JPS6020065B2 - Article holding jig - Google Patents
Article holding jigInfo
- Publication number
- JPS6020065B2 JPS6020065B2 JP9134181A JP9134181A JPS6020065B2 JP S6020065 B2 JPS6020065 B2 JP S6020065B2 JP 9134181 A JP9134181 A JP 9134181A JP 9134181 A JP9134181 A JP 9134181A JP S6020065 B2 JPS6020065 B2 JP S6020065B2
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- article holding
- holding jig
- article
- power transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 14
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 240000000530 Alcea rosea Species 0.000 description 1
- 235000017334 Alcea rosea Nutrition 0.000 description 1
- 235000017303 Althaea rosea Nutrition 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000009503 electrostatic coating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Spray Control Apparatus (AREA)
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
この発明は、被膜の葵着、塗装等の際に、被処理物品を
保持する物品保持拾臭に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an article-holding and odor-picking device for holding an article to be treated during coating, painting, etc.
一般に、照明器具や光学器具に用いられる材料、例えば
反射板等には高品質な被膜を設けることが要求される。Generally, materials used in lighting equipment and optical instruments, such as reflectors, are required to have a high-quality coating.
そのため、これまでは、それ自身自転しながら所定の軌
道上を公転する軸を備えた治具を用い、その袷具の上誌
軸の下端に反射板用材料等の材料（被処理物品）を吊る
し、その軸を自公転させながら真空蒸着等によって被処
理物品に高品質な被膜を形成させることが行われていた
。この場合、上記治具は、真空燕着時における蒸発源と
被処理物品との位置関係が、上記目公転により一義的に
定まる関係以外にとりようがなかった。そのため、被処
理物品の形状、寸法が異なるごとに葵着状態が異なるよ
うになるという欠点を有している。したがって、形状、
寸法等が異なる多種類の被処理物品に対応することがで
きなかった。しかしながら、一合の治具で多種類の被処
理物品に対応できれば治具の交換等の手間が省け操業時
間の短縮化を実現しうる。この発明は、このような事情
に鑑みなされたもので、それ自身自転しながら定められ
た軌道上を公転する駆動軸の下端に物品保持部を設け、
その物品保持部に物品を保持させる物品保持治具であっ
て、上記駆動軸が上下に分割されており、上部駆動軸と
下部駆動軸の間に、動力の伝達方向を変える薮手部とそ
の懐手部による動力伝達方向の変更状態を保持する保持
部とが設けられていることを特徴とする物品保持拾具を
第１の要旨とし、それ自身自転しながら定められた軌道
上を公転する駆動軸に、その駆動軸を中心に駆動軸と直
角な平面上を揺動し所定の位置まで揺動したときにその
状態を保持しうる保持手段付きの支持板が取付けられ、
この支持板に、下端に物品保持部を備えた回転軸が設け
られ、この回転軸と上記駆動軸との間にその駆動軸から
回転軸に動力を伝達する動力伝達手段が設けられている
ことを特徴とする物品保持治具を第２の要旨とするもの
である。For this reason, up until now, a jig with a shaft that revolves around a predetermined orbit while rotating on its own axis has been used, and a material such as a material for a reflector (article to be processed) was placed at the lower end of the upper shaft of the jig. A high-quality coating has been formed on an article by hanging the article and rotating it around its axis by vacuum deposition or the like. In this case, the jig cannot have a positional relationship between the evaporation source and the object to be processed during vacuum deposition other than the relationship uniquely determined by the eye revolution. Therefore, there is a drawback that the state of the hollyhock coating differs depending on the shape and size of the article to be treated. Therefore, the shape,
It was not possible to deal with many types of objects to be processed having different dimensions. However, if a single jig can handle many types of objects to be processed, the hassle of exchanging jigs, etc. can be saved, and the operating time can be shortened. This invention was made in view of these circumstances, and includes an article holding section provided at the lower end of a drive shaft that revolves on a predetermined orbit while rotating on its own axis.
