JPS5936955B2 - Titanium oxide film formation method - Google Patents
Titanium oxide film formation methodInfo
- Publication number
- JPS5936955B2 JPS5936955B2 JP11010177A JP11010177A JPS5936955B2 JP S5936955 B2 JPS5936955 B2 JP S5936955B2 JP 11010177 A JP11010177 A JP 11010177A JP 11010177 A JP11010177 A JP 11010177A JP S5936955 B2 JPS5936955 B2 JP S5936955B2
- Authority
- JP
- Japan
- Prior art keywords
- formula
- solution
- polytitanoxane
- oxide film
- titanium oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5041—Titanium oxide or titanates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Paints Or Removers (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Description
【発明の詳細な説明】
本発明は基材表面に均一で緻密な透明の酸化チタンの連
続被膜を形成する方法に関するものであり、さらに詳し
くはポリチタノキサンキレート化合物含有溶液を基材表
面に塗布することを特徴とする酸化チタン被膜を形成す
る方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming a uniform, dense, transparent continuous titanium oxide film on the surface of a substrate, and more specifically, the present invention relates to a method for forming a uniform, dense, transparent, continuous titanium oxide film on the surface of a substrate. The present invention relates to a method of forming a titanium oxide film, which is characterized by coating the titanium oxide film.
ガラス、金属、セラミックスなどの基材表面に酸化チタ
ン被膜を形成させることは基材に耐食性、絶縁性、高い
表面硬度等を付与する方法として有効であるばかりでな
く、光学材料、電子材料としての機能付与などに有効な
手段である。とりわけ、高出力蛍光ランプ用ガラス管内
面にガラスよりも紫外線の屈折率が大きく、かつ透明な
二酸化チタン被膜を形成させることにより、アルカリ金
属に富むガラス管表面と蛍光体膜との接触を妨げて蛍光
体の劣化を防止し、また二酸化チタン被膜の屈折率が基
体ガラスの屈折率よりも大きいため、紫外線がランプ内
部へ反射され紫外線の利用効率を高めるとともにガラス
管への紫外線の到達率が減少することによつて紫外線照
射によるガラスの着色を防ぎ、光束劣化を低減すること
ができる。有機チタン化合物塗布による酸化チタン被膜
形成に用いられている有機チタンとしてテトラーー n
ブチルチタネートおよびテトライソプロピルチタネート
のような一般式(式中、Rは炭化水素基)
で表わされるチタン酸エステル化合物が通常用いられる
が、該化合物は加水分解を起こしやすく、塗布溶液が大
気中の水分を吸収して白濁化したり、塗布被膜が大気中
の水分で急速な加水分解を受けて粒子状の二酸化チタン
を生じ不透明化するなどの不都合を生じる。Forming a titanium oxide film on the surface of substrates such as glass, metals, and ceramics is not only effective as a method of imparting corrosion resistance, insulation, and high surface hardness to substrates, but also as a method for providing optical and electronic materials. This is an effective means for adding functionality. In particular, by forming a transparent titanium dioxide coating on the inner surface of a glass tube for high-output fluorescent lamps, which has a higher refractive index for ultraviolet rays than glass, it prevents contact between the glass tube surface, which is rich in alkali metals, and the phosphor film. This prevents deterioration of the phosphor, and since the refractive index of the titanium dioxide film is higher than that of the base glass, UV rays are reflected inside the lamp, increasing the efficiency of UV rays and reducing the rate of UV rays reaching the glass tube. By doing so, it is possible to prevent the glass from being colored by ultraviolet irradiation and reduce luminous flux deterioration. Tetler n is an organic titanium used to form a titanium oxide film by coating an organic titanium compound.
Titanate ester compounds represented by the general formula (wherein R is a hydrocarbon group) such as butyl titanate and tetraisopropyl titanate are commonly used; This causes problems such as the coating film becoming cloudy due to absorption of water, and the coated film undergoing rapid hydrolysis due to moisture in the atmosphere, producing particulate titanium dioxide and becoming opaque.
