JPS5916706B2 - Ion detection device of mass spectrometer - Google Patents
Ion detection device of mass spectrometerInfo
- Publication number
- JPS5916706B2 JPS5916706B2 JP56002535A JP253581A JPS5916706B2 JP S5916706 B2 JPS5916706 B2 JP S5916706B2 JP 56002535 A JP56002535 A JP 56002535A JP 253581 A JP253581 A JP 253581A JP S5916706 B2 JPS5916706 B2 JP S5916706B2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- conversion electrode
- ions
- electrode
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
【発明の詳細な説明】
本発明は質量分析装置に用いられるイオン検出装置に関
し、特に正イオン及び負イオンを簡単な操作で切換えて
検出することのできる検出装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ion detection device used in a mass spectrometer, and particularly to a detection device that can detect positive ions and negative ions by switching them with a simple operation.
従来の質量分析装置は専ら正イオンを分析対象としてい
るが、近時負イオンの質量分析の有効性が主張され、一
台で正負両イオンを分析することのできる質量分析装置
が開発されている。Conventional mass spectrometers analyze only positive ions, but recently the effectiveness of mass spectrometry of negative ions has been advocated, and mass spectrometers that can analyze both positive and negative ions with a single device have been developed. .
斯かる装置ではイオン検出装置として正イオン用、負イ
オン用の両方を揃えなければならない。その点分析磁場
を備える磁場型質量分析装置では通常イオン加速電圧が
数にVと高いため、従来の正イオンに対する検出装置を
そのまま用いても負イオンを検出装置内へ取込んで検出
することができ、極めて有利である。In such a device, both positive ion and negative ion detection devices must be provided as ion detection devices. In magnetic field mass spectrometers equipped with an analysis magnetic field, the ion accelerating voltage is usually as high as several volts, so even if the conventional detection device for positive ions is used as is, negative ions cannot be taken into the detection device and detected. Yes, it is extremely advantageous.
ところがこの様に正イオンに対する検出装置を負イオン
に対してそのまま使用する際、利得調整のために検出装
置内のイオンマルチプライヤ(入射したイオンを電子に
変換フ して増倍するもの)に印加する電圧を変化させ
ると、該電圧がイオン加速電圧と等しくなる電圧側えば
3にV付近で第1図においてaで示す様にイオンマルチ
プライヤの増倍率が低下する現象が起きる。5 これは
負イオンがイオンマルチプライヤに印加される負電圧に
よつて減速され、速度が零に近くなるためイオンマルチ
プライヤヘ入射する確率が低くなるためと考えられる。However, when a detection device for positive ions is used as is for negative ions, an electric current is applied to the ion multiplier (which converts incident ions into electrons and multiplies them) inside the detection device to adjust the gain. When the voltage is changed, a phenomenon occurs in which the multiplication factor of the ion multiplier decreases as shown by a in FIG. 1 when the voltage is equal to the ion accelerating voltage, for example around 3V. 5 This is considered to be because the negative ions are decelerated by the negative voltage applied to the ion multiplier, and the velocity becomes close to zero, so that the probability of the negative ions entering the ion multiplier becomes low.
イオンマルチプライヤに印加する電圧は利得調整のため
に可変するも0 のであるから増倍率は電圧に応じてリ
ニアに変化することが望ましく、この様な現象は好まし
くない。本発明は上述した点に鑑みてなされたものであ
V)従来の正イオン用検出装置に簡単な構成を付5 加
するの与で増倍率の低下なく負イオンをも検出すること
のできるイオン検出装置を提供することを目的としてい
る。Since the voltage applied to the ion multiplier is variable for gain adjustment, it is desirable that the multiplication factor varies linearly in accordance with the voltage, and such a phenomenon is undesirable. The present invention has been made in view of the above points.V) By adding a simple configuration to the conventional positive ion detection device, it is possible to detect negative ions without reducing the multiplication factor. The purpose is to provide a detection device.
以下図面を用いて本発明を詳説する。第2図は本発明の
一実施例を示す斜視図である。The present invention will be explained in detail below using the drawings. FIG. 2 is a perspective view showing an embodiment of the present invention.
