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JPS5920474B2 - Heat mode laser beam recording method - Google Patents
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JPS5920474B2 - Heat mode laser beam recording method - Google Patents

Heat mode laser beam recording method

Info

Publication number
JPS5920474B2
JPS5920474B2 JP50012072A JP1207275A JPS5920474B2 JP S5920474 B2 JPS5920474 B2 JP S5920474B2 JP 50012072 A JP50012072 A JP 50012072A JP 1207275 A JP1207275 A JP 1207275A JP S5920474 B2 JPS5920474 B2 JP S5920474B2
Authority
JP
Japan
Prior art keywords
recording
laser beam
recording layer
protective layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50012072A
Other languages
Japanese (ja)
Other versions
JPS5188024A (en
Inventor
正直 葛西
洋子 及川
浩 伊藤
宏 松野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50012072A priority Critical patent/JPS5920474B2/en
Priority to US05/643,171 priority patent/US4069487A/en
Priority to DE2558245A priority patent/DE2558245C2/en
Publication of JPS5188024A publication Critical patent/JPS5188024A/ja
Publication of JPS5920474B2 publication Critical patent/JPS5920474B2/en
Expired legal-status Critical Current

Links

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  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Fax Reproducing Arrangements (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Description

【発明の詳細な説明】 本発明はヒートモードレーザービーム記録方法に関する
ものであり、更に詳細には、記録層上に保護層を設けた
、改良されたヒートモードレーザービーム記録方法に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a heat mode laser beam recording method, and more particularly to an improved heat mode laser beam recording method in which a protective layer is provided on the recording layer.

ヒートモードレーザービーム記録(以後 HMLBRと略称する)は、強度変調され且つ走査或い
は偏向されるレーザービームを高パワー密度のスポット
に集束させて、記録部材に照射し、記録部材の−部を選
択的に融解蒸発、除去、変形して記録を行うもので多く
の特長を有する新しい記録方法として知られている。
Heat mode laser beam recording (hereinafter abbreviated as HMLBR) focuses an intensity-modulated, scanned or deflected laser beam into a high-power density spot and irradiates the recording member to selectively target a portion of the recording member. It is known as a new recording method that performs recording by melting, evaporating, removing, and deforming, and has many features.

即ち、加熱現像・定着などの後処理及び処理液を必要と
しないリアルタイムの記録である事、極めて高解像力高
コントラストの画像を形成し得る事、記録媒体は室内光
に感光せず暗室操作が不要である事、計算機の出力や伝
送されて来る時系列信号などの電気信号の記録に適して
いる事、後からの情報の追加即ちアツドオンが可能であ
る事、などの利点を有し、マイクロ画像、超マイクロ画
像、COM)マイクロフアクシミル、写真植字用原板等
に応用され、装置の小型化、機能の高度化、画像品質の
改良等に寄与する可能性が充分にあるものと考えられて
いる。
In other words, it is a real-time recording that does not require post-processing such as heat development and fixing, and does not require processing liquids, can form images with extremely high resolution and high contrast, and the recording medium is not exposed to room light and does not require darkroom operation. It has the advantages of being suitable for recording electrical signals such as computer output and transmitted time series signals, and being able to add information later. It is thought that it has ample potential to be applied to micro facsimiles, phototypesetting original plates, etc., and contribute to the miniaturization of devices, the advancement of functions, and the improvement of image quality. .

通常、前述のHMLBRに用いられる記録部材の構成は
、第1図に示す様に、必要に応じて透明である支持体1
上にレーザー光(3又は3’)を吸収して熔融又は蒸発
して除去される記録層2を形成したものである。
Normally, the configuration of a recording member used in the above-mentioned HMLBR is as shown in FIG.
A recording layer 2 is formed thereon, which absorbs laser light (3 or 3') and is removed by melting or evaporation.

更には第2図及び第3図の様に、記録層2に接してレー
ザー光(3又は3’)の入射する側に反射防止層6を設
けたものがあり、この構成の系は記録層2表面でのレー
ザー光(3又は3’ )の反射が著しく低下する効果を
有するので、、第1図に示す構成の系に較べて感度が顕
著に:−向上するので甚だ有用なものである。
Furthermore, as shown in FIGS. 2 and 3, there is a system in which an antireflection layer 6 is provided on the side where the laser beam (3 or 3') is incident, in contact with the recording layer 2. It has the effect of significantly reducing the reflection of the laser beam (3 or 3') on the 2 surface, so the sensitivity is significantly improved compared to the system with the configuration shown in Figure 1, making it extremely useful. .

而乍ら、HMLBRに於いては本質的に記録層の熔融又
は蒸発を伴う為に、前述の第1図乃至第3図に示される
構成の記録部材を用いたのでは種種の問題が生ずる場合
が少なくない。
However, since HMLBR essentially involves melting or evaporation of the recording layer, various problems may occur if the recording member configured as shown in FIGS. 1 to 3 is used. There are quite a few.

