JPS6021630A - Atomic beam device - Google Patents
Atomic beam deviceInfo
- Publication number
- JPS6021630A JPS6021630A JP12990183A JP12990183A JPS6021630A JP S6021630 A JPS6021630 A JP S6021630A JP 12990183 A JP12990183 A JP 12990183A JP 12990183 A JP12990183 A JP 12990183A JP S6021630 A JPS6021630 A JP S6021630A
- Authority
- JP
- Japan
- Prior art keywords
- atomic beam
- vacuum
- getter
- atomic
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/26—Automatic control of frequency or phase; Synchronisation using energy levels of molecules, atoms, or subatomic particles as a frequency reference
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Abstract
Description
【発明の詳細な説明】
+al 発明の技術分野
本発明は原子ビーム装置に係り、特にセシウム(Cs)
原子ビーム装置における原子ビーム発生炉内を、所定高
真空度に維持し得る構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION +al Technical Field of the Invention The present invention relates to an atomic beam device, in particular cesium (Cs)
The present invention relates to a structure capable of maintaining a predetermined high degree of vacuum inside an atomic beam generating reactor in an atomic beam apparatus.
lb) 技術の背景
セシウム(Cs)を用いた原子ビーム装置は、周波数標
準器として採用されており、既に種々の構成のものが提
案されている。第1図は原子ビーム装置の概略構成図で
あり、セシウムビーム発生源の原子ビーム発生炉1にお
いて、例えば炉1内に収容したセシウム(Cs )密封
容器を開封して該Csを80〜100℃に加熱して蒸気
とし、該Cs原子をコリメータスリット2を通して原子
ビームとして放射して、A磁界3、C磁界4中のマイク
ロ波共振器5、更にB磁界6を通して検出器7に入射さ
せる。一方入力部8からマイクロ波信号を加える。lb) Background of the Technology Atomic beam devices using cesium (Cs) have been adopted as frequency standards, and various configurations have already been proposed. FIG. 1 is a schematic configuration diagram of an atomic beam apparatus. In an atomic beam generation reactor 1 as a cesium beam generation source, for example, a cesium (Cs) sealed container housed in the reactor 1 is opened and the Cs is heated to 80 to 100°C. The Cs atoms are radiated as an atomic beam through a collimator slit 2, passed through a microwave resonator 5 in an A magnetic field 3 and a C magnetic field 4, and then incident on a detector 7 through a B magnetic field 6. On the other hand, a microwave signal is applied from the input section 8.
これらは内部を真空とした外囲管内に収容されており、
前記共振器5においてCs原子の遷移周波数と一致する
マイクロ波磁界が加えられたとき共鳴が起こり、検出器
6の出力が最大となり、安定な周波数を発生させる。尚
、Cs原子の零磁界の遷移周波数は約9192.6闘2
である。These are housed in an envelope tube with a vacuum inside.
When a microwave magnetic field matching the transition frequency of Cs atoms is applied to the resonator 5, resonance occurs, the output of the detector 6 becomes maximum, and a stable frequency is generated. Furthermore, the transition frequency of the zero magnetic field of Cs atoms is approximately 9192.6 to 2
It is.
(C) 従来技術と問題点
ところでこれら原子ビーム発生炉lを含む原子ビーム装
置の内部は、Csなどの原子ビームの散乱を防止すると
共に、該原子ビームとマイクロ波との共鳴現象を安定化
させるために、I X 10−’ Torr以下の高真
空に保つ必要がある。(C) Prior art and problems By the way, the interior of the atomic beam apparatus including these atomic beam generating reactors 1 prevents the scattering of atomic beams such as Cs, and also stabilizes the resonance phenomenon between the atomic beam and microwaves. Therefore, it is necessary to maintain a high vacuum of I x 10-' Torr or less.
従って前記原子ビーム装置を400〜500℃程度にベ
ーキングしながら真空装置により内部を高真空に排気し
、更に内蔵したイオンポンプやゲッターによってCsi
気以外の、該装置内の構成体より動作中に放出する吸着
残留ガスを排除するようにして所要真空度を維持してい
る。Therefore, while baking the atomic beam device at about 400 to 500°C, the inside is evacuated to a high vacuum using a vacuum device, and the built-in ion pump and getter are used to evacuate the inside of the atomic beam device to a high vacuum.
