JPS6013470B2 - Method for manufacturing heat-resistant flexible thin film probe - Google Patents
Method for manufacturing heat-resistant flexible thin film probeInfo
- Publication number
- JPS6013470B2 JPS6013470B2 JP53126976A JP12697678A JPS6013470B2 JP S6013470 B2 JPS6013470 B2 JP S6013470B2 JP 53126976 A JP53126976 A JP 53126976A JP 12697678 A JP12697678 A JP 12697678A JP S6013470 B2 JPS6013470 B2 JP S6013470B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sensor
- resistive thin
- resistive
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title claims description 45
- 239000000523 sample Substances 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000000034 method Methods 0.000 title claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 239000010408 film Substances 0.000 claims description 9
- 239000000945 filler Substances 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- 239000010979 ruby Substances 0.000 claims description 5
- 229910001750 ruby Inorganic materials 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 16
- 229910052697 platinum Inorganic materials 0.000 description 8
- 239000012530 fluid Substances 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
この発明は、小形で耐熱性と熱可榛性に優れ、強度も大
きく、高温で、かつ振動を受ける狭膝な場所の流速の計
測等に適した耐熱可榛性薄膜プローブの製造方法に関す
るものである。[Detailed Description of the Invention] The present invention provides a heat-resistant and flexible product that is small, has excellent heat resistance and thermoplasticity, has high strength, and is suitable for measuring flow velocity in narrow spaces subject to high temperatures and vibrations. The present invention relates to a method for manufacturing a thin film probe.
従来の熱線流速プローブ（ホットワイヤ）、あるいは抵
抗薄膜流速プロープ（ホットフィルム）は、セソサとプ
ローブ本体からなり、センサ自体は比較的小形のものが
既に使用されている。Conventional hot wire flow velocity probes (hot wire) or resistive thin film flow velocity probes (hot film) consist of a sensor and a probe body, and relatively small sensors are already in use.
しかし、プロープ全体の寸法が大であり、かつセンサ自
体も振動に弱い欠点があった。これを図面についてさら
に説明する。第１図はホットワイヤセンサを用いた円筒
形の熱蟻泉流速プローブの従来例を示すもので、１はス
テンレススチールの金属パイプであり、内部には金メッ
キを施したステンレスワイヤのサポート２，３が絶縁体
４を介して絶縁して収容されており、その先端は金属パ
イプ１の端部から突出しており、さらに、サポート２，
３の先端は尖鋭に形成され、その間にホットワイヤ５が
溶接等により固着される。However, the overall size of the probe was large, and the sensor itself was susceptible to vibration. This will be further explained with reference to the drawings. Figure 1 shows a conventional example of a cylindrical hot ant spring flow velocity probe using a hot wire sensor. 1 is a stainless steel metal pipe, and inside is a gold-plated stainless steel wire support 2, 3. It is housed insulated through an insulator 4, the tip of which protrudes from the end of the metal pipe 1, and further supports 2,
The tip of 3 is formed sharply, and a hot wire 5 is fixed therebetween by welding or the like.