即ちレーザー光を数ミクロン以下のビーム径に集光する
のに必要なレンズ系のワーキングデイスタンス(レンズ
表面から焦点までの距離)は通常数百ミクロン以下と短
かいので、レーザー光照射時に照射部分5から飛散する
記録層形成材料がレンズの表面に付着しその後の記録を
著しく防げる。
In other words, the working distance (distance from the lens surface to the focal point) of the lens system required to focus the laser beam into a beam diameter of several microns or less is usually short, several hundred microns or less, so when the laser beam is irradiated, the irradiated area The recording layer forming material scattered from No. 5 adheres to the surface of the lens, thereby significantly preventing subsequent recording.

又、前記レンズ系の焦点深度は通常数ミクロン以下であ
るため記録部材表面に有効にレーザー光を集光させるに
は何らかの手段で集光状態を検出し、その結果をフイー
ドバツクさせ、リアルタイムで常に一定の集光状態を維
持することが必要であるが、その一般的方式である記録
部材からの反射光を検出して行う方式は簡便で且つ精度
が高いので好ましいものであるが、先にも述べた通り、
レーザー光照射時に於いては記録層の照射部分から記録
層形成物質が飛散する為に、その粒子又は蒸気が前記反
射光の正確な検出に障害を齋らす原因となる。更には、
前記記録層形成材料の飛沫粒子又は蒸気が記録部材表面
に附着する場合が多々生ずるの −で、その結果、記録
情報のノイズの一因となり、殊に画像を記録する場合に
於いては、画像のバツクグランドとなる部分では著しく
画像特性を低下させるものである。
In addition, since the focal depth of the lens system is usually several microns or less, in order to effectively focus the laser beam on the surface of the recording member, the focusing state must be detected by some means, and the result must be fed back so that it is always constant in real time. It is necessary to maintain the condensed state of the light, but the general method of detecting the reflected light from the recording member is preferred because it is simple and highly accurate. As expected,
During laser beam irradiation, since the recording layer forming material scatters from the irradiated portion of the recording layer, the particles or vapor may cause trouble in accurate detection of the reflected light. Furthermore,
Splashed particles or vapor of the recording layer forming material often adhere to the surface of the recording member, and as a result, this becomes a cause of noise in the recorded information, especially when recording an image. In the background area, image characteristics are significantly degraded.

更に別には、記録部材に表面の傷や塵埃の附着 3があ
つた場合には、銀塩記録部材やヴエジキユラーフイルム
等とは異つて、前記傷や塵埃と記録部とは本質的に区別
出来ないものである。
Furthermore, if a recording member has surface scratches or dust adhesion 3, unlike silver halide recording members, veneer film, etc., the scratches and dust are essentially distinguishable from the recording section. It is not possible.

更には、情報記録部、即ち記録層形成物質の除去された
部分(第1図乃至第3図の5)に塵芥が附着した場 3
合にも同様の結果を生じ、殊に読み出し時に於いて情報
の不明確さを齋らすものであるので極めて不便である。
更に詳述すれば、HMLBR用の記録部材に於いては、
記録層2又は(記録層2+反射防止層6)4の厚さは高
々1μ程度のオーダーであるので記録層2についた傷は
容易に支持体1の表面まで到達し、これが読み出しの際
にも現われるので、記録された情報の信頼性を失う結果
となる。
Furthermore, if dust adheres to the information recording section, that is, the part from which the recording layer forming material has been removed (5 in Figures 1 to 3),
This is extremely inconvenient because the same result occurs in cases where the information is unclear, especially when reading the information.
More specifically, in the recording member for HMLBR,
Since the thickness of the recording layer 2 or (recording layer 2 + antireflection layer 6) 4 is on the order of 1 μm at most, scratches on the recording layer 2 easily reach the surface of the support 1, and this also causes damage during readout. This results in a loss of reliability of the recorded information.

′ 殊に、HMLBR用記録部材として高感度であるBiは
、その機械的強度が弱く傷つき易いので、一層取扱いに
注意を要するものである。
' In particular, Bi, which has high sensitivity as a recording material for HMLBR, has a weak mechanical strength and is easily damaged, so it must be handled with greater care.

前述の事を第4図を以つて説明すれば、記録層2につい
た傷7は情報記録部5と本質的に何等変わる処は無い。
To explain the above with reference to FIG. 4, the scratches 7 on the recording layer 2 are essentially the same as the information recording portion 5.

