JPS5934165B2 - Production method of carboxylic acid ester - Google Patents
Production method of carboxylic acid esterInfo
- Publication number
- JPS5934165B2 JPS5934165B2 JP12768878A JP12768878A JPS5934165B2 JP S5934165 B2 JPS5934165 B2 JP S5934165B2 JP 12768878 A JP12768878 A JP 12768878A JP 12768878 A JP12768878 A JP 12768878A JP S5934165 B2 JPS5934165 B2 JP S5934165B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- alkyl group
- carbon
- hydrogen
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 125000003262 carboxylic acid ester group Chemical class [H]C([H])([*:2])OC(=O)C([H])([H])[*:1] 0.000 title claims 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 34
- 239000003054 catalyst Substances 0.000 claims description 19
- 229910017052 cobalt Inorganic materials 0.000 claims description 16
- 239000010941 cobalt Substances 0.000 claims description 16
- -1 halogenated alkyl compound Chemical class 0.000 claims description 15
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 13
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 12
- 150000001450 anions Chemical class 0.000 claims description 12
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 11
- 125000000217 alkyl group Chemical group 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 150000001868 cobalt Chemical class 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 125000005843 halogen group Chemical group 0.000 claims description 3
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000005078 alkoxycarbonylalkyl group Chemical group 0.000 claims description 2
- 125000002947 alkylene group Chemical group 0.000 claims description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 2
- 125000001033 ether group Chemical group 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 150000002790 naphthalenes Chemical class 0.000 claims description 2
- 125000002560 nitrile group Chemical group 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 125000002723 alicyclic group Chemical group 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 23
- 150000001733 carboxylic acid esters Chemical class 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- QABLOFMHHSOFRJ-UHFFFAOYSA-N methyl 2-chloroacetate Chemical compound COC(=O)CCl QABLOFMHHSOFRJ-UHFFFAOYSA-N 0.000 description 6
- 150000004820 halides Chemical class 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 125000001931 aliphatic group Chemical group 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- MQIKJSYMMJWAMP-UHFFFAOYSA-N dicobalt octacarbonyl Chemical group [Co+2].[Co+2].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] MQIKJSYMMJWAMP-UHFFFAOYSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- BEPAFCGSDWSTEL-UHFFFAOYSA-N dimethyl malonate Chemical compound COC(=O)CC(=O)OC BEPAFCGSDWSTEL-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012456 homogeneous solution Substances 0.000 description 2
- 239000012433 hydrogen halide Substances 0.000 description 2
- 229910000039 hydrogen halide Inorganic materials 0.000 description 2
- VODRWDBLLGYRJT-UHFFFAOYSA-N propan-2-yl 2-chloroacetate Chemical compound CC(C)OC(=O)CCl VODRWDBLLGYRJT-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical group C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 1
- IFABLCIRROMTAN-MDZDMXLPSA-N (e)-1-chlorooctadec-9-ene Chemical compound CCCCCCCC\C=C\CCCCCCCCCl IFABLCIRROMTAN-MDZDMXLPSA-N 0.000 description 1
- SEQRDAAUNCRFIT-UHFFFAOYSA-N 1,1-dichlorobutane Chemical compound CCCC(Cl)Cl SEQRDAAUNCRFIT-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- OCJBOOLMMGQPQU-UHFFFAOYSA-N 1,4-dichlorobenzene Chemical compound ClC1=CC=C(Cl)C=C1 OCJBOOLMMGQPQU-UHFFFAOYSA-N 0.000 description 1
- RRRBNCDKPVHUNU-UHFFFAOYSA-N 1-(chloromethoxy)-2-methylpropane Chemical compound CC(C)COCCl RRRBNCDKPVHUNU-UHFFFAOYSA-N 0.000 description 1