また、金属パイプ１の基部側には、ソケット６が取付け
られ、これにサポート２，３の池端が接続される。ソケ
ット６には○リングを介して金メッキしたコネクタ７が
着脱自在に結合される。また、第２図ａ，ｂ，ｃ，はホ
ットフィルムセンサを用いた内筒形の抵抗薄膜流速プロ
ーブの従来例を示すもので、それぞれ放物線形抵抗薄膜
流速プローブ、ウェッジ形抵抗薄膜流速ブロープ、横ゥ
ェッジ形抵抗薄膜流速プロープの斜視図である。これら
の図において、１はステンレススチールの金属パイプで
、水晶からなるセンサ基部８がその端部に固定されてい
る。センサ基部８はその先端または側面がそれぞれ放物
線形、ウェッジ形、穣ゥェッジ形に成形され、その部分
に白金の薄膜を蒸着してセンサ９を形成し、センサ９の
両端に金膜からなるリード膜１０が接続されている。リ
ード膜１０は金属パイプ１の内部で、図示は省略したが
第１図と同様にサポート２，３に接続され、金属パイプ
１の池端のソケット６を介してコネクタ′７に結合され
ている。このような従釆の熱線または抵抗薄膜流速プロ
ーブにおいては、ホットワイヤ、ホットフイルムのいず
れを用いたものにおいてもセンサプ。Further, a socket 6 is attached to the base side of the metal pipe 1, and the ends of the supports 2 and 3 are connected to this. A gold-plated connector 7 is detachably connected to the socket 6 via a ring. In addition, Figures 2a, b, and c show conventional examples of internal cylindrical resistive thin film flow velocity probes using hot film sensors, including a parabolic resistive thin film flow velocity probe, a wedge-shaped resistive thin film flow velocity probe, and a horizontal resistive thin film flow velocity probe, respectively. FIG. 2 is a perspective view of a wedge-shaped resistive membrane flow probe. In these figures, 1 is a stainless steel metal pipe, and a sensor base 8 made of crystal is fixed to the end thereof. The tip or side of the sensor base 8 is shaped into a parabolic shape, a wedge shape, or a wedge shape, respectively, and a thin platinum film is deposited on the part to form a sensor 9, and a lead film made of a gold film is attached at both ends of the sensor 9. 10 are connected. The lead film 10 is connected inside the metal pipe 1 to the supports 2 and 3 (not shown) in the same way as in FIG. 1, and is connected to the connector '7 via the socket 6 at the end of the metal pipe 1. In such secondary hot wire or resistive thin film flow velocity probes, both hot wire and hot film sensors are used.
ーブとして、第１図、第２図に示す金属パイプ１という
金属剛体を用いており、外径が大きく可鏡性がないため
狭隣で複雑な形状をしたタービン、コンブレッサ、ブロ
ワなどの回転方式の流体機械の内部に取付けることが困
難であり、かつ振動に対して弱いので大きな空気力また
は激しい機械的振動を受けるとたちまち破損するため、
いまいま取替える必要があった。このため使用できるの
は流体機械を軽負荷で運転する場合に限られていた。さ
らに、上述のように金属剛体である金属／ぐィプーを用
いているため、万一、高速回転している夕−ビンの羽根
等に接触するようなことがあると、大事故に至る危険が
あった。この発明は、上述した従来の欠点を除去するた
めになされたものである。As a pipe, a rigid metal body called the metal pipe 1 shown in Figs. 1 and 2 is used, and because it has a large outer diameter and is not transparent, it is difficult to rotate turbines, compressors, blowers, etc. that are closely spaced and have complex shapes. It is difficult to install it inside a type of fluid machine, and it is vulnerable to vibration, so it will break immediately if subjected to large aerodynamic force or severe mechanical vibration.
I needed to replace it now. For this reason, it can only be used when operating fluid machinery under light loads. Furthermore, as mentioned above, since the metal/gupoo is used as a rigid metal body, there is a risk of a serious accident if it were to come into contact with the blades of a high-speed spinning bin. there were. This invention has been made to eliminate the above-mentioned conventional drawbacks.
以下この発明について説明する。第３図はこの発明によ
り製造された耐熱可榛・性薄膜プロープの一部を破断し
て示したものである。This invention will be explained below. FIG. 3 is a partially cutaway view of a heat-resistant, flexible thin film probe manufactured according to the present invention.
この図を用いて構成ならびに製造方法について説明する
。１１はホルダおよびリード線を兼ねた細い可榛性のシ
ース部で、可孫性のある例えば直径２側め以下の金属チ
ューブ１２内に１本乃至複数本（第３図では２本）の電
気抵抗の少ない金芯線１３を絶縁性充填材１４を充填す
ることにより、金属チューブ１２ならびに金芯線１３の
相互間の絶縁を保って挿入されたもので、製造に際して
は太い径の金属チューブ内に同じく太い径の金芯線を絶
縁性充填材で絶縁して収容したものを、直径２側？以下
になるように引延すことにより行うものである。The configuration and manufacturing method will be explained using this figure. Reference numeral 11 denotes a thin flexible sheath that also serves as a holder and a lead wire, and one or more (two in Fig. 3) electrical wires are inserted into a flexible metal tube 12 with a diameter of less than 2 mm. By filling a metal core wire 13 with low resistance with an insulating filler 14, the metal tube 12 and the metal core wire 13 are inserted while maintaining mutual insulation, and during manufacturing, they are inserted into a metal tube with a large diameter. A large diameter metal core wire insulated and housed with an insulating filler is placed on the diameter 2 side? This is done by stretching it as follows.
