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JPS5939286B2 - Manufacturing method of raw ceramic sheet - Google Patents
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JPS5939286B2 - Manufacturing method of raw ceramic sheet - Google Patents

Manufacturing method of raw ceramic sheet

Info

Publication number
JPS5939286B2
JPS5939286B2 JP56196082A JP19608281A JPS5939286B2 JP S5939286 B2 JPS5939286 B2 JP S5939286B2 JP 56196082 A JP56196082 A JP 56196082A JP 19608281 A JP19608281 A JP 19608281A JP S5939286 B2 JPS5939286 B2 JP S5939286B2
Authority
JP
Japan
Prior art keywords
ceramic sheet
raw ceramic
roll
semi
raw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56196082A
Other languages
Japanese (ja)
Other versions
JPS5896508A (en
Inventor
秀次 「く」島
芳幸 堀部
弘 和田
武美 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP56196082A priority Critical patent/JPS5939286B2/en
Publication of JPS5896508A publication Critical patent/JPS5896508A/en
Publication of JPS5939286B2 publication Critical patent/JPS5939286B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Inorganic Insulating Materials (AREA)

Description

【発明の詳細な説明】 本発明は生のセラミックシートの製造法に関する。[Detailed description of the invention] The present invention relates to a method for producing green ceramic sheets.

従来、生のセラミックシートはアルミナ、ガラ。Traditionally, raw ceramic sheets are alumina and glass.

ス質などの粒子材料を溶剤、可塑剤、樹脂などとともに
混合した泥漿(以下スリップという)をドクターブレー
ドを使用して可とう性を有するフィルム上に塗工後乾燥
する。いわゆるテープキャスティング法により製造され
ているが、一般にこのような方法で製造された生のセラ
ミックシートを焼成するとフィルムの進行方向とその法
線方向(フィルムに対し直角方向)で収縮率に差を生ず
る。この収縮率に異方性が生ずると基板の寸法精度が悪
くなるのみならず、生のセラミックシート上に回路を形
成しこれを多数枚積層して高い回路密度とした多層セラ
ミック基板を製造した場合、回路の切断などの原因とな
ヤ不都合を生じる。この欠点を補うため乾燥した生のセ
ラミックシートをカレンダー加工して焼成収縮率の異方
性をなくす方法があるが、乾燥した生のセラミックシー
トをカレンダー加工するためにはカレンダーロールに圧
力をかけなければならず、またカレンダーロール表面も
乾燥した生のセラミックシートにより摩耗するなどの欠
点があり、その改善が必要であつた。一方半乾燥の生の
セラミックシートをロール処理して焼成収縮率の異方性
をなくす方法もあるが、キャスティングの幅方向の全て
にわたつて通常の表面が平坦なロールで異方性を解消す
ることは困難であつた。
A slurry (hereinafter referred to as slip), which is a mixture of particulate materials such as grains with solvents, plasticizers, resins, etc., is applied onto a flexible film using a doctor blade and then dried. It is manufactured by the so-called tape casting method, but generally when raw ceramic sheets manufactured by this method are fired, there is a difference in shrinkage rate between the film's traveling direction and its normal direction (perpendicular to the film). . Anisotropy in this shrinkage rate not only deteriorates the dimensional accuracy of the substrate, but also when manufacturing a multilayer ceramic substrate with a high circuit density by forming a circuit on a raw ceramic sheet and laminating a large number of sheets. This may cause other inconveniences such as circuit breakage. To compensate for this drawback, there is a method of calendering a dry raw ceramic sheet to eliminate the anisotropy of firing shrinkage rate, but in order to calender a dry raw ceramic sheet, pressure must be applied to the calendar roll. In addition, there is a drawback that the surface of the calender roll is abraded due to the dry raw ceramic sheet, and it is necessary to improve this problem. On the other hand, there is a method to eliminate anisotropy in firing shrinkage rate by rolling a semi-dry raw ceramic sheet, but it is also possible to eliminate anisotropy by using a regular roll with a flat surface across the entire width of the casting. That was difficult.

