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JPS60178340A - Metal or metal-compound analyzing method by using radiation - Google Patents
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JPS60178340A - Metal or metal-compound analyzing method by using radiation - Google Patents

Metal or metal-compound analyzing method by using radiation

Info

Publication number
JPS60178340A
JPS60178340A JP59035490A JP3549084A JPS60178340A JP S60178340 A JPS60178340 A JP S60178340A JP 59035490 A JP59035490 A JP 59035490A JP 3549084 A JP3549084 A JP 3549084A JP S60178340 A JPS60178340 A JP S60178340A
Authority
JP
Japan
Prior art keywords
radiation
sample
cross
section
pixels
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59035490A
Other languages
Japanese (ja)
Inventor
Isamu Taguchi
勇 田口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP59035490A priority Critical patent/JPS60178340A/en
Publication of JPS60178340A publication Critical patent/JPS60178340A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/419Imaging computed tomograph

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pulmonology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain data in a sample, by taking the photograph of the cross section of a sample under non-destructive condition by a radiation tomography method, dividing the level of the picture of the tomography according to picture elements, and analyzing the ratio of the numbers of picture elements. CONSTITUTION:A radiation beam 5 is projected on the cross section of a sample 1. Under this state, a radiation projector 3 and a radiation detector 4 are moved as a unitary body along a scanning line 6 from scanning starting points 7 and 7. The amount of radiation (a) transmitted through the sample is continuously detected. At the same time, the amount of radiation (b) from the radiation projector 3 is detected by a monitoring radiation detector 9. The radiations (a) and (b) are inputted to an operating device 12 through an amplifier 10 and an analog to digital converter 11. The signal of the ratio between the radiations (a) and (b), which is recorded in correspondence with the moving distance of the ridiation projector 3, is inversely projected on the cross section 2 of the sample 1 by a central processing unit 15. Thus the components of the sample can be accurately analyzed without contact.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、金属または金属化合物中の成分の非破協祢析
古炊f間ナスものでも六− (従来技術) 最近放射線(X線など)を使用した断層撮影法(CT 
: Computerized Tomography
)が普及し、装置が医療機関に設置され、活用されて多
大の成果を挙けている。この方法は、従来できなかった
外部からの人体の内部観察を可能としておシ、現在では
頭部専用、全身用などの装置が市販されている。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to the non-destructive analysis of components in metals or metal compounds. ) using tomography (CT)
: Computerized Tomography
) has become widespread, and the devices have been installed and utilized in medical institutions with great success. This method makes it possible to observe the inside of the human body from the outside, which was previously impossible, and devices for the head and for the whole body are currently on the market.

一方、工学分野では、金属や金属化合物等の材料の内部
欠陥の検出に、X線やγ線などの放射線による透過試験
が広〈実施されている。しかしこの方法は欠陥の定性的
な検出が目的であシ、断面像をめるのでもなく、また成
分の分析を目的とするものでもなかった。ところが最近
、医療用のCT法を、そのまま工学の分野においても利
用しようという試みがなされ、例えば特開昭57−67
846号公報、特開昭57−76443号公報などに開
示されている。しかしエネルギーの高い放射線が容易に
得られないことや、適当な検出器がない等の理由から断
層撮影法によシ金属や金属化合物の成分の分析を行うま
でには至っていない。このような事情から現在、金属等
の成分の分析は、試料を切…■して分析用試料を調節し
、種々の分析法や様器を用いて成分の分析を行っている
が、分析試料の調製が面倒であるのみならず試料調製の
ために破壊することになるので経時的な変化を追跡でき
ない、あるいは再分析できない、また試料の切断、加工
により対象が変質するおそれもある等1、神々の問題が
ある。
On the other hand, in the engineering field, transmission tests using radiation such as X-rays and γ-rays are widely used to detect internal defects in materials such as metals and metal compounds. However, this method was aimed at qualitatively detecting defects, and was not aimed at obtaining cross-sectional images or analyzing components. However, recently, attempts have been made to utilize the medical CT method as it is in the field of engineering.
This method is disclosed in Japanese Patent Application Laid-open No. 846, Japanese Patent Application Laid-open No. 76443/1983, and the like. However, due to the inability to easily obtain high-energy radiation and the lack of suitable detectors, it has not been possible to analyze the components of metals and metal compounds using tomography. Due to these circumstances, currently, the analysis of components such as metals involves cutting the sample, adjusting the sample for analysis, and analyzing the components using various analytical methods and instruments. Not only is it troublesome to prepare, but the sample must be destroyed to prepare it, making it impossible to track changes over time or reanalyzing it, and cutting and processing the sample may cause the object to change in quality.1. There is a problem with gods.