The required degree of vacuum is maintained by excluding adsorbed residual gases other than air that are released from components within the device during operation.
しかしながら前記装置内の排気工程において、同時に排
気される原子ビーム発生炉1にあっては、第2図に示す
ように排気径路となるコリメータスリット2の間隙が0
.1〜9.3鶴程度で、且つその長さが5〜101謙の
微細な構成を有しているため、その排気速度が数cc/
sec以下と非常に小さく、当該ビーム発生炉l内の排
気が不十分になる不都合がある。更に該ビーム発生炉1
内に予め収容された金属セシウム(Cs) 21の密封
容器22は前記排気工程が終了後開封機構23によって
開封されるわけであるが、前記高温排気工程においてC
s@封容器22内にその器壁などから放出された不純ガ
スが当該容器開封時にCs蒸気と共にビーム発生炉1内
に発散され、ビーム発生炉1内壁に吸着されるだけでな
く、前記第1図に示すようにコリメータスリット2を通
ってマイクロ波共振器5等の装置内壁部、或いは装置内
の要所に設置されているグラファイト等から成る不要C
s吸着材9などにも吸着され、これが長時間にわたって
該装置内の真空度を劣化させるといった欠点があった。However, in the atomic beam generating reactor 1, which is simultaneously evacuated during the exhaust process in the device, the gap between the collimator slits 2, which serve as the exhaust path, is 0 as shown in FIG.
.. It has a fine structure with a length of about 1 to 9.3 centimeters and a length of 5 to 101 centimeters, so the pumping speed is several cc/cm.
This is very small, less than sec, and there is a disadvantage that the exhaust inside the beam generating furnace 1 is insufficient. Furthermore, the beam generating furnace 1
The sealed container 22 containing metal cesium (Cs) 21 stored in advance is opened by the unsealing mechanism 23 after the evacuation step.
When the container is opened, the impure gas released from the walls of the sealed container 22 is emitted into the beam generating furnace 1 along with Cs vapor, and is not only adsorbed on the inner wall of the beam generating furnace 1, but also As shown in the figure, unnecessary C made of graphite or the like is installed on the inner wall of the device such as the microwave resonator 5 or at key points within the device through the collimator slit 2.
There is a drawback that the s-adsorbent 9 is also adsorbed, and this deteriorates the degree of vacuum in the device over a long period of time.
なお上記Cs密封容器22は、内部に金属Cs21を収
納する際に十分に高温真空排気を施して不純ガスを排除
しているにもかかわらず上記欠点の一因となっている。Although the Cs sealed container 22 is sufficiently high-temperature vacuum evacuated to eliminate impurity gases when storing the metal Cs 21 therein, this is one of the causes of the above-mentioned drawbacks.
(d) 発明の目的
本発明は上記従来の欠点を解消するため、原子ビーム装
置内の真空度劣化の元凶となる原子ビーム発生炉内の要
所に、該発生炉の機能を損なうことのない不純ガス吸着
手段を設けて、前記発生炉内の真空度を向上せしめ、以
て当該装置内の真空度劣化を防止すると共に、長期にわ
たり所定高真空度に維持し得る新規な原子ビーム装置を
提供することを目的とするものである。(d) Purpose of the Invention In order to eliminate the above-mentioned conventional drawbacks, the present invention provides a method for installing a material at key points within the atomic beam generator, which is the cause of vacuum deterioration within the atomic beam equipment, without impairing the functions of the generator. Provided is a new atomic beam device that is equipped with an impure gas adsorption means to improve the degree of vacuum within the generating reactor, thereby preventing deterioration of the degree of vacuum within the device and maintaining a predetermined high degree of vacuum for a long period of time. The purpose is to
(el 発明の構成
そしてこの目的は本発明によれば、所定の原子ビームを
放射する原子ビーム発生炉と、該放射ビーム中の原子の
共鳴を検出する検出部を備えて成る原子ビーム装置にお
いて、上記原子ビーム発生炉の内部に、非蒸発性の活性
化ゲッタ一部材−を設置したことを特徴とする原子ビー
ム装置を従供することによって達成される。According to the present invention, the present invention provides an atomic beam apparatus comprising an atomic beam generating reactor that emits a predetermined atomic beam, and a detection section that detects resonance of atoms in the radiation beam. This is achieved by providing an atomic beam apparatus characterized in that a non-evaporable activated getter member is installed inside the atomic beam generating reactor.
