JPS6016376B2 - Manufacturing method of optical fiber material - Google Patents
Manufacturing method of optical fiber materialInfo
- Publication number
- JPS6016376B2 JPS6016376B2 JP5847478A JP5847478A JPS6016376B2 JP S6016376 B2 JPS6016376 B2 JP S6016376B2 JP 5847478 A JP5847478 A JP 5847478A JP 5847478 A JP5847478 A JP 5847478A JP S6016376 B2 JPS6016376 B2 JP S6016376B2
- Authority
- JP
- Japan
- Prior art keywords
- heating source
- glass tube
- optical fiber
- manufacturing
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma- or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【発明の詳細な説明】
本発明は改良された光フアィバ素材の製造方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention is directed to an improved method of manufacturing optical fiber materials.
従来、低損失の光フアィバ素材を製造する方法として、
第1図に示す様な内煤付法(MCVD法)と呼ばれる方
法がある。この方法は局部加熱源2を往復移動させて、
円筒状ガラス管1の内壁に所望のガラスを堆積させてい
くものであるが、堆積されたガラスは第2図に示すよう
に原料入口側の膜厚及び添加元素量の長手方向の均一性
がよくないこと、原料の有効利用度が約50%程度とや
)低いこと、出発材料の円筒状ガラス管の製造過程中で
の縦径があること等の問題点があった。本発明の目的は
上記問題点を解消させた改良された光フアィバ素材の製
造方法を提供するものである。Conventionally, as a method for manufacturing low-loss optical fiber materials,
There is a method called internal soot deposition method (MCVD method) as shown in FIG. This method moves the local heating source 2 back and forth,
A desired glass is deposited on the inner wall of the cylindrical glass tube 1, and the deposited glass has uniformity in the film thickness and the amount of added elements in the longitudinal direction on the raw material inlet side, as shown in Fig. 2. There were problems such as the low effective utilization of raw materials (approximately 50%), and the vertical diameter of the starting material cylindrical glass tube during the manufacturing process. SUMMARY OF THE INVENTION An object of the present invention is to provide an improved method for manufacturing an optical fiber material that eliminates the above-mentioned problems.
本発明者の検討結果によれば、加熱源の直前を冷却すれ
ば、気相状で反応し、生成したSi02等の微粒子〔第
1図の5(スート)と称する〕の堆積量が増すことが見
出された。According to the study results of the present inventors, if the area immediately before the heating source is cooled, the amount of deposited fine particles such as Si02 (referred to as 5 (soot) in Fig. 1) that reacts in the gas phase and is generated increases. was discovered.
このスートの堆積量が増加する理由は明確には言えない
が、一般に温度勾配をもつ気体中に微粒子が存在してい
る時、温度の低い個所で微粒子濃度が高くなると言う現
象がある。The reason for this increase in the amount of soot deposited cannot be clearly stated, but there is a general phenomenon that when particulates are present in a gas with a temperature gradient, the particulate concentration increases at locations with lower temperatures.
固体壁に微粒子が衝突する場合にも固体壁がより低温で
あればこの衝突確率(付着確率)も増加する。これはサ
ーマルブレシピラィトと呼ばれる現象で、古くから知ら
れてはいるが、その原理に関する定説は未だ明らかでな
い。Even when fine particles collide with a solid wall, if the solid wall is at a lower temperature, the probability of this collision (probability of adhesion) increases. This is a phenomenon called thermal brecipitrite, and although it has been known for a long time, the established theory regarding its principle is still unclear.
本発明に於ても同様の原理でガス(スート)温度とシリ
カ/ぐィプ内壁の温度差が大きい程スートのパイプ内壁
への付着確率が増すものと考えられる。In the present invention, it is considered that the probability of adhesion of soot to the inner wall of the pipe increases as the difference between the gas (soot) temperature and the inner wall of the silica/Gyp pipe increases based on the same principle.
さらに本発明者の検討結果によれば、加熱源の直前に加
えて直後をも強制的に冷却することにより、堆積された
ガラス層の膜厚及び添加元素量に関する不均一部の長さ
が短か〈なること、およびガラス管の変形を減少する効
果のあることをもみし、だした。Furthermore, according to the study results of the present inventors, by forcibly cooling not only immediately before the heating source but also immediately after the heating source, the length of the non-uniform part regarding the thickness of the deposited glass layer and the amount of added elements can be shortened. It has been found that this method has the effect of reducing the deformation of glass tubes.