(発明の目的) 本発明は金属あるいは金属酸化物等の試料の断層写真を
撮影し、該写真を解析することによシ、その成分の分析
を行うことを特徴とするもので、試料に対し、非接触、
非破壊状態で内部の情報を得ることを目的とするもので
ある。
(Object of the invention) The present invention is characterized by taking a tomographic photograph of a sample of a metal or metal oxide, etc., and analyzing the photograph to analyze its components. , non-contact,
The purpose is to obtain internal information in a non-destructive manner.

(発明の構成、作用) 本発明は、高1七X+W、γ紳、中性子線等の放射線を
使用し、かつ高感度の検出器を使用して試料の内部に関
する情報を画像として取シ出し、この画像情報を解析す
ることにより試料の成分を分析し、かつ色別に表示する
ものである。す彦わち本発明は、放射線による断層撮影
法により試料の断面を非破壊状態で撮影し、得られた断
層写真の画像を構成する各画素を、放射線透過量の多少
に従って二つ以上のレベルに分割し、レベル毎の画素の
総数をめ、全画素数に対する比率をめることによシ目的
とする成分を分析すること、および各レベル毎の画素を
色別表示することを特徴とするものである。
(Structure and operation of the invention) The present invention uses radiation such as high-17X+W, γ-2, and neutron beams, and uses a highly sensitive detector to extract information about the inside of a sample as an image. By analyzing this image information, the components of the sample are analyzed and displayed in different colors. In other words, the present invention non-destructively photographs a cross section of a sample using radiation tomography, and divides each pixel constituting the obtained tomographic image into two or more levels according to the amount of radiation transmitted. It is characterized by analyzing the target component by dividing the image into 10 pixels, calculating the total number of pixels for each level, and calculating the ratio to the total number of pixels, and displaying the pixels for each level by color. It is something.

以下発明について詳細に説明する。第1図は本発明方法
を示す略図で、1は金属または金属酸化物からなる円筒
形の試料、2はその横断面である。
The invention will be explained in detail below. FIG. 1 is a schematic diagram showing the method of the present invention, in which 1 is a cylindrical sample made of a metal or metal oxide, and 2 is a cross section thereof.

3は放射線照射装置で、140KV以上のXfll(因
みに医療用は130KV以下である)や、”’C8また
はll0coなどのγ線、tSt Ctなどの中性子線
などのラジオアイソトープ等を用いることができる。
3 is a radiation irradiation device that can use radioisotopes such as Xfll of 140 KV or higher (in medical use, the voltage is 130 KV or lower), γ rays such as C8 or 110co, neutron beams such as tSt, Ct, etc.