An article holding jig for holding an article in the article holding part, wherein the drive shaft is divided into upper and lower parts, and between the upper drive shaft and the lower drive shaft there is a bushing part that changes the direction of power transmission. The first aspect is an article holding/picking device characterized by being provided with a holding portion that maintains the changing state of the power transmission direction by the pocket portion, and a drive device that revolves on a predetermined orbit while rotating itself. A support plate with a holding means is attached to the shaft, which can swing on a plane perpendicular to the drive shaft around the drive shaft and maintain that state when the shaft swings to a predetermined position.
The support plate is provided with a rotating shaft having an article holding portion at its lower end, and a power transmission means is provided between the rotating shaft and the drive shaft for transmitting power from the drive shaft to the rotating shaft. The second gist is an article holding jig characterized by:
すなわち、物品保持治具を上記のように構成することに
より、真空蒸着の際等に被処理物品と蒸発源との距離等
を被処理物品の形状、寸法等に合わせて変えられるよう
になる。That is, by configuring the article holding jig as described above, the distance between the article to be treated and the evaporation source can be changed in accordance with the shape, dimensions, etc. of the article to be treated during vacuum evaporation or the like.
したがって、一合の治具で多種類の彼処理物品に対応で
きるようになり、操業時間の短縮化を実現できるように
なるのである。つぎに、実施例にもとづきこの発明を詳
しく説明する。Therefore, a single jig can be used to process many types of articles, and the operating time can be shortened. Next, the present invention will be explained in detail based on examples.
第１図はこの発明の一実施例の斜視図、第２図はその要
部断面図である。これらの図において、１は支柱、２は
その支柱１の下端に取付けられた固定歯車、３はその固
定歯車２の下側に回転自在に設けられている回転円板、
４はその回転円板３の下側に設けられているリング状の
公転歯車である。この公転歯車４は、ピン５により回転
円板３に一体的に固定されており、中間歯車６を介して
モータ７の回転軸８に取付けられた歯車９と噛合してい
る。１川ま、回転円板３に、上部を突出させた状態で垂
直に取付けられている駆動軸である。FIG. 1 is a perspective view of an embodiment of the present invention, and FIG. 2 is a sectional view of a main part thereof. In these figures, 1 is a column, 2 is a fixed gear attached to the lower end of the column 1, and 3 is a rotary disk rotatably provided below the fixed gear 2.
Reference numeral 4 denotes a ring-shaped revolving gear provided below the rotating disk 3. This revolving gear 4 is integrally fixed to the rotating disk 3 by a pin 5, and meshes with a gear 9 attached to a rotating shaft 8 of a motor 7 via an intermediate gear 6. First, it is a drive shaft that is vertically attached to the rotating disk 3 with its upper part protruding.
この駆動軸１川ま、抜手部１１を狭んで上下２つに分割
されており、上部駆動軸１２の、回転円板３から突出し
ている部分に公転歯車２と噛合している自転歯車１３を
備え、下部駆動軸１４の下端には物品保持部１５を備え
ている。１６は物品保持部１５に保持された被処理物品
である。This drive shaft 1 is divided into upper and lower halves by narrowing the extraction part 11, and an autorotating gear 13 meshing with the revolving gear 2 on the part of the upper drive shaft 12 that protrudes from the rotating disk 3. The lower drive shaft 14 is provided with an article holding section 15 at the lower end thereof. Reference numeral 16 indicates an article to be processed held in the article holding section 15.