また生のセラミックシートの厚さが異なる場合には半乾
燥の生のセラミックシートをロール処理する位置を変え
ねばならず装置が煩雑なるなど改善の必要があつた。本
発明はこれらの欠点のないセラミックシートの製造法を
提供することを目的とするものである。
Further, if the thickness of the raw ceramic sheet is different, the position at which the semi-dried raw ceramic sheet is rolled must be changed, which makes the apparatus complicated, and there is a need for improvement. The object of the present invention is to provide a method for producing ceramic sheets that does not have these drawbacks.

本発明は可とう性を有するフィルム上にテープキャステ
ィングにより生のセラsツクシートを製造する方法にお
いて、半乾燥の生のセラミックシートを、まず凹凸な表
面を有するロールで加工し、次いで平坦な表面を有する
ロールで加工して半乾燥の生のセラミックシート表面の
凹凸を除去する生のセラミックシートの製造法に関する
。本発明で使用される可とク性を有するフィルムの材質
及び厚さは制限されず、また製造する生のセラミツクシ
ートの材質なども制限されない。
The present invention is a method for producing green ceramic sheets by tape casting on flexible films, in which a semi-dry green ceramic sheet is first processed with a roll having an uneven surface, and then a flat surface is processed. The present invention relates to a method for producing a raw ceramic sheet, which processes the raw ceramic sheet using a roll having the same properties to remove irregularities on the surface of the semi-dried raw ceramic sheet. There are no restrictions on the material or thickness of the flexible film used in the present invention, nor are there any restrictions on the material of the raw ceramic sheet to be produced.

本発明で使用される凹凸な表面を有するロールの材質は
セラミックコーテイングもしくはセラミツクのタイルを
金属ロールに貼ジつけたものが望ましいが、キヤステイ
ング速度とロールの周速度が同一であれば金属であつて
も差Lつかえない。半乾燥の生のセラミツクシート表面
の凹凸をなくすために使用する表面が平坦なロールは金
属製で差しつかえない。ロールを押しつける圧力は半乾
燥の生のセラミツクシートの乾燥の影響をうけるが幅1
CTfL当VlO9〜500g程度で十分であり制限は
されない。凹凸な表面のロール突起形状については、突
起の先端が鋭利になつておシ半乾燥の皮膜を破損させる
ものは望ましくないが、一般的には円柱状の突起、半球
状の突起、角柱状の突起などが使用でき、突起の高さは
0.2m1及至2關程度のものが好ましい。以下実施例
により本発明を説明するが本発明はこれによジ拘束され
るものではない。
The material of the roll with an uneven surface used in the present invention is preferably ceramic coating or ceramic tiles stuck to a metal roll, but if the casting speed and the peripheral speed of the roll are the same, metal can be used. But I can't get the difference L. The roll with a flat surface used to eliminate unevenness on the surface of a semi-dry raw ceramic sheet may be made of metal. The pressure to press the roll is affected by the drying of the semi-dry raw ceramic sheet, but the width is 1.
Approximately 9 to 500 g of VlO per CTfL is sufficient and is not limited. Regarding the shape of the roll protrusion on the uneven surface, it is not desirable that the tip of the protrusion be sharp and damage the semi-dry film, but in general, cylindrical protrusions, hemispherical protrusions, and prismatic protrusions are recommended. A protrusion or the like can be used, and the height of the protrusion is preferably about 0.2 m1 to 2 m1. The present invention will be explained below with reference to Examples, but the present invention is not limited thereto.

第1表に示す組成物を各々20倍量配合し、硬質磁器製
6tポツトミルに直径25m1(ψ)アルミナ製ボール
3kgとともに投人し、100時間混合してスリツプと
した。
Each of the compositions shown in Table 1 was blended in 20 times the amount, put into a 6-t pot mill made of hard porcelain together with 3 kg of alumina balls having a diameter of 25 m1 (ψ), and mixed for 100 hours to form a slip.

