JPS5950617B2 - Method for producing silicon nitride-silicon carbide composition - Google Patents
Method for producing silicon nitride-silicon carbide compositionInfo
- Publication number
- JPS5950617B2 JPS5950617B2 JP57098563A JP9856382A JPS5950617B2 JP S5950617 B2 JPS5950617 B2 JP S5950617B2 JP 57098563 A JP57098563 A JP 57098563A JP 9856382 A JP9856382 A JP 9856382A JP S5950617 B2 JPS5950617 B2 JP S5950617B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- silicon carbide
- powder
- silicon
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 title claims description 19
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 6
- 229910052710 silicon Inorganic materials 0.000 title claims description 6
- 239000010703 silicon Substances 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 26
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 11
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 10
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- 239000002245 particle Substances 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 239000006229 carbon black Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000005273 aeration Methods 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000004901 spalling Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Description
【発明の詳細な説明】
窒化珪素は従来のセミラック材料に較べて耐熱性や耐ス
ポーリング性が優れているので、エンジンやタービンな
どの構造材料として多大の関心を集めている。DETAILED DESCRIPTION OF THE INVENTION Since silicon nitride has superior heat resistance and spalling resistance compared to conventional semilac materials, it has attracted much interest as a structural material for engines, turbines, and the like.
この理由は窒化珪素の膨張係数が他のセラミック材料よ
りも低いためであるが、さらに苛酷な使用環境において
も、さらに熱衝撃抵抗性の優れた材料の出現が望まれて
いる。The reason for this is that silicon nitride has a lower coefficient of expansion than other ceramic materials, but there is a desire for a material that has even better thermal shock resistance even in harsher usage environments.
本発明者はこの要望に応じるため、窒化珪素焼結体の物
性を高めんとして種々研究を行なった。In order to meet this demand, the present inventor conducted various studies in an attempt to improve the physical properties of silicon nitride sintered bodies.
その結果によると、窒化珪素に熱伝導性の高い炭化珪素
を加えた焼結体を造るとその耐スポーリング性がさらに
向上することが孝えられるが、窒化珪素粉末と炭化珪素
粉末とを唯単に機械的に混合して焼結体を造っても成分
の局部的偏在は避は難く、その焼結体の構成成分に片寄
りが生じ、組織の不均衡を起こすので好ましくない。According to the results, it appears that the spalling resistance of a sintered body can be further improved by adding silicon nitride to silicon carbide, which has high thermal conductivity. Even if a sintered body is produced by simply mechanically mixing, local uneven distribution of the components is unavoidable, and the constituent components of the sintered body become uneven, causing an imbalance in the structure, which is not preferable.
それ故、本発明者は窒化珪素のml繊織中炭化珪素成分
を均斉に存在せしめんとしてシリカ粉末をカーボン粉末
の存在において加熱処理する際に窒素中に一酸化炭素を
共存せしめて焼結せしめる方法について種々研究を行な
った。Therefore, the present inventor aimed to make the silicon carbide component uniformly exist in the silicon nitride ml fiber, and when heat-treating silica powder in the presence of carbon powder, carbon monoxide coexists in nitrogen to cause sintering. Various studies were conducted on the method.
次に実験した結果について説明する。Next, the experimental results will be explained.
非晶質シリカ粉末(平均粒径10μ)にカーボンブラッ
ク(平均粒形2μ)を内側で30重量%添加混合したち
の約1gを炉中に装入し1500℃に加熱しつつ窒素ま
たは窒素と一酸化炭素とを第1表に示す割合に混合した
混合ガスを450m1/分で通しながら60分間加熱し
、第1表に示す如き生成物を得た。Approximately 1 g of amorphous silica powder (average particle size 10 μm) mixed with 30% by weight of carbon black (average particle size 2 μm) inside was charged into a furnace and heated to 1500°C while being heated with nitrogen or nitrogen. The mixture was heated for 60 minutes while passing a mixed gas of carbon monoxide and carbon monoxide in the ratio shown in Table 1 at a rate of 450 ml/min to obtain the products shown in Table 1.
上記結果より、窒素と一酸化炭素との混合ガス(CO量
2〜8重量%)を通気すれば酸窒化珪素、クリストバラ
イトを含まず、窒化珪素と炭化珪素のみの生成物が得ら
れることが認められた。From the above results, it was confirmed that if a mixed gas of nitrogen and carbon monoxide (CO amount 2 to 8% by weight) is aerated, a product containing only silicon nitride and silicon carbide without containing silicon oxynitride or cristobalite can be obtained. It was done.
次に上記実験で得た実験番号1.3.4および5の生成
物の物性を求めるために、これら生成物に対しAl2O
3を5重量%添加し、成形圧2000kg/cm2加圧
、成形した後、1700℃で焼結して試験試料を造り、
これらの物性を測定して第2表の結果を得た。Next, in order to determine the physical properties of the products of experiment numbers 1.3.4 and 5 obtained in the above experiments, Al2O
3 was added in an amount of 5% by weight, molded under a molding pressure of 2000 kg/cm2, and then sintered at 1700°C to prepare a test sample.
