl/2)QO.5〈xく1.0(
至)(1−x)PbTiO3−x(K1/2,Bi1A
)ZrqO.25くx〈0.45a7) (Cax,S
ry,Baz)TiO3但しx+y+z=10〈x〈0
.6,0.2<y〈1,0<z〈0.7..08) (
Cax,Bay,Pbz)TiO8但しx+y+z=1
0.45くx<0.55,0〈y〈0.35・,0.2
くz〈0.55であり、これらは従来の透明強誘電物質
とはまつたく異なるものである。That is, the ferroelectric ceramic of the present invention has (1) an ABO8 type having a perovskite crystal structure (A is a monovalent or divalent cation Ll, Na, K, Pb, Ca,
B is a cation M whose average valence is 5 or 4
g, W, Sc, Nb, In, Ta, Cd, Zr, Ti,
A combination of Ni and Na), or a solid solution ferroelectric material of (2) to (self) shown below; (2) (1-x
) KNbO3-XKTaO3O. 3〈X<0.6, (3
) (1-x)PbTiO3-XCaTiO3O. 4O
〈x〈0.65, (4) (1-x)BaTiO3-X
SrTiO3O. O5〈x<0.6(5) (1-X)
BaZrO3-XCaZrO3O. Ol〈x〈0.17
, (6) (Pbl-X, Bax) (Hfy, TiO-,
)0s0.15〈x〈1.0,0kuy〈0.9, (7)
(Pbl-X, Srx) (Hfy, Til-,)08
0.15〈xku0.7,0kuy〈0.9, (8) (1
-x) BaTiO3-XBaSnO. J.O. O5〈x〈
0.20(9) (1-x)NaNbO3-XKTaO
,O. O6〈x〈0.6101(1-x)PbTiO8
-XCaSnO3O. 2O〈x<0.60συ (1−
x) PbTiO3-XSrSnO,O. 2O<x<0.
35 (generation) (Pbl-X, Bax) (Snl-,,Ti
y) 030.2x〈1.0, 0.1〈y〈0.803
(1-x)PbTlOs-, ([JilA,Cel/2
) TiO8O. 55〈x<0.65(self)(1-x)P
bTlO3-x(Lil/2, NbV)TiO3O. 5
Ox<0.6505) (1-?C)PbTiO3-
XPb(MglA,Wl/2)QO. 5〈xku1.0(
to) (1-x) PbTiO3-x (K1/2, Bi1A
)ZrqO. 25 x〈0.45a7) (Cax,S
ry, Baz) TiO3 However, x+y+z=10〈x〈0
.. 6,0.2<y<1,0<z<0.7. .. 08) (
Cax, Bay, Pbz) TiO8 However, x+y+z=1
0.45x<0.55,0〈y〈0.35・,0.2
z<0.55, and these are completely different from conventional transparent ferroelectric materials.
さらに、上記物質においての散乱中心となる残留気孔を
除去し、透光性を向上せしめる目的で、上記組成のセラ
ミツクス原料として、固溶体粉末あるいは、共沈法によ
るシユウ酸塩粉末を用い、酸素ふん囲気中にて従来より
も高温(900〜1450゜C)高圧(50以上、実用
的には70〜700Kf/(71)でホツトグレス焼結
することを特徴とするものである。この焼結条件は、酸
素気流中でアルミナ製型を用いる場合に生じるダイスの
強度からの制限である。また焼結時間は少なくとも1時
間、実用的には5〜200時間が適当と考えられる。以
下実施例によつて本発明の詳細を説明する。Furthermore, in order to remove residual pores that become scattering centers in the above substances and improve translucency, solid solution powder or oxalate powder produced by coprecipitation was used as the ceramic raw material with the above composition, and an oxygen-filled atmosphere was used. The sintering conditions are as follows: This is a limitation due to the strength of the die that occurs when using an alumina mold in an oxygen stream.Also, the sintering time is at least 1 hour, and 5 to 200 hours is considered to be appropriate in practice. The details of the present invention will be explained.
実施例本発明の電気光学セラミツクスの出発原料として
、純度99.9%以上、粉末粒子径〈2μmのPbO,
MgO,OdO,NiO,WO,,Sc,O3,ce2
O3ツNd2O3jBi2O3ラSnO2yzrO2?