- VQRBXYBBGHOGFT-UHFFFAOYSA-N 1-(chloromethyl)-2-methylbenzene Chemical group CC1=CC=CC=C1CCl VQRBXYBBGHOGFT-UHFFFAOYSA-N 0.000 description 1
- MOHYOXXOKFQHDC-UHFFFAOYSA-N 1-(chloromethyl)-4-methoxybenzene Chemical compound COC1=CC=C(CCl)C=C1 MOHYOXXOKFQHDC-UHFFFAOYSA-N 0.000 description 1
- OMSLLABRPCKBOQ-UHFFFAOYSA-N 1-(iodomethyl)-2-methylbenzene Chemical group CC1=CC=CC=C1CI OMSLLABRPCKBOQ-UHFFFAOYSA-N 0.000 description 1
- PPUZXOKAOIOPIE-UHFFFAOYSA-N 1-bromo-2-ethenoxyethane Chemical compound BrCCOC=C PPUZXOKAOIOPIE-UHFFFAOYSA-N 0.000 description 1
- WSULSMOGMLRGKU-UHFFFAOYSA-N 1-bromooctadecane Chemical compound CCCCCCCCCCCCCCCCCCBr WSULSMOGMLRGKU-UHFFFAOYSA-N 0.000 description 1
- GPTVQTPMFOLLOA-UHFFFAOYSA-N 1-chloro-2-ethoxyethane Chemical compound CCOCCCl GPTVQTPMFOLLOA-UHFFFAOYSA-N 0.000 description 1
- NKNYZKFBNQUWTM-UHFFFAOYSA-N 1-chloropent-1-ene Chemical compound CCCC=CCl NKNYZKFBNQUWTM-UHFFFAOYSA-N 0.000 description 1
- SQCZQTSHSZLZIQ-UHFFFAOYSA-N 1-chloropentane Chemical compound CCCCCCl SQCZQTSHSZLZIQ-UHFFFAOYSA-N 0.000 description 1
- KSWQCTDANYDRPR-UHFFFAOYSA-N 1-chloroundec-1-ene Chemical compound CCCCCCCCCC=CCl KSWQCTDANYDRPR-UHFFFAOYSA-N 0.000 description 1
- UWLHSHAHTBJTBA-UHFFFAOYSA-N 1-iodooctane Chemical compound CCCCCCCCI UWLHSHAHTBJTBA-UHFFFAOYSA-N 0.000 description 1
- BKPFTDPOCSONMX-UHFFFAOYSA-N 1-iodopent-1-ene Chemical compound CCCC=CI BKPFTDPOCSONMX-UHFFFAOYSA-N 0.000 description 1
- BLXSFCHWMBESKV-UHFFFAOYSA-N 1-iodopentane Chemical compound CCCCCI BLXSFCHWMBESKV-UHFFFAOYSA-N 0.000 description 1
- MPCHQYWZAVTABQ-UHFFFAOYSA-N 2-(chloromethyl)naphthalene Chemical compound C1=CC=CC2=CC(CCl)=CC=C21 MPCHQYWZAVTABQ-UHFFFAOYSA-N 0.000 description 1
- IVJLGIMHHWKRAN-UHFFFAOYSA-N 2-(chloromethyl)oxolane Chemical compound ClCC1CCCO1 IVJLGIMHHWKRAN-UHFFFAOYSA-N 0.000 description 1
- XFLOGTUFKZCFTK-UHFFFAOYSA-N 2-iodooctane Chemical compound CCCCCCC(C)I XFLOGTUFKZCFTK-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- MBXSHBIQMDKTEW-UHFFFAOYSA-N 3-bromobutanenitrile Chemical compound CC(Br)CC#N MBXSHBIQMDKTEW-UHFFFAOYSA-N 0.000 description 1
- GNHMRTZZNHZDDM-UHFFFAOYSA-N 3-chloropropionitrile Chemical compound ClCCC#N GNHMRTZZNHZDDM-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- OSDWBNJEKMUWAV-UHFFFAOYSA-N Allyl chloride Chemical compound ClCC=C OSDWBNJEKMUWAV-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical class OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- ZNSMNVMLTJELDZ-UHFFFAOYSA-N Bis(2-chloroethyl)ether Chemical compound ClCCOCCCl ZNSMNVMLTJELDZ-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- RENMDAKOXSCIGH-UHFFFAOYSA-N Chloroacetonitrile Chemical compound ClCC#N RENMDAKOXSCIGH-UHFFFAOYSA-N 0.000 description 1
- 229910021503 Cobalt(II) hydroxide Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910000290 alkaline earth metals carbonate Inorganic materials 0.000 description 1
- BHELZAPQIKSEDF-UHFFFAOYSA-N allyl bromide Chemical compound BrCC=C BHELZAPQIKSEDF-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- AGEZXYOZHKGVCM-UHFFFAOYSA-N benzyl bromide Chemical compound BrCC1=CC=CC=C1 AGEZXYOZHKGVCM-UHFFFAOYSA-N 0.000 description 1
- KCXMKQUNVWSEMD-UHFFFAOYSA-N benzyl chloride Chemical compound ClCC1=CC=CC=C1 KCXMKQUNVWSEMD-UHFFFAOYSA-N 0.000 description 1
- 229940073608 benzyl chloride Drugs 0.000 description 1
- MBXXQYJBFRRFCK-UHFFFAOYSA-N benzyl fluoride Chemical compound FCC1=CC=CC=C1 MBXXQYJBFRRFCK-UHFFFAOYSA-N 0.000 description 1
- BRTFVKHPEHKBQF-UHFFFAOYSA-N bromocyclopentane Chemical compound BrC1CCCC1 BRTFVKHPEHKBQF-UHFFFAOYSA-N 0.000 description 1
- RDHPKYGYEGBMSE-UHFFFAOYSA-N bromoethane Chemical compound CCBr RDHPKYGYEGBMSE-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- NEHMKBQYUWJMIP-NJFSPNSNSA-N chloro(114C)methane Chemical compound [14CH3]Cl NEHMKBQYUWJMIP-NJFSPNSNSA-N 0.000 description 1