そこで、加水分解を起こしにくい有機チタン化合物を用
いる方法が提案されている(特開昭49−122519
号公法、同49−122520号公報)。これらの特許
では炭素数5〜9個を有するアルコールまたは前記アル
コールの酢酸エステルを溶媒とする一般式(式中、Rは
炭化水素基)
で表わされる有機チタン溶液を塗布する方法と多量体の
アルキルチタネートを塗布する方法が提案されている。Therefore, a method using organic titanium compounds that are less likely to cause hydrolysis has been proposed (Japanese Patent Application Laid-Open No. 122519-1989).
Public Law No. 49-122520). These patents describe a method of applying an organic titanium solution represented by the general formula (wherein R is a hydrocarbon group) using an alcohol having 5 to 9 carbon atoms or an acetate ester of the alcohol as a solvent, and A method of applying titanate has been proposed.
前者の方法ではエステル交換反応により炭素数の多いア
ルキル基を有するチタン酸エステルが生成することによ
りある程度耐加水分解性が良くなるが、被膜が分解して
二酸化チタンになる際の分解収縮率が大きいことが原因
で被膜に亀裂の発生が起こることがある。In the former method, hydrolysis resistance is improved to some extent by producing a titanate ester having an alkyl group with a large number of carbon atoms through the transesterification reaction, but the decomposition shrinkage rate when the film decomposes into titanium dioxide is high. This may cause cracks to occur in the coating.
また、いずれの方法でもこれらの溶液の耐加水分解性が
十分とは言えず、溶液を大気中で取扱つていると溶液の
白濁化が起こつてしまう。本発明者等は大気中でも安定
に取扱え、かつ透明で緻密な被膜を形成しうる有機チタ
ン化合物を見出すべく、鋭意研究を重ねた結果、ポリチ
タノキサンキレート化合物の溶液がきわめて有効である
ことを見出し、本発明を完成するに至つた。In addition, in either method, the hydrolysis resistance of these solutions is not sufficient, and when the solutions are handled in the atmosphere, they become cloudy. The inventors of the present invention have conducted intensive research in order to find an organic titanium compound that can be handled stably in the atmosphere and that can form a transparent and dense film, and as a result, they have found that a solution of a polytitanoxane chelate compound is extremely effective. They discovered this and completed the present invention.
さらに詳細に本発明を説明すると、ガラス、金属、セラ
ミツクスなどの基材に、構造単位が一般式(式中、Xは
チタンとキレート環を形成する炭素数12以下の有機化
合物残基の一種または二種以上)、一般式
(式中、Xはチタンとキレート環を形成する炭素数12
以下の有機化合物残基の一種または二種以上、Yは炭素
数10以下の炭化水素化合物残基、アルコキシ基あるい
はカルボン酸残基の一種または二種以上)、および一般
式
(式中、Yは炭素数10以下の炭化水素化合物残基、ア
ルコキシ基あるいはカルボン酸残基の一重または二種以
上)からなり、X,Yの比率がモル比で1≧IXl/0
X+(Yl)≧0.2であるポリチタノキサンキレート
化合物の溶液を塗布することを特徴とする酸化チタン被
膜形成法であつて、該ポリチタノキサンキレート化合物
溶液は長期に亘つて大気中で安定に取扱うことができ、
しかも形成される被膜は均一で緻密な透明の酸化チタン
被膜を形成することができる。To explain the present invention in more detail, a substrate such as glass, metal, or ceramics is coated with a structural unit having a general formula (wherein, (2 or more types), general formula (in the formula, X is 12 carbon atoms forming a chelate ring with titanium)
One or more of the following organic compound residues, Y is one or more of the following hydrocarbon compound residues having 10 or less carbon atoms, alkoxy groups, or carboxylic acid residues), and general formulas (wherein, Y is consisting of one or more types of hydrocarbon compound residues, alkoxy groups, or carboxylic acid residues having 10 or less carbon atoms, and the molar ratio of X and Y is 1≧IXl/0
A titanium oxide film forming method characterized by applying a solution of a polytitanoxane chelate compound in which It can be handled stably with
Moreover, the formed film can be a uniform, dense, and transparent titanium oxide film.
