JPS5926856B2 - dust removal device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a dust removal device installed immediately before the entrance of a clean room or the like where high cleanliness is required.

In general, in semiconductor device manufacturing factories, it is important to have a dust-free working atmosphere from the viewpoint of yield, quality, and reliability, and the work is carried out in a clean room maintained at an extremely high level of cleanliness using ultra-high-performance dust-free equipment. It is held in a room called.

However, when workers enter the clean room or articles are brought into the clean room, the clean room becomes contaminated and the working atmosphere, which is maintained at an extremely high level of cleanliness, deteriorates.

For this reason, in order to prevent the clean room from being contaminated by workers entering the room or items being brought in, it is necessary to prevent contamination from contaminating the clothes of workers entering the clean room or the materials of the items being brought in. It is necessary to install a dust removal device (air shower) to wash off and collect dust and germs in a short time using high-speed sterile air (for example, about 60 to 130 km/hour).

FIGS. 1 and 2 are top and side views showing the basic configuration of a dust removal device conventionally used in a semiconductor device manufacturing factory.

In these figures, 1 is an air shower room main body having a predetermined volume, 2a and 2b are entrance and exit single doors attached to the air shower room main body 1, 3-1, 3-2. . . . are a plurality of high-speed air blowing nozzles attached to the upper part and both sides of the air shower room main body 1, and each of these high-speed air blowing nozzles 3-1*3-2. . . . are supplied with purified sterile air from a blower device 5, which will be described later.

4 is a pre-filter attached to the floor of the air shower room main body 1; 5 is each of the high-speed air blowing nozzles 3-1+3-
2. It is a blower device for sending out purified sterile air to..., and this blower device 5 includes a blower 6, a blower tube 7 attached to the blower 6, and an outlet of the blower tube 7. Medium performance filter 8, HgPA
It is composed of a filter 9.

Incidentally, reference numeral 10 denotes an operation panel attached to the side surface of the air shower room main body 1, which includes a switch for driving the blower 6 and the like.

In the figure, the direction of the arrow indicates the flow of the air.

The operating procedure of such a dust removal device will be explained below.

Assuming that the single entrance door 2a is the entrance side, first change into dust-free clothes (made of dust-resistant nylon or fiber) in the front room, then open the door 2a and enter the air shower room main body 1.
Enter and lock each door 2a+2b.

After that, when the blower drive switch on the operation panel 10 is turned on to drive the blower 6, the high-speed air obtained from the blower 6 passes through the blower tube 7, medium-performance filter 8, and HEPA filter 9, and is sterilized and purified. be converted into

This purified sterile air is delivered to each high-speed blowout nozzle 3-1 attached to the top and both sides of the air shower room main body 1.
, 3-2t, etc., and the dust and germs adhering to the dust-free clothing are removed by this jet.

Note that the injection time is about 5 to 10 seconds.

After that, the locks of entrances and exits #2a and 2b are unlocked to enter a clean room with a high degree of cleanliness (class 200 to 400).

However, in a conventional dust removal device with such a structure, when high-speed sterile air is injected at a worker wearing dust-free clothes who has entered the air shower room main body 1, the entrance and exit of the room main body 1 is Since the side facing the single doors 2a and 2b becomes a blind spot in the spray angle, it is difficult to effectively remove dust and germs adhering to the front and rear surfaces of worn dust-free clothing.

In addition, there is a system in which each of the high-speed air blowing nozzles is semi-fixed so that the injection angle can be changed, but even with this, the blind spot of the injection angle cannot be sufficiently compensated for.

The present invention was made in order to eliminate the drawbacks of such conventional devices, and by making the floor section equipped with a pre-filter on the bottom of the air shower room main body rotatable around an axis,
To provide a dust removal device capable of effectively removing dust and germs adhering to dust-free clothing.

Hereinafter, the present invention will be explained in detail using the drawings.

3 and 4 are a top view and a side view of the basic configuration of an embodiment of the dust removal device according to the present invention, and in these figures, the same parts as in FIGS. 1 and 2 are designated by the same numbers. Therefore, the explanation will be omitted.

In this embodiment, a floor 1a equipped with a pre-filter provided at the bottom of the shower room main body 1 is rotatably attached, and this floor 1a is rotated by a rotating device 11 to
It rotates once per second.

In this case, the rotating device 11 includes a driving motor 12 equipped with a speed reducer, a rotating shaft 13 connected to the motor 12,
One end is connected to the rotating shaft 13, and the other end is connected to the floor 1a.
The rotary support 14 is connected to the rotary support 14.

Further, the operation panel 10 is provided with a switch for driving the motor 12 of the rotating device 11.

According to the dust removal device configured in this way, when a worker wearing dust-free clothes enters the air shower room main body 1 and operates the blower device 5 and the rotating device 11, each high-speed blowing nozzle 3-1 , 3-2t... clean sterile air is injected at high speed.

At the same time, the worker
When the floor 1a is located at
1, 3-2. The sterile high-speed air jetted from ... reaches the workers' dust-free clothes evenly.

As a result, the dust and germs adhering to the dust-free clothes can be washed evenly over the entire circumference, and the dust and germs in the air shirt chamber body 1 can be washed off smoothly and effectively. I can do it.

In addition, although the above embodiment shows the case where the floor 1a of the air shower room main body 1 is rotated, the present invention is not limited to this, and for example, each high speed air expulsion nozzle 3-1y3- By adding a function to rotate the 2t at an appropriate angle vertically and horizontally at the same time as the blower 5 is operating, the blind spot of the injection angle will be further improved and dust and germs will be removed even more effectively. I can do it.

Further, by forming the inner wall of the air shower room main body 1 into a circular or elliptical cylindrical structure, the high-speed air injected within the air shower room main body 1 is reflected, and the dust removal effect can be further improved.

As explained above, according to the dust removal device according to the present invention, since the floor of the air shower room main body is made rotatable, it is possible to compensate for the blind angle of the jet angle of the high-speed air blowing nozzle provided in the air shower room main body. This has the effect that dust and germs can be removed smoothly and effectively from the main body of the air shower room.

[Brief explanation of the drawing]

1 and 2 are a top view showing the basic configuration of a conventional dust removal device and a side view taken along line A-B in FIG. 1, and FIGS. 3 and 4 are views of the present invention. A top view of main parts and a third
It is a side view when cut along the CD line of a figure. 1... Air shower room body, 2a, 2b...
... Entrance/exit door, 3-1, 3-2.・・・・・・High-speed air blowing nozzle, 4・・・・・・Pre-filter, mutual
...Blower device, 6...Blower, 7...
...Blower tube, 8...Medium performance filter, 9...
...HEPA filter, 10...Operation panel,
U...Rotating device, 12...Motor, 1
3...Rotation axis, 14...Rotation support.

Claims (1)

[Claims] 1. A dust removal device installed between a room with a low cleanliness class and a room with a high cleanliness class, which comprises: an air shower room main body having a predetermined volume; and the air shower room main body. a plurality of high-speed air blowing nozzles respectively attached to surfaces other than the surface of the single entrance door attached to the air shower room main body; 1. A dust removal device comprising: a blower device that sends out pulverized air; and a rotation device that rotates the floor of the air shower room main body at a constant speed. 2. The dust removal device according to claim 1, wherein the plurality of high-speed air blowing nozzles rotate at a predetermined angle to emit air. 3. The dust removal device according to claim 1, wherein the inner surface of the air shower chamber main body is circular.