- FOCAUTSVDIKZOP-UHFFFAOYSA-N chloroacetic acid Chemical compound OC(=O)CCl FOCAUTSVDIKZOP-UHFFFAOYSA-N 0.000 description 1
- BULLHNJGPPOUOX-UHFFFAOYSA-N chloroacetone Chemical compound CC(=O)CCl BULLHNJGPPOUOX-UHFFFAOYSA-N 0.000 description 1
- HRYZWHHZPQKTII-UHFFFAOYSA-N chloroethane Chemical compound CCCl HRYZWHHZPQKTII-UHFFFAOYSA-N 0.000 description 1
- ASKVAEGIVYSGNY-UHFFFAOYSA-L cobalt(ii) hydroxide Chemical compound [OH-].[OH-].[Co+2] ASKVAEGIVYSGNY-UHFFFAOYSA-L 0.000 description 1
- YTKRILODNOEEPX-NSCUHMNNSA-N crotyl chloride Chemical compound C\C=C\CCl YTKRILODNOEEPX-NSCUHMNNSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 229940117389 dichlorobenzene Drugs 0.000 description 1
- QRVSDVDFJFKYKA-UHFFFAOYSA-N dipropan-2-yl propanedioate Chemical compound CC(C)OC(=O)CC(=O)OC(C)C QRVSDVDFJFKYKA-UHFFFAOYSA-N 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- PQJJJMRNHATNKG-UHFFFAOYSA-N ethyl bromoacetate Chemical compound CCOC(=O)CBr PQJJJMRNHATNKG-UHFFFAOYSA-N 0.000 description 1
- 229960003750 ethyl chloride Drugs 0.000 description 1
- VEUUMBGHMNQHGO-UHFFFAOYSA-N ethyl chloroacetate Chemical compound CCOC(=O)CCl VEUUMBGHMNQHGO-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012442 inert solvent Substances 0.000 description 1
- 150000007529 inorganic bases Chemical class 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- XJTQJERLRPWUGL-UHFFFAOYSA-N iodomethylbenzene Chemical compound ICC1=CC=CC=C1 XJTQJERLRPWUGL-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- MJGFBOZCAJSGQW-UHFFFAOYSA-N mercury sodium Chemical compound [Na].[Hg] MJGFBOZCAJSGQW-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- YDCHPLOFQATIDS-UHFFFAOYSA-N methyl 2-bromoacetate Chemical compound COC(=O)CBr YDCHPLOFQATIDS-UHFFFAOYSA-N 0.000 description 1
- GZGJIACHBCQSPC-UHFFFAOYSA-N methyl 3-chloropropanoate Chemical compound COC(=O)CCCl GZGJIACHBCQSPC-UHFFFAOYSA-N 0.000 description 1
- 229940073584 methylene chloride Drugs 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- UNFUYWDGSFDHCW-UHFFFAOYSA-N monochlorocyclohexane Chemical compound ClC1CCCCC1 UNFUYWDGSFDHCW-UHFFFAOYSA-N 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000002896 organic halogen compounds Chemical class 0.000 description 1
- 125000001477 organic nitrogen group Chemical group 0.000 description 1
- 125000001037 p-tolyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1*)C([H])([H])[H] 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 229910001023 sodium amalgam Inorganic materials 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
【発明の詳細な説明】
本発明は、カルボン酸エステルの製法、特に一酸化炭素
、アルコール、及び特定のハロゲン化有機化合物からカ
ルボン酸エステルを製造するにあたり、コバルト化合物
、一酸化炭素及び水素をアセトン溶媒中反応させて得ら
れたコバルトテトラカルボニルアニオンのアセトン溶液
をそのまま、触媒とするカルボン酸のエステルの製法に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a method for producing a carboxylic acid ester, particularly for producing a carboxylic acid ester from carbon monoxide, alcohol, and a specific halogenated organic compound. This invention relates to a method for producing a carboxylic acid ester using an acetone solution of cobalt tetracarbonyl anion obtained by reaction in a solvent as a catalyst.
従来、カルボン酸エステルの製法としてはいろいろ提案
されているが、例えば特公昭4010967号に記載さ
れたように一酸化炭素・・ロゲン化有機化合物及びアル
コール類をコバルトテトラカルボニル塩を触媒に用い、
無機塩基又は有機窒素塩基を使用し、塩基性反応条件下
反応させる方法がある。Conventionally, various methods for producing carboxylic acid esters have been proposed, but for example, as described in Japanese Patent Publication No. 4010967, carbon monoxide, rogogenated organic compounds, and alcohols are used as a catalyst, and a cobalt tetracarbonyl salt is used as a catalyst.
There is a method of using an inorganic base or an organic nitrogen base and carrying out the reaction under basic reaction conditions.