抜手部１１は、駆動軸１２の動力伝達方向を変更するも
のでありつぎのように構成されている。すなわち、上部
駆動軸１２の下部に、上部に軸穴１７を有する断面下向
きコ字状の支持体１８を、その軸穴１７を上部駆動軸１
２の軸に遊鉄して装着し、その下側にベアリング軸受１
９を装着し、さらにその下側に第１のかご歯車２０を装
着している。この断面下向きコ字状の支持体１８のコ字
状の一側部２１には、第３のかさ歯車２２が軸２３によ
り第１のかさ歯車２０と噛合した状態で設けられている
。また、断面下向きコ字状の支持体１８のコ字状の開□
部には、その支持体１８よりも寸法の小さい断面上向き
コ字状の可動支持体２４が軸２５により揺動自在に設け
られている。この可動支持体２４の断面上向コ字状の底
面部には、下部駆動軸１４が取付けられ、その下部駆動
軸１４に第２のかさ歯車２６が第３のかさ歯車２２と噛
合した状態で設けられている。このようにして鞍手部１
１が構成されている。この構成により、下部駆動軸１４
は、断面下向きコ字状の支持体１８のコ字状の一側面２
１と平行な面（垂直面）に沿って揺動（角度を変えた状
態）できるようになる。そして、その状態で回転できる
ようになる。なお、２７は下部駆動軸１４を角度を変え
た状態で保持するため、可動支持体２４に設けられてい
るセットピンで、その頭部が支持体１８に設けられたガ
イド穴から突出している。また、２８はベアリング軸受
である。この物品保持拾具は、モーター７の回転により
、公転歯車４を駆動して公転させ、かっこの公転により
、固定歯車２と噛合している自転歯車１３を回転駆動し
、それによって上部駆動軸１２を回転させ、その回転力
を第１、第３、第２のかご歯車２０，２２，２６を介し
て下部駆動軸１４に伝達し、下部駆動軸１４を回動させ
るようになつている。The removal part 11 changes the power transmission direction of the drive shaft 12, and is configured as follows. That is, a support 18 having a downward U-shaped cross section and a shaft hole 17 at the upper part is provided at the lower part of the upper drive shaft 12, and the shaft hole 17 is connected to the upper drive shaft 1.
Install the free iron on the shaft of No. 2, and attach the bearing No. 1 to the underside of the free iron.
9 is attached, and a first cage gear 20 is further attached below it. A third bevel gear 22 is provided on one side 21 of the U-shaped support body 18, which has a downward U-shaped cross section, and meshes with the first bevel gear 20 via a shaft 23. In addition, the U-shaped opening of the support body 18 having a downward U-shaped cross section □
A movable support 24 having an upwardly U-shaped cross section and having a smaller size than the support 18 is provided in the section so as to be swingable about a shaft 25. A lower drive shaft 14 is attached to the bottom surface of the movable support 24 and has an upwardly U-shaped cross section. It is provided. In this way, the saddle part 1
1 is configured. With this configuration, the lower drive shaft 14
is one U-shaped side surface 2 of the support 18 having a downward U-shaped cross section.
It becomes possible to swing (change the angle) along a plane parallel to 1 (vertical plane). Then, you will be able to rotate in that state. Note that 27 is a set pin provided on the movable support 24 in order to hold the lower drive shaft 14 at a different angle, and its head protrudes from a guide hole provided on the support 18. Further, 28 is a bearing. In this article holding and picking tool, the revolution gear 4 is driven and revolved by the rotation of the motor 7, and the rotation gear 13 meshing with the fixed gear 2 is driven to rotate by the revolution of the parentheses, whereby the upper drive shaft 12 is rotated, and the rotational force is transmitted to the lower drive shaft 14 via the first, third, and second cage gears 20, 22, and 26, and the lower drive shaft 14 is rotated.
これにより、駆動軸１０は自転しつつ回転円板３による
公転軌道上を公転する。そして、この間に駆動軸１０の
下端の被処理物品１６に真空黍着等の処理がなされる。
つぎに、第１図の被処理物品１６に代えて、他の種類の
被処理物品を処理する場合において、蒸発源等からの角
度（距離）を変える必要があるときは、セットピン２７
を操作して下部駆動軸１４を例えば第３図に示すような
角度に保持させ、その状態でモーター７をスイッチオン
すると下部駆動軸１４が第３図の状態を保って自転する
ようになる。Thereby, the drive shaft 10 revolves on the orbit of the rotating disk 3 while rotating. During this time, the workpiece 16 at the lower end of the drive shaft 10 is subjected to a process such as vacuum dusting.
