JPS6020050B2 - filter device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention particularly relates to a filter device that takes into consideration airtightness and workability when installing a high-performance filter used in a clean room or the like.

In general, clean roux. The high-performance filter installed at the air outlet in the ceiling of the system has an airtight structure that completely prevents leakage of non-furnace air from around the outside of the filter (filter support frame), and it is easy to replace the filter. This is particularly required.

By the way, as shown in FIG. 1A, this kind of filter device is attached to a mounting frame 3 attached to the lower part of the inner periphery of an air outlet 2 of a ceiling 1, and a filter 5 is attached from inside the ceiling 1 through a packing 4. There is an installation method in which the holder is placed on top of the holder and fastened with bolts 7 using a presser metal fitting 6, but this requires a space in the ceiling 1 for the operator to enter, and the replacement workability is also extremely poor.

For this purpose, as shown in FIG. 1b, the filter 5 is pressed from inside the clean room 8 via the packing 4 to the mounting frame 3 attached to the upper part of the inner periphery of the air outlet 2 of the ceiling 1, and the presser metal fitting 6 is pressed. There is an installation method in which the filter 5 is fastened with bolts 7, but it is difficult to position the filter 5, and many bolts 7 are required.
It is difficult to tighten the filter evenly, and the filter 5 may be pressed against the filter at an angle, resulting in a lack of airtightness, and dust attached to the outer periphery of the filter (filter support frame) 5 may fall into the clean room 8. Cleanliness could not be maintained until the amount of falling dust decreased (for a long time). On the other hand, as the packing 4, in addition to a rubber sheet or the like, as shown in FIG.
Inside, liquid sealing material with high maple property 1 1 (vetrolatum p
It has been proposed in Japanese Patent Publication No. 52-23103 etc. to fill the falling part 3a of the mounting frame 3 with e○olatmm) in advance, but when installing the support frame 9 on site, In order to align with the frame 3, there are many cases in which the support frame 9 is moved and adjusted vertically and horizontally as shown in FIG. 2b.
There is a problem in that a gap is formed between the trailing edge 3a and the airtightness of the airtightness is extremely reduced.

．． The present invention has been made in view of the above-mentioned conventional problems.Basically, it can be easily installed from the clean room side, is completely unaffected by dust attached to the outer periphery of the filter, and has high airtightness. The present invention provides a new filter device. For this reason, the present invention provides a support frame that holds the outer periphery of the filter airtight and has a packing groove facing the upstream side formed around the outer periphery of the downstream end, and a packing groove that is fitted in the packing groove of the support frame and is mounted upstream. It is equipped with a rubber packing filled with a liquid sealant in a roughly V-shaped pleat that stands up on the side, and a mounting frame that is airtightly attached to the inner periphery of the air outlet. The device is characterized in that the folds of the rubber gasket can be pushed out by the mounting frame when the device is fastened and fixed to the device.

Embodiments of the invention will now be described in detail with reference to the accompanying drawings.

As shown in FIGS. 3 and 4a, the filter device includes:
A support frame 16 is provided that airtightly holds the outer periphery of a rectangular parallelepiped-shaped high-performance filter 15, and a packing groove 17 that is closed toward the upstream side is formed in the outer peripheral view of the downstream end of the support frame 16.

The support frame 16 is placed at the lower part of the inner periphery of the air outlet 20 provided in the ceiling 19 of the clean room 8 with a slight gap t.
A mounting frame 2 with a riser gate 21 formed therebetween that can be used for iron fitting.
2 is attached by welding or the like, and airtightly sealed with a sealing material 23.

A cap nut 24 is attached to a suitable position on the circumferential surface of the mounting frame 22 by welding or the like, and is airtightly sealed with a sealing material 23.
A bolt 27 is screwed into the threaded portion of the cap nut 24 from the clean room 18 side with a nut 26 via a spacer 25a and a washer 25b.

In the packing groove 17 of the support frame 16, a rubber packing 28 having approximately V-shaped folds 28a and 28b raised upstream is iron-packed.

A space a between the folds 28a and 28b of the rubber packing 28 and a space b between the folds 28b and the support frame 16 are filled with a liquid sealing material 29 in advance.