TlO2FNb2O5FTa2O5,Li2COS,N
a2OO3,K,CO3を所定の化学式に従つて秤量す
る。Example As a starting material for the electro-optic ceramics of the present invention, PbO with a purity of 99.9% or more and a powder particle size of <2 μm,
MgO, OdO, NiO, WO, Sc, O3, ce2
O3tsuNd2O3jBi2O3raSnO2yzrO2?
TlO2FNb2O5FTa2O5, Li2COS, N
Weigh a2OO3, K, and CO3 according to a predetermined chemical formula.
上記粉末を蒸留水を溶媒としてポールミル混合し、蒸発
乾固後混合物を700℃〜130『C,l〜12時間、
酸素気流中で仮焼する。冷却後、この仮焼粉末をメノウ
製乳鉢などで粗粉砕し、アセトンを溶媒として再度ボー
ルミル混合を行なう。この粉末を700′Cにて1時間
、酸素気流中で加熱することにより、粉末に吸着してい
るアセトンを蒸発除去する。仮焼粉末を鋼製のダイスを
用い、350Kf/C7tの圧力で、直径15闘、高さ
8關の大きさに加圧成形する。この圧粉体をアルミナ製
1ダイスに装入し、電気炉にセツト後ホツトプレス焼結
を行なつた。ここで用いた焼結法は、まず試料を装填し
たアルミナダイスを電気炉内にセツトした状態で、20
0〜400′Cll〔2T0rrの真空度に60分間排
気した後、酸素ガスにて炉内を置換し、その後、酸素気
流中で加熱し、1000〜1450゜C,1〜200時
間、50〜700K9/CTIIO)圧力でホツトプレ
ス焼結する方法である。ホツトプレスされた試料は、ダ
イヤモンド製のコア−ドリルを用いアルミナダイスから
取り出し所望の寸法にダイアモンドカツタ一にて切断し
、試料の両面を光学研磨する。The above powder was mixed in a pole mill using distilled water as a solvent, and after evaporation to dryness, the mixture was heated at 700°C to 130°C, l for 12 hours.
Calcinate in an oxygen stream. After cooling, this calcined powder is coarsely ground in an agate mortar or the like, and mixed again in a ball mill using acetone as a solvent. By heating this powder at 700'C for 1 hour in an oxygen stream, acetone adsorbed on the powder is removed by evaporation. The calcined powder is pressure-molded using a steel die at a pressure of 350Kf/C7t to a size of 15 mm in diameter and 8 mm in height. This green compact was charged into one die made of alumina, set in an electric furnace, and hot press sintered. In the sintering method used here, first, an alumina die loaded with a sample was set in an electric furnace, and then heated for 20 minutes.
After evacuating to a vacuum level of 0 to 400'Cll [2T0rr for 60 minutes, the inside of the furnace was replaced with oxygen gas, and then heated in an oxygen stream to 1000 to 1450°C, 1 to 200 hours, 50 to 700K9 /CTIIO) Pressure hot press sintering method. The hot-pressed sample is removed from the alumina die using a diamond core drill and cut into desired dimensions with a diamond cutter, and both surfaces of the sample are optically polished.
第1表は、本発明になる組成物の製造条件とその光透過
率を示したものである。Table 1 shows the manufacturing conditions and light transmittance of the composition of the present invention.
第1表において(刀印にて示した組成物では1価、2価
および希土類金属の原料として酢酸塩を用い、この水溶
液中に他の原料酸化物を十分分散させシシユウ酸を加え
酸化物との混合沈澱物を合成した。In Table 1, in the compositions indicated by the sword seal, acetate is used as a raw material for monovalent, divalent and rare earth metals, other raw material oxides are sufficiently dispersed in this aqueous solution, and oxalic acid is added to form the oxides. A mixed precipitate was synthesized.