Next, when processing another type of object instead of the object 16 shown in FIG. 1, if it is necessary to change the angle (distance) from the evaporation source, set pin 27
When the lower drive shaft 14 is held at an angle as shown in FIG. 3, for example, and the motor 7 is switched on in this state, the lower drive shaft 14 will rotate while maintaining the state shown in FIG.
公転は第１図と同様、回転円板３による公転軌道上を公
転する。なお、下部駆動軸１４は第３図の矢印Ａの範囲
で揺動角度の調節が可能である。このように、この実施
例によれば、被処理物品に応じセットピン２７を操作し
て下部駆動軸１４の角度を調節し、蒸発源からの距離を
変えることができるため、形状、寸法が異なる多種類の
彼処理物品に対応できるようになる。Similar to FIG. 1, the revolution revolves on the orbit of the rotating disk 3. The swing angle of the lower drive shaft 14 can be adjusted within the range of arrow A in FIG. As described above, according to this embodiment, the angle of the lower drive shaft 14 can be adjusted by operating the set pin 27 depending on the object to be processed, and the distance from the evaporation source can be changed, so that the object may have different shapes and dimensions. It becomes possible to handle a wide variety of products.
また、下部駆動軸１４の角度の調節により、彼処理物品
の被蒸着面を蒸発源に最適な角度で向けることができる
ようになるため、曲面形状、多面形状被処理物品に対し
て均一な被膜を形成できるようになり、干渉縞等が生じ
なくなる。さらに、被膜組織が被処理面に対して直角に
成長するようになるため、蒸着時に被膜のいわゆるにご
りが発生しなくなる。なお、上記の実施例は、垂直面（
角度を変えるための案内面）内で角度を変えるようにし
ているが、上記の援手１１に代えて、自在鞍手を用いれ
ば、垂直面だけでなく、斜面（角度を変えるための案内
面）に沿って角度を変えることもできる。また、この斜
面自体の傾斜角度を変えることができるようにしておけ
ばなお一層自由に取付角度ならびに距離の変更ができる
ようになるのである。第４図はこの発明の他の実施例の
斜視図、第５図はその要部断面図である。この実施例は
、駆動軸３川こ、その駆動軸３０と直角な平面上を駆動
軸３０を中心に揺動する支持板３１を設け、その支持板
３１にセットピン３２を楯設してその頭部を、第１の回
転円板３と一体的に設けられている第２の回転円板３３
のガイド穴３２ａから突出させている。そして、支持板
３１の下面に、相互に噛合している第２、第３の駆動歯
車３４，３５を設けて駆動軸３０の下端に設けられた第
１の駆動歯車３６と噛合させ第３の歯車３５の物品保持
部（第３の歯車３５の軸の下面に形成されている）に被
処理物品３６を保持させるようになっている。３７は軸
受、３８は蒸発源、３９は電源である。In addition, by adjusting the angle of the lower drive shaft 14, it is possible to orient the surface of the article to be evaporated to the evaporation source at an optimal angle, resulting in a uniform coating on curved or multifaceted articles. can be formed, and interference fringes etc. do not occur. Furthermore, since the film structure grows perpendicularly to the surface to be treated, so-called turbidity of the film does not occur during vapor deposition. Note that in the above embodiment, the vertical plane (
The angle is changed within the guide surface for changing the angle), but if a flexible saddle hand is used instead of the support hand 11 described above, it can be used not only on a vertical surface but also on a slope (a guide surface for changing the angle). You can also change the angle along the line. Furthermore, if the inclination angle of the slope itself can be changed, the mounting angle and distance can be changed even more freely. FIG. 4 is a perspective view of another embodiment of the invention, and FIG. 5 is a sectional view of the main part thereof. In this embodiment, three drive shafts are provided, a support plate 31 is provided which swings around the drive shaft 30 on a plane perpendicular to the drive shaft 30, and a set pin 32 is installed on the support plate 31 as a shield. The head is attached to a second rotating disk 33 that is integrally provided with the first rotating disk 3.
