JPS5953500B2 - X-ray fluoroscopy equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray fluoroscopic inspection apparatus, and more particularly to an X-ray fluoroscopic inspection apparatus in which a fluoroscopic image and an external appearance of an object to be inspected can be observed on a single video monitor.

When performing a transparent inspection of minute parts of electronic components such as ICs,
Using a television camera that uses an image pickup tube that is sensitive even to the ray region, a method is used in which the X-ray fluoroscopic image is directly input to the image pickup tube target and converted into an electrical signal. In this case, a relatively enlarged image is obtained based on the ratio of the beam scanning area of the image pickup tube to the screen area of the video monitor, and magnified fluoroscopy with a large magnification ratio is possible, so the bonding state of the IC wafer can be observed. It is effective for inspecting the structure of micro parts. However, since a partially enlarged image of the microcomponent is displayed on a video monitor, it has the disadvantage that it is difficult to understand which part of the object to be inspected is being inspected. In order to deal with this problem, a method as shown in FIG. 1 has conventionally been used.

That is, the X-rays emitted from the X-ray tube 1 pass through the inspection object 2 placed on the X-Y table 3 and are input to the television camera 4. The X-ray fluoroscopic image converted into an electrical signal by the image pickup tube 5 is displayed as an image on the video monitor 6. At this time, an industrial television camera 2 is used to image the appearance of the object to be inspected.
A separate L video monitor 22 is installed to display the external image of this gate and the
The inspection was conducted while comparing and observing the fluoroscopic image. However, this method has the disadvantage that an industrial television camera can only take images from an oblique direction, which requires additional efforts to align the pits and makes the images difficult to see. Another problem was that the inspector had to look at a two-foot video monitor, making it difficult to perform the inspection. The present invention aims to overcome the drawbacks of the conventional methods.
A half-5 mirror that transmits X-rays and reflects visible light is installed between the radiation source and the object to be inspected, and the X-ray fluoroscopic image is obtained using an X-ray television camera, and the appearance reflected by the half mirror is obtained using an industrial television camera. The video signals from the X-ray television camera and the industrial television camera, which are respectively imaged and synchronized by the synchronization signal from the synchronization signal generation section of the X-ray television camera, are appropriately processed by a signal processing means and sent to a video monitor. The desired purpose was achieved by configuring the video monitor to be able to display the X-ray fluoroscopic image and the external appearance at the same time or by switching between them.

An embodiment of the present invention will be described below with reference to the drawings. Second
3 are a block diagram and a block diagram of an embodiment of the X-ray fluoroscopic inspection apparatus according to the present invention, respectively.
A half mirror 7 that transmits X-rays and reflects visible light from the object to be inspected is provided between the X-ray source 1 such as a ray tube and the object 2 placed on the X-Y table 3. It is provided facing the object to be inspected and tilted at a desired angle. This half mirror 7 is
The material has low X-ray absorption and high visible light reflectance, such as an aluminum vapor-deposited mirror. The
A line television camera 4 is provided. Further, the half mirror 7
An industrial television camera 8 is provided at a position to receive the reflected light. Furthermore, a mixer 9 and a video monitor 6 are provided at appropriate locations as signal processing means, and the X-ray television camera 4
The industrial television camera 8 and the mixer 9 are connected to each other, and the mixer 9 and the video monitor 6 are connected by cable lines. The above-mentioned half mirror 7, X-ray television camera 4, industrial television camera 8, mixer 9 and video monitor 6 constitute a display device. Next, the operation and effects of this embodiment will be explained with reference to the block diagram of FIG.

Move the X-Y table 3 to move the inspection area of the object 2 to the
Align with the X-ray beam from source 1.

The X-rays pass through the half mirror 7 and through the inspection site of the object 2 to be inspected, and the X-ray fluoroscopic image thereof is input to the X-ray television camera 1. Synchronization 5 signal generator 4a of X-ray television camera 1
sends a synchronization signal to the imaging unit 4b of the X-ray television and the industrial television camera 8, controls the deflection of each television camera,
Generate a synchronized video signal. The external image of the inspected object 2 reflected by the half mirror 7 is input to an industrial television camera 8. Mutually synchronized video signals from the X-ray television camera 4 and the industrial television camera 8 are sent to a mixer 9. The aforementioned signals are mixed by a mixer 9 and displayed on a video monitor 6. That is, a mixture of an X-ray fluoroscopic image and an external appearance image of the object to be inspected, or an image in which the external appearance is superimposed, is displayed on the video monitor 6. For example, by providing a crosshair on the video monitor, the inspection area can be easily confirmed, and a single monitor can display an X-ray fluoroscopic image of the inspection area and an external image of the object to be inspected, making the inspection easier. This makes inspection easier and improves inspection efficiency. In addition, by installing the half mirror 7,
Since an external image of the inspected object viewed at right angles is obtained, the image is easy to see and no special effort is required for pit alignment. In the above embodiment, the X-ray fluoroscopic image and the external image are mixed and displayed using a mixer, but a switch is provided as a signal processing means to arbitrarily switch the above images and display them separately. You can also do it like this.

Further, the external appearance may be displayed while being changed periodically, for example, by displaying the external appearance for 1 second every 10 seconds. As described in detail above, according to the present invention, by providing a half mirror that transmits X-rays and reflects visible light, an X-ray fluoroscopic image of the object to be inspected and an external appearance image of the object to be inspected viewed at right angles are obtained. can be observed in a desired image format on a single video monitor, which greatly contributes to improving the efficiency of X-ray fluoroscopic inspection of electronic components and reducing fatigue of inspectors.

[Brief explanation of the drawing]

Figure 1 is a configuration diagram showing a conventional example of an X-ray fluoroscopic inspection device;
3 and 3 are a configuration diagram and a block diagram, respectively, of an embodiment of an X-ray fluoroscopic inspection apparatus according to the present invention. 1...X-ray source, 2...Object to be inspected, 4.
...X-ray television camera, 4a ... Synchronization signal generator, 6 ... Video monitor, 7 ...
・Half mirror, 8...Industrial TV camera,
9... Signal processing means.

Claims (1)

[Scope of Claims] 1 In an apparatus in which a transparent image of an object to be inspected due to X-rays from an X-ray source is captured with an X-ray television camera and observed on a video monitor, A half mirror provided to transmit visible light and reflect visible light, an industrial television camera that images the appearance of the inspected object reflected by this half mirror, and synchronization from a synchronization signal generator of the X-ray television camera. a signal processing means that processes the video signals from the X-ray television camera and the industrial television camera synchronized with the signals and sends them to a video monitor; An X-ray fluoroscopic inspection apparatus comprising a display device comprising a video monitor for displaying images. 2. The X-ray fluoroscopic inspection apparatus according to claim 1, characterized in that the signal processing means comprises a mixer, and the fluoroscopic image and external appearance of the object to be inspected are displayed simultaneously on a video monitor. 3. The X-ray fluoroscopic inspection apparatus according to claim 1, wherein the signal processing means is constituted by a switch, and the fluoroscopic image and external appearance of the object to be inspected are appropriately switched and displayed on a video monitor.