このように金属チューブ１２が紬径になると、自由に曲
げられるようになり、いわゆる可操性をもつようになる
。１５はセラミックスで、サフアィャ等の絶縁物からな
るセンサ取付台で、第４図に示すように、中央に金芯線
１３の通る挿通孔１６が設けられており、その下面周縁
において、シース部１１の上端とろう接されて、シース
部１１と一体になっている。When the metal tube 12 has a pongee diameter in this way, it can be bent freely and has so-called maneuverability. Reference numeral 15 is a sensor mounting base made of ceramics and an insulating material such as saphia, and as shown in FIG. The upper end is brazed and integrated with the sheath part 11.
１７は抵抗薄膜センサで、第５図に示すように、半円形
状の薄板からなるルビーを用いて構成した基台１８の円
弧表面に、イオンプレーティング、蒸着、スパッタリン
グ等の手段によって白金薄膜１９を形成したものである
。17 is a resistive thin film sensor, and as shown in FIG. 5, a thin platinum film 19 is formed on the arcuate surface of a base 18 made of ruby, which is a semicircular thin plate, by means such as ion plating, vapor deposition, or sputtering. was formed.
この抵抗薄膜センサ１７は、その平底面をセンサ取付台
１５上に載遣し、ろう付けによりセンサ取付台１５に固
着する。そして、センサ取付台１５の挿通孔１６を通し
た金芯線１３の端部をそれぞれ抵抗薄膜センサ１７の白
金薄膜１９の両端にろう接する。このようにしてこの発
明の耐熱可榛性薄膜プローブが第３図のように構成され
る。シース部１１の長さは、測定回路の必要のところに
接続できるような長さに選定し、直接金芯線１３をコネ
クタなしで所要部位例えば同軸ケーブルに接続させる。This resistive thin film sensor 17 is placed with its flat bottom surface on the sensor mounting base 15 and is fixed to the sensor mounting base 15 by brazing. Then, the ends of the metal core wire 13 passed through the insertion hole 16 of the sensor mounting base 15 are soldered to both ends of the platinum thin film 19 of the resistive thin film sensor 17, respectively. In this way, the heat-resistant flexible thin film probe of the present invention is constructed as shown in FIG. The length of the sheath part 11 is selected to be such that it can be connected to a necessary part of the measurement circuit, and the metal core wire 13 is directly connected to the required part, for example, a coaxial cable, without a connector.
上記の構成によれば、センサ取付台１５の外蓬Ｄ、抵抗
薄膜センサ１７の底面の長さ１等はいずれもシース部１
１の外釜ｄとほぼ同程度であり、したがって、シース部
１１の先端は安定に封じられた形となり、所要部への挿
入にきわめて便利なものとなる。According to the above configuration, the length D of the sensor mounting base 15, the length 1 of the bottom surface of the resistive thin film sensor 17, etc. are both the sheath part 1.
Therefore, the tip of the sheath portion 11 is stably sealed, making it extremely convenient to insert it into a desired location.
第６図ａ，ｂはこの発明の他の実施例を示すもので、シ
ース部１１の構成は第３図の実施例と同じであるが、セ
ンサ取付台１５の固着手段が異なっている。6a and 6b show another embodiment of the present invention, in which the structure of the sheath portion 11 is the same as the embodiment shown in FIG. 3, but the fixing means for the sensor mount 15 is different.