It is made to protrude from the guide hole 32a. Second and third drive gears 34 and 35 are provided on the lower surface of the support plate 31 and mesh with the first drive gear 36 provided at the lower end of the drive shaft 30. The article holding portion of the gear 35 (formed on the lower surface of the shaft of the third gear 35) holds the article 36 to be processed. 37 is a bearing, 38 is an evaporation source, and 39 is a power source.
それ以外の部分は前記の実施例と同じであり、同一部分
に同一符号を付している。このように構成したため、セ
ットピン３２を第２の回転円板３３のガィ・ド穴３２ａ
に沿わせて移動させると、それによって支持板３１が駆
動軸３０を中心に揺動するため、第３の歯車３５と蒸発
源３８との距離が調節できるようになる。The other parts are the same as those in the previous embodiment, and the same parts are given the same reference numerals. With this configuration, the set pin 32 is inserted into the guide hole 32a of the second rotating disk 33.
When the support plate 31 is moved along the drive shaft 30, the distance between the third gear 35 and the evaporation source 38 can be adjusted.
これを第５図のけ−の断面図である第６図に示す。すな
わち、支持板３１は、第２の回転円板３３に、駆動軸３
０を中心にして円弧状に形成されているガイド穴３２ａ
の円弧の長さ分だけ、駆動軸３０を中心に揺動する。し
たがって、支持板３１の揺動範囲は点線の位置から２点
鎖線の位置までとなる。この揺動範囲内における第３の
歯車３５の軸の移動軌跡をＡで示す。そして、蒸発源３
８から点線の位置における第３の歯車３５の軸までの距
離（最大距離）をＢとし、蒸発源から２点鎖線の位置に
おける第３の歯車３５までの距離（最小距離）をＣとす
ると、Ｂ−ＣすなわちＤが距離調節範囲となる。したが
って、セットピン３２を操作し支持板３１を駆動軸３０
を中心に揺動させることにより、Ｄの範囲内で蒸発源３
８から被処理物品３６（第３の歯車３５の軸の下面に保
持されている）までの距離を調節できるようになるので
ある。そして、セットピン３２をセットしモーター７の
スイッチをオンすると、被処理物品３６は、その距離調
節された位置で、駆動軸３０の回転力を駆動歯車３６，
３４，３５を経て受け回転する。このように、この実施
例によれば、セットピン３２を操作して支持部３１を駆
動軸３０を中心に揺動させることにより蒸発源３８から
の被処理物品３６の距離を変えることができるため、形
状、寸法が異なる多種類の被処理物品に対応できるよう
になる。This is shown in FIG. 6, which is a sectional view of the cage shown in FIG. That is, the support plate 31 connects the drive shaft 3 to the second rotating disk 33.
Guide hole 32a formed in an arc shape with 0 as the center
It swings about the drive shaft 30 by the length of the circular arc. Therefore, the swing range of the support plate 31 is from the position indicated by the dotted line to the position indicated by the two-dot chain line. The movement locus of the axis of the third gear 35 within this swing range is indicated by A. And evaporation source 3
If the distance (maximum distance) from 8 to the axis of the third gear 35 at the position of the dotted line is B, and the distance (minimum distance) from the evaporation source to the third gear 35 at the position of the two-dot chain line is C, B-C, that is, D becomes the distance adjustment range. Therefore, by operating the set pin 32, the support plate 31 is moved to the drive shaft 30.
By swinging around the evaporation source 3 within the range of D
8 to the article to be processed 36 (held on the underside of the shaft of the third gear 35). Then, when the set pin 32 is set and the switch of the motor 7 is turned on, the article to be processed 36 is placed in the position where the distance has been adjusted, and the rotational force of the drive shaft 30 is applied to the drive gear 36,
It receives and rotates through 34 and 35. As described above, according to this embodiment, the distance of the article to be processed 36 from the evaporation source 38 can be changed by operating the set pin 32 and swinging the support section 31 around the drive shaft 30. , it becomes possible to handle many types of objects to be processed that differ in shape and size.