例えば420KVの高圧X紳を絞シさらにスリットを用
いて直径0.5 wmのビーム5にして試料1を透過さ
せる。4は放射線検出器で、一般的なシンチレーション
計数管、G、M(ガイガー・ミュラー)計数管等を用い
ることもできるが、高感度の測定のためにはB、G、0
 (Bi−Ge 0xide )などの半導体検出器や
マルチシンチレーション検出器等を使用することが望ま
しい。また第2図は本発明方法の概髪を示す説明図で、
8は放射線源、9はモニター用放射線検出器である。1
0は放射線検出器4および9からの信号を増幅する増幅
器、11は該増幅器と接続したアナログディジタル変換
器、12は演算装置で、バッファメモリ13、プログラ
ムストア14、中央処理装[15、主メモリ16、読出
装置17、等から構成されている。18はディジタル・
アナログ変換器、19は増幅器、20はディスプレイ装
置である。
For example, a high voltage X-ray of 420 KV is condensed and a beam 5 having a diameter of 0.5 wm is transmitted through the sample 1 using a slit. 4 is a radiation detector, and a general scintillation counter, G, M (Geiger-Muller) counter, etc. can be used, but for high sensitivity measurement, B, G, 0
It is desirable to use a semiconductor detector such as (Bi-Ge Oxide) or a multi-scintillation detector. Moreover, FIG. 2 is an explanatory diagram showing the general hair according to the method of the present invention,
8 is a radiation source, and 9 is a monitoring radiation detector. 1
0 is an amplifier that amplifies the signals from the radiation detectors 4 and 9, 11 is an analog-to-digital converter connected to the amplifier, 12 is an arithmetic unit, which includes a buffer memory 13, a program store 14, a central processing unit [15, main memory] 16, a reading device 17, and the like. 18 is digital
An analog converter, 19 an amplifier, and 20 a display device.

本発明方法を用いて、金属または金属化合物の成分の分
析を行うには、先ず試料1の断層写真を撮影するが、第
1図および第2図に示すように、放射線ビーム5が目的
とする断面を透過するように放射線照射゛装置3および
放射線検出器4をセット口、放射線ビーム5を照射しな
がら、放射線照ら走査線6に沿って一体に移動させ、試
料1を透過した放射線量aを連続的に検出する。なおこ
のとき、放射線照射装置3からの放射線fl′bをモニ
ター用放射線検出器9で直接検出しておく。この放射線
検出器4および9で検出した放射線量aおよびbは増幅
器10.アナログ・ディジタル変換器11を経て、演算
装#12のバッファメモリ13に入力され、aとbとの
比が走育始点7.7からの放射1g4照射装置3の移動
距離と対応して記録される。す々わち走査方向に沿った
透過放射線の強度分布が記憶されることになる。このバ
ッファメモIJ l 3に記録された信号は、さらに中
央処理装部15において試料1の横断面2に逆投影され
るように演算処理される。例えは第3図(a)に示すよ
うに検出された強度工は走査方向Sに対して直角方向に
沿い横断面2上に強度■に比例して一様に配分される。
In order to analyze the components of a metal or metal compound using the method of the present invention, first a tomographic photograph of the sample 1 is taken. As shown in FIGS. 1 and 2, the radiation beam 5 The radiation irradiation device 3 and the radiation detector 4 are set so as to pass through the cross section, and while irradiating the radiation beam 5, they are moved together along the radiation illumination scanning line 6, and the radiation dose a transmitted through the sample 1 is measured. Detect continuously. At this time, the radiation fl'b from the radiation irradiation device 3 is directly detected by the monitoring radiation detector 9. The radiation doses a and b detected by the radiation detectors 4 and 9 are transmitted to the amplifier 10. Via the analog-digital converter 11, it is input to the buffer memory 13 of the arithmetic unit #12, and the ratio of a and b is recorded in correspondence with the moving distance of the radiation 1g4 irradiation device 3 from the running starting point 7.7. Ru. In other words, the intensity distribution of the transmitted radiation along the scanning direction is stored. The signals recorded in the buffer memo IJ13 are further processed in the central processing unit 15 so as to be back-projected onto the cross section 2 of the sample 1. For example, as shown in FIG. 3(a), the detected intensity is uniformly distributed on the cross section 2 along the direction perpendicular to the scanning direction S in proportion to the intensity .

この配分された値は画像が再構成されたときの画像の濃
淡を表わすものである。
This distributed value represents the shading of the image when the image is reconstructed.