次に前述のスリツプを厚さ150μmのポリエステルフ
イルム上にドクターブレード法で、ギヤツプ2.111
でテープキヤステイングし、40℃で3時間および60
℃で30分乾燥して表面に皮膜が形成された時点で硬質
クロムメツキされた直径10011!でかつ表面に直径
10m71L,高さ111の半球状の凸起を5.7中間
隔でとvつけたロールを幅1cm当?)509の荷重で
押しつけ半乾燥の生のセラミツクシート表面に凹凸を形
成し、引き続き直径60m1で表面の平坦な硬質クロム
メツキされたロールを幅1CfL当シ1009の荷重で
半乾燥の生のセラミツクシート表面を平坦にした。
Next, the aforementioned slip was placed on a 150 μm thick polyester film using a doctor blade method, with a gap of 2.111 mm.
tape casting at 40°C for 3 hours and 60°C.
After drying at ℃ for 30 minutes and forming a film on the surface, it is hard chrome plated with a diameter of 10011! A roll with a diameter of 10 m, 71 L and a height of 111 mm and a hemispherical protrusion on the surface at 5.7 medium intervals, with a width of 1 cm? ) The surface of the semi-dry raw ceramic sheet was pressed with a load of 509 to form irregularities, and then a hard chrome-plated roll with a diameter of 60 m1 and a flat surface was pressed with a width of 1 CfL and a load of 1009 to the surface of the semi-dry raw ceramic sheet. flattened.

その後70℃で30分、80℃で30分および100で
30分の条件で乾燥させて厚さ1WZ1の生のセラミツ
クシートとし、該生のセラミツクシートをポリエステル
フイルムからはく離したのちパンチングにより5011
tm角に打ち抜いた。次に前記打ち抜いた50中角の生
のセラミツクシートを室温から300℃まで2時間で昇
温し、30分保持したのち3『C/時間で1300℃ま
で昇温し、さらに50℃/時間で1600℃まで昇温し
、30分保持して焼成セラミツク基板とした。
Thereafter, it was dried at 70°C for 30 minutes, 80°C for 30 minutes, and 100°C for 30 minutes to obtain a raw ceramic sheet with a thickness of 1WZ1. After peeling the raw ceramic sheet from the polyester film, it was punched to form a 5011
Punched into tm square. Next, the temperature of the punched 50 medium square raw ceramic sheet was raised from room temperature to 300°C in 2 hours, held for 30 minutes, then heated to 1300°C at 3°C/hour, and further heated at 50°C/hour. The temperature was raised to 1600° C. and held for 30 minutes to obtain a fired ceramic substrate.

このセラミツク基板の焼成収縮率は20枚の平均でキヤ
ステイング方向14.1%,法線方向14.1%で差は
なく各点における焼成収縮率の差も0.1%以下であつ
た。比較例 実施例と同じスリツプを使用し、2回のロール処理のみ
除いて実施例と同条件でテープキャスタイックし、生の
セラミツクシートとした。
The average firing shrinkage of 20 ceramic substrates was 14.1% in the casting direction and 14.1% in the normal direction, with no difference, and the difference in firing shrinkage at each point was less than 0.1%. Comparative Example Using the same slip as in the example, tape casting was performed under the same conditions as in the example except for rolling twice, to obtain a green ceramic sheet.

これを実施例と同じ大きさに打ち抜き以下実施例と同条
件で焼成してセラミツク基板とし、焼成収縮率を測定し
た。焼成収縮率は20枚の平均でキヤステイング方向1
4.3%,法線方向13.8%と0.5%の差があり各
点における焼成収縮率の差は0.3〜0.6%みられた
This was punched out to the same size as in the example and then fired under the same conditions as in the example to obtain a ceramic substrate, and the firing shrinkage rate was measured. The firing shrinkage rate is the average of 20 sheets in the casting direction 1
There was a difference of 0.5% between 4.3% and 13.8% in the normal direction, and the difference in firing shrinkage at each point was 0.3 to 0.6%.