なお、以上の実施例の物品保持拾具は、真空葵着に用い
ているが、真空黍着以外に静電、粉体塗装やそれ以外の
場合にも用いうるのである。It should be noted that although the article holding device of the above embodiment is used for vacuum plating, it can also be used for electrostatic coating, powder coating, and other methods in addition to vacuum plating.
以上のように、この発明にかかる第一の物品保持指具は
、それ自身自転しながら定められた軌道上を公転する駆
動軸の下端に物品保持部を設け、その物品保持部に物品
を保持させる物品保持俗臭であって、上記駆動軸が上下
に分割されており、上部駆動軸と下部駆動軸の間に、動
力の伝達方向を変える接手部とその鞍手部による動力伝
達方向の変更状態を保持する保持部とが設けられている
ため、接手部および保持部を操作して、保持物品と蒸発
源等との角度（距離）を変えることができる。そのため
、多種類の被処理物品に対応できるようになる。また、
保持物品の被処理面を蒸発源等に最適な角度で向けるこ
とができるようになるため、曲面形状や多面形状をもつ
物品に対して、例えば均一な被膜が形成できるようにな
り干渉縞が生じなくなる。そのうえ、被膜ににごり等も
生じなくなる。またこの発明にかかる第二の物品保持治
具は、それ自身自転しながら定められた軌道上を公転す
る駆動軸に、その駆動軸を中心に駆動軸と直角な平面上
を移動し所定の位置まで揺動したと封こその状態を保持
しうる保持手段付きの支持板が取付けられ、この支持板
に、下端に物品保持部を備えた回転軸が設けられ、この
回転軸と上記駆動軸との間にその駆動軸から回転軸に動
力を伝達する動力伝達手段が設けられているため、支持
板を揺動させることにより、保持物品と蒸発源等の距離
を変えることができる。そのため、多種類の被処理物品
に対応できるのである。As described above, the first article holding tool according to the present invention is provided with an article holding section at the lower end of the drive shaft that revolves on a predetermined orbit while rotating on its own axis, and holds an article on the article holding section. The drive shaft is divided into upper and lower parts, and between the upper drive shaft and the lower drive shaft, there is a joint part for changing the direction of power transmission and a saddle part for changing the power transmission direction. Since a holding part is provided to hold the article, the angle (distance) between the held article and the evaporation source etc. can be changed by operating the joint part and the holding part. Therefore, it becomes possible to deal with many types of objects to be processed. Also,
Since the surface of the held article to be treated can be directed toward the evaporation source at an optimal angle, it is possible to form a uniform coating on articles with curved or multifaceted shapes, which can prevent interference fringes. It disappears. Moreover, cloudiness and the like will not occur on the film. Further, the second article holding jig according to the present invention moves on a plane perpendicular to the drive shaft around the drive shaft, which revolves on a predetermined orbit while rotating on its own axis, to a predetermined position. A support plate with a holding means that can maintain the sealed state when swung up to the maximum is attached, and this support plate is provided with a rotating shaft having an article holding portion at the lower end, and this rotating shaft and the drive shaft are connected to each other. Since a power transmission means for transmitting power from the drive shaft to the rotating shaft is provided between them, the distance between the held article and the evaporation source can be changed by swinging the support plate. Therefore, it is possible to handle many types of objects to be processed.