本発明は上記の現象を利用してなされたものである。The present invention has been made by taking advantage of the above phenomenon.
次に本発明を第3図に示す実施例によって説明する。Next, the present invention will be explained with reference to an embodiment shown in FIG.
1は円筒状ガラス管、2は局部加熱源で上記ガラス管1
の上を複数回往復移動させてガラス管1の内壁に所望の
ガラス媒を堆積させていくものである。1 is a cylindrical glass tube; 2 is a local heating source;
A desired glass medium is deposited on the inner wall of the glass tube 1 by reciprocating the glass tube 1 several times.
3は原料ガスを示す。3 indicates raw material gas.
41は加熱源の直前を強制的に冷却する冷却源、42は
加熱源の直前を強制的に冷却直後を冷却する冷却源で、
共にガラス管1の外壁にリング状のパイプを間隔をおい
て取付けAr,N3C02等の非酸化性ガスをガラス管
壁に吹きつけるか、冷却水をスパイラル状のパイプに流
して冷却するものである。41 is a cooling source that forcibly cools the area immediately before the heating source; 42 is a cooling source that forcibly cools the area immediately before the heating source;
In both cases, ring-shaped pipes are installed at intervals on the outer wall of the glass tube 1, and non-oxidizing gas such as Ar or N3C02 is blown onto the glass tube wall, or cooling water is allowed to flow through the spiral pipe for cooling. .
以上の如く加熱源2の直前のガラス管壁を冷却しながら
加熱することによりガラス管壁内に気相状で反応し生成
した微粒子(スート)の堆積量が平均して増大し、原料
の有効利用度(収率)が高まる。As described above, by heating the glass tube wall immediately in front of the heating source 2 while cooling it, the amount of deposited fine particles (soot) generated by reacting in the gas phase within the glass tube wall increases on average, and the effective use of raw materials is achieved. Utilization (yield) increases.
又加熱源2の直後をも冷却すると収率が高まることに加
えて光フアィバ用ガラス素材の長手方向に均一性が増す
ため、有効長の長い素材が得られ、又、出発材料のガラ
ス管の変形が少なくなるためコア径の寸法精度の良好な
光フアィバ用素材が得られる等光フアィバの製造上極め
て有効である。以下、従来のMCVD法に対し本発明の
実施例を比較しながら説明する。In addition, cooling immediately after the heating source 2 not only increases the yield, but also increases the uniformity in the longitudinal direction of the glass material for optical fibers, so a material with a long effective length can be obtained, and the starting material of the glass tube can be Since deformation is reduced, an optical fiber material with good dimensional accuracy of the core diameter can be obtained, and is extremely effective in manufacturing optical fibers. Hereinafter, embodiments of the present invention will be explained while comparing them with the conventional MCVD method.
本発明は下記材料のガラスだけでなく、同様の方法で作
製できるガラス膜、例えばSi02一B03ガラス、S
i02−P205ガラスなどに広く適用できる。The present invention applies not only to glasses made of the following materials, but also to glass films that can be produced by similar methods, such as Si02-B03 glass, S
It can be widely applied to i02-P205 glass, etc.
比較例 1
第1図に示した装置でSj02−蛇02ガラス膜を作成
した。Comparative Example 1 A Sj02-Jake02 glass film was produced using the apparatus shown in FIG.
出発材料のガラス管1として外径20肋、肉厚1.5肋
の石英管を使用した。A quartz tube with an outer diameter of 20 ribs and a wall thickness of 1.5 ribs was used as the glass tube 1 as a starting material.
