JPS6022583B2 - 2-axis pulse motor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pulse motor having a linear pulse motor as a component thereof.

Generally, when performing position control in the XY two-dimensional plane using a linear pulse motor, a method is considered in which a beam carrying a crane motor in the first mari (x direction) is moved by a motor in the second axis (axis in the Y direction). .

This method has the disadvantage that it is difficult to obtain high acceleration due to the weight of the beam. The present invention has been made in view of the above points, and by arranging a pair of one-wheel motors, each consisting of two linear pulse motors having a three-phase structure, facing each other, positioning can be performed within the XY plane, and the height can be increased. This realizes a pulse motor that can obtain acceleration.

Hereinafter, the present invention will be explained in detail using the drawings. FIG. 1 is a diagram showing an example of the configuration of the present invention. In the same figure, a
is a bottom view, and b is a top view. 1 is a mover, and on top of this mover 1, as shown in figure b, there are near pulse motors X,, X2 for moving in the x direction and near pulse motors Y,, Y2 for moving in the Y direction. They are layered and fixed to the moving element 1, respectively.

The linear pulse modes x, and Y, and x2 and Y2 are arranged at right angles, respectively, and X, and Y, and x2 and Y2
Permanent magnets 2 and 3 are tightly connected between them. Here, 1 consists of X, , Y, and
The shaft motor is the first motor, X2 is connected with the permanent magnet 3,
The single-axis motor configured with Y2 will be referred to as a second motor. The first motor and the second motor are arranged symmetrically with respect to the center point of the movable element 1 as the origin. As shown in FIGS. 1a and 2, the legs of each motor that slide on the stator are arranged on the bottom surface of the motor. 2 is a side view of the first motor of the motors shown in FIG. 1. FIG.

In the figure, reference numeral 4 denotes a stator, which is a magnetic plate having lattice-shaped teeth with a pitch P. For example, an iron plate is used as the magnetic plate. 5 is a yoke portion of the linear pulse motor X.

The yoke 5 has three legs 10, 20, 30 that are offset from each other by (N±1'3)p (N is an integer greater than 1),
Coils C, C2, and C3 are wound around these legs, respectively.
has been done. Although not shown in the figure, the X2 motor also has the same structure. Furthermore, the Y, Mo, and Y2 models have the same structure, with the only difference being the mounting direction of the legs by 90 degrees. In FIG. 2, teeth of pitch P are formed at the tip of each leg turtle 0, military rank, 30. These teeth have the same dimensions and configuration as the teeth carved on the stator 4. That is, each tooth has a prismatic transverse structure as shown in the figure.In this way, the teeth of each chest and the teeth of the stator 4 are designed to mesh with each other.Furthermore, these teeth are
They are separated by a gap g using pneumatic or mechanical bearings. In the case of pneumatic bearings, the gaps between the teeth of each leg and the teeth of the stator base are filled with resin to prevent the air floating pressure from decreasing. Further, the X motor and the Y motor are arranged at right angles to each other, and these motors are held together by permanent magnets as described above. The operation of the motor set as described above will be explained below. Figure 100
Bias magnetic fields are applied by permanent magnets 2 and 3 between the X motor and the Y motor, and between the X2 motor and the Y2 motor, respectively.

The X motor and the X2 motor, and the Y motor and the Y2 motor generate thrust in the X direction and the Y direction, respectively, and at the same time generate a couple force to prevent the movable turtle from rotating.
The magnetic fields generated by the permanent magnets 2 and 3 are generated by the magnetic fields 8 and 2, respectively, as shown by the broken lines in Figure 2. 3. Hunger is evenly distributed. Now, if a current is passed through the coil C, a magnetic flux as shown by the solid line in FIG. 2 will be generated.

As can be seen from the figure, the magnetic flux passing through the leg IQ is ~ Takeshi Kametsugu,
The magnetic flux caused by the permanent magnet 2 and the magnetic flux caused by the permanent magnet 2 are added to each other and strengthen each other. On the other hand, the magnetic flux passing through the chests 2Q, 38 becomes smaller because the current i and the permanent magnet 2 cancel each other out. As a result, the rebel force G and the stator 4 are attracted to each other, and the motor is stopped at the position shown in FIG. At this time as well, the teeth of the legs Q and the teeth of the stator Gtsuru are perfectly aligned. On the other hand, the distance between each breast is as described above (Nshi Y3)
Since the teeth of the second chest 20 are separated by 3P of the stator, the teeth of the third chest 38 are shifted by 2j3P from the teeth of the stator turtle.Next, for example, the coil C2
When a coil current i2 is applied to , the two leg cranes and the stator turtle become engaged in the same manner as described above.At this time, the distance the motor moves from the state shown in Fig. 2 is i'3P. When a coil current of 3 is applied to the coil C3 from the state shown in Fig. 2 in the same machine, the leg 30 and the stator 4 engage, and the motor travel distance at this time is 2'3P. By repeating these operations, the motor moves on the stator 4 at intervals of 1'3P or 2'3P.

On the other hand, if it is desired to advance the motor in the Y direction, the above-mentioned operations can be performed for the Y and motor. Further, in the above explanation, the method is performed by passing a coil current through any one of the coils C, C2, and C3 to advance one step 1'3P or 23P. Instead of this method, the coils C, , C2, and C3 each have 2〆3
By simultaneously applying coil currents with different phases to each bamboo, the fixed pitch described above can be set to any value. In other words, it is possible to obtain a pitch smaller than the V3P or 2J3P. Approximately 2/3 of the 38 legs (10, 2 Buddhas) shown in Figure 2 generate power.

That is, assuming that the thrust of the legs 10 is 1, the chests 28 and 38 each generate two thrusts. Therefore, efficient thrust per the same area can be obtained. Moreover, since a part of the magnetic flux is supplied by a permanent magnet, energy efficiency is good. FIG. 3 is a diagram showing the holding force characteristics of the motor shown in the diagram. In Fig. 3, the horizontal axis represents the deviation of the motor from the stop position (unit side), and the vertical axis represents the holding force of the motor (unit: kg).The parameter IB shown in the figure is
The current flowing through the coil C2 in FIG. 2 is shown. Also, a coil current of 11〆21B is applied to coils C and C3, respectively. In the figure, Po is the pressure of the air bearing. In this case, the gap g between the leg teeth and the stator is 0
. There are 24 legs.

As described above in detail, according to the present invention, it is possible to realize a pulse motor that can perform positioning within the XY plane and obtain high acceleration.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an example of the configuration of the present invention. FIG. 3 is a diagram showing characteristics of a motor according to the present invention.・・・・・・
Stator "6...York, 'Q? 2Q, 30...
...Yoke's legs, X,, X2, Y,, Y2...Linear pulse mode. Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] 1. A stator having lattice-shaped teeth carved with pitch P,
In a pulse motor consisting of a moving element opposing this through a small gap, two single-axis motors are arranged at right angles to each other, and two motors are arranged at right angles to each other, forming the first and second motors. a pair of permanent magnets that connect each of the two uniaxial motors, and the uniaxial motors are spaced apart from each other by (N+1/3)P (N is an integer greater than 1) and have distal ends thereof. A two-axis pulse motor, comprising three legs each having teeth that mesh with the stator, and a coil wound around each leg.