第１図はこの発明の一実施例の斜視図、第２図はその要
部断面図、第３図はその動作説明図、第４図は他の実施
例の斜視図、第５図はその要部断面図、第６図はその動
作説明図である。
１・・・・・・支柱、２・・…・固定歯車、３・・・・
・・回転円板、４・・・…公転歯車、５・・・・・・ピ
ン、６，９・・・・・・歯車、７・・・・・・モーター
、１０・・・・・・駆動軸、１１・・…・援手部、１２
・・・・・・上部駆動軸、１３・・・・・・自転歯車、
１４・・・・・・下部駆動軸、１５・・・・・・物品保
持部、１６・・・・・・被処理物品、１８・・・・・・
支持体、１９・・・・・・ベアリング軸受、２０，２２
，２６・・・・・・かさ歯車、２４・・・・・・可動支
持体、２５・・・・・・軸。
第１図第２図
第３図
第ム図
第５図
第６図Fig. 1 is a perspective view of one embodiment of the present invention, Fig. 2 is a sectional view of its essential parts, Fig. 3 is an explanatory diagram of its operation, Fig. 4 is a perspective view of another embodiment, and Fig. 5 is its main part. A sectional view of the main part and FIG. 6 are explanatory diagrams of its operation. 1... Prop, 2... Fixed gear, 3...
...Rotating disk, 4...Revolving gear, 5...Pin, 6,9...Gear, 7...Motor, 10... Drive shaft, 11... Reinforcement part, 12
......Upper drive shaft, 13...Rotating gear,
14... Lower drive shaft, 15... Article holding section, 16... Article to be processed, 18...
Support body, 19...Bearing bearing, 20, 22
, 26...Bevel gear, 24...Movable support, 25...Shaft. Figure 1 Figure 2 Figure 3 Figure 5 Figure 6
Claims (1)
駆動軸の下端に物品保持部を設け、その物品保持部に物
品を保持させる物品保持治具であつて、上記駆動軸が上
下に分割されており、上部駆動軸と下部駆動軸の間に、
動力の伝達方向を変える接手部とその接手部による動力
伝達方向の変更状態を保持する保持部とが設けられてい
ることを特徴とする物品保持治具。 ２ 動力の伝達方向を変える接手部が、下部駆動軸が垂
直面に沿つて揺動しかつその垂直面を上部駆動軸の軸線
を中心に任意の角度で回転しうるように下部駆動軸を上
部駆動軸に取付ける取付け部材と、上部駆動軸の下端に
説けられた第１のかさ歯車と、下部駆動軸の上端に設け
られた第２のかさ歯車と、第１のかさ歯車の回転力を第
２のかさ歯車に伝達する第３のかさ歯車からなるもので
ある特許請求の範囲第１項記載の物品保持治具。 ３ 動力の伝達方向の変更状態を保持する保持部が、取
付け部材に装着されていて下部駆動軸の任意の位置まで
の揺動をその状態で保持するセツトピンである特許請求
の範囲第２項記載の物品保持治具。 ４ 動力の伝達方向を変える接手部が、自在継手である
特許請求の範囲第１項記載の物品保持治具。 ５ 物品保持治具が、真空蒸着用の物品保持治具である
特許請求の範囲第１項ないし第４項にいずれかに記載の
物品保持治具。 ６ それ自身自転しながら定められた軌道上を公転する
駆動軸に、その駆動軸を中心に駆動軸と直角な平面上を
揺動し所定の位置まで揺動したときにその状態を保持し
うる保持手段付きの支持板が取付けられ、この支持板に
、下端に物品保持部を備えた回転軸が設けられ、この回
転軸と上記駆動軸との間にその駆動軸から回転軸に動力
を伝達する動力伝達手段が設けられていることを特徴と
する物品保持治具。 ７ 動力伝達機構が歯車列である特許請求の範囲第６項
記載の物品保持治具。 ８ 物品保持治具が真空蒸着用の物品保持治具である特
許請求の範囲第６項または第７項記載の物品保持治具。[Scope of Claims] 1. An article holding jig which is provided with an article holding part at the lower end of a drive shaft that revolves on a predetermined trajectory while rotating on its own axis, and which holds an article in the article holding part, which The shaft is divided into upper and lower parts, and between the upper and lower drive shafts,
An article holding jig, characterized in that it is provided with a joint part that changes the direction of power transmission, and a holding part that maintains the state in which the direction of power transmission is changed by the joint part. 2. The joint part that changes the direction of power transmission connects the lower drive shaft to the upper part so that the lower drive shaft can swing along a vertical plane and rotate the vertical plane at any angle around the axis of the upper drive shaft. a mounting member attached to the drive shaft; a first bevel gear disposed at the lower end of the upper drive shaft; a second bevel gear disposed at the upper end of the lower drive shaft; The article holding jig according to claim 1, which comprises a third bevel gear that transmits information to the second bevel gear. 3. Claim 2, wherein the holding part that holds the changed state of the power transmission direction is a set pin that is attached to the mounting member and holds the lower drive shaft in that state so that the lower drive shaft can swing to any desired position. jig for holding objects. 