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JPS5944795B2 - Manufacturing method of polyvinylidene fluoride electrical functional device - Google Patents
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JPS5944795B2 - Manufacturing method of polyvinylidene fluoride electrical functional device - Google Patents

Manufacturing method of polyvinylidene fluoride electrical functional device

Info

Publication number
JPS5944795B2
JPS5944795B2 JP50092296A JP9229675A JPS5944795B2 JP S5944795 B2 JPS5944795 B2 JP S5944795B2 JP 50092296 A JP50092296 A JP 50092296A JP 9229675 A JP9229675 A JP 9229675A JP S5944795 B2 JPS5944795 B2 JP S5944795B2
Authority
JP
Japan
Prior art keywords
stretching
film
type
width
polyvinylidene fluoride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50092296A
Other languages
Japanese (ja)
Other versions
JPS5216696A (en
Inventor
宏 小原
直広 村山
雅弘 勢川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kureha Corp
Original Assignee
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kureha Corp filed Critical Kureha Corp
Priority to JP50092296A priority Critical patent/JPS5944795B2/en
Publication of JPS5216696A publication Critical patent/JPS5216696A/en
Publication of JPS5944795B2 publication Critical patent/JPS5944795B2/en
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/857Macromolecular compositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/04Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/098Forming organic materials

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Organic Insulating Materials (AREA)

Description

【発明の詳細な説明】 本発明はポリフッ化ビニリデン樹脂(以下PVDFと略
す)を素材とした大きな圧電性及び焦電性を有する電気
機能素子の製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an electrically functional element having large piezoelectricity and pyroelectricity made of polyvinylidene fluoride resin (hereinafter abbreviated as PVDF).

圧電性や焦電性を有する高分子電気機能素子の発達は近
来特に目ざましい。
Recently, the development of polymer electrical functional elements having piezoelectricity and pyroelectricity has been particularly remarkable.

先ず木材、骨などの天然高分子や合成ポリペプチドの一
軸延伸フィルムが圧電性を示すことが見出され、その後
ある種の合成高分子フィルムが特殊な処理を施すことに
より大きな圧電性や焦電性を示すようになることが見出
された。即ち溶融押出し、延伸などの手段により得られ
た高分子フィルムに高温下で直流高電圧を印加する分極
処理(エレクトレット化)を施すことにより、大きな圧
電性や焦電性を得るいわゆる圧電性、焦電性エレクトレ
ットの発見である。このような高分子電気機能素子とし
てはPVDF、ポリフッ化ビニル、ポリ塩化ビニルなど
のエレクトレットが良く知られているが、なかでもβ型
結晶に富むPVDFエレクトレットの圧電性は極めて大
きく他の追従を許さない。PVDFは極性の強い結晶性
のポリマーであり、その結晶形態にはα型、β型の少な
くとも2種がある。
First, it was discovered that uniaxially stretched films of natural polymers such as wood and bone, as well as synthetic polypeptides, exhibited piezoelectric properties, and later certain synthetic polymer films were subjected to special treatments to exhibit large piezoelectric and pyroelectric properties. It was found that the In other words, by applying polarization treatment (electretization) by applying a high DC voltage at high temperatures to a polymer film obtained by means such as melt extrusion or stretching, so-called piezoelectric or pyroelectric properties can be obtained. This is the discovery of electrically conductive electret. Electrets such as PVDF, polyvinyl fluoride, and polyvinyl chloride are well known as such polymer electrofunctional devices, but among them, the piezoelectricity of PVDF electret, which is rich in β-type crystals, is extremely large and surpasses other types. do not have. PVDF is a highly polar crystalline polymer, and its crystal forms include at least two types: α type and β type.