このようにして横断面2について1回目の走査4の対を
横断面2において試料1を中心として回動させ、(ある
いは試料1を回動させ、)再び前回と同様の操作を行う
。このような操作を繰返して第3図(a) 、 (b)
 、 (c) 、・・・・・・に示すような逆投影像を
得る。この画像は例えば512X 512の画素により
構成され、透過放射線量の多少に比例してグレイスケー
ルで表示される。さらにこれらの逆投影像は中央処理装
置15において演算処理により重ね合され、主メモリ1
6の2次元配置の番地に、それぞれの番地に対応する画
素が記憶される。なお1画素と試料の横断面との対応は
例えば0.1mX O,1vnである(この重ね合され
再構成された像を模式的に第4図に示す)。このとき試
料1の走査された横断面2に放射線透過性が異る成分F
が存在すると、その位置に他成分像Gが生じる。なお放
射線の走査回数は少くとも3回以上が必要であり、鮮明
な像を得るためには30回以上が望ましい。主メモリ1
6に記憶された画像は読出装置17により読み出され、
ディジタル・アナログ変換器18によりアナログ信号に
変換される。このアナログ信号は増幅器19を経てディ
スプレイ装置20に入力され、試料1の横断面2の画像
が表示される。なお演算装置12における前記の各演算
処理は、プログラムストア14から読み出されたプログ
ラムに従って実行される。
In this way, the first pair of scans 4 on the cross section 2 are rotated around the sample 1 on the cross section 2 (or the sample 1 is rotated), and the same operation as the previous one is performed again. By repeating these operations, the results shown in Figures 3 (a) and (b) are obtained.
, (c) Obtain a back projection image as shown in . This image is composed of, for example, 512×512 pixels, and is displayed in gray scale in proportion to the amount of transmitted radiation. Furthermore, these back-projected images are superimposed by arithmetic processing in the central processing unit 15, and stored in the main memory 1.
The pixels corresponding to the respective addresses are stored in the 6 two-dimensionally arranged addresses. Note that the correspondence between one pixel and the cross section of the sample is, for example, 0.1 m×O, 1 vn (this superimposed and reconstructed image is schematically shown in FIG. 4). At this time, a component F having different radiolucency in the scanned cross section 2 of the sample 1
If , another component image G is generated at that position. Note that the number of times the radiation is scanned must be at least three times, and preferably 30 times or more in order to obtain a clear image. Main memory 1
The image stored in 6 is read out by a reading device 17,
It is converted into an analog signal by a digital-to-analog converter 18. This analog signal is input to a display device 20 via an amplifier 19, and an image of a cross section 2 of the sample 1 is displayed. Note that each of the arithmetic operations described above in the arithmetic unit 12 is executed according to a program read from the program store 14.

次にディスプレイ装置20に表示された画像を撮影し、
撮影された画像を公知の画像解析装置に入れ、各画素毎
の放射線透過量を例えば16段階にレベル分けし、試料
のマトリックスに相当する放射線透過量をもつ画素と、
目的とする成分(2つ以上でもよい)に相当する放射線
透過量をもつ画素とに分け、それぞれの画素を数える。
Next, the image displayed on the display device 20 is photographed,
The photographed image is put into a known image analysis device, and the amount of radiation transmitted by each pixel is divided into levels, for example, 16 levels, and pixels having the amount of radiation transmitted corresponding to the matrix of the sample are determined.
The pixels are divided into pixels having a radiation transmission amount corresponding to the target component (which may be two or more), and each pixel is counted.

このとき目的とする成分の分析は目的とする成分に相当
するXm透過号をもつ画素数と、画素総数の比(面積率
になる)に基いて行う。また目的とする成分が2つ以上
の場合には前記のレベル分けを2つ以上にし、それぞれ
の画素数をめ画素総数との比をめればよい。なおこの場
合得られる分析値は面積割合であるので、これを重量割
合に変換するには検量線法などを使用する必要がある。
At this time, the target component is analyzed based on the ratio of the number of pixels having the Xm transmission sign corresponding to the target component and the total number of pixels (which becomes the area ratio). Furthermore, when there are two or more target components, the above-mentioned level division may be divided into two or more, and the number of pixels of each level may be determined and the ratio of the number of pixels to the total number of pixels may be determined. In addition, since the analytical value obtained in this case is an area ratio, it is necessary to use a calibration curve method or the like to convert this into a weight ratio.