該ポリチタノキサンキレート化合物は一般式(式中、Y
は炭素数10以下の炭化水素化合物残基、アルコキシ基
あるいはカルボン酸残基の一種または二種以上)で表わ
される構造単位を有するポリチタノキサン化合物とYに
対して20〜100m01e%に相当する一般式XH
(式中、Xはチタンとキレート環を形成する有機置換基
の一種または二種以上)で表わされるキレート形成性化
合物を反応させ、例えば(1)式に従つて製造すること
ができるが、この反応は室温で容易に進行するので一般
式で表わされる構造単位を有するポリチタノキサン化合
物を有機溶媒に溶解した溶液に該キレート形成性化合物
を混合するだけで製造することができ、その反応溶液を
そのままあるいは必要に応じてさらに適当な有機溶媒で
稀釈して被膜形成用の塗布溶液として利用することがで
きる。The polytitanoxane chelate compound has the general formula (wherein Y
is a general formula (In the formula, X is one or more organic substituents that form a chelate ring with titanium.) It can be produced by reacting a chelate-forming compound represented by, for example, according to formula (1). Since the reaction easily proceeds at room temperature, it can be produced by simply mixing the chelate-forming compound with a solution of a polytitanoxane compound having a structural unit represented by the general formula dissolved in an organic solvent, and the reaction solution can be used as it is or If necessary, it can be further diluted with a suitable organic solvent and used as a coating solution for film formation.
ここで、2≧j>0.5,k+l+m=I,l≧( 2
k+l)/ 2( k +l+m )≧0.2である。Here, 2≧j>0.5, k+l+m=I, l≧( 2
k+l)/2(k+l+m)≧0.2.
また、別の製造法として、一般式(式中、n=0,1ま
たは2,Xはチタンとキレート環を形成する炭素数12
以下の有機化合物残基の一種または二種以上、Yは炭素
数10以下の炭化水素化合物残基、アルコキシ基あるい
はカルボン酸残基)で表わされる有機チタン化合物の一
種または二種以上の溶液に、該有機チタン化合物に対し
当モル前後(80〜130m01e%)の水を加え、例
えば(2)式に従つて製造することができる。In addition, as another production method, the general formula (where n = 0, 1 or 2, X is 12 carbon atoms forming a chelate ring with titanium)
In a solution of one or more organic titanium compounds represented by one or more of the following organic compound residues (Y is a hydrocarbon compound residue having 10 or less carbon atoms, an alkoxy group, or a carboxylic acid residue), It can be produced, for example, by adding approximately the same molar amount (80 to 130 m01e%) of water to the organic titanium compound, for example, according to formula (2).
一般式、XHで表わされるキレート形成性化合物として
、アセチルアセトン、ベンゾイルアセトン等のβ−ジケ
トン類、アセト酢酸、プロピオニル酪酸、ベンゾイル酢
酸、ピルビン酸、ベンゾイルギ酸などのα−またはβ−
ケトン酸類、該ケトン酸類のメチル、エチル、n−プロ
ピル、IsO−プロピル、n−ブチル、IsO−ブチル
、Tert−ブチルなどのエステル類、グリコール酸、
乳酸、α−オキシ酪酸、ヒドロアクリ酸、サリチル酸な
どα一またはβ−オキシ酸類のメチル、エチル、n−プ
ロピル、IsO−プロピル、n−ブf”゛IsO−ブチ
ル、Tert−ブチルなどのエステル類、ジアセトンア
ルコール、アセトインなどのα−またはβ−オキシケト
ン類、グリコールアルデヒド、アルドールなどのα一ま
たはβ−オキシアルデヒド類、グリシン、アラニンなど
のα−アミノ酸類、アミノエチルアルコールなどのα−
またはβ−アミノアルコール類などを含むチタンとキレ
ート環を形成しうるすべての化合物を単独または二種以
上の混合物として使用することができるが、該化合物を
用いて製造されるポリチタノキサンキレート化合物の耐
加水分解性が良好であつて、酸化チタン被膜形成時の分
解収縮率が小さく、かつ経済性に優れたキレート形成性
化合物として、アセチルアセトン、アセト酢酸エチル、
ジアセトンアルコールなどが特に好ましい。本発明によ
り被膜形成法が適用できる基材は被膜形成時の熱処理温
度に耐えるものであれば、ガラス、金属、セラミツクス
などのあらゆる材料を使用することができる。Chelate-forming compounds represented by the general formula
Ketone acids, esters of the ketone acids such as methyl, ethyl, n-propyl, IsO-propyl, n-butyl, IsO-butyl, tert-butyl, glycolic acid,
Esters such as methyl, ethyl, n-propyl, IsO-propyl, n-butyl, tert-butyl, etc. of α- or β-oxyacids such as lactic acid, α-oxybutyric acid, hydroacrylic acid, and salicylic acid; α- or β-oxyketones such as diacetone alcohol and acetoin, α- or β-oxyaldehydes such as glycolaldehyde and aldol, α-amino acids such as glycine and alanine, and α- such as aminoethyl alcohol.