上記沈澱物を仮焼しシヨウ酸塩の分解と酸化物との反応
をおこなわせ固溶体粉末を得、本粉末をホツトプレス焼
結したものである。以上説明したごとく、本発明によれ
ば、ペロブスカイト型の結晶構造を有するABO3タイ
プのセラミツクスを透明化する場合、セラミツクスを構
成している各結晶粒の光学的異方性が小さく、かつ吸収
の少ないようなセラミツクス組成を選定し、さらに光の
散乱中心をなくするような方法でセラミツクスをホツト
プレス焼結することにより、従来に比していちじるしく
高い光透過率を有するセラミツクスを得ることができる
。The above precipitate was calcined to decompose the siolate and react with the oxide to obtain a solid solution powder, which was then hot-pressed and sintered. As explained above, according to the present invention, when ABO3 type ceramics having a perovskite crystal structure are made transparent, each crystal grain constituting the ceramic has small optical anisotropy and low absorption. By selecting such a ceramic composition and hot-press sintering the ceramic in a manner that eliminates light scattering centers, it is possible to obtain a ceramic having significantly higher light transmittance than conventional ceramics.
本発明の実施例によつて得られたセラミツクス焼結体は
、すぐれた電気的、光学的性質を有し、各種の画像メモ
リー素子、光変調素子、光学機器などに用いてすぐれた
性能を発揮し、本発明の工業的効果はきわめて大きい。The ceramic sintered bodies obtained by the embodiments of the present invention have excellent electrical and optical properties, and exhibit excellent performance when used in various image memory devices, light modulation devices, optical devices, etc. However, the industrial effects of the present invention are extremely large.
Claims (1)
PbもしくはCa、BはMg、W、Sc、Nb、In、
Ta、Cd、Zr、TiおよびNiから平均原子価が4
価または5価となるように選択された組合せ)で示され
る組成を有するペロブスカイト型セラミックス、もしく
は下記一般式で示される組成を持つた固溶体強誘電物質
、(1−x)KNbO_3−xKTaO_3(ただし、
0.3<x<0.6)、(1−x)PbTiO_3−x
CaTiO_3(ただし、0.40<x<0.65)、
(1−x)BaTiO_3−xSrTiO_3(ただし
、0.05<x<0.6)、(1−x)BaZrO_3
−xCaZrO_3(ただし、0.01<x<0.17
)、(Pb_1_−_xBa_x)(Hf_yTi_1
_−_y)O_3(ただし、0.15<x1.0、0≦
y<0.9)、(Pb_1_−_xSr_x)(Hf_
yTi_1_−_y)O_3(ただし、0.15<x<
0.7、0≦y<0.9)、(1−x)BaTiO_3
−xBaSnO_3(ただし、0.05<x<0.20
)、(1−x)NaNbO_3−KTaO_3(ただし
、0.06<x<0.061)、(1−x)PbTiO
_3−xCaSnO_3(0.20<x<0.60)、
(1−x)PbTiO_3−xSrSnO_3(ただし
、0.20<x<0.35)、(Pb_2_−_xBa
_x)(Sn_1_−_yTi_y)O_3(ただし、
0.2<x<1.0、0.1<y<0.8)、(1−x
)PbTiO_3−x(Li_1_/_2Ce_1_/
_2)TiO_2(ただし、0.55<x<0.65)
(1−x)PbTiO_3−x(Li_1_/_2Nb
_1_/_2)TiO_2(ただし、0.50<x<0
.65)、(1−x)PbTiO_3−xPb(Mg_
1_/_2W_1_/_2)O_3(ただし、0.5<
x<1.0)、(1−x)PbTiO_3−x(K_1
_/_2Bi_1_/_2)ZrO_2(ただし、0.