樹脂を溶融状態から冷却固化させた場合、結晶はα型と
なるがα型PVDFを分極処理しても、その圧電性は小
さい。分極処理により大きな圧電性を示すβ型PVDF
を得るには種々の方法があるが、α型フィルムを比較的
低温で延伸する方法が工業的に最も容易なため好んで用
いられている。この場合α型からβ型への結晶転移の割
合は延伸温度が低い程また延伸倍率が大きい程大きく、
例えば130℃以下で少なくとも一方向に130%以上
延伸した場合にβ型結晶の多いフィルムが得られ、更に
温度が下がる程β型結晶が増加し、延伸点の温度が50
℃以下ではほぼ完全なβ型フィルムが得られることが知
られている。従来より、この結晶転移の割合と圧電性と
の間には密接な関係があるとされており、一般的に言つ
てβ型への転移量が多い程、圧電性も大きい。従つてな
るべく低温で、かつ高倍率での延伸が好んで用いられて
いる。一方、圧電性エレクトレットの性能は分極条件に
も依存し、一般的に言つて分極温度が高い程、また印加
される電界強度が大きい程、大きな圧電性が得られる。
When the resin is cooled and solidified from a molten state, the crystals become α-type, but even if α-type PVDF is polarized, its piezoelectricity is small. β-type PVDF exhibits great piezoelectricity due to polarization treatment
There are various methods for obtaining this, but the method of stretching an α-type film at a relatively low temperature is preferred because it is industrially easiest. In this case, the ratio of crystal transition from α type to β type increases as the stretching temperature decreases and as the stretching ratio increases,
For example, if the film is stretched by 130% or more in at least one direction at 130°C or lower, a film with many β-type crystals will be obtained, and as the temperature further decreases, the β-type crystals will increase, and the temperature at the stretching point will be 50°C.
It is known that an almost perfect β-type film can be obtained at temperatures below °C. It has been conventionally believed that there is a close relationship between the ratio of crystal transition and piezoelectricity, and generally speaking, the larger the amount of transition to the β type, the greater the piezoelectricity. Therefore, it is preferred to stretch at a low temperature and at a high magnification. On the other hand, the performance of piezoelectric electrets also depends on the polarization conditions, and generally speaking, the higher the polarization temperature and the greater the applied electric field strength, the greater piezoelectricity can be obtained.

しかしながら高い分極温度と大きな電界強度は応々にし
てフィルムの絶縁破壊を引起こし、より大きな圧電性を
得ようとして温度と電界強度を更に高めようとしても、
この絶縁耐電圧の壁にはばまれて圧電性の上限が決まつ
てくる。
However, high polarization temperatures and large electric field strengths can cause dielectric breakdown of the film, and even if attempts are made to further increase the temperature and electric field strength in order to obtain greater piezoelectricity,
The upper limit of piezoelectricity is determined by this wall of dielectric withstand voltage.

フイルムの絶縁耐電圧を向上させるべく、ポリマーの純
度を高めたり、またフイルムの偏肉を極力滅らしても絶
縁耐電圧には本質的な限界があり、圧電性の大幅な向上
は望みにくい。むしろ延伸条件を更に詳細に検討し、よ
り低い分極温度と電界強度で高い圧電性が得られるフイ
ルムを得ることが特に工業的な観点から見て極めて望ま
しいことである。本発明者らは上述のような観点に立ち
、より低い分極温度と電界強度で高い圧電性を示すPV
DFフイルムを得るべく、PVDFの延伸について更に
詳細な検討を行なつた結果、従来知られていなかつた新
事実を見出し本発明に至つたのである。即ち、本発明者
らは溶融押出しによつて得られたα型PVDFフイルム
を一軸延伸してβ型フイルムとする際、フイルムの幅方
向の収縮率と圧電性との間に密接な関係があることを見
出しムこれを図によつて説明すると、第1図に示す如く
α型PVDFフイルムaを一軸延伸してβ型フイルムb
とする際、延伸によつてフイルム中央部にくびれを生じ
フイルム幅W。はWVC変化する。このような一軸延伸
によるくびれ現象は、プラスチツクスのみならず全ての
物質に見られることであろうが、PVDFVC卦いて圧
電性と密接な関係があることは誠に驚くべき事である。
本発明者らは、この一軸延伸によるフイルム幅方向の収
縮率と圧電定数との関係に着目し種々検討を重ねた結果
、同一の延伸倍率であつても幅方向の収縮率が大きいも
の程大きな圧電定数が得られることを見出し、特に大き
な圧電定数を得るには25q1)以上の幅収縮率が必要
であることを見出した。
In order to improve the dielectric strength voltage of the film, even if the purity of the polymer is increased or the thickness unevenness of the film is eliminated as much as possible, there is an inherent limit to the dielectric strength voltage, and it is difficult to expect a significant improvement in piezoelectricity. Rather, it is extremely desirable, especially from an industrial point of view, to study the stretching conditions in more detail and to obtain a film that exhibits high piezoelectricity at a lower polarization temperature and electric field strength. Based on the above-mentioned viewpoint, the present inventors have developed a PV that exhibits high piezoelectricity at a lower polarization temperature and electric field strength.
In order to obtain a DF film, we conducted a more detailed study on the stretching of PVDF, and as a result, we discovered a new fact that was previously unknown, leading to the present invention. That is, when the present inventors uniaxially stretched an α-type PVDF film obtained by melt extrusion to form a β-type film, they found that there was a close relationship between the contraction rate in the width direction of the film and the piezoelectricity. This will be explained using a diagram. As shown in Fig. 1, an α-type PVDF film a is uniaxially stretched to form a β-type film b.
When the film is stretched, a constriction is created in the center of the film and the width W of the film is reduced. changes to WVC. Such a constriction phenomenon caused by uniaxial stretching may be observed in all materials, not just plastics, but it is truly surprising that PVDFVC has a close relationship with piezoelectricity.
The inventors of the present invention focused on the relationship between the shrinkage rate in the width direction of the film due to uniaxial stretching and the piezoelectric constant, and as a result of various studies, we found that even at the same stretching ratio, the larger the shrinkage rate in the width direction, the greater the shrinkage rate in the width direction. It has been found that a piezoelectric constant can be obtained, and that a width shrinkage ratio of 25q1) or more is required to obtain a particularly large piezoelectric constant.