Alternatively, all compounds capable of forming a chelate ring with titanium, including β-amino alcohols, etc., can be used alone or as a mixture of two or more, and polytitanoxane chelate compounds produced using these compounds. Acetylacetone, ethyl acetoacetate,
Diacetone alcohol and the like are particularly preferred. The substrate to which the film forming method according to the present invention can be applied may be any material such as glass, metal, ceramics, etc., as long as it can withstand the heat treatment temperature during film formation.
被膜形成法は該ポリチタノキサンキレート化合物溶液の
塗布工程と該ポリチタノキサンキレート化合物の分解に
よる被膜形成工程からなるが、塗布法としては浸漬、ス
プレー、キヤスチングなど既存の塗布法を利用すること
ができ、分解による被膜の酸化チタン化は400℃以上
1400℃以下の熱処理または大気中の水分または水蒸
気または水による加水分解後、490℃以上の熱処理を
行うことによつて達成することができる。The film forming method consists of a coating process of the polytitanoxane chelate compound solution and a film forming process by decomposing the polytitanoxane chelate compound, and existing coating methods such as dipping, spraying, and casting are used as the coating method. The titanium oxide film formed by decomposition can be achieved by heat treatment at 400°C or higher and 1400°C or lower, or by heat treatment at 490°C or higher after hydrolysis with atmospheric moisture, steam, or water. .
また、400℃以上に加熱した基材表面に該ポリチタノ
キサンキレート化合物溶液を塗布し、基材表面で塗布と
同時に熱分解させて酸化チタン被膜を形成させる方法を
利用することもできる。塗布用の該ポリチタノキサンキ
レート化合物溶液の溶媒としては、該ポリチタノキサン
キレート化合物の製造にも用いられるあらゆる有機溶媒
を使用することができるが塗布後の溶媒除去の容易さか
ら、沸点180℃以下の有機溶媒、特に炭素数8以下の
低級アルコール類、エーテル類、ケトン類、脂肪族炭化
水素、芳香族炭化水素およびこれらのハロゲン化物が好
ましい。Alternatively, it is also possible to use a method in which the polytitanoxane chelate compound solution is applied to the surface of a substrate heated to 400° C. or higher, and simultaneously thermally decomposed on the substrate surface to form a titanium oxide film. As the solvent for the polytitanoxane chelate compound solution for coating, any organic solvent that is also used in the production of the polytitanoxane chelate compound can be used. However, for ease of solvent removal after coating, boiling point Organic solvents having a temperature of 180° C. or lower, particularly lower alcohols having 8 or less carbon atoms, ethers, ketones, aliphatic hydrocarbons, aromatic hydrocarbons, and halides thereof are preferred.
塗布用の該ポリチタノキサンキレート化合物溶液中の該
ポリチタノキサンキレート化合物の濃度は7.5wt%
以下であれば任意に選ぶことができるが、高濃度溶液で
形成される被膜は膜厚が厚くなりすぎて亀裂が発生しや
すくなる欠点があり、1〜30重量?の範囲で使用する
ことが好ましい。亀裂のない厚膜を形成するには被膜形
成工程を繰り返し、重ね塗りすることにより任意の厚さ
を有する被膜を得ることができる。以下、実施例を挙げ
て本発明を説明する。The concentration of the polytitanoxane chelate compound in the polytitanoxane chelate compound solution for coating is 7.5 wt%.