なお試料の断層の(最影に際しては、上記の説明の他、
放射線ビームを狭いファン状にし、複数の検出器を用い
て放射線透過量を測定したシ、あるいは広いファン状放
射線と300個以上の多数の検出器列r組合せ、回転運
動のみで試料に放射線を走査する方法、さらには600
個以上の多数個の検出器を全円周に並べ、放射線のみを
回転させる方法等任意の方法を使用することができ、こ
れらは倒れも本発明の範、囲に含まれるものである。次
に本発明の実施例を示す。
In addition to the above explanation, for the (most shadow) of the fault of the sample,
The radiation beam is made into a narrow fan shape and the amount of radiation transmitted is measured using multiple detectors, or the radiation beam is scanned onto the sample using only rotational movement by combining a wide fan-shaped radiation beam and multiple detector rows of 300 or more. How to do, even 600
Any method can be used, such as a method in which a large number of detectors are arranged around the entire circumference and only the radiation is rotated, and the fall of these detectors is also included in the scope of the present invention. Next, examples of the present invention will be shown.

(実施例1) 炭素餉(Slキルド)のプルームの中心偏析帯から採取
した肯径46w、高さ50關の円筒形試料中の酸化物(
SiOz)を本発明法によって分析した。
(Example 1) Oxide (
SiOz) was analyzed by the method of the present invention.

なおこのとき中心偏析帯の断面の中心が、試料断面の中
心になるように試料を調製した。高圧X線照躬装価(4
20KV、 3mA )および検出器(BGO)を用い
、試料の高さの1/2の位置を試料を6°つづ回転させ
、スライス’lVi? 0.5 v、Iで31回走旌し
た。
At this time, the sample was prepared so that the center of the cross section of the central segregation zone was the center of the sample cross section. High-voltage X-ray illumination equipment price (4
Using 20KV, 3mA) and a detector (BGO), rotate the sample at 1/2 of the sample height in 6° increments to obtain a slice 'lVi? It was run 31 times at 0.5 v, I.

所要時間10分、画素数240 X 240とした。得
られた画像を画像解析装置によシ16段階にレベル分け
し、そのうち8段階以下を酸化物とした。このようにし
て分析した酸化物(Stay)をディスプレイ装置に着
色して表示した。第5図における0印が表示された画素
である。この結果から中心偏析帯の中心部には酸化物が
多く存在していることがわかった。なおこの画素数は2
3、画素総数は57600である。検量線法によって酸
化物(0,2m以上)をめると0.04%であった。同
じ試料を電解法でめた酸化物(0,2m+以上)の分析
値は0.04%であり両者は一致した。
The required time was 10 minutes, and the number of pixels was 240 x 240. The obtained image was classified into 16 levels by an image analysis device, and 8 or below levels were classified as oxides. The thus analyzed oxide (Stay) was colored and displayed on a display device. The 0 mark in FIG. 5 is the displayed pixel. This result revealed that there are many oxides in the center of the central segregation zone. Note that this number of pixels is 2
3. The total number of pixels is 57,600. When oxides (0.2 m or more) were included using the calibration curve method, it was 0.04%. The analytical value of oxide (0.2m+ or more) obtained from the same sample by electrolytic method was 0.04%, and both values were in agreement.

(実施例2) 製鉄所において使用される焼結鉱〔酸化鉄(鉄鉱石)が
主体でカルシウムフェライト、スラグ等が混合している
。試料の大きさ50 x 40X 30van :]中
のカルシウムフェライトおよびスラグを本発明法によシ
分析した。使用した装置、条件は実施例1と同様とした
。ただし各画素毎の透過X a %″を8段階に分け、
各画素をX線透過量の少いものから次のようにレベル分
けした。
(Example 2) Sintered ore used in steel plants [mainly composed of iron oxide (iron ore), mixed with calcium ferrite, slag, etc. Calcium ferrite and slag in a sample having a size of 50 x 40 x 30 vans were analyzed by the method of the present invention. The equipment and conditions used were the same as in Example 1. However, the transmission X a %'' for each pixel is divided into 8 stages,
Each pixel was classified into levels as follows, starting from the one with the least amount of X-ray transmission.