θ 同図において1は第1ダイノードD1〜第nダイノ
ードPnを有するイオンマルチプライヤであり、2は第
1ダイノードD、に近接して配置されたスリットである
。該スリット2の前方には2枚のアース電極3、4がイ
オン通過口を一致させてi5順次配列されており、図示
しない磁場型質量分析系によつて選択されたイオンビー
ムIは該通過口を通つて第1ダイノードD1へ入射する
。5,6は上記電極3,4の間にイオ7通路を挾んで配
置された変換電極及び対向電適で、対向電極6にはアー
ス電位が与えられ、変換電極5にはスイツチ7を介して
直流電源8から1乃至数KVの正の高電位又はアース電
位が選択的に与えられる。θ In the figure, 1 is an ion multiplier having a first dynode D1 to an n-th dynode Pn, and 2 is a slit disposed close to the first dynode D. In front of the slit 2, two ground electrodes 3 and 4 are arranged in i5 order so that the ion passage ports coincide with each other, and the ion beam I selected by a magnetic field type mass spectrometry system (not shown) passes through the passage ports. , and enters the first dynode D1. Reference numerals 5 and 6 denote a conversion electrode and a counter electrode arranged between the electrodes 3 and 4 with the ion 7 path in between. A positive high potential of 1 to several KV or a ground potential is selectively applied from a DC power source 8.
上述の如き構成に}いて、正イオン検出時にはスイツチ
7はa側に倒され、変換電極5にアース電位が与えられ
るため、アース電極3,4間には電界が生成されず、正
イオンIは第1図の縦断面図である第3図に示す様にそ
のまま直進し、負の高電圧が印加された第1ダイノード
D,へ入射して検出される。次に負イオン検出時にはス
イツチ7はb側に倒され、変換電極5に電源8によつて
正の高電位が与えられるため、該変換電極5と対向電極
6の間にはイオン通路を横切る方向に偏向電界が生成さ
れる。With the above-mentioned configuration, when positive ions are detected, the switch 7 is turned to side a and the conversion electrode 5 is given a ground potential, so no electric field is generated between the ground electrodes 3 and 4, and the positive ions I are As shown in FIG. 3, which is a vertical cross-sectional view of FIG. 1, the light beam continues straight, enters the first dynode D to which a negative high voltage is applied, and is detected. Next, when negative ions are detected, the switch 7 is turned to the b side and a high positive potential is applied to the conversion electrode 5 by the power source 8, so that there is a gap between the conversion electrode 5 and the counter electrode 6 in the direction across the ion path. A deflection electric field is generated.
そのため負イオンは第3図で破線で示すように該偏向電
痒によつて変換電極5へ向けて放物線を描いて接近し、
遂には該電極5へ衝突する。逆に許えばイオンが電極5
へ衝突する様に偏向電界の強度及び電極5の長さが設定
されている。該電極5の表面は負イオンの衝突によつて
正イオンとして飛び出し易い物質で形成されて卦V1且
つ該電極5には数KVの十分なポテンシヤルが与えられ
ている。従つて該電極5の負イオン衝突点からは衝突し
た負イオンの数に対応した数の正イオンが発生する。該
正イオンは第1ダイノードD1に印加された負の高電圧
に引かれて加速され、該ダイノードへ入射して検出され
る。Therefore, as shown by the broken line in FIG. 3, the negative ions approach the conversion electrode 5 in a parabola due to the deflected electric itching.
Finally, it collides with the electrode 5. On the other hand, if allowed, ions become electrode 5.
The strength of the deflection electric field and the length of the electrode 5 are set so that the deflection electric field collides with the electrode 5. The surface of the electrode 5 is formed of a material that is easily ejected as positive ions upon collision with negative ions, and the electrode 5 is given a sufficient potential of several KV. Therefore, a number of positive ions corresponding to the number of collided negative ions are generated from the negative ion collision point of the electrode 5. The positive ions are accelerated by being attracted by the negative high voltage applied to the first dynode D1, enter the dynode, and are detected.
この様ノこ本発明によれば負イオンの全量が変換電極に
照射され、負イオンが直接イオンマルチプライヤ,へ入
射することがないため、該イオンマルチプライヤに印加
する電圧を変えても増倍率の低下はなく、第1図にbで
示す様にリニアを特性が実現される。周変換電極5から
発生した正イオンがイオンマルチプライヤ1へ入射する
率は、その発生位置によつて大幅に変化する。According to the present invention, the entire amount of negative ions is irradiated to the conversion electrode, and the negative ions do not directly enter the ion multiplier, so even if the voltage applied to the ion multiplier is changed, the multiplication rate is There is no decrease in the voltage, and a linear characteristic as shown by b in FIG. 1 is achieved. The rate at which positive ions generated from the circumferential conversion electrode 5 are incident on the ion multiplier 1 varies greatly depending on the position where they are generated.