すなわち、第６図の実施例では、シース部１ １の先端
部分の絶縁性充填材１４を取り除き、ここにセンサ取付
台１５を入れ、金芯・線１３は挿通孔１６を通す。そし
て、あらかじめセンサ取付台１５の周緑に形成した環状
溝２０中に金属チューブ１２の先端をかしめて固着する
。その後、金芯線１３の端を白金薄膜１９の両端にそれ
ぞれろう接する。この実施例の場合には、センサ取付台
１５の固着を機械的に行えばよいため作業が簡単になる
。第７図は第６図の抵抗薄膜センサー７の製造方法を説
明するための図で、半円柱状体１８′をルビーで作り、
この円弧状の外表面にイオンプレーティング、蒸着、ス
パッタリング等の手段によって白金薄膜１９′を形成し
、その後、カッタを用いて点線のように切断すると、第
５図に示す基台１８と白金薄膜１９からなる抵抗薄膜セ
ンサ１７を多数同一特性に作ることができる。That is, in the embodiment shown in FIG. 6, the insulating filler 14 at the tip of the sheath portion 11 is removed, the sensor mounting base 15 is inserted therein, and the metal core/wire 13 is passed through the insertion hole 16. Then, the tip of the metal tube 12 is caulked and fixed into the annular groove 20 formed in advance around the sensor mounting base 15. Thereafter, the ends of the gold core wire 13 are soldered to both ends of the platinum thin film 19, respectively. In this embodiment, the sensor mounting base 15 can be fixed mechanically, which simplifies the work. FIG. 7 is a diagram for explaining the manufacturing method of the resistive thin film sensor 7 shown in FIG. 6, in which a semi-cylindrical body 18' is made of ruby,
A platinum thin film 19' is formed on this arcuate outer surface by means such as ion plating, vapor deposition, or sputtering, and then cut along dotted lines using a cutter. A large number of resistive thin film sensors 17 consisting of 19 can be made with the same characteristics.
上記では、基台１８上に白金薄膜１９を所要形状のマス
クを用いてイオンプレーティングで形成するのであるが
、この他、フオトエツチングによって所定のパターンを
形成してもよい。In the above example, the platinum thin film 19 is formed on the base 18 by ion plating using a mask having a desired shape, but a predetermined pattern may also be formed by photo etching.
また、白金薄膜１９を抵抗薄膜とするのみならず、他の
材料によって抵抗薄膜を作成してもよい。次に第２図ｃ
に示す従来の熱線流速ブロープと第３図に示すこの発明
の製造方法による熱線流速ブローブとの耐用時間の比較
について述べる。Furthermore, the platinum thin film 19 is not limited to being a resistive thin film, and the resistive thin film may be made of other materials. Next, Figure 2c
A comparison of service life between the conventional hot wire flow velocity probe shown in FIG. 3 and the hot wire flow velocity probe manufactured by the manufacturing method of the present invention shown in FIG. 3 will be described.
高速回転しているコンブレッサの固定翼に第２図ｃと第
３図に示す熱嫌像流速プロープをそれぞれ取付け、空気
の脈動（非定常流）の測定を行ったところ、第２図ｃの
従来のものは約３分で金属パィプーとセンサ基部８との
境界面で切摸した。一方、第３図に示すこの発明による
ものは、３糊時間のテストに十分に耐え、所要のデータ
を供給することができた。以上詳細に説明したように、
この発明は金属チューブ内に絶縁性充填材で電気的に絶
縁して金芯線を挿入後、引延して全体を紬径としたので
、可榛・性のシース部となり、そのため長時間の振動に
対しても十分に耐えることができる。The thermoanamorphic flow velocity probes shown in Figures 2c and 3 were attached to the fixed blades of a compressor rotating at high speed, and the air pulsation (unsteady flow) was measured. The sample was cut at the interface between the metal pipe and the sensor base 8 in about 3 minutes. On the other hand, the one according to the invention shown in FIG. 3 satisfactorily withstood the 3 gluing time test and was able to supply the required data. As explained in detail above,
In this invention, a metal core wire is electrically insulated with an insulating filler and inserted into a metal tube, and then stretched to make the entire pongee diameter, resulting in a flexible sheath part that can withstand vibrations for a long time. It can withstand it well.