すなわち、この方法は、二酸化炭素、アルコール及びハ
ロゲン化有機化合物をジコバルトオクタカルボニルとナ
トリウムアマルガムとの反応生成物を触媒とし反応させ
るものであるが、収率が低く、しかも触媒の製法が実用
的でなく、しかも活性に問題がある。In other words, this method involves reacting carbon dioxide, alcohol, and a halogenated organic compound using the reaction product of dicobalt octacarbonyl and sodium amalgam as a catalyst, but the yield is low and the method for producing the catalyst is not practical. Moreover, there is a problem with the activity.
本発明はこれらの欠点を解決することを目的とするもの
で、アセトン溶媒中、コバルト塩、一酸化炭素、及び水
素を反応させて得られるコバルトテトラカルボニルアニ
オンのアセトン溶液を触媒とし、一酸化炭素、アルコー
ル及びハロゲン化有機化合物を塩基性物質の存在下反応
させることにより、高収率でカルボン酸エステルを製造
する方法を提案するものである。The present invention aims to solve these drawbacks, and uses an acetone solution of cobalt tetracarbonyl anion obtained by reacting cobalt salt, carbon monoxide, and hydrogen in an acetone solvent as a catalyst, and uses carbon monoxide as a catalyst. , proposes a method for producing carboxylic acid esters in high yield by reacting alcohols and halogenated organic compounds in the presence of a basic substance.
すなわち、本発明は、下記一般式(1)、()又は()
で示されるそれぞれハロゲン化カルボン酸エステル、ハ
ロゲン化アルキル化合物又はハロゲン化アリール化合物
を塩基性物質の存在下、一酸化炭素及びアルコールと反
応させる際に、コバルト塩、一酸化炭素及び水素をアセ
トン溶媒中で反応させて得られたコバルトテトラカルボ
ニルアニオンのアセトン溶液を触媒とすることを特徴と
するカルボン酸エステルの製法である。That is, the present invention provides the following general formula (1), () or ()
When reacting a halogenated carboxylic acid ester, a halogenated alkyl compound, or a halogenated aryl compound shown respectively with carbon monoxide and alcohol in the presence of a basic substance, the cobalt salt, carbon monoxide, and hydrogen are reacted in an acetone solvent. This is a method for producing a carboxylic acid ester, which is characterized by using an acetone solution of cobalt tetracarbonyl anion obtained by the reaction as a catalyst.
(式中、Xはハロゲン、R1は水素又は炭素数1〜3の
アルキル基、R2は炭素数1〜8のアルキル基、R3は
炭素数1〜8の直鎖、分枝又は脂環族アルキル基であつ
て、場合によつては、その炭素鎖中に二重結合、エーテ
ル基、ニトリル基又はカルボニル基を有し、あるいは末
端炭素に結合するハロゲン基を有するもの、&は水素又
は炭素数1〜3のアルキル基、Arはベンゼン核、ナフ
タリン核、その他単核以上のアリール基、R5は水素、
ハロゲン、炭素数1〜8の直鎖又は分枝アルキル基、炭
素数1〜3のアルキレン基を有するアルコキシカルボニ
ルアルキル基、アルコキシ基及びハロゲン化アルキル基
から選ばれた少くとも1種である。(In the formula, A group that, as the case may be, has a double bond, ether group, nitrile group, or carbonyl group in its carbon chain, or has a halogen group bonded to the terminal carbon, & is hydrogen or the number of carbon atoms 1 to 3 alkyl groups, Ar is a benzene nucleus, naphthalene nucleus, or other mononuclear or higher aryl group, R5 is hydrogen,
It is at least one selected from halogen, a linear or branched alkyl group having 1 to 8 carbon atoms, an alkoxycarbonyl alkyl group having an alkylene group having 1 to 3 carbon atoms, an alkoxy group, and a halogenated alkyl group.
)具体例として次の化合物が挙げられるが本発明ではこ
れに限定されるものではない。) Specific examples include the following compounds, but the present invention is not limited thereto.
ハロゲン化カルボン酸エステルとしては、メチルクロロ
アセテート、エチルクロロアセテート、イソプロピルク
ロロアセテート、メチルブロモアセテート、エチルブロ
モアセテート、メチル−3クロロプロピオネート等であ
る。Examples of the halogenated carboxylic acid ester include methyl chloroacetate, ethyl chloroacetate, isopropyl chloroacetate, methyl bromoacetate, ethyl bromoacetate, methyl-3chloropropionate, and the like.