ガラス合成用原料としては室温のSIC14及びQC1
4中へ酸素をキャリアとしてバブルさせ(それぞれ20
0cc/分,160cc/分)、さらに余剰の02を5
00cc/分加えて1の石英管内に導入した。加熱源2
によりガラス管を約14000Cに加熱しながら、この
加熱源を8の/分の速度で20回移動させて管内壁にS
i02−快02膜を作成したところ、原料入口側の膜厚
に関する不均一部長は、約40肌,Ge02濃度の不均
一部長は約5仇奴あった。又、SIC14の有効利用度
は約50%であった。石英管の外径は加熱前後で約30
%程縞4・化した。比較例 2
移動加熱源2の後方(第3図の42)に、20そ/分の
量のN2ガスを1方向に吹き出させるノズルを1ケ設け
、加熱源と同期ごせて移動させながら、比較例1で述べ
たのと同様の条件でSj02一G02腰を作成したとこ
ろ10回の移動で石英管の変形が大きくなった。SIC14 and QC1 at room temperature are used as raw materials for glass synthesis.
Bubble oxygen as a carrier into 4 (each 20
0cc/min, 160cc/min), and the surplus 02 to 5
00 cc/min and introduced into the quartz tube of 1. heating source 2
While heating the glass tube to approximately 14,000C, the heating source was moved 20 times at a speed of 8/min to apply S to the inner wall of the tube.
When the i02-Kai02 film was prepared, there were about 40 areas of non-uniformity in film thickness on the raw material inlet side, and about 5 areas of non-uniformity in Ge02 concentration. Furthermore, the effective utilization of SIC14 was approximately 50%. The outer diameter of the quartz tube is approximately 30 mm before and after heating.
About 4% of stripes appeared. Comparative Example 2 One nozzle was installed behind the moving heating source 2 (42 in Fig. 3) to blow out N2 gas at a rate of 20 som/min in one direction, and while moving in synchronization with the heating source, When Sj02-G02 waists were made under the same conditions as described in Comparative Example 1, the deformation of the quartz tube became large after 10 movements.
この素材の原料入口側の膜厚に関する不均一部長は約2
5側,戊02濃度の不均一部長は約3仇舷と比較例1に
対して改善されたが、SIC14の有効利用度は約50
%であり、比較例1と同じであった。比較例 3
石英管1の周囲に20夕/分の量のN2ガスをリング状
に吹き出させるノズルを加熱源の後方に設けて比較例2
に述べたのと同様の条件でSi02−W02膜を作成し
たところ、20回の加熱源の移動によっても石英管の変
形は殆んどなく変形を防ぐ効果のあることが解つた。The uneven length of the film thickness on the raw material inlet side of this material is approximately 2
On the 5th side, the non-uniform part of the 02 concentration was about 3 sides, which was improved compared to Comparative Example 1, but the effective utilization of SIC14 was about 50
%, which was the same as Comparative Example 1. Comparative Example 3 A nozzle was installed behind the heating source to blow out N2 gas in a ring shape around the quartz tube 1 at an amount of 20 pm/min.
When a Si02-W02 film was prepared under the same conditions as described in 1., it was found that the quartz tube was hardly deformed even after the heating source was moved 20 times, and it was found to be effective in preventing deformation.
しかし、SIC14の有効利用度は改善されなかった。
本発明の実施例 1
20そ/分の量のN2ガスを、石英管1の周囲にリング
状に吹き出させるノズルを加熱源の前方(第3図41)
に設けて、比較例2に述べたのと同様の条件でSj02
−Ge02膜を作成したところ20回の加熱源の移動後
、石英管の外径は約10%の縮小化にとどまり、又この
素材の原料入口側の膜厚に関する不均一部長は約35肋
,Q02濃度の不均一部長は約45凧まで改善されたが
、さらにSIC14の有効利用度は、約65%と比較例
1に対して著しい効果のあることを確認した。However, the effective utilization of SIC14 was not improved.
Embodiment 1 of the present invention A nozzle is installed in front of the heating source (FIG. 3, 41) for blowing out N2 gas in a ring shape around the quartz tube 1 at an amount of 20 som/min.
Sj02 under the same conditions as described in Comparative Example 2.
- When a Ge02 film was created, the outer diameter of the quartz tube was reduced by only about 10% after the heating source was moved 20 times, and the uneven length of the film thickness on the raw material inlet side of this material was about 35 ribs. Although the non-uniform part of Q02 concentration was improved to about 45 kites, it was further confirmed that the effective utilization of SIC14 was about 65%, which is significantly more effective than Comparative Example 1.