さらに、可犠牲のシース部の先端には絶縁材からなり挿
通孔に金芯線を挿通させてセンサ取付台を固着し、この
セソサ取付台に抵抗薄膜センサを固着するようになって
いるので、抵抗薄膜センサの取付けがきわめて容易、か
つ堅ろうである。また、抵抗薄膜セソサはルビーからな
る半円柱状体の円弧状の表面に抵抗薄膜を形成し、これ
を所要の幅に切断すればよいのでルビーの加工性の良好
なこと）相まってきわめて量産的であり、また、必要な
抵抗薄膜の抵抗値は切断の幅を加減することで容易に変
更することができる。そして、リード線は金芯線である
ため、抵抗薄膜に比べ充分抵抗が小さいので感度の増大
がはかれる。さらに抵抗薄膜センサは抵抗薄膜が円弧面
上に形成されているため垂直方向の指向性がなく、その
ため死角がなくなり、取り付けが容易であるばかりでな
く、薄膜抵抗が基台の円弧状の表面に形成されるため有
効長を大きくとれ、全体を小形化することができる。こ
の発明による耐熱可操性薄膜ブローブは、全体が一本の
単純な形のプローブとなり、しかも抵抗薄膜センサの大
きさも可榛・性のシース部の外径とほぼ同じか、それ以
下にすることができぅ。したがって、小孔を通して流体
機械内に挿入したり、表面を這わせるなどした後、ろう
付け等により容易に固定することができる。また、この
発明による抵抗薄膜センサは等感度のものを容易に作る
ことができるばかりでなく、きわめて小形であることか
ら、熱損失も少なく、正確な測定を行うことができる。
したがって、流速計測はもとより、温度計にも使用でき
、また、同一のもの数個を配置すれば、気流方向を探知
するためのョウメータとしても、あるいは相関測定用と
しても使用できる。かように、この発明は取付けが容易
で、優れた耐熱性を持ち、かつセンサ部がきわめて小さ
くシース部が適度の可操性を持つため機械的振動に強く
充分な強度と長い寿命を有する耐熱可操性薄膜プローブ
を得ることができる利点がある。Furthermore, the tip of the sacrificial sheath part is made of an insulating material, and a metal core wire is inserted into the insertion hole to secure the sensor mounting base, and the resistive thin film sensor is secured to this sesosa mounting base, so that the resistance can be reduced. Installation of thin film sensors is extremely easy and robust. In addition, with the resistive thin film sesosa, a resistive thin film is formed on the arc-shaped surface of a semi-cylindrical body made of ruby, and this can be cut to the required width, so ruby is easy to work with), making it extremely easy to mass produce. Moreover, the required resistance value of the resistive thin film can be easily changed by adjusting the cutting width. Since the lead wire is a metal core wire, the resistance is sufficiently lower than that of a resistive thin film, so that sensitivity can be increased. Furthermore, since the resistive thin film sensor is formed on an arcuate surface, there is no directivity in the vertical direction, which eliminates blind spots and is easy to install. Since it is formed, the effective length can be increased, and the whole can be made smaller. The heat-resistant flexible thin-film probe according to the present invention has a simple shape as a single probe, and the size of the resistive thin-film sensor is approximately the same as or smaller than the outer diameter of the flexible sheath. I can do it. Therefore, it can be easily fixed by brazing or the like after being inserted into a fluid machine through a small hole or stretched over a surface. Further, the resistive thin film sensor according to the present invention not only can be easily manufactured with equal sensitivity, but also is extremely small, so that heat loss is small and accurate measurements can be performed.
Therefore, it can be used not only to measure flow velocity but also as a thermometer, and by arranging several identical ones, it can also be used as a rhyometer to detect the direction of airflow or for correlation measurement. As described above, the present invention is easy to install, has excellent heat resistance, has an extremely small sensor part, and has a moderate amount of maneuverability in the sheath part, which makes it resistant to mechanical vibration, has sufficient strength, and has a long lifespan. There is an advantage that a steerable thin film probe can be obtained.