第1段階:マトリックス 第2〜4段階:カルシウムフェライト 第5〜8段階ニスラグ これらのレベル分けはそれぞれの標準試料のX線透過性
をR周査し、この値を基に実施しだ。
1st stage: Matrix 2nd to 4th stages: Calcium ferrite 5th to 8th stages Nislag These level classifications were carried out based on the X-ray transmittance of each standard sample measured by R.

上記のようにレベル分けしたカルシラノ、フェライトと
スラグとを、例えば赤色と青色のように色分けしてディ
スプレイ装置に表示17た。その状態を第6図に模式的
に示す。無色部は酸化鉄マトリックス、赤色部(第6図
における斜線部)はカルシウムフェライト、青色部(第
6図における格子縞部)はスラグであり、黒色部は気孔
である。第6図によると試料全体に小さい気孔が分数し
ており、まだカルシウムフェライト、スラグの分布状態
も明瞭である。この1ii3i仰(写真)から酸化鉄マ
トリックス部、カルシウムフェライト部、スラグ部につ
いて、それぞれの画素数を画像解析装置を用いてH周査
した。酸化鉄マ) IJックス部の画素数は11903
、カルシウムフェライト部の画素数は7601、スラグ
部の画素数は5458であった。全画素数(前記3つの
部分の総数で気孔部を除く)は24962であった。従
って全画素数に対する比率は酸化鉄マトリックス47.
7%、カルシウムフェライト30.4%、スラグ21.
9%である。これらの分析値は第6図におけるそれぞれ
の画面上での割合すなわち面積率に相当する。また参考
のためこの試料をX線で横断した位置で切断し、切断面
を研暦し、上記成分を光学顕微鏡によって観察分類した
ところ面積率で酸化鉄マトリックス50.1係、カルシ
ウムフェライト27.3%、スラグ226チであった。
Calcillano, ferrite, and slag classified into levels as described above were displayed 17 on a display device by color, for example, red and blue. The state is schematically shown in FIG. The colorless part is an iron oxide matrix, the red part (shaded part in FIG. 6) is calcium ferrite, the blue part (checkered part in FIG. 6) is slag, and the black part is pores. According to FIG. 6, there are several small pores throughout the sample, and the distribution of calcium ferrite and slag is still clear. From this 1ii3i (photograph), the number of pixels of each of the iron oxide matrix portion, calcium ferrite portion, and slag portion was scanned using an image analysis device. Iron oxide) The number of pixels in the IJ x section is 11903
The number of pixels in the calcium ferrite portion was 7601, and the number of pixels in the slag portion was 5458. The total number of pixels (the total number of the three parts, excluding the pores) was 24,962. Therefore, the ratio to the total number of pixels is 47.
7%, calcium ferrite 30.4%, slag 21.
It is 9%. These analysis values correspond to the proportions on each screen in FIG. 6, that is, the area ratios. For reference, this sample was cut at the cross-sectional position using X-rays, the cut surface was examined, and the above components were observed and classified using an optical microscope. %, and the slag was 226 cm.