従つて、傷7も情報記録部の一部として読み出されるの
で、情報の混乱を招く結果となる。更に又、記録した情
報を可視光の透過光強度比として読み出す場合には記録
層2の面に附着した塵芥8′は記録層2の光学濃度が、
通常1,0以上と大きい為、比較的影響は少ないが、情
報記録部8に附着した塵芥8は記録された情報を乱す結
果となつて、芳しくないものである。又、塵芥8,8′
を除去する時、新たに記録層2の表面に傷をつける恐れ
が在り、これも甚だ好ましい事ではない。更には、HM
LBR用記録部材に於いて、記録層が充分な感度を有し
、且つ機械的強度の大きい、実用に充分適応し得る記録
層形成材料を選択する事は非常に困難であつて、商業品
として廉価に提供しようとする場合には極めて不利であ
る。本発明は前述の点に鑑み成されたものであつて、記
録層本来の性能を低下させる事なくレーザー光照射時に
記録層形成材料の蒸気が発生したり、又は粒子として飛
散するのを防止して照射部周辺の記録部材表面、或いは
光学系、測定系等の周辺装置に附着しないHMLBR記
録方法を提供することを目的とするものである。更に別
には、記録部材表面に塵埃が附着しても記録層を何等傷
つける事無く除去出来、又表面に傷が極めてつき悪いH
MLBR用記録部材を用いたHMLBR記録方法を提供
することを目的とする。本発明によるHMLBR記録方
法は、非金属物質から成る0.01〜10μの記録層上
に、記録に用いるレーザー光に対して透光性で機械的強
度に優れた無機物質(但し、記録層の非金属物質がカル
コゲン化合物の時はカルコゲン化合物を除く)から成る
0.1〜10μの保護層を設けたヒートモードレーザー
ビーム記録部材に、該保護層を蒸発又は変形させないレ
ーザー光を照射して記録することを特徴とするものであ
る。
Therefore, the flaw 7 is also read out as part of the information recording section, resulting in confusion of information. Furthermore, when the recorded information is read out as the transmitted light intensity ratio of visible light, the dust 8' adhering to the surface of the recording layer 2 causes the optical density of the recording layer 2 to be
Since it is usually larger than 1.0, the influence is relatively small, but the dust 8 adhering to the information recording section 8 disturbs the recorded information, which is not good. Also, garbage 8,8'
When removing the recording layer 2, there is a risk of newly damaging the surface of the recording layer 2, which is also extremely undesirable. Furthermore, H.M.
For LBR recording members, it is extremely difficult to select a material for forming the recording layer that has sufficient sensitivity and high mechanical strength and is suitable for practical use. This is extremely disadvantageous when trying to provide it at a low price. The present invention has been made in view of the above-mentioned points, and is capable of preventing the recording layer forming material from generating vapor or scattering as particles during laser beam irradiation without degrading the original performance of the recording layer. It is an object of the present invention to provide an HMLBR recording method that does not attach to the surface of a recording member around the irradiation section or to peripheral devices such as an optical system and a measurement system. Furthermore, even if dust adheres to the surface of the recording member, it can be removed without damaging the recording layer, and the surface is extremely difficult to scratch.
An object of the present invention is to provide an HMLBR recording method using an MLBR recording member. The HMLBR recording method according to the present invention uses an inorganic material that is transparent to the laser beam used for recording and has excellent mechanical strength on a recording layer of 0.01 to 10μ made of a nonmetallic material (however, the recording layer is Recording is performed by irradiating a heat mode laser beam recording member with a protective layer of 0.1 to 10μ consisting of a chalcogen compound (excluding the chalcogen compound when the nonmetallic substance is a chalcogen compound) with a laser beam that does not evaporate or deform the protective layer. It is characterized by:

本発明に用いるHMLBR記録部材の保護層としては次
の条件を満たす事が要求される。(1)記録に用いるレ
ーザー光に対して、少なくとも照射時に透明である事(
2)光学的に一様な層である事 (3)耐久性、機械的強度、殊に表面強度が大である事
(4)記録層との密着性が良い事 (5)層形成時、情報記録時に記録層と反応等を起して
記録層を劣化変質させない事(6)記録層の本来の感度
を低下させない事(7)情報記録に際して変質、変形、
破壊等をうけない事上記条件の内条件(7)は照射する
レーザー光のエネルギー量に依存する。
The protective layer of the HMLBR recording member used in the present invention is required to satisfy the following conditions. (1) Be transparent to the laser beam used for recording at least when irradiated (
2) It must be an optically uniform layer (3) It must have high durability, mechanical strength, especially surface strength (4) It must have good adhesion with the recording layer (5) When forming the layer, (6) Avoid deteriorating the recording layer by causing a reaction with the recording layer during information recording. (6) Avoid reducing the original sensitivity of the recording layer. (7) Avoid deteriorating, deforming, or deforming the recording layer during information recording.
Among the above conditions, condition (7) of not being damaged depends on the amount of energy of the laser beam to be irradiated.

即ち、後述の実施例から明らかなように本発明に用いる
HMLBR記録部材の保護層は使用するレーザー光に対
して透光性であるので保護層自体がレーザー光を吸収し
て、温度が上昇する事は無視出来るが、保護層下部の記
録層はレーザー光を吸収して加熱され、可成高温となる
ので、その熱が保護層に伝わつて、保護層も加熱される
That is, as is clear from the examples described below, the protective layer of the HMLBR recording member used in the present invention is transparent to the laser beam used, so the protective layer itself absorbs the laser beam and the temperature rises. Although this can be ignored, the recording layer below the protective layer absorbs the laser beam and is heated to a relatively high temperature, so the heat is transmitted to the protective layer and the protective layer is also heated.