この一軸延伸によるフイルム幅方向の収縮率は延伸倍率
が大きい程大きくなることは明らかであるが、更に単位
フイルム幅に対する延伸ゾーンの長さにも依存し、同一
延伸倍率においては第2図に示す如く延伸ゾーンが長い
程収縮率も大きい。
It is clear that the shrinkage rate in the width direction of the film due to uniaxial stretching increases as the stretching ratio increases, but it also depends on the length of the stretching zone with respect to the unit film width. Thus, the longer the stretching zone, the greater the shrinkage rate.

従つて25%以上の幅収縮率を得るための延伸条件を一
律に決定するこ濃烟難である力\延伸倍率を自然延伸比
に限定した場合には延伸前の時点で延伸ゾーンの長さを
フイルム幅の1/4.5以上に設定すれば良いことが経
験的に確認された。もちろん自然延伸比以上の延伸倍率
であれば、より短い延伸ゾーンで必要な幅収縮率を得る
ことがで警きる。
Therefore, it is difficult to uniformly determine the stretching conditions to obtain a width shrinkage of 25% or more.If the force/stretching ratio is limited to the natural stretching ratio, the length of the stretching zone before stretching It has been empirically confirmed that it is sufficient to set the value to 1/4.5 or more of the film width. Of course, if the stretching ratio is higher than the natural stretching ratio, the necessary width shrinkage can be obtained in a shorter stretching zone.

ここに述べた延伸ゾーンとは延伸時に応力が作用し、実
際に延伸される部分のことであり例えば、引張り試験機
の場合にはフイルムのチヤツク間にはさまれた部分、ま
た連続延伸機の場合にはフイルムの前後ロール間にはさ
まれた部分のことを指す。周、延伸応力が作用する部分
内の特定の箇所に加熱ゾーンを設置した場合には、実質
的にこの加熱ゾーンが延伸ゾーンとなる。
The stretching zone mentioned here refers to the part where stress is applied during stretching and is actually stretched.For example, in the case of a tensile tester, it is the part sandwiched between the chucks of the film, or in the case of a continuous stretching machine. In some cases, it refers to the part sandwiched between the front and rear rolls of film. When a heating zone is installed at a specific location within the area where stretching stress acts, this heating zone substantially becomes the stretching zone.

また延伸倍率とぼ延伸後のフイルムの長さを延伸前のフ
イルムの長さで割つた数値を意味し、自然延伸比とは第
3図に示す如くフイルムの応力ー歪曲線が降伏点と同じ
応力に達する点の延伸倍率を意味する。肯、本発明に用
いて好適な延伸温度及び延伸倍率は25℃乃至130℃
及び2.3倍乃至7倍である。
In addition, the stretching ratio means the value obtained by dividing the length of the film after stretching by the length of the film before stretching, and the natural stretching ratio means that the stress-strain curve of the film is the same as the yield point, as shown in Figure 3. It means the stretching ratio at the point where stress is reached. Yes, the stretching temperature and stretching ratio suitable for use in the present invention are 25°C to 130°C.
and 2.3 to 7 times.