そのため実際に使用する際には直流電源8の出力を調節
することにより偏向電界の強度を調節し、変換電極5上
の負イオン衝突位置を該衝突位置から発生した正イオン
が最も効率良くイオンマルチプライヤ1へ入射する、換
?すれば感度が最も高い最適場所に選ぶことが望ましい
。ところで、質量分析装置では磁場掃引による測定が主
に行われるが、一方では加速電圧掃引(連続的又は階段
的)による測定も行われる。Therefore, in actual use, the intensity of the deflection electric field is adjusted by adjusting the output of the DC power supply 8, and the negative ion collision position on the conversion electrode 5 is adjusted so that the positive ions generated from the collision position are most efficiently ion multiplied. Input to plier 1, exchange? If so, it is desirable to select the optimal location with the highest sensitivity. Incidentally, in a mass spectrometer, measurements are mainly performed by magnetic field sweep, but measurements are also performed by accelerating voltage sweep (continuous or stepwise).
この加速電圧掃引を負イオンの測定に卦いて行うと、イ
オンの加速電圧が変わるため変換電極5上の負イオンの
衝突位置が移動してしまい(具体的には加速電圧を高め
るとアース電極4の方向へ、低めるとアース電極3の方
向へ夫々移動する)、感度が大幅に変動する結果となつ
てしまう。第4図は負イオン加速電圧の掃引に連動して
偏向電界強度を可変することにより、変換電極上に卦け
る負イオンの衝突位置の移動を防止し、上述の様な感度
の変動を防ぐようにした実施例を示す構成図である。If this acceleration voltage sweep is performed in conjunction with the measurement of negative ions, the collision position of the negative ions on the conversion electrode 5 will shift because the ion acceleration voltage changes (specifically, if the acceleration voltage is increased, the earth electrode 4 (in the direction of the ground electrode 3 when lowered), this results in a significant change in sensitivity. Figure 4 shows that by varying the deflection electric field strength in conjunction with the sweep of the negative ion accelerating voltage, the collision position of negative ions on the conversion electrode is prevented from moving, and the sensitivity fluctuations described above are prevented. FIG. 2 is a configuration diagram showing an example in which
同図に卦いて第2図と同一の構成要素には同一番号及び
記号を付し、説明を省略する。第4図に卦いて9は磁場
10及び電場11を備えた質量分析系、12は正負共用
イオン源、13は接地された主スリツト、14はイオン
源12から発生した正イオンを加速するために該イオン
源に負電位に与えるための加速電源、15はイオン源1
2から発生した負イオンを加速するために該イオン源に
正電位を与えるための加速電源、16は加速電源14,
15の出力を選択的にイオン源12へ送るためのスイツ
チである。そして上記加速電源15と直流電源8との間
には夫々の出力電圧をVl,V2としたとき、V1が大
きくなつた時(加速電圧力塙くなつた時)V2も大きく
なるような連動関係、例えば第6図に示す様なリニアな
関係が与えられている。従つてスイツチ16,7をb側
を倒した負イオン測定の際加速電圧を例えば高める方向
に変化させると、それに連動して偏向電界も強められる
ため、変換電極上での負イオンの衝突点のアース電極4
の方向への移動は防止される。加速電圧を低める方向に
変化させた場合には逆に偏向電場は弱められ、衝突点の
アース電極3の方向への移動は防止されるため、結局負
イオンの衝突点を加速電圧の変化に拘らず常に最適位置
に保つことができ、感度は常に最高レベルに保たれるこ
とになる。周上述した実施例に卦ける対向電極6は偏向
電界の分布を整えるためのものであり、省略しても負イ
オンは変換電極の周囲に形成される偏向電界によV5変
換電極5へ引きつけられ、衝突するので必ずしも必要で
はない。Components in this figure that are the same as those in FIG. 2 are given the same numbers and symbols, and their explanations will be omitted. In FIG. 4, 9 is a mass spectrometry system equipped with a magnetic field 10 and an electric field 11, 12 is a positive and negative ion source, 13 is a grounded main slit, and 14 is for accelerating positive ions generated from the ion source 12. An accelerating power source for applying a negative potential to the ion source; 15 is the ion source 1;
2, an acceleration power source 14 for applying a positive potential to the ion source to accelerate the negative ions generated from the ion source;
This is a switch for selectively sending the output of 15 to the ion source 12. There is an interlocking relationship between the acceleration power supply 15 and the DC power supply 8 such that when the output voltages are Vl and V2, when V1 becomes large (when the acceleration voltage becomes low), V2 also becomes large. For example, a linear relationship as shown in FIG. 6 is given. Therefore, if the acceleration voltage is changed, for example, in the direction of increasing it when measuring negative ions with the switches 16 and 7 turned to the b side, the deflection electric field is also strengthened, so that the collision point of the negative ions on the conversion electrode is Earth electrode 4
Movement in the direction is prevented. When the accelerating voltage is changed to lower the accelerating voltage, the deflection electric field is weakened and the collision point is prevented from moving toward the earth electrode 3, so that the collision point of negative ions is eventually changed regardless of the change in the accelerating voltage. This means that the sensitivity can always be kept at the highest level. The counter electrode 6 in the embodiment described above is for adjusting the distribution of the deflection electric field, and even if omitted, negative ions are attracted to the V5 conversion electrode 5 by the deflection electric field formed around the conversion electrode. , it is not necessary as it will cause a collision.