ハロゲン化アルキル化合物としては、メチルクロライド
、メチレンクロライド、エチルクロライド、エチルブロ
マイド、エチレンジクロライド、アミルクロライド、3
−クロロプロパン、アミルアイオダイド、オクチルアイ
オダイド、2−ヨードオクタン、オレイルクロライド、
ステアリルブロマイド、ジクロロブタン、塩素化ケロセ
ン、アリルクロライド、アリルブロマイド、クロチルク
ロライド、クロチルフルオライド、メタアリルクロライ
ド、ペンテニルクロライド、ペンテニルアイオダイド、
ウンデセニルクロライド、ジクロロベンゼン、3−クロ
ロプロピオニトリル、クロロアセトニトリル、3−ブロ
モブチロ゛ニトリル、βクロロエチルエチルエーテル、
β・β7〜ジクロロジエチルエーテル、クロロメチルイ
ソブチルエーテル、β−ブロモエチルビニルエーテル、
αクロロプロピルプロピルエーテル、シクロヘキシルク
ロライド、シクロペンチルブロマイド、テトラヒドロフ
ルフリルクロライド、クロロアセトン、ジエチル4−ク
ロロブチルアルデヒドアセタール等である。Examples of halogenated alkyl compounds include methyl chloride, methylene chloride, ethyl chloride, ethyl bromide, ethylene dichloride, amyl chloride,
-chloropropane, amyl iodide, octyl iodide, 2-iodooctane, oleyl chloride,
Stearyl bromide, dichlorobutane, chlorinated kerosene, allyl chloride, allyl bromide, crotyl chloride, crotyl fluoride, meta-allyl chloride, pentenyl chloride, pentenyl iodide,
Undecenyl chloride, dichlorobenzene, 3-chloropropionitrile, chloroacetonitrile, 3-bromobutyronitrile, β-chloroethyl ethyl ether,
β・β7~dichlorodiethyl ether, chloromethyl isobutyl ether, β-bromoethyl vinyl ether,
α-chloropropylpropyl ether, cyclohexyl chloride, cyclopentyl bromide, tetrahydrofurfuryl chloride, chloroacetone, diethyl 4-chlorobutyraldehyde acetal and the like.
ハロゲン化アリール化合物としてはベンジルクロライド
、オルソ−、メタ−およびパラ−メトキシベンジルクロ
ライド、α−モノクロローキシレンおよびα・α7ージ
クロローキシレン(オルソ、メタまたはパラ)、α−ク
ロロメ子ルナフタレン、β−クロロメチルナフタレン、
α−クロロメシチレン、ベンジルフルオライド、ベンジ
ルブロマイド、ベンジルアイオダイド、パラトリルクロ
ライド、α−ヨードキシレン(オルソ、メタまたはパラ
)等である。Halogenated aryl compounds include benzyl chloride, ortho-, meta- and para-methoxybenzyl chloride, α-monochloroxylene and α・α7-dichloroxylene (ortho, meta or para), α-chloromethoxylunaphthalene, β -chloromethylnaphthalene,
α-chloromesitylene, benzyl fluoride, benzyl bromide, benzyl iodide, para-tolyl chloride, α-iodoxylene (ortho, meta or para) and the like.
本発明で使用する触媒は、コバルトテトラカルボニルア
ニオンであり、活性も高く公知の触媒に較べて、少量の
触媒量でも、反応は充分進行する。The catalyst used in the present invention is a cobalt tetracarbonyl anion, which has high activity and, compared to known catalysts, the reaction proceeds satisfactorily even with a small amount of catalyst.
又本発明に使用する、コバルトテトラカルボニルアニオ
ンの対イオンは、水素の陽イオンが大部分であり、コバ
ルトの陽イオンも少量存在すると推定できるが、副反応
は全くない。本発明で使用する触媒は、アセトン中で、
コバルト塩、一酸化炭素及び水素とジコバルトオクタカ
ルボニルを製造する条件と同様な条件(たとえば160
℃、200k9/漏)で反応させることにより得られる
アセトンの均一溶液を、−そのまま使用することができ
る。Further, the counter ions of the cobalt tetracarbonyl anion used in the present invention are mostly hydrogen cations, and although it is presumed that a small amount of cobalt cations are present, there are no side reactions at all. The catalyst used in the present invention is in acetone,
Conditions similar to those for producing dicobalt octacarbonyl with cobalt salt, carbon monoxide and hydrogen (e.g. 160
The homogeneous solution of acetone obtained by reaction at 200 k9/leak) can be used as is.
本発明に用いる、アルコールは、脂肪族アルコールであ
れば、特に制限はないが、メタノール、エタノール、イ
ソプロパノール、n−ブタノールがあげられる。The alcohol used in the present invention is not particularly limited as long as it is an aliphatic alcohol, and examples thereof include methanol, ethanol, isopropanol, and n-butanol.
さらに、アルコールの他に不活性溶媒、たとえば、脂肪
族飽和炭化水素、芳香族炭化水素、ピリジン、ピコリン
、および有機酸のアルコールエステルを共存させてもよ
い。Furthermore, in addition to alcohol, inert solvents such as aliphatic saturated hydrocarbons, aromatic hydrocarbons, pyridine, picoline, and alcohol esters of organic acids may be coexisting.
触媒と有機・・ロゲン化物とのモル比は、1:1〜1:
4゛00、好ましくは、l:4〜l:100である。The molar ratio of the catalyst and the organic logenide is 1:1 to 1:
4'00, preferably l:4 to l:100.