Any value below can be selected, but a film formed with a highly concentrated solution has the disadvantage that it becomes too thick and cracks are likely to occur. It is preferable to use it within the range of . In order to form a thick film without cracks, a film having an arbitrary thickness can be obtained by repeating the film forming process and overcoating. The present invention will be explained below with reference to Examples.
実施例 1
テトラ−n−ブチルチタネートに当モルの水を反応させ
て得た構造単位が式(nの平均値は11.2)
で表わされるポリチタノキサンのn−ブタノール溶液に
当量のアセチルアセトンを加えて構造単位が式(ただし
、k=m)
で表わされるポリチタノキサンキレート化合物の濃度1
0重量%のn−ブタノール溶液を製造した。Example 1 An equivalent amount of acetylacetone was added to an n-butanol solution of polytitanoxane, whose structural unit is represented by the formula (the average value of n is 11.2), obtained by reacting tetra-n-butyl titanate with the same mole of water. Concentration 1 of a polytitanoxane chelate compound whose structural unit is represented by the formula (k=m)
A 0% by weight n-butanol solution was prepared.
比較のためにテトラ−n−ブチルチタネートの10重量
%のn−ブタノール溶液と構造単位が式(nの平均値は
11.2)で表わされるポリチタノキサンの濃度10重
量%のn−ブタノール溶液を調製した。For comparison, a 10% by weight n-butanol solution of tetra-n-butyl titanate and a 10% by weight n-butanol solution of polytitanoxane whose structural unit is represented by the formula (the average value of n is 11.2) were prepared. did.
これらの浴液各50dを室温、大気中で内径40m1L
S深さ70熊の蓋つきガラス製秤量びんに入れ保存した
ところ、テトラ−n−ブチルチタネートの溶液とn−ブ
トキシ基を有するポリチタノキサン化合物の溶液はそれ
ぞれ調整後13日目と14日目に白濁したが、該ポリチ
タノキサンキレート化合物の溶液は3力月経過しても黄
色味がかつた透明溶液のままであつた。50 d of each of these bath liquids was heated to an inner diameter of 40 m 1 L at room temperature and in the atmosphere.
When stored in a glass weighing bottle with a lid of S depth 70 mm, the solution of tetra-n-butyl titanate and the solution of a polytitanoxane compound having an n-butoxy group became cloudy on the 13th and 14th day after preparation, respectively. However, the solution of the polytitanoxane chelate compound remained a clear solution with a yellowish tinge even after 3 months had passed.
これらの溶液を用いて40×60X111のガラス板に
二酸化チタンの被膜を形成させた。Using these solutions, a titanium dioxide film was formed on a 40 x 60 x 111 glass plate.
先ず、溶液中にガラス板を浸漬したのち、フローマーク
がつかないようにゆつくりとガラス板が引き上げ、室温
、空気中で1時間放置し、その後空気中で100空C/
時間の昇温速度で500℃まで昇温し、500℃で1時
間焼成した。被膜の表面状態は、ポリチタノキサンキレ
ート化合物溶液を用いた場合が最も良好で全く亀裂がな
いが、他の二つの溶液を用いた場合は部分的に亀裂が発
生した。被膜組成はESCA測定により、いずれの場合
もTiO2であり、膜厚は電顕観察によると約2000
Λであつた実施例 2
構造単位が式で表わされるポリチタノキサンキレート化
合物の濃度4.8重量%のテトラヒドロフラン溶液を製
造した。First, a glass plate was immersed in the solution, then slowly pulled up so as not to create flow marks, left in air at room temperature for 1 hour, and then heated in air at 100 °C/C.
The temperature was raised to 500°C at a temperature increase rate of 1 hour, and fired at 500°C for 1 hour. The surface condition of the coating was the best when the polytitanoxane chelate compound solution was used, with no cracks at all, but cracks occurred partially when the other two solutions were used. The film composition was determined to be TiO2 in each case by ESCA measurement, and the film thickness was approximately 2000 nm by electron microscopic observation.