又アース電極3,4は周囲からの漏洩電痒が変換電極5
によつて形成される偏向電界に悪影響を及ぼすのを防ぐ
ためのものであ9、どちらか一方又は双方とも省略する
ことができなる。In addition, the earth electrodes 3 and 4 are connected to the conversion electrode 5 due to electrical leakage from the surroundings.
This is to prevent an adverse effect on the deflection electric field formed by 9, and either or both can be omitted.
第1図はイオンマルチプライヤへの印加電圧と増倍率と
の関係を示す図、第2図は本発明の一実施例の構成を示
す斜視図、第3図はその縦断面図、第4図は本発明の他
の実施例の構成を示す図、第5図は加速電圧と直流電源
の出力との関係を示す図である。
1・・・イオンマルチプライヤ、5・・・変換電極、6
・・・対向電極、7,16・・・スイツチ、8・・・直
流電源、15・・・負イオン用加速電源。Fig. 1 is a diagram showing the relationship between the voltage applied to the ion multiplier and the multiplication factor, Fig. 2 is a perspective view showing the configuration of an embodiment of the present invention, Fig. 3 is a longitudinal sectional view thereof, and Fig. 4 5 is a diagram showing the configuration of another embodiment of the present invention, and FIG. 5 is a diagram showing the relationship between the acceleration voltage and the output of the DC power source. 1... Ion multiplier, 5... Conversion electrode, 6
. . . Counter electrode, 7, 16 . . . Switch, 8 . . . DC power supply, 15 . . . Accelerating power supply for negative ions.
Claims (1)
換して増倍するためのイオンマルチプライヤと、該マル
チプライヤの前方に上記選択されたイオンの進行方向に
沿つて配置される変換電極と、該変換電極の方向へ上記
イオンを引き寄せて該変換電極へ衝突させるための偏向
電界を該変換電極の周囲に形成するために該変換電極に
与える正電圧を発生する電源と、正イオン検出時該変換
電極を接地し、負イオン検出時該変換電極を上記電源に
接続する様に切換える切換手段とを備えたことを特徴と
する質量分析装置のイオン検出装置。1. An ion multiplier for converting and multiplying ions selected by the mass spectrometry system into electrons, and a conversion electrode disposed in front of the multiplier along the traveling direction of the selected ions. a power source that generates a positive voltage applied to the conversion electrode to form a deflection electric field around the conversion electrode to attract the ions toward the conversion electrode and cause them to collide with the conversion electrode; and a positive ion detection device. An ion detection device for a mass spectrometer, comprising a switching means for switching the conversion electrode to ground when detecting negative ions and to connect the conversion electrode to the power source when detecting negative ions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56002535A JPS5916706B2 (en) | 1981-01-10 | 1981-01-10 | Ion detection device of mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56002535A JPS5916706B2 (en) | 1981-01-10 | 1981-01-10 | Ion detection device of mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57115752A JPS57115752A (en) | 1982-07-19 |
| JPS5916706B2 true JPS5916706B2 (en) | 1984-04-17 |
Family
ID=11532070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56002535A Expired JPS5916706B2 (en) | 1981-01-10 | 1981-01-10 | Ion detection device of mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916706B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6030507A (en) * | 1983-07-27 | 1985-02-16 | Mitsubishi Heavy Ind Ltd | Roll driving device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60254549A (en) * | 1984-05-31 | 1985-12-16 | Shimadzu Corp | double convergence mass spectrometer |
| JPH083987B2 (en) * | 1989-01-09 | 1996-01-17 | 株式会社日立製作所 | Post-stage acceleration detector for mass spectrometer |
-
1981
- 1981-01-10 JP JP56002535A patent/JPS5916706B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6030507A (en) * | 1983-07-27 | 1985-02-16 | Mitsubishi Heavy Ind Ltd | Roll driving device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57115752A (en) | 1982-07-19 |
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