(fl 発明の実施例
以下図面を用いて本発明の実施例について詳細に説明す
る。(fl Embodiments of the Invention Below, embodiments of the present invention will be described in detail with reference to the drawings.
第3図は本発明に係る原子ビーム装置の原子ビーム発生
炉の一実施例を示す概略要部断面図である。なお第2図
と同等部分には同一符号をイ(シている。図において3
1は発生炉本体であって、該炉本体31の壁内部にはヒ
ータ32が埋設されている。FIG. 3 is a schematic cross-sectional view of essential parts showing an embodiment of the atomic beam generating reactor of the atomic beam apparatus according to the present invention. In addition, parts equivalent to those in Figure 2 are designated by the same reference numerals.
Reference numeral 1 denotes a generating furnace body, and a heater 32 is embedded inside the wall of the furnace body 31 .
また該炉本体31内には金属Cs21を収容した密封容
器22と、該容器22より出てくるCs21蒸気を蒸気
発生部33へ導入する細管状蒸気孔34、及びその蒸気
を原子ビームとして炉本体31外へ放射するコリメータ
スリンl−2が設けられており、更に前記密封容器22
の下部には穿孔具等から成る開封機構23が付設されて
いる。そして上記蒸気発生部33の内壁、即ち炉本体内
壁には、図示の如く例えばZr−Alから成る非蒸発性
の活性化ゲッタ一部材35(商品名: 5AES Ge
tter 5T−101等)が溶接等によって取り付け
られている。Further, inside the reactor body 31, there is a sealed container 22 containing metal Cs21, a capillary steam hole 34 for introducing the Cs21 vapor coming out of the container 22 into the steam generating section 33, and a tube-shaped steam hole 34 for introducing the Cs21 vapor coming out of the container 22 into the reactor main body as an atomic beam. 31 is provided with a collimator slin l-2 that emits to the outside, and furthermore, the sealed container 22
An opening mechanism 23 consisting of a punching tool or the like is attached to the lower part of the container. As shown in the figure, a non-evaporable activated getter member 35 (trade name: 5AES Ge) made of, for example, Zr-Al is provided on the inner wall of the steam generating section 33, that is, the inner wall of the furnace main body.
tter 5T-101, etc.) is attached by welding or the like.
このように非蒸発性の活性化ゲッタ一部材35を蒸気発
生部33の内壁に設置した構成とする。そして当該原子
ビーム発生炉1を含む原子ビーム装置の内部を、400
〜5oo℃程度にベーキングしながら真空排気装置によ
り内部を高真空に排気する過程において前記ゲッタ一部
材35の不純ガス抜き、及び活性化を行っておけば、当
該原子ビーム発生炉1内の不純残留ガス(一般にH2、
02、pJ 2 。In this manner, the non-evaporable activated getter member 35 is installed on the inner wall of the steam generating section 33. Then, the inside of the atomic beam equipment including the atomic beam generating reactor 1 was inspected at 400 m
If the getter member 35 is degassed and activated in the process of evacuating the inside to a high vacuum using a vacuum evacuation device while baking to about 50°C, impurities remaining in the atomic beam generating reactor 1 can be removed. gas (generally H2,
02, pJ 2 .