第１図、第２図ａ〜ｃは従来の熱磯裏流遠プ。
ーブおよび抵抗薄膜流速プローブ形状を示す斜視図、第
３図はこの発明により製造された耐熱熱可孫性薄膜プロ
ーブの一実施例を示す一部を被断した正面図、第４図は
第３図のセンサ取付台の平面図、第５図は同じく抵抗薄
膜センサの斜視図、第６図ａ，ｂはこの発明による他の
実施例を示す一部を破断した正面図および側面図、第７
図は第５図の抵抗薄膜センサの製造方法を説明するため
の図である。図中、１１は可髭性のシース部、１２は金
属チューブ、１３は金芯線、１４は絶縁性充填材、１５
はセンサ取付台、１６は挿通孔、１７は抵抗薄膜センサ
、１８は基台、１９は白金薄膜である。
第１図第２図
第３図
第４図
第５図
第６図
第７図Figures 1 and 2 a to c show the conventional Atsuiso Ura-ryu far-pu. FIG. 3 is a partially cutaway front view showing an embodiment of the heat-resistant thermoplastic thin-film probe manufactured according to the present invention, and FIG. 3 is a plan view of the sensor mounting base, FIG. 5 is a perspective view of the same resistive thin film sensor, FIGS. 7
This figure is a diagram for explaining a method of manufacturing the resistive thin film sensor shown in FIG. 5. In the figure, 11 is a flexible sheath part, 12 is a metal tube, 13 is a metal core wire, 14 is an insulating filler, 15
16 is a sensor mounting base, 16 is an insertion hole, 17 is a resistive thin film sensor, 18 is a base, and 19 is a platinum thin film. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7
Claims (1)
金芯線を挿入後、引延し全体を細径として可撓性のシー
ス部を構成し、この可撓性のシース部の先端に絶縁材か
らなり挿通孔に前記金芯線を挿通させてセンサ取付台を
固着し、一方、ルビーからなる半円柱状体の円弧状の表
面に抵抗薄膜を形成し、これを所要の幅に切断して基台
と抵抗薄膜からなる抵抗薄膜センサを作成し、この抵抗
薄膜センサを前記センサ取付台の表面に固着し、前記抵
抗薄膜の所要個所に前記金芯線を接続することを特徴と
する耐熱可撓性薄膜プローブの製造方法。1. After electrically insulating the wire with an insulating filler and inserting the metal core wire into the metal tube, the entire wire is stretched to a small diameter to form a flexible sheath portion, and the tip of the flexible sheath portion is The sensor mounting base is fixed by inserting the metal core wire made of an insulating material into the insertion hole, and on the other hand, a resistive thin film is formed on the arc-shaped surface of the semi-cylindrical body made of ruby, and this is cut to the required width. A resistive thin film sensor consisting of a base and a resistive thin film is created by using a resistive film, the resistive thin film sensor is fixed to the surface of the sensor mounting base, and the metal core wire is connected to a required location of the resistive thin film. A method for manufacturing a flexible thin film probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53126976A JPS6013470B2 (en) | 1978-10-16 | 1978-10-16 | Method for manufacturing heat-resistant flexible thin film probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53126976A JPS6013470B2 (en) | 1978-10-16 | 1978-10-16 | Method for manufacturing heat-resistant flexible thin film probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5552948A JPS5552948A (en) | 1980-04-17 |
| JPS6013470B2 true JPS6013470B2 (en) | 1985-04-08 |
Family
ID=14948549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53126976A Expired JPS6013470B2 (en) | 1978-10-16 | 1978-10-16 | Method for manufacturing heat-resistant flexible thin film probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6013470B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5284043B2 (en) * | 2008-11-07 | 2013-09-11 | 日野自動車株式会社 | Fluid flow measurement device |
-
1978
- 1978-10-16 JP JP53126976A patent/JPS6013470B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5552948A (en) | 1980-04-17 |
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