These physical properties were measured and the results shown in Table 2 were obtained.
なお第2表には比較のため、予め製造した窒化珪素粉末
(粒径的5μ)85重量%と炭化珪素粉末(粒径的3μ
)15重量%とを機械的に混合し、上記と同じ条件で焼
結して造った試験試料の物性を比較例として併記した。For comparison, Table 2 shows 85% by weight of silicon nitride powder (particle size: 5μ) and silicon carbide powder (particle size: 3μ).
) and 15% by weight were mechanically mixed and sintered under the same conditions as above, and the physical properties of a test sample were also shown as a comparative example.
註(1)*印は加熱試料を水中に投入した場合、焼結体
に始めて亀裂が認められた温度で求めたものである。Note (1) The * mark was determined at the temperature at which cracks were first observed in the sintered body when the heated sample was placed in water.
註(2)光学顕微鏡により焼結切断面を観察したところ
、比較例のものに比べ実験番号3,4および5のものは
窒化珪素と炭化珪素とが均斉に存在していた。Note (2) When the sintered cut surface was observed using an optical microscope, it was found that silicon nitride and silicon carbide were evenly present in the samples of Experiment Nos. 3, 4, and 5 compared to those of the comparative example.
第2表の結果より、窒素と一酸化炭素との混合ガス(C
O量2〜8重量%)を通気して得られた窒化珪素と炭化
珪素のみからなる生成物を焼結した実験番号3および4
の焼結物は窒化珪素100%の生成物を焼結した実験番
号1の焼結物に比して特に優れた物性を示すことが認め
られた。From the results in Table 2, a mixed gas of nitrogen and carbon monoxide (C
Experiment Nos. 3 and 4 in which a product consisting only of silicon nitride and silicon carbide obtained by aerating O (2 to 8% by weight) was sintered.
It was observed that the sintered product exhibited particularly excellent physical properties compared to the sintered product of Experiment No. 1, which was obtained by sintering a product containing 100% silicon nitride.
本発明はこれらの実験結果に基づくものであってシリカ
粉末とカーボン粉末との混合物を1350〜1600℃
に加熱しつつ窒素と一酸化炭素との混合ガス(N2:C
Oの重量比、98〜92:2〜8)を通気することを特
徴とする窒化珪素−炭化珪素組成物の製造法である。The present invention is based on these experimental results, and the mixture of silica powder and carbon powder is heated to 1350 to 1600°C.
A mixed gas of nitrogen and carbon monoxide (N2:C
This is a method for producing a silicon nitride-silicon carbide composition, which is characterized by aerating O at a weight ratio of 98 to 92:2 to 8).
本発明においてシリカとしては天然に産する高純度の珪
石、珪砂あるいは各種工業から副産する非晶質シリカな
どが使用されるが、このうち非晶質シリカを使用するこ
とが好ましく、その粒度は細かいほど反応性が良いが、
通常は平均粒径10μ以下のものを用いるのが好ましい
。In the present invention, as silica, naturally occurring high-purity silica stone, silica sand, or amorphous silica by-produced from various industries are used. Among these, it is preferable to use amorphous silica, and its particle size is The finer the details, the better the reactivity, but
It is usually preferable to use particles with an average particle size of 10 μm or less.
またカーボン粉末としては一般炭素、黒鉛などの粉末が
使用されるが、高純度の点よりカーボンブラックを使用
することが好ましい。Further, as the carbon powder, powders of general carbon, graphite, etc. are used, but it is preferable to use carbon black from the viewpoint of high purity.
そしてシリカ粉末とカーボン粉末との混合割合はカーボ
ン粉末が内側で28〜35重量%の範囲が望ましい。The mixing ratio of silica powder and carbon powder is preferably in the range of 28 to 35% by weight of the carbon powder inside.
本発明においてはシリカ粉末とカーボン粉末との混合物
を高温で加熱しつつ窒素を通気し、半量以下の窒化珪素
を造った後、窒素中に一酸化炭素を混合したガスを通気
して窒化珪素および炭化珪素を同時に生成し、窒化珪素
と炭化珪素との均斉な組成物を造ることもできるが、シ
リカ粉末とカーボン粉末との混合物を高温で加熱しつつ
、窒素と一酸化炭素を特定割合に混合したガスを通気し
て窒化珪素−炭化珪素組成物を造ることもできる。In the present invention, a mixture of silica powder and carbon powder is heated at a high temperature while nitrogen is passed through it to produce less than half the amount of silicon nitride, and then a gas containing carbon monoxide mixed in nitrogen is passed through the mixture to form silicon nitride and It is also possible to simultaneously generate silicon carbide and create a homogeneous composition of silicon nitride and silicon carbide, but it is also possible to heat a mixture of silica powder and carbon powder at a high temperature and mix nitrogen and carbon monoxide in a specific ratio. A silicon nitride-silicon carbide composition can also be produced by passing the gas.