本発明の実施例 2
石英管1の周囲にリング状に吹き出させるノズルを加熱
源の前後に設けて、それぞれ20夕/分の量のN2ガス
を石英管に吹きつけながら比較例2に述べたのと同様な
条件でSi02−W02膜を作成したところ、2の司の
加熱源の移動後、石英管の変形は殆んどなく、原料入口
側の膜厚に関する不均一部長は約25肋,蛇02濃度の
不均一部長は約30側で、SIC14の有効利用度は約
65%であり、比較例1に対して原料の有効利用度はも
とより、濃厚の均一性、外径の変形に有効であることを
確認した。Example 2 of the present invention Nozzles that blow out in a ring shape around the quartz tube 1 were installed before and after the heating source, and while blowing N2 gas to the quartz tube at an amount of 20 evening/minute, the same process as described in Comparative Example 2 was carried out. When a Si02-W02 film was prepared under the same conditions as above, there was almost no deformation of the quartz tube after the second heating source was moved, and the non-uniform part of the film thickness on the raw material inlet side was approximately 25 ribs. The non-uniform part of the snake 02 concentration is about 30, and the effective utilization of SIC14 is about 65%, which is effective for the effective utilization of raw materials as well as the uniformity of the concentration and the deformation of the outer diameter compared to Comparative Example 1. It was confirmed that
本発明においては、以上説明したように、加熱源の直前
を冷却することにより、光フアィバ素材の原料の有効利
用度は共に向上した。In the present invention, as explained above, by cooling immediately before the heating source, the effective utilization of the raw material of the optical fiber material is improved.
又、加熱源の直前とともに直後をも冷却することにより
、上記に加えて、石英管の熱変形が小さくなったため、
コア及びクラッドの寸法精度が向上し、さらに膜厚が均
一に付着することが確認された。In addition to the above, thermal deformation of the quartz tube was reduced by cooling both immediately before and immediately after the heating source.
It was confirmed that the dimensional accuracy of the core and cladding was improved and that the film thickness was evenly deposited.
発熱体として、抵抗発熱体を用いる場合、発熱体の酸化
による劣下を受け難くするためAr,N2等の非酸化性
気体を用いることが望ましい。When using a resistance heating element as the heating element, it is desirable to use a non-oxidizing gas such as Ar or N2 in order to make the heating element less susceptible to deterioration due to oxidation.
発熱体の酸化による劣下が問題とならない場合には、冷
却用気体として、空気を用いることが出来る。If deterioration of the heating element due to oxidation is not a problem, air can be used as the cooling gas.
第1図は従来の内煤付法を示す概略図、第2図はガラス
素材の長手方向に関するガラス堆積層の膜厚及び添加剤
濃度の不均一部を示す図、第3図は本発明による内煤付
法を示す概略図である。
1はガラス管、2は加熱源、3は原料ガス、41,42
は冷却源を示す。
オー図
オ2図
オヲ図Figure 1 is a schematic diagram showing the conventional internal sooting method, Figure 2 is a diagram showing non-uniformities in the thickness and additive concentration of the glass deposited layer in the longitudinal direction of the glass material, and Figure 3 is the method according to the present invention. It is a schematic diagram showing an internal soot application method. 1 is a glass tube, 2 is a heating source, 3 is a raw material gas, 41, 42
indicates a cooling source. O diagram O 2 diagram O wo diagram
Claims (1)
すると共に、局部加熱源を該円筒状ガラス管に沿つて移
動させて局部加熱を施し、該円筒状ガラス管内壁に所望
のガラス層を堆積せしめる方法において、該局部加熱源
の直前に該局部加熱源と同期する冷却源を設け、局部加
熱直前のガラス管部分を強制的に冷却することを特徴と
する光フアイバ素材の製造方法。 2 特許請求の範囲第1項に記載の方法において、冷却
源としてガラス管の外壁にリング状に気体を吹きつける
ノズルを用いることを特徴とする光フアイバ素材の製造
方法。 3 特許請求の範囲第1項または第2項に記載の方法に
おいて、加熱源として抵抗発熱体・冷却源としてAr,
N_2,CO_2等の非酸化性ガスを用いることを特徴
とする光フアイバ素材の製造方法。[Claims] 1. A raw material gas for glass formation is supplied into a cylindrical glass tube, and a local heating source is moved along the cylindrical glass tube to locally heat the inner wall of the cylindrical glass tube. An optical fiber material for depositing a desired glass layer, characterized in that a cooling source synchronized with the local heating source is provided immediately before the local heating source to forcibly cool the glass tube portion immediately before the local heating. manufacturing method. 2. A method for manufacturing an optical fiber material according to claim 1, characterized in that a nozzle that blows gas in a ring shape onto the outer wall of a glass tube is used as a cooling source. 3. In the method according to claim 1 or 2, a resistance heating element is used as a heating source and an Ar, a cooling source is used as a cooling source.