塩基性物質は、反応で副生する・・ロゲン化水素を捕捉
する役割をするものであり、したがつて、ハロゲン化水
素と反応するものであればよく、たとえば、アンモニア
、ヒドラジン、及び脂肪族、芳香族のブ級、二級、三級
アミン等脂肪族及び芳香族アルコールの金属アルコラー
ド、アルカリ金属、アルカリ土類金属の炭酸塩、重炭酸
塩、酸化物、水酸化物等の公知のものが用いられる。The basic substance has the role of capturing hydrogen halide, which is produced as a by-product in the reaction.Therefore, it may be anything that reacts with hydrogen halide, such as ammonia, hydrazine, and aliphatic substances. , aromatic secondary, secondary, and tertiary amines, aliphatic and aromatic alcohols, metal alcoholades, alkali metals, alkaline earth metals carbonates, bicarbonates, oxides, hydroxides, and other known compounds. is used.
反応温度は、30〜100℃好ましくは、40〜70℃
である。また反応圧力は、2〜50kg/c?好ましく
は、5〜30k9/Cdである。使用する一酸化炭素は
、特に高純度である必要はなく、水素、不活性ガスが共
存するものを用いても、収率の低下することはない。本
発明の方法は、使用する塩基が、原料である有機ハロゲ
ン化物と反応しやすい化合物、たとえば、アルコラード
、アンモニア、カセイソーダの場合は、塩基は少量づつ
分添し反応を行う。The reaction temperature is 30-100°C, preferably 40-70°C.
It is. Also, the reaction pressure is 2 to 50 kg/c? Preferably it is 5 to 30k9/Cd. The carbon monoxide used does not need to be of particularly high purity, and even if hydrogen and inert gas are used together, the yield will not decrease. In the method of the present invention, when the base used is a compound that easily reacts with the raw material organic halide, such as alcoholade, ammonia, or caustic soda, the base is added in small portions to carry out the reaction.
その他の塩基を使用する場合は、仕込む方法に制限はな
く、有機ハロゲン化物、塩基性物質、及びアルコール溶
液中に、コバルトテトラカルボニルのアセトン溶液を分
添してもよく、又コバルトテトラカルボニルアニオンの
アセトン溶液、塩基性物質及びアルコール中に、有機ハ
ロゲン化物を分添してもよい、さらに全ての原料を一括
して仕込んで反応を行つても収率的に変化は少ない。以
上説明したように本発明は一酸化炭素、アルコール、及
びハロゲンイヒ有機化合物よりカルボン酸エステルを製
造するにあたり、コバルトテトラカルボニルアニオンの
アセトン溶液を触媒とするものであるが、触媒としては
溶液であり取扱いは容易であり、また触媒活性は高く、
しかも副生物の生成がないので収率よく、カルボン酸エ
ステルを製造することができるすぐれた方法である。When using other bases, there are no restrictions on the preparation method; an acetone solution of cobalt tetracarbonyl may be added in portions to the organic halide, basic substance, and alcohol solution, or a cobalt tetracarbonyl anion may be added in portions to the organic halide, basic substance, and alcohol solution. The organic halide may be added in portions to the acetone solution, basic substance, and alcohol, and even if all the raw materials are charged at once and the reaction is carried out, there is little change in yield. As explained above, the present invention uses an acetone solution of cobalt tetracarbonyl anion as a catalyst in producing a carboxylic acid ester from carbon monoxide, alcohol, and a halogenated organic compound. is easy to use, has high catalytic activity,
Moreover, since no by-products are produced, it is an excellent method for producing carboxylic acid esters with good yield.
参考例コバルトテトラカルボニルアニオンのアセトン溶
液の製造法内容積1.eの攪拌器付の耐圧反応器に0.
5f!のアセトンと0.2モルの水酸化コバルトを仕込
む。Reference Example: Method for producing an acetone solution of cobalt tetracarbonyl anion Internal volume: 1. 0.0 in a pressure-resistant reactor equipped with a stirrer.
5f! of acetone and 0.2 mol of cobalt hydroxide are charged.
反応器を一酸化炭素及び水素の混合ガス(モル比10:
3)で反応器内の空気を置換した後、混合ガスを加圧し
、加熱及び撹拌を開始する。内温160℃で、圧力を2
00kg/Cdまで昇圧する。The reactor was heated with a mixed gas of carbon monoxide and hydrogen (molar ratio 10:
After replacing the air in the reactor in step 3), the mixed gas is pressurized and heating and stirring are started. Internal temperature 160℃, pressure 2
Increase the pressure to 00kg/Cd.