Example 2 A tetrahydrofuran solution having a concentration of 4.8% by weight of a polytitanoxane chelate compound whose structural unit is represented by the formula was prepared.
この溶液は黄色で透明であるが、空気中、室温で保存し
たところ、6力月経過しても全く変化がみられなかつた
。該溶液を実施例1と同様にしてガラス板に塗布、焼成
しTlO2被膜を形成させた。This solution was yellow and transparent, but when stored in air at room temperature, no change was observed even after 6 months had passed. The solution was applied to a glass plate and fired in the same manner as in Example 1 to form a TlO2 film.
Claims (1)
以下の有機化合物残基の一種または二種以上)、一般式 ▲数式、化学式、表等があります▼ (式中、Xはチタンとキレート環を形成する炭素数12
以下の有機化合物残基の一種または二種以上、Yは炭素
数10以下の炭化水素化合物残基、アルコキシ基あるい
はカルボン酸残基の一種または二種以上)および一般式
▲数式、化学式、表等があります▼ (式中、Yは炭素数10以下の炭化水素化合物残基、ア
ルコキシ基あるいはカルボン酸残基の一種または二種以
上)からなり、X、Yの比率がモル比で1≧〔X〕/(
〔X〕+〔Y〕≧0.2であるボリチタノキサンキレー
ト化合物の溶液を塗布することを特徴とする酸化チタン
被膜形成方法。[Claims] 1. The base material has a structural unit having a general formula ▲a mathematical formula, a chemical formula, a table, etc.▼ (wherein,
One or more of the following organic compound residues), general formula ▲ mathematical formula, chemical formula, table, etc. ▼ (wherein, X is the number of carbon atoms 12 forming a chelate ring with titanium
One or more of the following organic compound residues, Y is one or more of the following hydrocarbon compound residues, alkoxy groups, or carboxylic acid residues) and general formulas ▲ Numerical formulas, chemical formulas, tables, etc. ▼ (In the formula, Y consists of one or more types of hydrocarbon compound residues, alkoxy groups, or carboxylic acid residues having 10 or less carbon atoms), and the molar ratio of X and Y is 1≧[X ]/(
A method for forming a titanium oxide film, comprising applying a solution of a polytitanoxane chelate compound in which [X]+[Y]≧0.2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11010177A JPS5936955B2 (en) | 1977-09-12 | 1977-09-12 | Titanium oxide film formation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11010177A JPS5936955B2 (en) | 1977-09-12 | 1977-09-12 | Titanium oxide film formation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5443241A JPS5443241A (en) | 1979-04-05 |
| JPS5936955B2 true JPS5936955B2 (en) | 1984-09-06 |
Family
ID=14527054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11010177A Expired JPS5936955B2 (en) | 1977-09-12 | 1977-09-12 | Titanium oxide film formation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5936955B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3203546A1 (en) * | 1982-02-03 | 1983-08-11 | Dynamit Nobel Ag, 5210 Troisdorf | BINDERS CONTAINING TITANIC ACID ESTERS FOR COATING MEASURES AND FIRE-RESISTANT MOLDED BODIES, AND METHOD FOR THE PRODUCTION OF THESE BINDERS |
| US6740469B2 (en) * | 2002-06-25 | 2004-05-25 | Brewer Science Inc. | Developer-soluble metal alkoxide coatings for microelectronic applications |
| US6872506B2 (en) * | 2002-06-25 | 2005-03-29 | Brewer Science Inc. | Wet-developable anti-reflective compositions |
| US6737485B1 (en) * | 2003-04-22 | 2004-05-18 | E. I. Du Pont De Nemours And Company | Titanium chelate dispersions |
| CN106589388B (en) * | 2016-03-18 | 2018-08-28 | 北京华钛高科科技有限公司 | Linear titanyl polymer and its preparation method and application |
-
1977
- 1977-09-12 JP JP11010177A patent/JPS5936955B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5443241A (en) | 1979-04-05 |
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