25℃以下での延伸は応々にしてフイルムの切断を引起
こし特に工業的には不利であり、また130℃以上での
延伸では結晶転移が不十分でβ型結晶に富んだフイルム
を得がたい。
Stretching at a temperature of 25° C. or lower causes breakage of the film, which is particularly disadvantageous from an industrial perspective, and stretching at a temperature of 130° C. or higher results in insufficient crystal transition, making it difficult to obtain a film rich in β-type crystals.

倍率に関しては、2.3倍以下では延伸が完全に行なわ
れず未延伸部が残り、また7倍以上ではフイルムの切断
が起こり易くなり実用的でない。更に、幅収縮を高める
延伸方法としては二段延伸法がある。
Regarding the magnification, if the magnification is less than 2.3 times, the stretching will not be completed completely and an unstretched portion will remain, and if the magnification is more than 7 times, the film will easily break, which is not practical. Further, as a stretching method for increasing width shrinkage, there is a two-stage stretching method.

二段延伸法とは、比較的低温で延伸したフイルムを比較
的高温で更に延伸する方法であり、低温時での延伸で結
晶の転移が有効になされそれに続く高温時での延伸で幅
収縮が高められる。このようにして得られたPVDFフ
イルムを分極処理したものの圧電定数は極めて大きく、
特に小さな電界強度での分極によつても十分な圧電定数
を示すため、分極処理時の絶縁破壊を防ぐことができ、
その実用的価値は極めて高いものである。
The two-stage stretching method is a method in which a film that has been stretched at a relatively low temperature is further stretched at a relatively high temperature.The stretching at a low temperature effectively causes crystal transition, and the subsequent stretching at a high temperature causes width shrinkage. be enhanced. The piezoelectric constant of the PVDF film obtained in this way after polarization treatment is extremely large.
In particular, it exhibits a sufficient piezoelectric constant even when polarized with a small electric field strength, so it can prevent dielectric breakdown during polarization processing.
Its practical value is extremely high.

以下、本発明を実施例によつて詳述する。実施例 1 厚さ65μ、幅45111のα型PVDFフイルムを引
張り試験機により90℃の温度で延伸しβ型フイルムを
作成した。
Hereinafter, the present invention will be explained in detail with reference to Examples. Example 1 An α-type PVDF film having a thickness of 65 μm and a width of 45111 mm was stretched at a temperature of 90° C. using a tensile tester to prepare a β-type film.

このとき幅方向の収縮率の異なる試料を得るため延伸ゾ
ーンの長さ及び延伸倍率を変えて延伸を行なつた。得ら
れたβ型フイルムの両面にアルミニウムを真空蒸着して
電極となし、115℃の雰囲気中でフイルム両面間に4
00KV/al&の直流電界を印加し30分間経過後電
界を保つたまま室温まで冷却し第4図は、このようにし
て得られた種々の幅収縮率を持つPVDFエレクトレツ
トの圧電定数D3,をプロツトしたものであつて、幅収
縮率が大きい程D3lも大きいことを示している。
At this time, in order to obtain samples with different shrinkage rates in the width direction, stretching was carried out by changing the length of the stretching zone and the stretching ratio. Aluminum was vacuum-deposited on both sides of the obtained β-type film to serve as electrodes, and a
A DC electric field of 00 KV/al& was applied, and after 30 minutes, the electric field was maintained and cooled to room temperature. Figure 4 shows the piezoelectric constants D3, of the PVDF electrets with various width shrinkage ratios obtained in this way. It is plotted and shows that the larger the width shrinkage rate, the larger D3l is.

第5図は幅45mのフイルムについて延伸ゾーンの長さ
と自然延伸比における幅収縮率の関係を示したものであ
り、例えば30%の幅収縮率を得るには延伸ゾーンの長
きを延伸前の時点でツイルム幅の±(幅45wr1nの
フイルムに対して22.5m)に設定すれば良いことが
分る。
Figure 5 shows the relationship between the length of the stretching zone and the width shrinkage rate at the natural stretching ratio for a film with a width of 45 m. It can be seen that it is sufficient to set the width to ±(22.5 m for a film with a width of 45 wr1n) of the film width.

第6図は延伸ゾーン25maと50wmbの試料につい
て延伸倍率とD3lの関係を求めたものであり、同一延
伸倍率でも延伸ゾーンのより長いもの1がD3,も大き
いことを示している。
FIG. 6 shows the relationship between the stretching ratio and D3l for samples with stretching zones of 25 ma and 50 wmb, and shows that even at the same stretching ratio, the longer stretching zone 1 has a larger D3.