つまり保護層が加熱変形あるいは分解破壊等を生ずるか
否かは保護層に伝わる熱量で決まり例えば、あるレーザ
ー光のエネルギー量迄は、記録層のみ溶融及び/又は蒸
発変形し、保護層の変化は無いか、あつてもほとんど無
視できるが、それ以上のレーザー光のエネルギー量を与
えると保護層も変化する。従つて、本発明の目的からし
て、レーザー光は保護層を破壊又は通過する事によつて
、記録層形成物質が保護層外へ蒸発又は飛散しない程度
に照射されなければならない。本発明に於いて、保護層
形成物質は、前記の(1)乃至(7)の条件を満足する
ものが使用されるが、殊に具体的例を挙げれば無機物質
としては、アルゴンレーザー、クリプトレーザ一、He
−Neレーザー等の可視域、或いは近赤外レーザーを用
いて記録を行う場合には、ZnO,.MgO..Al2
O3、SlO,.SlO2、ZrO2、CeO2、In
2O3、SnO2、TiO2等の酸化物、或いはMgF
2、CaF2、CeF4等の弗化物に代表される透明誘
電体及び透明導電体、Zns..Ges2、Sb2S3
等のカルコゲン化合物が有効である。
In other words, whether or not the protective layer undergoes thermal deformation or decomposition and destruction depends on the amount of heat transmitted to the protective layer. For example, up to a certain amount of laser beam energy, only the recording layer melts and/or evaporates and deforms, and the protective layer does not change. There may be none, or even if there is, it can be ignored, but if a higher amount of laser light energy is applied, the protective layer will also change. Therefore, for the purpose of the present invention, the laser beam must be irradiated to such an extent that the recording layer forming substance does not evaporate or scatter outside the protective layer by destroying or passing through the protective layer. In the present invention, the protective layer-forming substance used is one that satisfies the conditions (1) to (7) above.Specifically, specific examples of inorganic substances include argon laser, crypto Laser 1, He
- When recording using a visible range laser such as a Ne laser or a near-infrared laser, ZnO, . MgO. .. Al2
O3, SlO,. SlO2, ZrO2, CeO2, In
Oxides such as 2O3, SnO2, TiO2, or MgF
2, transparent dielectrics and transparent conductors represented by fluorides such as CaF2 and CeF4, Zns. .. Ges2, Sb2S3
Chalcogen compounds such as are effective.

前記無機物質による保護層の形成は、塗布等の一般的方
法も採用されるが、殊に抵抗加熱及び電子ビーム加熱に
よる真空蒸着法の採用は同=容器内で連続形成が出来る
ので極めて好ましい方法である。該方法によればHML
BR記録部材で問題となる記録層表面′への塵埃等の附
着を防止出来るのみならず、記録部材の形成に要する時
間、費用等の面に於いても産業的に有効である。
Although general methods such as coating can be used to form the protective layer using the inorganic substance, the vacuum deposition method using resistance heating and electron beam heating is particularly preferred since it can be formed continuously within a container. It is. According to the method, HML
This method not only prevents dust and the like from adhering to the surface of the recording layer, which is a problem with BR recording members, but is also industrially effective in terms of time and cost required for forming the recording member.

無機物質で保護層を形成する場合、膜厚はその物質の物
性定数、例えば屈折率、熱伝導率、融点、融解熱等の性
質と保護層に関する前記条件(7)の対応を、記録層材
料と関連附け、個々に設定される可きものであるが、本
発明に於いては一般に10μ〜0.1μが好ましく、殊
に1μ以下の膜厚の場合には、保護層がレーザー光に対
しての反射防止効果を示す為に記録部材の感度向上の面
からも甚だ有効である。
When forming a protective layer with an inorganic material, the film thickness is determined based on the physical property constants of the material, such as refractive index, thermal conductivity, melting point, heat of fusion, etc., and the correspondence between the condition (7) regarding the protective layer and the recording layer material. In relation to this, it can be set individually, but in the present invention, it is generally preferable to have a thickness of 10μ to 0.1μ, and in particular, in the case of a film thickness of 1μ or less, the protective layer is resistant to laser light. It is extremely effective from the viewpoint of improving the sensitivity of the recording member since it exhibits an antireflection effect.

本発明に用いるHMLBR記録部材の記録層形成物質は
以下に示される条件を満足する事が要求される。
The recording layer forming material of the HMLBR recording member used in the present invention is required to satisfy the following conditions.

1使用するレーザー光の波長での吸収係数が大きいこと
、言い換えれば、単位面積あたりの重量(厚さ)が小さ
くてすむもの2融点が実用上支障がない程度で低く、か
つ融解熱、気化熱、熱伝導率が小さいこと3光学的に均
一な薄膜が容易に形成できること4機械的強度、耐久性
が充分であること以上の要求性能を完全に満足する記録
層形成物質は現在の処未だ知られていないが上記条件の
1、3を満たす材料としてAl,.Zn..Rh..B
i等の金属物質があり、これ等はガラス又は有機高分子
フイルム等の支持体上に真空蒸着等0手段で薄膜状に形
成されるものである。
1. The absorption coefficient at the wavelength of the laser beam used is large, in other words, the weight (thickness) per unit area is small. 2. The melting point is low enough to cause no practical problems, and the heat of fusion and vaporization are low. , low thermal conductivity; 3. Optically uniform thin film can be easily formed; 4. sufficient mechanical strength and durability. At present, there is no recording layer-forming material that fully satisfies the above requirements. Aluminum, . Zn. .. Rh. .. B
There are metal substances such as i, which are formed in the form of a thin film on a support such as glass or an organic polymer film by vacuum deposition or other means.