その後圧降下がはじまり、20kg/Cd圧降下したと
ころで再び200k9/CrAまで昇圧する。この方法
を繰り返し、約4時間後圧降下がないことを確認した上
で反応を停止した。反応後、冷却し常圧に戻し、反応液
を別のガラスの耐圧容器に移したところ全く沈殿状のも
のは、見られず、均一な溶液が得られた。この溶液と赤
外吸収スペクトル、ジコバルトオクタカルボニルとコバ
ルトテトラカルボニルアニオンの分析法であるヨウ素分
解法〔Anal.Chem.24巻A6.l、1952
年1月174〜176頁〕、を用いて分析したところ、
反応液中のコバルトカルボニルは全て、CO(CO)4
−であることを確認した。After that, the pressure starts to drop, and when the pressure drops by 20 kg/Cd, the pressure increases again to 200 k9/CrA. This method was repeated, and after confirming that there was no drop in pressure after about 4 hours, the reaction was stopped. After the reaction, the reaction solution was cooled and returned to normal pressure, and transferred to another glass pressure-resistant container. No precipitate was observed at all, and a homogeneous solution was obtained. This solution, infrared absorption spectrum, and iodine decomposition method, which is a method for analyzing dicobalt octacarbonyl and cobalt tetracarbonyl anions [Anal. Chem. Volume 24 A6. l, 1952
January 2015, pp. 174-176].
All cobalt carbonyl in the reaction solution is CO(CO)4
- It was confirmed that
実施例 1
攪拌器付1f!の耐圧反応器に、モノクロル酢酸メチル
エステル108y及び炭酸ソーダ0.5モル及びメタノ
ール300CCを仕込み、一酸化炭素で空気を置換後、
加熱、撹拌を開始し、温度50℃で、5k9/Cdに加
圧したところで、参考例と同様にして製造したコバルト
テトラカルボニルアニオンのアセトン溶液160CC(
CO(CO)4−107含有)を4時間の内にポンプで
分添する。Example 1 1f with stirrer! 108y of monochloroacetic methyl ester, 0.5 mol of soda carbonate, and 300cc of methanol were placed in a pressure-resistant reactor, and after replacing the air with carbon monoxide,
Heating and stirring were started, and when the temperature was 50°C and the pressure was increased to 5k9/Cd, 160 cc of an acetone solution of cobalt tetracarbonyl anion produced in the same manner as in the reference example (
CO (containing CO4-107) was added by pump within 4 hours.
又分添開始と同時に、30cc/Mmの速度で連続的に
パージしながら反応し、分添後1時間熟成した。反応後
、反応液を取り出し、硫酸酸性にし、ガスクロマトグラ
フイ一で分析したところ、マロン酸ジメチルエステル1
237(収率93.6%)生成しており、未反応モノク
ロル酢酸メチルエステルは、3.39であつた。実施例
2
実施例1と同様であるが、触媒液は、初めに仕込んでお
き、NH3のメタノール溶液(3M/l)350CCを
5時間で分添し反応を行つた。Simultaneously with the start of the fractional addition, the reaction was carried out while continuously purging at a rate of 30 cc/Mm, and the mixture was aged for 1 hour after the fractional addition. After the reaction, the reaction solution was taken out, made acidic with sulfuric acid, and analyzed by gas chromatography.
237 (yield: 93.6%) was produced, and the amount of unreacted monochloroacetic acid methyl ester was 3.39. Example 2 Same as Example 1, but the catalyst solution was charged first, and 350 cc of a methanol solution of NH3 (3 M/l) was added in portions over 5 hours to carry out the reaction.
反応後、実施例1と同様に、硫酸酸性とし、ガスクロマ
トグラフイ一で分析したところ、マロン酸ジメチルエス
テル1187(収率89.8%)生成しており、未反応
モノクロル酢酸メチルエステルは、2.9yであつた。
実施例 3
実施例1と同様であるがモノクロル酢酸イソフロピルエ
ステル136y1及びイソプロパノール300CCを使
用し、触媒液としてコバルトテトラカルボニルアニオン
のアセトン溶液160CC(CO(CO)4−10y含
有)を5時間の間に滴下した。After the reaction, it was acidified with sulfuric acid in the same manner as in Example 1, and analyzed by gas chromatography. As a result, 1187 dimethyl malonate (yield 89.8%) was produced, and unreacted monochloroacetic acid methyl ester was 2. It was .9y.
Example 3 Same as Example 1, except that 136y1 of monochloroacetic acid isofropyl ester and 300cc of isopropanol were used, and 160cc of an acetone solution of cobalt tetracarbonyl anion (containing CO(CO)4-10y) was added as a catalyst solution for 5 hours. It dripped in between.
反応後実施例1と同様に分析したところ、マロン酸ジイ
ソプロピルエステル165y(収率88.1%)が生成
しており、未反応はモノクロル酢酸イソプロピルエステ
ル11.5′F7であつた。実施例 4実施例1と同様
であるが、触媒液は初めに仕込んでおき、モノクロル酢
酸メチルエステルを3時間で分添した。After the reaction, analysis was performed in the same manner as in Example 1, and it was found that diisopropyl malonate 165y (yield 88.1%) was produced, and that unreacted was monochloroacetic acid isopropyl ester 11.5'F7. Example 4 Same as Example 1, but the catalyst liquid was charged first, and monochloroacetic acid methyl ester was added portionwise over 3 hours.
