JPS5912637B2 - Single crystal manufacturing method - Google Patents
Single crystal manufacturing methodInfo
- Publication number
- JPS5912637B2 JPS5912637B2 JP12483176A JP12483176A JPS5912637B2 JP S5912637 B2 JPS5912637 B2 JP S5912637B2 JP 12483176 A JP12483176 A JP 12483176A JP 12483176 A JP12483176 A JP 12483176A JP S5912637 B2 JPS5912637 B2 JP S5912637B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- single crystal
- seed crystal
- axis
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
【発明の詳細な説明】
本発明はニオブ酸リチウム、タンタル酸リチウム、又は
ニオブ・タンタル酸リチウム単結晶のチョクラルスキー
法による製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing lithium niobate, lithium tantalate, or lithium niobium tantalate single crystal by the Czochralski method.
通常、これらの単結晶は、ルツボに原料を溶解しその後
回転している種結晶を接触させ、引上られるものである
。Usually, these single crystals are pulled up by melting raw materials in a crucible and then bringing a rotating seed crystal into contact with the crucible.
この様にして得られた単結晶は圧電素子、光変調素子、
表面波素子材料としてすぐれている事が知られている。The single crystal obtained in this way can be used for piezoelectric elements, light modulation elements,
It is known to be an excellent material for surface wave devices.
これらの素子材料としての単結晶は歪が少くかつ格子欠
陥の少い結晶が要求されている。Single crystals used as materials for these devices are required to have low strain and few lattice defects.
このため、上記単結晶をチョクラルスキー法で引上げる
場合、溶解液の温度制御はきわめて精確に行われている
。Therefore, when pulling the single crystal using the Czochralski method, the temperature of the solution is controlled extremely accurately.
しかしかかる手段でも歪及び格子欠陥の点では良質の単
結晶は得られない。However, even with such a method, a single crystal of good quality cannot be obtained in terms of strain and lattice defects.
本発明者等は上記の従来の単結晶を種々研究観察した結
果、Z軸引上の場合、種結晶として、稜方向がY軸力向
、伸長方向がZ軸方向の3角柱単結晶を用いる事により
良質の単結晶を得るのに成功した。As a result of various research and observations of the above-mentioned conventional single crystals, the present inventors found that in the case of Z-axis pulling, a triangular prism single crystal whose ridge direction is the Y-axis force direction and whose elongation direction is the Z-axis direction is used as a seed crystal. As a result, we succeeded in obtaining a high-quality single crystal.
以下本発明を完成するにいたった経緯についてのべる。The circumstances that led to the completion of the present invention will be described below.
従来、Z軸育成の場合種結晶は作業能率上から第1図の
如く伸長方向がZ軸方向の四角柱が使用される。Conventionally, in the case of Z-axis growth, a square prism whose extension direction is in the Z-axis direction is used as a seed crystal, as shown in FIG. 1, from the viewpoint of work efficiency.
この種結晶1を用いて育成実験を行い、種結晶とそれ以
後の成長結晶間を肉眼、偏光顕微鏡、X線トポグラフィ
にて観察した所、Z軸育成に特有な育成結晶表面に生じ
る3本の稜線は、結晶固有の対称性には従わず、第1図
の如く、種結晶端部の稜から必ず生じ、かつねじれなが
ら数−成長しその後3回対称をもった3本の稜線2が形
成される。A growth experiment was conducted using this seed crystal 1, and when the space between the seed crystal and the subsequently grown crystal was observed with the naked eye, a polarizing microscope, and X-ray topography, three lines were observed on the surface of the grown crystal, which is unique to Z-axis growth. The ridge lines do not follow the symmetry inherent in the crystal, but as shown in Figure 1, they always arise from the ridge at the end of the seed crystal, grow several times while twisting, and then three ridge lines 2 with 3-fold symmetry are formed. be done.
この間の断面をとり、偏光顕微鏡、X線トポグラフィで
観察した所、種結晶部は歪、格子欠陥が少いが稜線のね
じれ部分以後の成長部分には大きな歪と格子欠陥が発生
していた。When a cross section was taken between this area and observed using a polarizing microscope and X-ray topography, it was found that the seed crystal part had few strains and lattice defects, but large strains and lattice defects had occurred in the growing part after the twisted part of the ridge line.