而乍ら金属薄膜は反射率が高いので照射されたレーザー
光の内、実際に吸収される光エネルギーは低下し見掛け
上の金属薄膜記録層の感度は減少する。
However, since the metal thin film has a high reflectance, the amount of light energy actually absorbed in the irradiated laser light decreases, and the apparent sensitivity of the metal thin film recording layer decreases.

また、その高い熱伝導率は照射部周辺への熱伝導損失に
よる感度低下をもたらすと共に、その部分の融解及び/
または蒸発等に変形を生じさせて記録情報、特に解像力
を低下させる。さらにHMLBR記録部材として有効な
性能を発揮させる為にはこれら金属薄膜の膜厚は通常1
ミクロン以下に限定されるが、この程度の薄膜の機械的
強度は感材として充分であるとは言えず特に高感度の記
録層形成材料であるBiの機械的強度は低く実用上何ら
かの対策を講じる必要がある。以上の点に於いて本発明
に用いるHMLBR記録部材の記録層形成物質としては
、金属、半金属、半導体、希土類の酸化物又は弗化物、
更には所謂カルコゲン化合物等の非金属物質が好ましい
ものとして用いられるものである。
In addition, its high thermal conductivity causes a decrease in sensitivity due to heat conduction loss around the irradiated area, as well as melting and/or melting of that area.
Alternatively, it causes deformation due to evaporation or the like, thereby reducing recorded information, especially resolution. Furthermore, in order to exhibit effective performance as an HMLBR recording member, the thickness of these metal thin films is usually 1.
Although it is limited to microns or less, the mechanical strength of a thin film of this level cannot be said to be sufficient as a sensitive material, and the mechanical strength of Bi, which is a highly sensitive recording layer forming material, is particularly low, so some practical measures must be taken. There is a need. In view of the above, the recording layer forming materials of the HMLBR recording member used in the present invention include metals, semimetals, semiconductors, rare earth oxides or fluorides,
Furthermore, nonmetallic substances such as so-called chalcogen compounds are preferably used.

これ等非金属物質は種類が多いばかりではなく、殊に酸
化物、カルコゲン化合物は化学量論的組成比から外れる
ものが多くその総てを具体的に列挙することは出来ない
が、比較的高感度の記録層形成材料としては、例えば酸
化鉛、酸化タングステン、酸化チタン、酸化シリコン、
酸化ジルコニウム、弗化マグネシウム、弗化カルシウム
等が本発明に於いては有効な材料として使用されるもの
である。尚、本発明において、透光性とは、使用するレ
ーザー光に対するものであり、レーザー光が紫外光、赤
外光等の可視光でない波長域にある場合には、必ずしも
透明性であることを意味しない。本発明のHMLBR記
録部材の記録層形成材料としてはカルコゲン化合物が極
めて良好な材料として採用されるものであるがここで云
うカルコゲン化合物とは、カルコゲン元素即ちS,.S
e.Teを含む化合物であり、広義にはS,.Se.T
e単体をも含む多種類の材料群を称するものである。
Not only are there many types of these nonmetallic substances, but many oxides and chalcogen compounds in particular deviate from the stoichiometric composition, and although it is not possible to specifically list them all, they are relatively high in composition. Examples of sensitive recording layer forming materials include lead oxide, tungsten oxide, titanium oxide, silicon oxide,
Zirconium oxide, magnesium fluoride, calcium fluoride, and the like are useful materials in the present invention. In the present invention, translucency refers to the laser light used, and if the laser light is in a non-visible wavelength range such as ultraviolet light or infrared light, it does not necessarily mean transparency. It doesn't mean anything. A chalcogen compound is an extremely suitable material for forming the recording layer of the HMLBR recording member of the present invention. S
e. A compound containing Te, in a broad sense S, . Se. T
It refers to a group of many types of materials, including e alone.

特に組成は連続的に変化せしめ得る為無限の種類が存在
するものである。代表的なものはカルコゲン元素以外に
As,.Sb,.P,.Ge,.Si,.Tl、その他
の金属、ハロゲン元素の中から選択される材料を単種又
は複数種含んでいる。しかし公害性を考慮した場合には
、カラコゲン元素としてはS1これと化合物を形成すべ
き材料としては、Ge、In,.Sn..Cu,.Ag
,.Fe,.Bi,.AI,.SilZn.V、などの
金属、半金属或いは半導体が良く特に、薄膜として好ま
しいものは、Ge..Inlsn,.cu,.Aglの
単独又は複数種を含むカルコゲン化合物である。前記記
録層形成材料を用いて記録層を形成するには一様性の要
求から支持体上に薄膜として形成するのが好ましい。
In particular, since the composition can be continuously changed, an infinite number of types exist. Typical examples include As, . Sb,. P. Ge,. Si,. It contains one or more materials selected from Tl, other metals, and halogen elements. However, when considering pollution, the characogen element is S1, and the materials that should form a compound with it are Ge, In, . Sn. .. Cu,. Ag
、. Fe,. Bi,. A.I. SilZn. Metals, semimetals, or semiconductors such as Ge. .. Inlsn,. cu,. It is a chalcogen compound containing one or more types of Agl. When forming a recording layer using the recording layer forming material, it is preferable to form it as a thin film on a support because of the requirement for uniformity.

