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JPS5933185B2 - chemical copper plating liquid - Google Patents
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JPS5933185B2 - chemical copper plating liquid - Google Patents

chemical copper plating liquid

Info

Publication number
JPS5933185B2
JPS5933185B2 JP3887480A JP3887480A JPS5933185B2 JP S5933185 B2 JPS5933185 B2 JP S5933185B2 JP 3887480 A JP3887480 A JP 3887480A JP 3887480 A JP3887480 A JP 3887480A JP S5933185 B2 JPS5933185 B2 JP S5933185B2
Authority
JP
Japan
Prior art keywords
copper plating
chemical copper
plating solution
chemical
nonionic surfactant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3887480A
Other languages
Japanese (ja)
Other versions
JPS56136969A (en
Inventor
邦弘 五十里
修 佐々木
俊樹 雀部
一広 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3887480A priority Critical patent/JPS5933185B2/en
Publication of JPS56136969A publication Critical patent/JPS56136969A/en
Publication of JPS5933185B2 publication Critical patent/JPS5933185B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は化学銅めつき液、特に機械的特性にすぐれため
つき皮膜を与え得る化学銅めつき液に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chemical copper plating solution, and particularly to a chemical copper plating solution capable of providing a matted film with excellent mechanical properties.

化学銅めつき液は通常たとえば硫酸銅、塩化第2銅など
の銅塩、エチレンジアミン四酢酸、N、N、N、N’−
テトラキスー(2−ヒドロキシプロピル)一エチレンジ
アミンなどのような錯化剤、ホルムアルデヒドなどのよ
うな還元剤および水酸化ナトリウムなどのpH調整剤な
どを含むが、これらのみでなる化学銅めつき液から得ら
れるめつき皮膜は一般に脆く、実用に供するには機械的
特性とくに延展性が不足している。
Chemical copper plating solutions typically include copper salts such as copper sulfate and cupric chloride, ethylenediaminetetraacetic acid, N, N, N, N'-
It contains a complexing agent such as tetrakis-(2-hydroxypropyl) monoethylenediamine, a reducing agent such as formaldehyde, and a pH adjuster such as sodium hydroxide, but is obtained from a chemical copper plating solution consisting only of these. Plating films are generally brittle and lack mechanical properties, especially spreadability, for practical use.

例えば、印刷配線板の導通回路部を化学銅めつきによつ
て形成するいわゆるアディティブ法印刷配線板の製造に
おいては、印刷配線板の加工や環境変化による熱的応力
や物理的衝撃に起因して回路断線を生じ易い。上記欠点
を改良するために、銅塩、錯化剤、還元剤、pH調整剤
からなる化学銅めつき液にジピリジル類、フエナントロ
リン類あるいは水溶性シアン化合物をさらに添加するこ
とによつて、化学銅めつき皮膜の延展性の向上を図るこ
とが試みられている。しかしながら、上記ジピリジル類
などの添加によつても、化学銅めつき皮膜の延展性の向
上はわずかであり、たとえば印刷配線板の導通回路を形
成する銅皮膜として実用に供し得るに足る機械的特性を
有するめつき皮膜は尚得られない。本発明は、このよう
な点を考慮し、機械的特性、とくに延展性にすぐれため
つき皮膜を与える化学銅めつき液を提供することを目的
とする。本発明の特徴は、銅塩、錯化剤、還元剤および
pH調整剤を含有する化学銅めつき液あるいは銅塩、錯
化剤、還元剤およびpH調整剤の他、2、2′−ジピリ
ジルもしくはその誘導体、1,10フエナントロリンも
しくはその誘導体、水溶性シアン化合物のうちの1種以
上を含有する化学銅めつき液にフエノール樹脂のポリオ
キシエチレン誘導体からなる非イオン界面活性剤を特に
添加配合したものである。
For example, in the production of so-called additive printed wiring boards in which the conductive circuit portion of the printed wiring board is formed by chemical copper plating, thermal stress and physical shock due to processing of the printed wiring board and environmental changes occur. Easy to cause circuit breakage. In order to improve the above drawbacks, by further adding dipyridyls, phenanthrolines, or water-soluble cyanide compounds to a chemical copper plating solution consisting of a copper salt, a complexing agent, a reducing agent, and a pH adjuster, Attempts have been made to improve the spreadability of chemical copper plating films. However, even with the addition of the dipyridyls mentioned above, the spreadability of the chemical copper plating film is only slightly improved, and the mechanical properties are insufficient for practical use as a copper film that forms conductive circuits on printed wiring boards, for example. It is still not possible to obtain a plated film having . The present invention takes these points into consideration and aims to provide a chemical copper plating solution that provides a matted film with excellent mechanical properties, especially spreadability. A feature of the present invention is that a chemical copper plating solution containing a copper salt, a complexing agent, a reducing agent, and a pH adjusting agent, or a chemical copper plating solution containing a copper salt, a complexing agent, a reducing agent, and a pH adjusting agent, or 2,2'-dipyridyl In particular, a nonionic surfactant consisting of a polyoxyethylene derivative of a phenol resin is added to a chemical copper plating solution containing one or more of the following: 1,10 phenanthroline or its derivative, and a water-soluble cyanide compound. It is a combination.

