JPS5945172B2 - Electrostrictive drive type sample moving device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample moving device that moves the position of an object with high precision.

Prior to this, the special patent application No. 51-12497 and the special application No. 5l-60
In 017 (Japanese Unexamined Patent Publication No. 2-143750), we provided a novel sample moving device that can move the position of an object with high precision.

The basic structure and operating principle will be described in Figures 1 and 2.The features of this device are the expansion and contraction effect that occurs when a voltage is applied to a member that has an inverse piezoelectric effect, and the This method utilizes the adsorption effect of a fixed electrostatic clutch or electromagnetic clutch, and utilizes step movement obtained by alternately repeating voltage application.

In FIG. 1, 1 is a body member made of a material exhibiting an inverse piezoelectric effect (preferably cylindrical in shape to maximize the inverse piezoelectric effect), and 2 is a leg member fixed to the end surface of the body member.

Reference numerals 3 and 4 denote slider members made of a semiconductive dielectric material, and by applying a voltage between them and the sample stage 7, an attractive force is exerted between them, and the sample stage 7 can be held.

The trunk member 1 and the leg member 2 are insulated, and the leg member 2 and the slider member 3 are adhesively fixed with a conductive adhesive (not shown).

Reference numeral 5 denotes a support stand for supporting the trunk member 1 on the base 6.

In this example, an electrostatic clutch type is shown, but if magnetic effects are not an issue, a conductor is wound around a slider member made of a magnetic material, and a current is passed to magnetize the slider member. An electromagnetic clutch type that utilizes the electromagnetic force obtained by this may also be used.

The same applies to the embodiments of the present invention.

Electrodes for voltage application are attached to the inner and outer surfaces of the body member 1, and a power source E3 is connected between these electrodes via a switch S3 to apply a voltage.

Furthermore, the voltage of the power source E1 can be applied between the slider members 3 and 4 and the sample stage 7 through the switch S1, and the voltage of the power source E2 can be applied through the switch S2. There is.

Now, if the state of voltage application to the body member and each slider member is 1, and the state of no voltage application is O, then the sample stage 7
When moving to the left, voltages may be applied to each part in the order shown in FIG.

A detailed explanation of the operation will be omitted.

FIG. 1a shows the arrangement of various parts when viewed from the top of the apparatus with the sample stage 7 removed.

Here, (3) and C are symbols that include the power source and switch for applying voltage to each part, and as an example, the symbol includes switch S1 and power source E1. shall be.

The present invention makes it possible to add a rotation mechanism to the sample stand in an apparatus capable of moving the sample stand to any position by driving the electrostrictive 1 as described above.

Example Hereinafter, the present invention will be explained in detail with reference to Examples.

FIG. 3 shows an embodiment of the present invention.

A is an A-A cross-sectional view of b. Its schematic structure, as shown in Fig. 1, includes a component part that allows the sample stage to move, and a lower part that can apply rotational motion to the sample stage. This is due to the addition of a drive unit.

However, in this embodiment, the structure shown in FIG. 1 is fixed upside down.

The support stand 5 and the sample stand 7 are fixed. Since the configuration and driving principle of the sample moving mechanism section have been described above using FIGS. 1 and 2, they will be omitted here, and only the sample stage rotation mechanism will be described in detail.

-11 is a rotating plate, and this rotating plate is supported by two slider members 12 and 13.

Furthermore, the slider members 12 and 13 are fixed with an outer cylinder 14.

Inside the outer cylinder 14, two cylindrical body members exhibiting an inverse piezoelectric effect for rotational driving are fixed to the outer cylinder 14 via a support base 9 made of an insulator.

A contact piece 10 is attached to the tip of the body member 8,
The shaft of the rotating plate 11 is inserted between them, and the contact friction coefficient between this shaft and the contact piece 10 is maintained to be very large.

Further, the rotary plate 11 and the slider members 12 and 13 made of a semiconductive dielectric are connected to a driving power source E4. E5 is connected, and when the switch is operated, a suction force is generated between the slider members 12 and 13 and the rotary plate 11, and a force that attracts the rotary plate is generated.

The body member 8 becomes E6 by turning off S5.
voltage is applied, and the trunk member 8 expands and contracts in the axial direction.

The procedure for rotating the sample stage in the apparatus configured as described above will be described.

In this case, first S4. When S5 is turned off, no force is generated between the rotating plate 11 and the slider members 12 and 13.

When 86 is turned on in this state, the body member 8 extends in the axial direction, and accordingly, the contact piece 10 moves, so a rotational moment acts on the shaft of the rotary plate 11, causing the rotary plate 11 to move. Rotate by a certain angle.

Next, switch S4. When S5 is turned on, the rotating plate 11 is attracted to the slider members 12 and 13.

When the switch S6 is turned off in the next operation, the body member 8 returns to its original length, but at this time, since the rotating disk 11 is attracted to the slider members 12 and 13, the contact piece 10 is It slides on the axis and returns to its original position.

This is one step for rotating the rotary disk 11, and by performing this operation continuously, the rotary disk 11 can be given rotational motion.

As mentioned above, the sample can be moved in X and Y only by the expansion and contraction of the electrostrictive element.
It is possible to move the sample on a plane and also rotate the sample at a predetermined position, which has a remarkable effect.

As another example of a method of imparting rotational motion to the rotating disk 11, as shown in FIG. 4, a wire 15 is wound around the shaft of the rotating disk 11 via a spring 16, and the rotating disk is rotated by pulling the wire 15. This is a mechanism that can be easily inferred.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a conventional example of an electrostrictive drive type sample moving device, FIG. 2 is a diagram showing the operating state of the conventional device, and FIGS. 3 and 4 are diagrams showing an embodiment of the present invention.

Claims (1)

[Claims] 1. A rotating disk held by a bearing, a body member whose one end is in contact with the rotating disk, the other end is fixed, and whose length can be expanded and contracted by a reverse voltage effect, and a body member whose length is expanded and contracted by electrostatic attraction or electromagnetic force. a clutch means for restraining the rotating disk, and applying a voltage to the body member and electrically controlling the clutch means are alternately applied to reduce friction between the contact portion between one end of the body member and the rotating disk. An electrostrictive drive type sample moving device that rotationally moves the rotating disk by force.