薄膜の作製手段は今日多くのものが存在し各々に一長一
短があるが、最も一般的なものは抵抗加熱、電子ビーム
加熱及びイオンビーム加熱などの方式による真空蒸着法
、スパツタリング法であつて、これ等は本発明に於いて
、極めて有効な方法である。記録層の厚さは用いる材料
の性質、記録部材の用途によつてその最適条件が変化し
、一概に述べることはできないが一般に10−0.01
μであり1〜0.1μが感度、分解能の点から好ましい
領域である。又、本発明に於いてはHMLBR記録部材
の支持体は本質的な影響をもつものではない。すなわち
HMLBRにより書き込まれた情報を読み出す時、透過
光を用いるか反射光を利用するかなどの差により支持体
を透明、半透明、不透明物質にするかが設定される。又
、使用するレーザービームの強度等により支持体の熱容
量、反射率等の物理量が制限されるのでこれからも支持
体物質が設定される。通常用いられる支持体はポリエス
テル、ポリエチレン、アセテート等の透明な高分子膜、
酸化物ガラス、板状又は箔状のA1等の金属等である。
更には、特筆すべき事として保護層の形成が次のような
効果をもたらすことを本出願人は見い出した。
There are many methods for producing thin films today, each with their own advantages and disadvantages, but the most common are vacuum evaporation and sputtering using methods such as resistance heating, electron beam heating, and ion beam heating. etc. are extremely effective methods in the present invention. The optimum thickness of the recording layer varies depending on the properties of the material used and the purpose of the recording member, and cannot be stated unconditionally, but it is generally 10-0.01.
μ, and 1 to 0.1 μ is a preferable range from the viewpoint of sensitivity and resolution. Further, in the present invention, the support of the HMLBR recording member has no essential influence. That is, when reading information written by HMLBR, whether the support is transparent, translucent, or opaque is set depending on whether transmitted light or reflected light is used. Further, since the physical quantities such as heat capacity and reflectance of the support are limited depending on the intensity of the laser beam used, the material of the support is also determined. The commonly used supports are transparent polymer films such as polyester, polyethylene, acetate, etc.
These include oxide glass, plate-shaped or foil-shaped metals such as A1, and the like.
Furthermore, the applicant has found that the formation of a protective layer brings about the following effects.