(発明の効果) 以上説明したように本発明によれば金属まだは金属酸化
物の成分を非接触、非破壊状態で精度よく分析すること
ができ、その効果は極めて太きい。
(Effects of the Invention) As explained above, according to the present invention, components of metals and metal oxides can be analyzed with high precision in a non-contact and non-destructive state, and the effects are extremely significant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明におりる放射線の照射と検出の態様を説
明する略図、第2図は本発明の実例を示す説明図、第3
図は本発明における画像の再構成法の一例を示す説明図
、第4図は第3図における再構成法の−fll (逆投
影法)によって匝I像が構成される原理を説明する説明
図、第5図および第6図は本発明の実71ili例にお
いてディスプレイ装置に表示された画像である′。 1:試料、2:横断面、3:放射線照射装置、4:放射
線検出器、5二放射線ビーム、6:走査線、7:走査始
点、8:放射線源、9:モニター用放射線検出器、lO
:増幅器、11:アナログ・ディジタル変換器、12:
演算装置、13:バッファメモリ、14ニブログラムス
トア、15:中央処理装置、16:主メモリ、17:読
出装置#、18:ディジタル・アナログ変換器、19:
増幅器、20:ディスプレイ装置。 出願人 新日本製鐵株式会社 代理人弁理士 青 柳 稔 第1図 第3図 2 第5図 第6図
FIG. 1 is a schematic diagram illustrating aspects of radiation irradiation and detection according to the present invention, FIG. 2 is an explanatory diagram showing an example of the present invention, and FIG.
The figure is an explanatory diagram showing an example of the image reconstruction method in the present invention, and FIG. 4 is an explanatory diagram explaining the principle of constructing the sho I image by the reconstruction method -fll (back projection method) in FIG. 3. , 5 and 6 are images displayed on a display device in a practical example of the present invention. 1: Sample, 2: Cross section, 3: Radiation irradiation device, 4: Radiation detector, 5 Two radiation beams, 6: Scanning line, 7: Scanning starting point, 8: Radiation source, 9: Monitoring radiation detector, lO
: Amplifier, 11: Analog-digital converter, 12:
Arithmetic unit, 13: Buffer memory, 14 Niprogram store, 15: Central processing unit, 16: Main memory, 17: Reading device #, 18: Digital-to-analog converter, 19:
Amplifier, 20: Display device. Applicant Nippon Steel Corporation Representative Patent Attorney Minoru Aoyagi Figure 1 Figure 3 Figure 2 Figure 5 Figure 6

Claims (2)

【特許請求の範囲】[Claims] (1)放射線による断層撮影法により試料の断面を非破
壊状態で撮影し、得られた断層写真の画像を構成する各
画素を、放射線透過量の多少に従って、二つ以上のレベ
ルに分割し、レベル毎の画素の総数をめ、全画素数に対
する比率をめることにより目的とする成分を分析するこ
とを特徴とする放射線による金属または金属化合物の分
析方法。
(1) Non-destructively photographing a cross section of a sample using radiation tomography, and dividing each pixel that makes up the obtained tomographic image into two or more levels according to the amount of radiation transmitted; A method for analyzing metals or metal compounds using radiation, characterized in that a target component is analyzed by calculating the total number of pixels for each level and calculating the ratio to the total number of pixels.
(2)各レベル毎の画素を色別に表示することを特徴と
する特許請求の範囲第1項記載の放射線による金属また
は金属化合物の分析方法。
(2) A method for analyzing metals or metal compounds using radiation according to claim 1, characterized in that pixels of each level are displayed in different colors.
JP59035490A 1984-02-27 1984-02-27 Metal or metal-compound analyzing method by using radiation Pending JPS60178340A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59035490A JPS60178340A (en) 1984-02-27 1984-02-27 Metal or metal-compound analyzing method by using radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59035490A JPS60178340A (en) 1984-02-27 1984-02-27 Metal or metal-compound analyzing method by using radiation

Publications (1)

Publication Number Publication Date
JPS60178340A true JPS60178340A (en) 1985-09-12

Family

ID=12443183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59035490A Pending JPS60178340A (en) 1984-02-27 1984-02-27 Metal or metal-compound analyzing method by using radiation

Country Status (1)

Country Link
JP (1) JPS60178340A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165739A (en) * 1986-12-27 1988-07-09 Nippon Atom Ind Group Co Ltd Method and apparatus for measuring concentration distribution of element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63165739A (en) * 1986-12-27 1988-07-09 Nippon Atom Ind Group Co Ltd Method and apparatus for measuring concentration distribution of element

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