この事は歪と格子欠陥が稜線のねじれが結晶中の歪と格
子欠陥の原因となる事を示している。This shows that distortion and lattice defects in the crystal are caused by twisting of the edges.
このため本発明者等は、種々の外形をもつ種結晶をつく
り、実験した所、Z軸育成においては稜方向がY方向の
3角柱の種結晶を用いた所従来の育成結晶に見られた稜
線のねじれはなくかつ、育成結晶中には歪と格子欠陥が
少い事を発見した。For this reason, the present inventors created seed crystals with various external shapes and conducted experiments, and found that in Z-axis growth, when a triangular prism seed crystal with the ridge direction in the Y direction was used, the crystals observed in conventionally grown crystals were It was discovered that there was no twisting of the ridge lines, and that there were few strains and lattice defects in the grown crystal.
以下本発明の実施例を第2図を参照しながら説明する。Embodiments of the present invention will be described below with reference to FIG.
すなわち、第2図の如く歪と格子欠陥の少い単結晶の稜
の方向がY軸方向、伸長方向がZ軸方向の種結晶11を
使用し、5 rrun/時間の引上スピードでZ軸方向
のニオブ酸リチウム、タンタル酸リチウム、ニオブ・タ
ンタル酸リチウムをそれぞれ育成した。That is, as shown in FIG. 2, a seed crystal 11 of a single crystal with few strains and lattice defects, whose edge direction is the Y-axis direction and whose elongation direction is the Z-axis direction, is used, and the Z-axis is pulled at a pulling speed of 5 rrun/hour. Lithium niobate, lithium tantalate, and lithium niobium tantalate were grown in the following directions.
これらの結晶固有の稜線12は種結晶の稜線から発生し
ねじれる事なく成長した。These crystal-specific ridgelines 12 were generated from the ridgelines of the seed crystal and grew without twisting.
育成結晶をZ軸方向に平行に切断し断面を偏光顕微鏡、
X線トポグラフィで観察した新種結晶と同程度の歪と格
子欠陥であった。The grown crystal was cut parallel to the Z-axis direction and the cross section was examined using a polarizing microscope.
The strain and lattice defects were on the same level as the new seed crystal observed by X-ray topography.
以上実施例の如くの育成法により本発明の単結晶は圧電
素子、光変調素子、表面波素子としてすぐれている事が
わかる。It can be seen that the single crystal of the present invention is excellent as a piezoelectric element, a light modulation element, and a surface wave element by the growth method as described in the above examples.
第1図はZ軸方向引上の従来方法による引上結晶のZ軸
方向の投影図、第2図はZ軸方向引上の本発明方法によ
る引上結晶のZ軸方向の投影図である。FIG. 1 is a projected view in the Z-axis direction of a crystal pulled by the conventional method of pulling in the Z-axis direction, and FIG. 2 is a projected view in the Z-axis direction of the pulled crystal by the method of the present invention, which is pulled in the Z-axis direction. .
Claims (1)
製造方法において、稜方向がY軸方向、伸長方向がZ軸
方向の3角柱種結晶を用いてニオブ酸リチウム、タンタ
ル酸リチウム又はニオブ・タンタル酸リチウム結晶をZ
軸方向に育成することを特徴とする単結晶の製造方法。1. In a method for producing a single crystal in which a single crystal is grown by the Czochralski method, lithium niobate, lithium tantalate, or niobium Z lithium tantalate crystal
A method for producing a single crystal characterized by growing it in the axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12483176A JPS5912637B2 (en) | 1976-10-20 | 1976-10-20 | Single crystal manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12483176A JPS5912637B2 (en) | 1976-10-20 | 1976-10-20 | Single crystal manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5350100A JPS5350100A (en) | 1978-05-08 |
| JPS5912637B2 true JPS5912637B2 (en) | 1984-03-24 |
Family
ID=14895166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12483176A Expired JPS5912637B2 (en) | 1976-10-20 | 1976-10-20 | Single crystal manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5912637B2 (en) |
-
1976
- 1976-10-20 JP JP12483176A patent/JPS5912637B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5350100A (en) | 1978-05-08 |
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