即ち透明支持体上に記録層を形成したHMLBR記録部
材に情報又は画像を記録したものを透過光により読み出
すと、得られる情報(又は画像)は総てレーザー照射部
が未照射部より明るく観察されるポジ画像であるが、本
発明は照射するレーザー光のエネルギー量によつて、ネ
ガ画像も形成出来るものである。即ち、本発明に用いる
HMLBR記録部材の記録層形成材料である非金属物質
は可視域に吸収端を有するものが多く、その為、照射レ
ーザー光を比較的可視域の短波長側にする事により、そ
のレーザー光波長に於いて記録に充分な吸収を有し、且
つ白色光では比較的低い光学濃度を持つ半透明の記録層
を容易に形成出来るので、該記録層上に保護層を有する
本発明に用いるHMLBR記録部材に、通常の記録エネ
ルギー程度以上で且つ保護層が著しい変形を受けない程
度で記録を行うと、通常の記録とは異なり、レーザー照
射部の光学濃度が未照射部のそれよりも高い、即ち透過
光による読み出しではネガ画像のものが得られる。この
理由の詳細は未だ不明瞭であるが、次の様に考える事が
出来る。即ち、前述の様にHMLBRは、記録層の融解
及び/又は蒸発による変形を利用したものであつて、こ
の融解と蒸発の現象は、通常共存するものであるが、レ
ーザー光のエネルギーが増加すると、蒸発の割合が増加
するものと思われ、従つてこの事から、先のレーザー照
射部の光学濃度の増加原因は、第一に蒸発した記録層形
成物質が保護層の記録層側表面上に凝縮する事によつて
未照射部の薄膜状態よりも光散乱が増加する事、第二に
は記録層形成材料である非金属物質の構成元素の蒸気圧
が異なる為にレーザー照射部の物質構成状態が、例えば
化合物から混合物になつたり又は化合物を構成する元素
の組成比が異つたりする等して物性の異つた他物質とな
り、それが保護層の存在により、飛散せずに照射部附近
に留められる事、第三には、記録層形成物が熱によつて
保護層形成物と反応する事、第四には前記の複合現象に
依る事に起因するものと思われる。以下、本発明を更に
具体的に説明する為に比較例を混じえた実施例を以つて
述べる。
That is, when information or images are recorded on an HMLBR recording member in which a recording layer is formed on a transparent support and are read out using transmitted light, all of the information (or images) obtained is observed in such a way that the laser irradiated areas are brighter than the non-irradiated areas. However, according to the present invention, a negative image can also be formed depending on the amount of energy of the irradiated laser light. That is, many of the nonmetallic substances that are the recording layer forming materials of the HMLBR recording member used in the present invention have an absorption edge in the visible range, and therefore, by setting the irradiation laser beam to the relatively short wavelength side of the visible range, , it is possible to easily form a translucent recording layer that has sufficient absorption for recording at the wavelength of the laser light and has a relatively low optical density under white light. When recording is performed on the HMLBR recording member used in the invention at a level higher than the normal recording energy level and at a level that does not cause significant deformation of the protective layer, unlike normal recording, the optical density of the laser irradiated area is different from that of the unirradiated area. If the reading is higher than that, that is, by transmitted light, a negative image is obtained. Although the details of this reason are still unclear, it can be considered as follows. That is, as mentioned above, HMLBR utilizes the deformation of the recording layer due to melting and/or evaporation, and although the phenomena of melting and evaporation usually coexist, when the energy of the laser beam increases, , it is thought that the rate of evaporation increases, and therefore, from this fact, the reason for the increase in the optical density in the laser irradiated area is that the evaporated recording layer-forming substance is deposited on the surface of the protective layer on the recording layer side. Due to condensation, light scattering increases compared to the thin film state of the non-irradiated area.Secondly, the material composition of the laser irradiated area changes due to the difference in vapor pressure of the constituent elements of the non-metallic substance that is the recording layer forming material. For example, if the state changes from a compound to a mixture or the composition ratio of the elements that make up the compound differs, it becomes a different substance with different physical properties, and due to the presence of the protective layer, it does not scatter and can be brought close to the irradiated area. The third reason is that the recording layer forming material reacts with the protective layer forming material due to heat, and the fourth reason is that it depends on the above-mentioned complex phenomenon. EXAMPLES Hereinafter, in order to explain the present invention more specifically, examples will be described along with comparative examples.

比較例 1 厚さ2CTn直径30cmのガラス円板を支持体としそ
の一面に高解像力HMLBR記録部材として、カルコゲ
ナイトガラスGe5Os5Oを膜厚1400〜2000
λに真空蒸着した。
Comparative Example 1 A glass disc with a thickness of 2 CTn and a diameter of 30 cm was used as a support, and on one side of the support, chalcogenite glass Ge5Os5O was coated with a film thickness of 1400 to 2000 as a high resolution HMLBR recording member.
Vacuum deposited on λ.

蒸着はタンタルボートによる抵抗加熱方式により蒸着時
のボート温度は、約700℃真空度は5.3×10−6
T0rrであつた。このようにした作製したHMLBR
記録部材をビデオデイスクとして用いるため記録を行つ
た。即ちモーターに連続したシャフトの一端に上記ガラ
ス円板をしつかりと固定し約3000rpmで回転させ
た。次にアルゴンレーザー(波長4880オングストロ
ームにて出力200mW)からのレーザー光を電気光学
素子に導入しビデオ信号によるFM変調しさらにワーキ
ングデイスタンス約70ミクロンの顕微鏡対物レンズに
より前記記録部材のGe5Os5O膜面上に集光させた
。その際レンズはガラス円板一回転につき約2ミクロン
半径方向に移動するようにしスパイラル状に信号が記録
できるように設定した。この様な方式で記号の記録を行
つたところレーザー照射部の記録媒体から蒸発した硫化
ゲルマニウムと思われるものにより照射開始後約5秒で
レンズが汚染しその後の記録ができなかつた。実施例
1 比較例1のGe5Os5O蒸着膜上に保護層としてCa
F2を同一真空ペルシャー内で連続蒸着して記録部材を
作製した。
Vapor deposition is carried out using a resistance heating method using a tantalum boat, and the boat temperature during vapor deposition is approximately 700℃, and the degree of vacuum is 5.3 x 10-6.
It was T0rr. HMLBR produced in this way
Recording was performed to use the recording member as a video disc. That is, the glass disk was firmly fixed to one end of a shaft connected to a motor and rotated at about 3000 rpm. Next, laser light from an argon laser (wavelength: 4880 angstroms, output: 200 mW) is introduced into the electro-optical element, FM modulated by a video signal, and then applied to the Ge5Os5O film surface of the recording member using a microscope objective lens with a working distance of about 70 microns. The light was focused on. At this time, the lens was set to move approximately 2 microns in the radial direction per revolution of the glass disk so that signals could be recorded in a spiral manner. When a symbol was recorded using this method, the lens was contaminated with what appeared to be germanium sulfide that had evaporated from the recording medium in the laser irradiation section about 5 seconds after the start of irradiation, and subsequent recording was not possible. Example
1 Ca was added as a protective layer on the Ge5Os5O vapor deposited film of Comparative Example 1.
A recording member was produced by continuously depositing F2 in the same vacuum Persian.