25<x<0.45)、(Ca_xSr_yBa_z)
TiO_3(ただし、x+y+z=1、0<x<0.6
、0.2<y<1、0<z<0.7)、(Ca_xBa
_yPb_z)TiO_3(ただし、x+y+z=1、
0.45<x<0.55、0<y<0.35、0.2<
y<0.55)、をホットプレス焼結によつて形成する
に際し、これら一般式を満足するよう各金属元素の酸化
物あるいは加熱により酸化物に変化し得る金属元素の化
合物であつて純度99.9%以上、粒子径2μm以下の
粉末を圧力50〜700Kg/cm^2、温度900〜
1450℃、時間5〜200時間なる条件でホットプレ
ス焼結して行なうことを特徴とする電気光学セラミック
スの製法。1 General formula ABO_3 (where A is Li, Na, K,
Pb or Ca, B is Mg, W, Sc, Nb, In,
Ta, Cd, Zr, Ti and Ni with an average valence of 4
A perovskite ceramic having a composition represented by a combination selected to be valent or pentavalent, or a solid solution ferroelectric material having a composition represented by the following general formula, (1-x)KNbO_3-xKTaO_3 (however,
0.3<x<0.6), (1-x)PbTiO_3-x
CaTiO_3 (however, 0.40<x<0.65),
(1-x) BaTiO_3-xSrTiO_3 (0.05<x<0.6), (1-x)BaZrO_3
-xCaZrO_3 (where 0.01<x<0.17
), (Pb_1_−_xBa_x) (Hf_yTi_1
____y) O_3 (however, 0.15<x1.0, 0≦
y<0.9), (Pb_1_−_xSr_x)(Hf_
yTi_1_-_y)O_3 (however, 0.15<x<
0.7, 0≦y<0.9), (1-x)BaTiO_3
-xBaSnO_3 (where 0.05<x<0.20
), (1-x) NaNbO_3-KTaO_3 (however, 0.06<x<0.061), (1-x)PbTiO
_3-xCaSnO_3 (0.20<x<0.60),
(1-x)PbTiO_3-xSrSnO_3 (0.20<x<0.35), (Pb_2_-_xBa
_x) (Sn_1_-_yTi_y)O_3 (However,
0.2<x<1.0, 0.1<y<0.8), (1-x
)PbTiO_3-x(Li_1_/_2Ce_1_/
_2) TiO_2 (0.55<x<0.65)
(1-x)PbTiO_3-x(Li_1_/_2Nb
_1_/_2) TiO_2 (0.50<x<0
.. 65), (1-x)PbTiO_3-xPb(Mg_
1_/_2W_1_/_2)O_3 (however, 0.5<
x<1.0), (1-x)PbTiO_3-x(K_1
_/_2Bi_1_/_2) ZrO_2 (however, 0.
25<x<0.45), (Ca_xSr_yBa_z)
TiO_3 (where x+y+z=1, 0<x<0.6
, 0.2<y<1, 0<z<0.7), (Ca_xBa
_yPb_z) TiO_3 (however, x+y+z=1,
0.45<x<0.55, 0<y<0.35, 0.2<
y < 0.55), by hot press sintering, the oxide of each metal element or a compound of a metal element that can be changed into an oxide by heating and has a purity of 99% is required to satisfy these general formulas. Powder with a particle size of .9% or more and a particle size of 2 μm or less at a pressure of 50 to 700 Kg/cm^2 and a temperature of 900 to
A method for producing electro-optic ceramics characterized by hot press sintering at 1450° C. for 5 to 200 hours.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49109553A JPS5912618B2 (en) | 1974-09-25 | 1974-09-25 | Manufacturing method of electro-optic ceramics |
| DE19742449698 DE2449698A1 (en) | 1973-10-19 | 1974-10-18 | PROCESS FOR PRODUCING AN OPTICALLY TRANSPARENT ABO TIEF 3 CERAMIC |
| US05/516,498 US4019915A (en) | 1973-10-19 | 1974-10-21 | Method of producing optically transparent ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49109553A JPS5912618B2 (en) | 1974-09-25 | 1974-09-25 | Manufacturing method of electro-optic ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5140151A JPS5140151A (en) | 1976-04-03 |
| JPS5912618B2 true JPS5912618B2 (en) | 1984-03-24 |
Family
ID=14513148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49109553A Expired JPS5912618B2 (en) | 1973-10-19 | 1974-09-25 | Manufacturing method of electro-optic ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5912618B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996000704A1 (en) * | 1994-06-30 | 1996-01-11 | Hitachi, Ltd. | Layered bismuth oxide ferroelectric material |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5323325B2 (en) * | 1971-11-09 | 1978-07-14 | ||
| JPS5624963B2 (en) * | 1974-07-04 | 1981-06-09 |
-
1974
- 1974-09-25 JP JP49109553A patent/JPS5912618B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996000704A1 (en) * | 1994-06-30 | 1996-01-11 | Hitachi, Ltd. | Layered bismuth oxide ferroelectric material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5140151A (en) | 1976-04-03 |
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