第7図は第6図の結果を延伸されたフイルムの配向度と
D3,の関係で表示したものであり、同一の配向度でも
延伸ゾーンのより長いものがD3,も大きいことを示し
ている。
Fig. 7 shows the results of Fig. 6 in terms of the relationship between the degree of orientation of the stretched film and D3, and shows that even with the same degree of orientation, the longer the stretching zone, the larger the D3. .

肯、配向度は光学的複2屈折率△nで表示した。実施例
2 厚さ65μ、幅30cmのα型PVDFフイルムを一軸
連続延伸機により90℃で延伸し、A,B2種のβ型フ
イルムを作成した。
The degree of orientation was expressed as the optical birefringence Δn. Example 2 An α-type PVDF film with a thickness of 65 μm and a width of 30 cm was stretched at 90° C. using a uniaxial continuous stretching machine to create two types of β-type films, A and B.

二Aは延伸ゾーンの長さを10c1
nに設定し、Bは50cmに設定し、共に延伸倍率4.
1倍で延伸した。得られたβ型フイルムの幅収縮率はA
が20%、Bが45%であつた。この2種のフイルムを
実施例1と同様な方法で分極処理をしてD3,を測定し
たところ、Aは5.0×10−7Cgsesu..Bは
7.2×10−7CgseBuであつた。
2A is the length of the stretching zone 10c1
B was set to 50 cm, and both stretching ratios were 4.
It was stretched at 1x. The width shrinkage rate of the obtained β-type film is A
was 20%, and B was 45%. When these two types of films were polarized in the same manner as in Example 1 and D3 was measured, A was 5.0×10 −7 Cgsesu. .. B was 7.2×10 −7 CgseBu.

実施例 3 実施例1で得られたPVDFエレクトレツトのうち、延
伸ゾーンの長さ50m、延伸倍率3.64、幅収縮率4
7%のものを50℃で16時間エージングしたところD
3lは6.88×10−7 Cgsesuを示しれこの
サンプルを50℃から1℃/Minの割合で冷却して3
0℃での焦電率を測定したところ、4.7nc/℃・d
で焦電性も十分大きいことが認められた。
Example 3 Among the PVDF electrets obtained in Example 1, the length of the stretching zone was 50 m, the stretching ratio was 3.64, and the width shrinkage ratio was 4.
After aging 7% at 50℃ for 16 hours, D
3L showed 6.88×10-7 Cgsesu, and this sample was cooled from 50℃ at a rate of 1℃/min.
When the pyroelectric constant at 0℃ was measured, it was 4.7nc/℃・d
The pyroelectricity was also found to be sufficiently large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図はα型PVDFフイルムを一軸延伸す
る際の幅方向の収縮を示したものである。
FIGS. 1 and 2 show shrinkage in the width direction when an α-type PVDF film is uniaxially stretched.

Claims (1)

【特許請求の範囲】[Claims] 1 ポリフッ化ビニリデン樹脂フィルムを張力を加えて
25℃乃至130℃で一軸方向に2.3倍乃至7倍延伸
するに際し、延伸時に幅方向に25%以上収縮させるよ
うにして得られた一軸延伸ポリフッ化ビニリデン樹脂フ
ィルムを成極することを特徴とするポリフッ化ビニリデ
ン電気機能素子の製造方法。
1 A uniaxially stretched polyvinylidene fluoride resin film obtained by applying tension to a polyvinylidene fluoride resin film and stretching it 2.3 to 7 times in the uniaxial direction at 25°C to 130°C, shrinking it by 25% or more in the width direction during stretching. A method for manufacturing a polyvinylidene fluoride electrical functional device, which comprises polarizing a vinylidene chloride resin film.
JP50092296A 1975-07-29 1975-07-29 Manufacturing method of polyvinylidene fluoride electrical functional device Expired JPS5944795B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50092296A JPS5944795B2 (en) 1975-07-29 1975-07-29 Manufacturing method of polyvinylidene fluoride electrical functional device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50092296A JPS5944795B2 (en) 1975-07-29 1975-07-29 Manufacturing method of polyvinylidene fluoride electrical functional device

Publications (2)

Publication Number Publication Date
JPS5216696A JPS5216696A (en) 1977-02-08
JPS5944795B2 true JPS5944795B2 (en) 1984-11-01

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Country Link
JP (1) JPS5944795B2 (en)

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Publication number Publication date
JPS5216696A (en) 1977-02-08

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