併し特定割合の窒化珪素−炭化珪素組成物を造る場合に
は後者の方法が好ましい。However, the latter method is preferred when producing a silicon nitride-silicon carbide composition of a specific ratio.
本発明によれば、シリカ粉末とカーボン粉末とから高温
加熱により極めて簡単に窒化珪素と炭化珪素とが均斉で
かつ所定組成を有する組成物を製造することができ、こ
の組成物の焼結体は高い熱衝撃抵抗性を有するので、そ
の工業的価値は大である。According to the present invention, a composition in which silicon nitride and silicon carbide are homogeneous and have a predetermined composition can be produced very easily from silica powder and carbon powder by high-temperature heating, and a sintered body of this composition is Since it has high thermal shock resistance, its industrial value is great.
実施例 1
平均粒径8μの非晶質シリカ粉末70gに平均粒径2μ
のカーボンブラック30gをボッ1ヘミルで゛20分間
湿式混合し、これを直径2〜3mmのペレットに成形し
たものを電気炉に装填し、一酸化炭素を5重量%含有す
る窒素を450m1/分で通気しながら1500℃で6
0分間加熱して51gの生成物を得た。Example 1 70g of amorphous silica powder with an average particle size of 8μ and an average particle size of 2μ
30 g of carbon black was wet mixed in a bottle mill for 20 minutes, formed into pellets with a diameter of 2 to 3 mm, and loaded into an electric furnace. 6 at 1500℃ with ventilation
Heating for 0 minutes gave 51 g of product.
生成物の鉱物組成をX線回折で調べたところ窒化珪素8
7重量%、炭化珪素13重量%であった。The mineral composition of the product was examined by X-ray diffraction and found to be silicon nitride 8.
7% by weight, and 13% by weight of silicon carbide.
実施例 2
実施例1と同様にして造ったペレット電気炉に装填し、
1500℃に加熱しつつ、初めの15分間は窒素のみを
450m1/分で流しながら窒化を行ない、15分後に
窒素の通気量を420m1/分とし、これに一酸化炭素
を30m1/分混合して通気し、引続き45分間加熱し
て反応を終了した。Example 2 The pellets were loaded into an electric furnace made in the same manner as in Example 1,
While heating to 1500°C, nitriding was carried out by flowing only nitrogen at a rate of 450 m1/min for the first 15 minutes, and after 15 minutes, the nitrogen aeration rate was increased to 420 m1/min, and carbon monoxide was mixed with this at 30 m1/min. The reaction was completed by aeration and subsequent heating for 45 minutes.
得られた生成物の鉱物組成をX線回折で調べたところ、
窒化珪素79重量%、炭化珪素21重量%よりなる均一
組成のものであった。When the mineral composition of the obtained product was investigated by X-ray diffraction, it was found that
It had a uniform composition consisting of 79% by weight of silicon nitride and 21% by weight of silicon carbide.
Claims (1)
1600℃に加熱しつつ窒素と一酸化炭素との混合ガス
(N2:COの重量比、98〜92:2〜8)を通気す
ることを特徴とする窒化珪素−炭化珪素組成物の製造法
。1. Mixture of silica powder and carbon powder at 1350~
A method for producing a silicon nitride-silicon carbide composition, which comprises heating to 1600° C. and passing a mixed gas of nitrogen and carbon monoxide (N2:CO weight ratio: 98-92:2-8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57098563A JPS5950617B2 (en) | 1982-06-10 | 1982-06-10 | Method for producing silicon nitride-silicon carbide composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57098563A JPS5950617B2 (en) | 1982-06-10 | 1982-06-10 | Method for producing silicon nitride-silicon carbide composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58217469A JPS58217469A (en) | 1983-12-17 |
| JPS5950617B2 true JPS5950617B2 (en) | 1984-12-10 |
Family
ID=14223142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57098563A Expired JPS5950617B2 (en) | 1982-06-10 | 1982-06-10 | Method for producing silicon nitride-silicon carbide composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950617B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178513U (en) * | 1984-05-07 | 1985-11-27 | リョービ株式会社 | Vibration drill switching lever device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538675A (en) * | 1994-04-14 | 1996-07-23 | The Dow Chemical Company | Method for producing silicon nitride/silicon carbide composite |
-
1982
- 1982-06-10 JP JP57098563A patent/JPS5950617B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60178513U (en) * | 1984-05-07 | 1985-11-27 | リョービ株式会社 | Vibration drill switching lever device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58217469A (en) | 1983-12-17 |
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