本発明において、フエノール樹脂のポリオキシエチレン
誘導体系非イオン界面活性剤を添加配合する銅塩一錯化
剤一還元剤−PH調整剤系化学銅めつき液は例えば次の
ような組成のものである。
In the present invention, the chemical copper plating solution based on a copper salt, a complexing agent, a reducing agent, and a PH adjuster, to which a nonionic surfactant based on a polyoxyethylene derivative of a phenol resin is added, has the following composition, for example. be.

本発明においてベースとなる化学銅めつき液は上記の如
く銅塩一錯化剤一還元剤−PH調整剤の四成分系のみで
もよいが2,2′−ジピリジルもしくはその誘導体、1
,10−フエナントリロンもしくはその誘導体、水溶性
シアン化合物などをさらに添加配合したものでもよい。
尚上記水溶性シアン化合物としては例えばシアン化ナト
リウム、シアン化カリウム、ニトロプルシツドナトリウ
ム塩、ニツケルシアン化カリウム、フエロシアン化カリ
ウム、フエリシアン化カリウムなどが挙げられ、これら
の添加配合量は2W19〜39/l好ましくは0.5W
19〜19程度がよい。
The chemical copper plating solution that is the basis of the present invention may be a four-component system consisting of a copper salt, a complexing agent, a reducing agent, and a PH adjuster as described above, but it may also include 2,2'-dipyridyl or its derivatives, 1
, 10-phenanthrylone or a derivative thereof, a water-soluble cyanide compound, etc. may be further added and blended.
Examples of the water-soluble cyanide compounds include sodium cyanide, potassium cyanide, sodium nitroprusside, potassium nickel cyanide, potassium ferrocyanide, potassium ferricyanide, etc. The amount of these added is 2W19 to 39/l, preferably 0. 5W
Approximately 19 to 19 is good.

本発明において、化学銅めつき液に特に添加配合するフ
エノール樹脂のポリオキシエチレン誘導体からなる非イ
オン界面活性剤は、例えばフエノール誘導体とフオルマ
リンとの重縮合体フエノール誘導体とフルフリルアルコ
ールの共縮合体、ポリアルキレンポリフエノール縮合体
などのフエノール性水酸基にエチレングリコールもしく
はポリオキシエチレングリコールを適宜エーテル化反応
させることによつて得られる。しかしてこのような非イ
オン界面活性剤は例えば次の一般式(但し式中R,,R
2は水素原子、アルキル基、シクロアルキル基、アリル
基、アラルキル基、1,m,nは1以上の整数を示す)
で示されるものである。
In the present invention, the nonionic surfactant made of a polyoxyethylene derivative of phenolic resin that is particularly added to the chemical copper plating solution is, for example, a polycondensate of a phenol derivative and formalin, a co-condensate of a phenol derivative and furfuryl alcohol, etc. , by subjecting the phenolic hydroxyl group of a polyalkylene polyphenol condensate or the like to an appropriate etherification reaction with ethylene glycol or polyoxyethylene glycol. However, such a nonionic surfactant has the following general formula (where R, , R
2 is a hydrogen atom, an alkyl group, a cycloalkyl group, an allyl group, an aralkyl group, 1, m, and n are integers of 1 or more)
This is shown in .