The liquid sealing material 29 is a semi-solid fluid with high steel properties at room temperature, and is not sticky. Those such as loratum (petrolatum) are suitable. Note that if the rise 17a of the packing groove 17 is high, the space c between the crease 28a of the rubber packing 28 can also be filled with the liquid sealant 29, but even if the rise 17a is low, as shown in FIG. , the side pleats 28c can be provided in the rubber packing 28, and the liquid sealing material 29 can be filled in the space c.

In addition, as shown in Fig. 5b, both pleats 2
8c and 28d may be provided, and the spaces b and c may be filled with the liquid sealing material 29. Corresponding to the screwing position of the bolt 27 of the mounting frame 22, a presser metal fitting 30 is provided which comes into contact with the gasket groove 17 portion of the support frame 16 from below,
It is screwed onto the bolt 27 with a nut 32 through a washer 31.

If the filter device is constructed as described above, the air outlet two-hole mounting frame 22 will be installed on site.

On the other hand, the high-performance filter 15 is installed in the support frame 16 at the factory, the rubber packing 28 is installed in the packing groove 17, and the spaces a and b of the folds 28a and 28b are filled with liquid sealing material 29 in advance (filling on site). ) is carried to the site, and the support frame 16 is iron-fitted to the rising opening □ 21 of the mounting frame 22 from inside the clean room 18, and the support frame 16 is supported with the holding metal fittings 30 temporarily fastened to the bolts 27. After adjusting the position with the first mounting frame 22, as shown in FIG.
2 to fasten and fix the support frame 16 to the mounting frame 22. At this time, the folds 28a, 2 of the rubber packing 28
8b comes into contact with the mounting frame 22 and is pushed outward to the left and right to come into close contact with the mounting frame 22, and at the same time, the liquid sealant 29 in the space a overflows and flows into the spaces b and c, and the liquid sealant 29 also flows into the space c. At the same time as being filled, the sealing material 29 in the space b also fills the gap t between the mounting frame 22 and the support frame 16.

In this way, the liquid sealing material 29 is uniformly filled over a wide range between the rubber packing 28 and the mounting frame 22, so that the airtightness is significantly improved.

If an air leak is discovered during use, for example at a location indicated by arrow A in FIG. It can be repaired.

As is clear from the above description, the present invention is applicable to the case where the V-shaped folds of the rubber packing fitted into the packing groove of the filter support frame are filled with a liquid sealant, and the support frame is fastened and fixed to the mounting frame. Since the mounting frame pushes out the folds of the rubber packing, the liquid sealant is evenly filled over a wide area between the rubber packing and the mounting frame.
There is no risk of creating gaps that could cause air leakage when the support frame is moved and adjusted as in the conventional case, and the airtightness is significantly improved.

In addition, since it is installed from the clean room side, replacement work is easy, and since it is installed to the mounting frame at the bottom of the air outlet, dust attached to the outer periphery of the filter (filter support frame) can be prevented from falling into the clean room. do not have.

[Brief explanation of drawings]

1a and 1b are schematic sectional views of a conventional filter device, FIG. 2a and 2b are sectional views of essential parts of a conventional filter device using a liquid sealing material, and FIG. 3 is a schematic sectional view of the filter device according to the present invention, FIG. 4a is a sectional view of the main part of FIG. 3 before fastening and fixing, FIG. 4b is a sectional view of the main part of FIG. 3, and FIG. 5a is and FIG. 5b is a sectional view of a modified example of the rubber packing. 15...High performance filter, 16...
Support frame, 17...Packing groove, 20...Air outlet, 22...Mounting frame, 28...
...Rubber pads, 28a, 28b...Folds, 2
9... Liquid sealing material, 30... Holding metal fitting. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5

Claims (1)

[Claims] 1. A support frame that holds the outer periphery of the filter airtight and has a packing groove facing upstream on the outer periphery of the downstream end, and a support frame that is fitted into the packing groove of the support frame and stands upright facing the upstream side. It is equipped with a rubber gasket filled with a liquid sealant in a roughly V-shaped fold, and a mounting frame that is airtightly attached to the inner circumference of the air outlet, and when the support frame is fastened and fixed to the mounting frame from the downstream side, A filter device characterized in that the folds of the rubber gasket can be pushed and expanded with a mounting frame.