連続蒸着では記録層、保護層を別個に蒸着するものとく
らべ記録層表面のゴミの付着が大巾に減少し、又作製に
要する時間も半分以下に減少した。CaF2蒸着膜の膜
厚は約1.2μであり、蒸着ソースはCaF2単結晶を
用いた。次に、この記録部材にアルゴンレーザー(波長
4880オングストローム)によりマイクロ画像を縮少
率1/9で記録した。記録装置は直径約2?のドラムに
先の記録部材を粘着テープにより記録層を上にしてはり
つけ、ドラムを回転することで一方向の走査を行つた。
又それと直角方向の走査は、レーザー光を集光する顕微
鏡対物レンズをドラムの軸方向に平行に移動することに
より行つた。光強度の変調には電気光学素子と偏光板の
組合せで行い、それにオリジナルの画像の各点の濃度を
FM信号に変換したものを入力させることで行つた。記
録の条件は記録部材表面でのレーザービーム径約3ミク
ロン、走査速度約2,5m/秒、記録時間約1分間で解
像力500本/m似上の最適画像を得るためのレーザー
光エネルギーは約200mWであつた。この様にして記
録した所、良好な画像が得られ、又、使用したレーザー
の最高出力400mW以内では保護層の破壊は認められ
なかつた。実施例 2 比較例1のGe5Os5O蒸着膜上に保護層として硫化
亜鉛を用いた記録部材を作成した。
Continuous deposition greatly reduced the amount of dust attached to the surface of the recording layer, and also reduced the time required for fabrication by more than half, compared to the method in which the recording layer and protective layer were deposited separately. The thickness of the CaF2 vapor deposited film was approximately 1.2 μm, and a CaF2 single crystal was used as the vapor deposition source. Next, a micro image was recorded on this recording member using an argon laser (wavelength: 4880 angstroms) at a reduction rate of 1/9. The recording device is about 2 in diameter? The previous recording member was attached to the drum using adhesive tape with the recording layer facing up, and scanning was performed in one direction by rotating the drum.
Scanning in a direction perpendicular to this was performed by moving the microscope objective lens that condenses the laser beam parallel to the axial direction of the drum. The light intensity was modulated using a combination of an electro-optical element and a polarizing plate, and the density of each point of the original image converted into an FM signal was input to the modulation. The recording conditions are: laser beam diameter on the surface of the recording member is approximately 3 microns, scanning speed is approximately 2.5 m/sec, recording time is approximately 1 minute, and the laser light energy to obtain an optimal image with a resolution of approximately 500 lines/m is approximately It was 200mW. When recorded in this manner, good images were obtained, and no destruction of the protective layer was observed within the maximum output of the laser used, 400 mW. Example 2 A recording member was prepared using zinc sulfide as a protective layer on the Ge5Os5O vapor deposited film of Comparative Example 1.

Claims (1)

【特許請求の範囲】[Claims] 1 非金属物質から成る0.01〜10μの記録層上に
、記録に用いるレーザー光に対して透光性で機械的強度
に優れた無機物質(但し、記録層の非金属物質がカルコ
ゲン化合物の時はカルコゲン化合物を除く)から成る0
.1〜10μの保護層を設けたヒートモードレーザービ
ーム記録部材に、該保護層を蒸発又は変形させないレー
ザー光を照射して記録することを特徴とするヒートモー
ドレーザービーム記録方法。
1 An inorganic material that is transparent to the laser beam used for recording and has excellent mechanical strength is placed on a recording layer of 0.01 to 10 μm made of a nonmetallic material (however, if the nonmetallic material of the recording layer is a chalcogen compound) (excluding chalcogen compounds)
.. A heat mode laser beam recording method, which comprises recording by irradiating a heat mode laser beam recording member provided with a protective layer with a thickness of 1 to 10 microns with a laser beam that does not evaporate or deform the protective layer.
JP50012072A 1974-12-26 1975-01-29 Heat mode laser beam recording method Expired JPS5920474B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP50012072A JPS5920474B2 (en) 1975-01-29 1975-01-29 Heat mode laser beam recording method
US05/643,171 US4069487A (en) 1974-12-26 1975-12-22 Recording member and process for recording
DE2558245A DE2558245C2 (en) 1974-12-26 1975-12-23 Recording material for recording by means of a laser beam and method for recording using the recording material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50012072A JPS5920474B2 (en) 1975-01-29 1975-01-29 Heat mode laser beam recording method

Publications (2)

Publication Number Publication Date
JPS5188024A JPS5188024A (en) 1976-08-02
JPS5920474B2 true JPS5920474B2 (en) 1984-05-14

Family

ID=11795380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50012072A Expired JPS5920474B2 (en) 1974-12-26 1975-01-29 Heat mode laser beam recording method

Country Status (1)

Country Link
JP (1) JPS5920474B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135870U (en) * 1984-02-17 1985-09-09 赤井電機株式会社 floppy disk drive carriage

Also Published As

Publication number Publication date
JPS5188024A (en) 1976-08-02

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