本発明は凹凸な表面を有するロールで半乾燥の生のセラ
ミツクシートの表面に凹凸を形成し、この過程でキヤス
テイングにより配向させられていたセラミツク原料の粒
子はランダムな方向を向き、次いでこの凹凸を平坦な表
面を有するロールで加工して平坦化するのでさらにセラ
ミツク原料粒子の配向は修正され結果として焼成収縮率
の異方性がほとんど生じない生のセラミツクシートを製
造することができる。
In the present invention, unevenness is formed on the surface of a semi-dry raw ceramic sheet using a roll having an uneven surface, and during this process, particles of ceramic raw material that had been oriented by casting are oriented in random directions, and then the unevenness is Since the material is flattened by processing with a roll having a flat surface, the orientation of the ceramic raw material particles is further corrected, and as a result, a green ceramic sheet with almost no anisotropy in firing shrinkage rate can be produced.

Claims (1)

【特許請求の範囲】[Claims] 1 可とう性を有するフィルム上にテープキヤステイン
グにより生のセラミックシートを製造する方法において
、半乾燥の生のセラミックシートを、まず凹凸な表面を
有するロールで加工し、次いで平坦な表面を有するロー
ルで加工して半乾燥の生のセラミックシート表面の凹凸
を除去することを特徴とする生のセラミックシートの製
造法。
1. In a method of producing a green ceramic sheet by tape casting on a flexible film, a semi-dry green ceramic sheet is first processed with a roll having an uneven surface, and then a roll with a flat surface is processed. A method for producing a raw ceramic sheet, characterized by processing the raw ceramic sheet to remove irregularities on the surface of the semi-dry raw ceramic sheet.
JP56196082A 1981-12-04 1981-12-04 Manufacturing method of raw ceramic sheet Expired JPS5939286B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56196082A JPS5939286B2 (en) 1981-12-04 1981-12-04 Manufacturing method of raw ceramic sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56196082A JPS5939286B2 (en) 1981-12-04 1981-12-04 Manufacturing method of raw ceramic sheet

Publications (2)

Publication Number Publication Date
JPS5896508A JPS5896508A (en) 1983-06-08
JPS5939286B2 true JPS5939286B2 (en) 1984-09-21

Family

ID=16351899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56196082A Expired JPS5939286B2 (en) 1981-12-04 1981-12-04 Manufacturing method of raw ceramic sheet

Country Status (1)

Country Link
JP (1) JPS5939286B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109160809A (en) * 2018-08-29 2019-01-08 厦门朝瓷科技有限公司 A kind of submicrometer structure ultrathin alumina ceramic substrate and preparation method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145970A (en) * 1983-12-29 1985-08-01 株式会社陶研産業 Manufacture of ceramic thin blade
JPH0729850B2 (en) * 1991-11-18 1995-04-05 日本ピラー工業株式会社 Ceramic member of hydrodynamic bearing having a plurality of adjacent concave grooves on the surface and method of manufacturing the same
JPH07187803A (en) * 1993-12-27 1995-07-25 Nec Corp Production of green sheet
JP2009126095A (en) * 2007-11-26 2009-06-11 Nippon Shokubai Co Ltd Manufacturing method of surface-roughened ceramic green sheet
CN110862260B (en) * 2018-08-28 2021-03-26 比亚迪股份有限公司 Electronic product casing and preparation method thereof and mobile phone back cover
CN108947504A (en) * 2018-08-29 2018-12-07 厦门朝瓷科技有限公司 Submicrometer structure ultrathin alumina ceramic substrate and preparation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109160809A (en) * 2018-08-29 2019-01-08 厦门朝瓷科技有限公司 A kind of submicrometer structure ultrathin alumina ceramic substrate and preparation method

Also Published As

Publication number Publication date
JPS5896508A (en) 1983-06-08

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