しかしてこの非イオン界面活性剤は1種もしくは2種以
上の混合系で用いてもよく、またその添加配合量は化学
銅めつき液11当り0.1〜2.09程度で充分である
。次に本発明を具体例をもつて説明する。硫酸銅(5水
和物)、エチレンジアミン四酢酸、ホルムアルデヒド、
水酸化ナトリウム、2,2′−ジピリジル、2−9−ジ
メチル1,10−フエナントロン、シアン化ナトリウム
およびフエノール樹脂のポリオキシエチレン誘導体から
なる非イオン界面活性剤を水にそれぞれ溶解せしめ表−
1に示す如き組成系の化学銅めつき液14種を調整した
However, these nonionic surfactants may be used alone or in a mixed system of two or more, and the addition amount thereof is about 0.1 to 2.09 per 11 parts of the chemical copper plating solution. Next, the present invention will be explained using specific examples. Copper sulfate (pentahydrate), ethylenediaminetetraacetic acid, formaldehyde,
A nonionic surfactant consisting of sodium hydroxide, 2,2'-dipyridyl, 2-9-dimethyl 1,10-phenanthrone, sodium cyanide, and a polyoxyethylene derivative of a phenol resin was dissolved in water.
EXAMPLE 1 Fourteen types of chemical copper plating solutions having the compositions shown in 1 were prepared.

尚界面活性剤は次式 (但しRl,R2はノニル基、lは1〜3の数)におい
てm+n=3の場合を種類(A)、m+n=20の場合
を種類(B)、m+n−9の場合を種類(Oで示した。
In addition, the surfactant is expressed by the following formula (where Rl and R2 are nonyl groups, and l is a number from 1 to 3), where m+n=3 is type (A), m+n=20 is type (B), and m+n-9. The case is indicated by type (O).

一方厚さ10μmの圧延銅箔を10%苛性ソーダ水溶液
に30秒間浸漬後水洗し、引続き100!)硝酸水溶液
に浸漬してから水洗し表面を清浄にした。
On the other hand, a rolled copper foil with a thickness of 10 μm was immersed in a 10% caustic soda aqueous solution for 30 seconds and then washed with water, followed by 100! ) The surface was cleaned by immersing it in a nitric acid aqueous solution and then washing it with water.

かくして表面清浄化した銅箔を、塩化錫509/l塩酸
10d/l残部が水よりなる前処理液に2分間浸漬して
から流水で1分間水洗した。
The surface-cleaned copper foil was immersed for 2 minutes in a pretreatment solution consisting of 509 tin chloride/l and 10 d/l hydrochloric acid, the balance being water, and then rinsed with running water for 1 minute.

しかる後この前処理した銅箔を、塩化パラジウム0.2
59/11塩酸10m1/11残部が水よりなる感応性
賦与液に1分間浸漬し、流水中で1分間水洗した。上記
処理を施した銅箔を、前記調製した化学銅めつき液(浴
温70℃)にそれぞれ浸漬し、銅箔の両面に厚さ4〜6
μmの銅めつき膜をそれぞれ析出形成させた。
After that, this pretreated copper foil was treated with palladium chloride 0.2
The sample was immersed for 1 minute in a sensitizing solution consisting of 10 ml of 59/11 hydrochloric acid and the balance of 1/11 was water, and washed in running water for 1 minute. The copper foils subjected to the above treatment were immersed in the chemical copper plating solution prepared above (bath temperature 70°C), and both sides of the copper foils were coated with a thickness of 4 to 6 cm.
Copper plating films with a thickness of μm were deposited and formed.