A method for manufacturing an optical fiber material, characterized by using a non-oxidizing gas such as N_2 and CO_2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5847478A JPS6016376B2 (en) | 1978-05-17 | 1978-05-17 | Manufacturing method of optical fiber material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5847478A JPS6016376B2 (en) | 1978-05-17 | 1978-05-17 | Manufacturing method of optical fiber material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54151623A JPS54151623A (en) | 1979-11-29 |
| JPS6016376B2 true JPS6016376B2 (en) | 1985-04-25 |
Family
ID=13085420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5847478A Expired JPS6016376B2 (en) | 1978-05-17 | 1978-05-17 | Manufacturing method of optical fiber material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016376B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6045134B2 (en) * | 1978-07-07 | 1985-10-08 | 古河電気工業株式会社 | Processing method of glass for optical fiber |
| US4302230A (en) * | 1980-04-25 | 1981-11-24 | Bell Telephone Laboratories, Incorporated | High rate optical fiber fabrication process using thermophoretically enhanced particle deposition |
| KR0168009B1 (en) * | 1996-09-13 | 1999-10-15 | 김광호 | Chiller used for manufacturing optical fiber base material |
| NL1018239C2 (en) * | 2001-06-08 | 2002-12-10 | Draka Fibre Technology Bv | Optical fiber and method for manufacturing an optical fiber. |
| CN101041550B (en) | 2006-12-28 | 2010-12-15 | 北京交通大学 | Method and device for improving MCVD deposition efficiency and quality by cryogenic gas refrigeration |
-
1978
- 1978-05-17 JP JP5847478A patent/JPS6016376B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54151623A (en) | 1979-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4217027A (en) | Optical fiber fabrication and resulting product | |
| US3982916A (en) | Method for forming optical fiber preform | |
| US4909816A (en) | Optical fiber fabrication and resulting product | |
| US5558693A (en) | Methods of making optical waveguides | |
| JPH01103924A (en) | Manufacture of single mode optical fiber | |
| US4334903A (en) | Optical fiber fabrication | |
| US4235616A (en) | Optical waveguide manufacturing process and article | |
| US4528009A (en) | Method of forming optical fiber having laminated core | |
| JPH0686303B2 (en) | Method for straightening and forming a preformed tube in which a fiber for an optical waveguide is stretched | |
| JPS6016376B2 (en) | Manufacturing method of optical fiber material | |
| TWI237624B (en) | Apparatus for fabricating soot preform for optical fiber | |
| US4932990A (en) | Methods of making optical fiber and products produced thereby | |
| JPS5851892B2 (en) | Method and apparatus for manufacturing optical glass products | |
| JP3517848B2 (en) | Manufacturing method of optical fiber preform | |
| US4504299A (en) | Optical fiber fabrication method | |
| JP2002326833A (en) | Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method using the same | |
| US6928841B2 (en) | Optical fiber preform manufacture using improved VAD | |
| JP4110893B2 (en) | Method and apparatus for producing glass particulate deposit | |
| JPH0240003B2 (en) | TANITSUMOODO * HIKARIFUAIBAYOBOZAINOSEIZOHOHO | |
| JPS62108748A (en) | Preparation of glass fiber base material | |
| JP2003012338A (en) | Method for manufacturing optical fiber preform using MCVD method | |
| JPS58185446A (en) | Manufacturing method of optical fiber base material | |
| JP3654232B2 (en) | Optical fiber preform manufacturing method | |
| JP3772796B2 (en) | Manufacturing method of optical fiber preform | |
| JPS5830704A (en) | Infrared fiber manufacturing method |