CO2等)は該ゲッタ一部材35によって吸着され、所
定高真空に維持される。従ってその後、Cs密封容器2
2を開封した際に、該容器22内より放出される不純ガ
スも当然前記ゲッタ一部材35によって吸着されるので
、従来のように発生炉1内の不純ガスがコリメータスリ
ット2を通ってマイクロ波共振器5等の装置内壁部、或
いは装置内の要所に設置されているグラファイト等から
成る不要Cs吸着材9などに吸着されることがな(なる
。勿論当該装置の動作時において発生が1内に出てくる
不純ガスも随時吸着されることから、原子ビーム発生炉
1を含む原子ビーム装置内の真空度劣化が防止され長期
にわたり所定高真空度を維持することが可能となる。CO2, etc.) are adsorbed by the getter member 35 and maintained at a predetermined high vacuum. Therefore, after that, Cs sealed container 2
2, when the container 22 is opened, the impure gas released from the inside of the container 22 is naturally adsorbed by the getter member 35. Therefore, as in the conventional case, the impure gas in the generating furnace 1 passes through the collimator slit 2 and is exposed to the microwave. It will not be adsorbed to the inner wall of the device such as the resonator 5 or to the unnecessary Cs adsorbent 9 made of graphite etc. installed at important points in the device. Since impurity gases coming out are also adsorbed as needed, deterioration of the vacuum level within the atomic beam apparatus including the atomic beam generator 1 is prevented, and a predetermined high vacuum level can be maintained for a long period of time.
なお上記実施例では非蒸発性の活性化ゲッタ一部材35
としてZr−Δ1から成るゲッターを用いた場合の例で
説明したが、本発明はこれに限定されるものではなく、
例えばTi、 Zrs体或いはその他の非蒸発性の活性
化ゲッタ一部材を適用可能なことは云うまでもない。ま
た前記ゲッタ一部材は、蒸気発生部33を構成するヒー
タ32が埋設されている炉本体31の内壁面に取り付け
るようにすれば、当該装置の動作時に、ピーク32埋設
壁部が少なくとも90℃前後に加熱されるのでゲッタ一
部材も加熱され、そのガス吸着がより効果的に行われる
と共に該ゲッタ−915材35表面がセシウムで?1F
ilされることも防止される。In the above embodiment, a non-evaporable activated getter member 35 is used.
Although the example in which a getter made of Zr-Δ1 is used has been described, the present invention is not limited to this.
For example, it goes without saying that Ti, Zrs, or other non-evaporable activated getter materials can be used. Further, if the getter member is attached to the inner wall surface of the furnace body 31 in which the heater 32 constituting the steam generating section 33 is buried, the temperature of the buried wall of the peak 32 will be at least around 90° C. when the device is operated. Since the getter material 35 is heated, the getter material is also heated, and the gas adsorption is performed more effectively, and the surface of the getter material 35 is made of cesium. 1F
It is also prevented from being exposed to illumination.
(gl 発明の効果
以上の説明から明らかなように、本発明に係るる原子ビ
ーム装置によれば、該装置内の真空度劣化の元凶となる
原子ビーム発生炉内の要所に、該発生炉の機能を損なう
ことのない非蒸発性の活性化ゲッタ一部材を設置した構
成が採られているので、前記発生炉内の真空度が大きく
向上し、当該装置内の真空度劣化が防止されると共に、
所定高真空度を安定して維持することが可能となる等価
れた利点を有する。従って長期にわたる安定動作も可能
となるなど実用上の効果は頗る大きい。(gl Effects of the Invention As is clear from the above explanation, according to the atomic beam device according to the present invention, the atomic beam generator Since a configuration is adopted in which a non-evaporable activation getter member is installed that does not impair the function of the generator, the degree of vacuum within the generating furnace is greatly improved and deterioration of the degree of vacuum within the device is prevented. With,
It has an equivalent advantage of being able to stably maintain a predetermined high degree of vacuum. Therefore, it has great practical effects, such as long-term stable operation.