このようにして形成した銅めつき膜の展延性を180゜
の折り曲げ試験により測定した結果を表−2にそれぞれ
示した。尚展延性試験は銅めつき膜を一定方向に180
゜折り曲げて折目を次に元の位置にもどし圧力を加えて
折り目を平坦にする操作を繰返し、折り目の部分で銅め
つき膜が破断するまでの回数(めつき膜が耐え得る折り
曲げ回数)をもつて評価したものである。
The malleability of the copper-plated films thus formed was measured by a 180° bending test, and the results are shown in Table 2. The ductility test was conducted by rolling the copper plated film in a certain direction at 180°C.
゜Repeat the operation of bending, returning the fold to its original position, applying pressure to flatten the crease, and the number of times it takes for the copper plating film to break at the crease (number of times the plating film can withstand) It was evaluated based on the following.

また上記実施例7の組成の化学銅めつき液においてシア
ン化ナトリウムの代りに、水溶性シアン化合物である(
a)=ニトロプルシツドナトリウム(50W19/l)
、(b)シアン化ニツケルカリウム(100mg/l)
もしくは(c)フエロシアン化カリウム(50W19/
l)を用いた他は同じ組成のめつき液を用い、同じ条件
で銅めつき膜を析出形成させ、そのめつき膜について展
延性を評価したところ折り曲げ回数は(a)の場合24
回、(b)の場合22回、(c)の場合20回であつた
In addition, in the chemical copper plating solution having the composition of Example 7, a water-soluble cyanide compound was used instead of sodium cyanide (
a) = Sodium nitroprusside (50W19/l)
, (b) Potassium nickel cyanide (100mg/l)
or (c) potassium ferrocyanide (50W19/
A copper plating film was precipitated and formed under the same conditions using a plating solution with the same composition as above (a), and the spreadability of the plating film was evaluated.
22 times in the case of (b) and 20 times in the case of (c).

表−1および表−2に本発明の特徴である非イオン界面
活性剤を添加しない化学銅めつきを使用した場合につい
ても比較例として付記してある。
Tables 1 and 2 also include, as comparative examples, the case where chemical copper plating without adding a nonionic surfactant, which is a feature of the present invention, is used.

Claims (1)

【特許請求の範囲】 1 銅塩、錯化剤、還元剤、pH調整剤およびフェノー
ル樹脂のポリオキシエチレン誘導体からなる非イオン界
面活性剤を含有することを特徴とする化学銅めつき液。 2 特許請求範囲第1項においてフェノール樹脂のポリ
オキシエチレン誘導体からなる非イオン界面活性剤が一
般式、▲数式、化学式、表等があります▼ (式中R_1、R_2は水素原子、アルキル基、シクロ
アルキル基、アリル基、アラルキル基、l、m、nは1
以上の整数を示す)で示される化合物であることを特徴
とする化学銅めつき液。
[Scope of Claims] 1. A chemical copper plating solution characterized by containing a copper salt, a complexing agent, a reducing agent, a pH adjuster, and a nonionic surfactant consisting of a polyoxyethylene derivative of a phenolic resin. 2 In claim 1, the nonionic surfactant made of a polyoxyethylene derivative of phenolic resin has a general formula, ▲mathematical formula, chemical formula, table, etc.▼ (In the formula, R_1 and R_2 are hydrogen atoms, alkyl groups, cyclo Alkyl group, allyl group, aralkyl group, l, m, n are 1
A chemical copper plating solution characterized by being a compound represented by (indicating an integer greater than or equal to).
JP3887480A 1980-03-28 1980-03-28 chemical copper plating liquid Expired JPS5933185B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3887480A JPS5933185B2 (en) 1980-03-28 1980-03-28 chemical copper plating liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3887480A JPS5933185B2 (en) 1980-03-28 1980-03-28 chemical copper plating liquid

Publications (2)

Publication Number Publication Date
JPS56136969A JPS56136969A (en) 1981-10-26
JPS5933185B2 true JPS5933185B2 (en) 1984-08-14

Family

ID=12537351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3887480A Expired JPS5933185B2 (en) 1980-03-28 1980-03-28 chemical copper plating liquid

Country Status (1)

Country Link
JP (1) JPS5933185B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352389A (en) * 1986-08-22 1988-03-05 Takeshi Amamiya Sound recording and picture recording disk provided with printing face

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352389A (en) * 1986-08-22 1988-03-05 Takeshi Amamiya Sound recording and picture recording disk provided with printing face

Also Published As

Publication number Publication date
JPS56136969A (en) 1981-10-26

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