反応後、実施例1と同様に分析したところ、マロン酸ジ
メチルエステル1247(収率94.4%)が生成して
おり、未反応モノクロル酢酸メチルは3.47であつた
。After the reaction, analysis in the same manner as in Example 1 revealed that 1247 dimethyl malonates (yield 94.4%) were produced, and the amount of unreacted methyl monochloroacetate was 3.47.
実施例 5〜23
実施例1〜4と同様な方法で実施した結果を第1表に示
す。Examples 5-23 Table 1 shows the results of experiments conducted in the same manner as in Examples 1-4.
尚、触媒は全てCO−(CO)4のアセトン溶液であり
、実施例5、6、11、12、14、18、19、20
、21124については有機ハロゲン化物を反応中分添
した。All catalysts were CO-(CO)4 acetone solutions, and Examples 5, 6, 11, 12, 14, 18, 19, 20
, 21124, an organic halide was added during the reaction.
Claims (1)
それぞれハロゲン化カルボン酸エステル、ハロゲン化ア
ルキル化合物又はハロゲン化アリール化合物を塩基性物
質の存在下、一酸化炭素及びアルコールと反応させる際
に、コバルト塩、一酸化炭素及び水素をアセトン溶媒中
で反応させて得られたコバルトテトラカルボニルアニオ
ンのアセトン溶液をそのまま触媒とすることを特徴とす
るカルボン酸エステルの製法。 ▲数式、化学式、表等があります▼( I )▲数式、化
学式、表等があります▼(II)▲数式、化学式、表等が
あります▼(III)(式中、Xはハロゲン、R_1は水
素又は炭素数13のアルキル基、R_2は炭素数1〜8
のアルキル基、R_3は炭素数1〜8の直鎖、分枝又は
脂環族アルキル基であつて、場合によつては、その炭素
鎖中に、二重結合、エーテル基、ニトリル基又はカルボ
ニル基を有し、あるいは末端炭素に結合するハロゲン基
を有するもの、R_4は水素又は炭素数1〜3のアルキ
ル基、Arはベンゼン核、ナフタリン核、その他単核以
上のアリール基、R_5は水素、ハロゲン、炭素数1〜
8の直鎖又は分枝アルキル基、炭素数1〜3のアルキレ
ン基を有するアルコキシカルボニルアルキル基、アルコ
キシ基及びハロゲン化アルキル基から選ばれた少くとも
1種である。 )。[Scope of Claims] 1 A halogenated carboxylic acid ester, a halogenated alkyl compound, or a halogenated aryl compound represented by the following general formula (I), (II), or (III), respectively, is monoxidized in the presence of a basic substance. A method for producing a carboxylic acid ester, characterized in that when reacting with carbon and alcohol, an acetone solution of cobalt tetracarbonyl anion obtained by reacting a cobalt salt, carbon monoxide, and hydrogen in an acetone solvent is used as a catalyst. . ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (I) ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (II) ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ (III) (In the formula, X is halogen, R_1 is hydrogen or an alkyl group having 13 carbon atoms, R_2 is a carbon number 1 to 8
The alkyl group R_3 is a straight chain, branched or alicyclic alkyl group having 1 to 8 carbon atoms, and in some cases, a double bond, ether group, nitrile group or carbonyl group is present in the carbon chain. or a halogen group bonded to the terminal carbon, R_4 is hydrogen or an alkyl group having 1 to 3 carbon atoms, Ar is a benzene nucleus, naphthalene nucleus, or other mononuclear or higher aryl group, R_5 is hydrogen, Halogen, carbon number 1~
It is at least one selected from a straight chain or branched alkyl group having 8 carbon atoms, an alkoxycarbonyl alkyl group having an alkylene group having 1 to 3 carbon atoms, an alkoxy group, and a halogenated alkyl group. ).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12768878A JPS5934165B2 (en) | 1978-10-17 | 1978-10-17 | Production method of carboxylic acid ester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12768878A JPS5934165B2 (en) | 1978-10-17 | 1978-10-17 | Production method of carboxylic acid ester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5553241A JPS5553241A (en) | 1980-04-18 |
| JPS5934165B2 true JPS5934165B2 (en) | 1984-08-21 |
Family
ID=14966235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12768878A Expired JPS5934165B2 (en) | 1978-10-17 | 1978-10-17 | Production method of carboxylic acid ester |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5934165B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11342201B2 (en) | 2019-03-28 | 2022-05-24 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus |
-
1978
- 1978-10-17 JP JP12768878A patent/JPS5934165B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11342201B2 (en) | 2019-03-28 | 2022-05-24 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5553241A (en) | 1980-04-18 |
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