4. The article holding jig according to claim 1, wherein the joint portion that changes the direction of power transmission is a universal joint. 5. The article holding jig according to any one of claims 1 to 4, wherein the article holding jig is an article holding jig for vacuum deposition. 6 It can swing on a plane perpendicular to the drive shaft around the drive shaft that revolves on a predetermined orbit while rotating on its own axis, and can maintain that state when it swings to a predetermined position. A support plate with holding means is attached, a rotary shaft having an article holding portion at the lower end is provided on the support plate, and power is transmitted between the rotary shaft and the drive shaft from the drive shaft to the rotary shaft. An article holding jig, characterized in that it is provided with a power transmission means for transmitting power. 7. The article holding jig according to claim 6, wherein the power transmission mechanism is a gear train. 8. The article holding jig according to claim 6 or 7, wherein the article holding jig is an article holding jig for vacuum deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9134181A JPS6020065B2 (en) | 1981-06-12 | 1981-06-12 | Article holding jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9134181A JPS6020065B2 (en) | 1981-06-12 | 1981-06-12 | Article holding jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57207570A JPS57207570A (en) | 1982-12-20 |
| JPS6020065B2 true JPS6020065B2 (en) | 1985-05-20 |
Family
ID=14023712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9134181A Expired JPS6020065B2 (en) | 1981-06-12 | 1981-06-12 | Article holding jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6020065B2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116775A (en) * | 1983-11-28 | 1985-06-24 | Pioneer Electronic Corp | Treatment device for vapor deposition |
| US5618388A (en) * | 1988-02-08 | 1997-04-08 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
| EP0409451A1 (en) * | 1989-07-18 | 1991-01-23 | Optical Coating Laboratory, Inc. | Process for depositing optical thin films on both planar and non-planar substrates |
| JP4966774B2 (en) * | 2007-07-23 | 2012-07-04 | オリジン電気株式会社 | Coating material spreading device |
| CN102312203A (en) * | 2010-07-01 | 2012-01-11 | 向熙科技股份有限公司 | Vacuum coating system capable of swinging workpiece and swinging carrier |
| CN102560372A (en) * | 2010-12-21 | 2012-07-11 | 向熙科技股份有限公司 | Multilayer film preparation system and method thereof |
| CN103920615B (en) * | 2014-04-30 | 2016-04-20 | 常州君合科技股份有限公司 | The transmission device of the planetary coating machine of many baskets |
| CN104588234A (en) * | 2014-12-10 | 2015-05-06 | 苏州欣航微电子有限公司 | Fan base plate coating protecting and processing device |
| CN104549877A (en) * | 2014-12-24 | 2015-04-29 | 苏州用朴合金工具有限公司 | Numerical control blade lubricator |
| CN111001543A (en) * | 2019-12-05 | 2020-04-14 | 西安双德喜信息科技有限公司 | Electronic components is with electronic components adhesive deposite device |
| CN110882876B (en) * | 2019-12-21 | 2021-09-10 | 江苏武专科技有限公司 | Automatic workpiece coloring equipment |
-
1981
- 1981-06-12 JP JP9134181A patent/JPS6020065B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57207570A (en) | 1982-12-20 |
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