第1図は従来の原子ビーム装置の概略構成図、第2図は
第1図中の原子ビーム発生炉の概略要部断面図、第3図
は本発明に係る原子ビーム装置の原子ビーム発生炉の一
実施例を示す概略要部断面図である。
図面において、1は原子ビーム発生炉、2はコリメータ
スリット、21は金属Cs、22はCs密封容器、23
は開封機構、31は発生炉本体、32ばヒータ、33は
蒸気発生部、34は細管状蒸気孔、35は非蒸発性の活
性化ゲッターを示す。
第1図
第2図
第3図FIG. 1 is a schematic configuration diagram of a conventional atomic beam device, FIG. 2 is a schematic cross-sectional view of essential parts of the atomic beam generator shown in FIG. 1, and FIG. 3 is an atomic beam generator of the atomic beam device according to the present invention. FIG. 2 is a schematic cross-sectional view of essential parts showing one embodiment of the present invention. In the drawing, 1 is an atomic beam generator, 2 is a collimator slit, 21 is a metal Cs, 22 is a Cs sealed container, 23
31 is a generator main body, 32 is a heater, 33 is a steam generating section, 34 is a capillary steam hole, and 35 is a non-evaporable activation getter. Figure 1 Figure 2 Figure 3
Claims (1)
射ビーム中の原子の共鳴を検出する検出部を備えて成る
原子ビーム装置において、上記原子ビーム発生炉の内部
に、非蒸発性の活性化ゲッタ一部材を設置したことを特
徴とする原子ビーム装置。In an atomic beam apparatus comprising an atomic beam generator that emits a predetermined atomic beam, and a detection unit that detects resonance of atoms in the radiation beam, a non-evaporative activation device is provided inside the atomic beam generator. An atomic beam device characterized in that a getter member is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12990183A JPS6021630A (en) | 1983-07-15 | 1983-07-15 | Atomic beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12990183A JPS6021630A (en) | 1983-07-15 | 1983-07-15 | Atomic beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6021630A true JPS6021630A (en) | 1985-02-04 |
Family
ID=15021178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12990183A Pending JPS6021630A (en) | 1983-07-15 | 1983-07-15 | Atomic beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6021630A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5312868A (en) * | 1989-09-29 | 1994-05-17 | Sekisui Kagaku Kogyo Kabushiki Kaisha | Thermosetting covering sheet and a method of forming hard coating on the surface of substrates using the same |
| JP2008107065A (en) * | 2006-10-23 | 2008-05-08 | Hokkaido | Method of promoting vaporization of solvent using electric field |
| CN109298620A (en) * | 2018-09-20 | 2019-02-01 | 中国科学院国家授时中心 | A π Phase Difference Microwave Cavity for Beam-Type Atomic Clocks |
-
1983
- 1983-07-15 JP JP12990183A patent/JPS6021630A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5312868A (en) * | 1989-09-29 | 1994-05-17 | Sekisui Kagaku Kogyo Kabushiki Kaisha | Thermosetting covering sheet and a method of forming hard coating on the surface of substrates using the same |
| JP2008107065A (en) * | 2006-10-23 | 2008-05-08 | Hokkaido | Method of promoting vaporization of solvent using electric field |
| CN109298620A (en) * | 2018-09-20 | 2019-02-01 | 中国科学院国家授时中心 | A π Phase Difference Microwave Cavity for Beam-Type Atomic Clocks |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5634030B2 (en) | Environmental cell for particle optics | |
| US2665391A (en) | X-ray tube having a mica window | |
| GB2043334A (en) | Radioactive starting aids for electrodeless light sources | |
| US4607493A (en) | Cryosorption pump | |
| US2887584A (en) | Electron irradiation apparatus | |
| JPS6021630A (en) | Atomic beam device | |
| KR100213976B1 (en) | Method and apparatus for exhausting hydrogen from vacuum vessel | |
| JPH02501875A (en) | Getsuta assembly | |
| US3493805A (en) | Ultraviolet resonance lamp | |
| US6841777B2 (en) | Electron diffraction system for use in production environment and for high pressure deposition techniques | |
| US3322993A (en) | Getter body mounted on low thermal conductivity supports | |
| US3640597A (en) | Method of producing neutron source tube with coated target | |
| JPS6250943B2 (en) | ||
| US5270544A (en) | Energy-dispersive X-ray detector | |
| US3700950A (en) | X-ray tube | |
| JP2010091387A (en) | Radiation irradiator of non-fixed type | |
| US2712069A (en) | Electromagnetic wave generation | |
| US4382646A (en) | Method for removing gases caused by out-gassing in a vacuum vessel | |
| Arčon et al. | X-ray absorption cell for alkaline metal vapors | |
| Briffod et al. | Instability in a cold cathode reflex discharge | |
| JPH07101029B2 (en) | RF type ion thruster | |
| JP2584827B2 (en) | Semiconductor X-ray detector | |
| JPS6348387B2 (en) | ||
| JPH04215240A (en) | Charged particle beam device | |
| JPS5866296A (en) | X-ray source device |