JPS6022675B2 - Method for manufacturing silicon nitride sintered body - Google Patents
Method for manufacturing silicon nitride sintered bodyInfo
- Publication number
- JPS6022675B2 JPS6022675B2 JP54014334A JP1433479A JPS6022675B2 JP S6022675 B2 JPS6022675 B2 JP S6022675B2 JP 54014334 A JP54014334 A JP 54014334A JP 1433479 A JP1433479 A JP 1433479A JP S6022675 B2 JPS6022675 B2 JP S6022675B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered body
- nitride sintered
- weight
- manufacturing silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 本発明は窒化珪素焼結体の方法に関する。[Detailed description of the invention] The present invention relates to a method for manufacturing silicon nitride sintered bodies.
更には、高密度で耐酸化性の高い窒化珪素嘘縞体の製造
方法に関する。窒化珪素焼結体は、高温強度の大きさ、
低膨脹性に起因する耐熱衝撃性の大きさ等の理由から近
年、ガスタービン,ディーゼルエンジン用部材,ラジア
ントチューブ,歯車,ダイス等の主として高温で使用さ
れる産業用部品に応用が展開されつつある。Furthermore, the present invention relates to a method of manufacturing a silicon nitride striped body having high density and high oxidation resistance. Silicon nitride sintered body has high temperature strength,
Due to its high thermal shock resistance due to low expansion, in recent years it has been increasingly applied to industrial parts used at high temperatures, such as gas turbines, diesel engine parts, radiant tubes, gears, and dies. .
窒化珪素自体は共有結合性結晶であり、それ自身では中
々鱗結しにくい材料であるため、暁結体の強度向上がと
りあえずの目標とされ、各種の添加剤により競結性の促
進と同時に、高温強度の向上が計られてきた。その結果
、Mや,AI203,Y203などの添加成分が焼縞促
進、高温強度の向上に効果がある添加剤として提供され
ている。Silicon nitride itself is a covalent crystal, and is a material that is difficult to scale by itself, so improving the strength of the Akatsuki compact is the first goal, and various additives are used to promote cohesion. Efforts have been made to improve high-temperature strength. As a result, additive components such as M, AI203, and Y203 have been provided as additives that are effective in promoting burning streaks and improving high-temperature strength.
確かに、これらの添加剤は単独で又はこれら同志の組合
せで添加されることにより、目的とする効果はかなりの
程度達成することが認められているものの、窒化珪素競
鯖体として要求される今−つの特性、即ち耐酸化性につ
いては必ずしも充分な効果を特ちえないものである。Although it is recognized that these additives can be added alone or in combination to achieve the desired effect to a considerable extent, they are not currently required as silicon nitride competitive substances. - One property, ie, oxidation resistance, is not necessarily sufficiently effective.
そこで、本発明者等は、高温強度を損わず、耐酸化性の
充分高い窒化珪素暁結体をホットプレス方法によらず、
従来からの成形,焼成する方法により得ることを目的に
研究を重ねた結果本発明に至ったもので、本発明は酸化
アルミニウム3〜15重量%,酸化ジリコニウム0.5
〜10重量%,残部窒化珪素よりなる混合粉末を成形後
、非酸化性雰囲気中で焼成することを特徴とする窒化珪
素焼結体の製造方法を要旨とするものである。Therefore, the present inventors have developed a silicon nitride compact that does not impair high-temperature strength and has sufficiently high oxidation resistance without using the hot pressing method.
The present invention was developed as a result of repeated research with the aim of obtaining it by conventional molding and firing methods.
The gist of the present invention is a method for manufacturing a silicon nitride sintered body, which comprises molding a mixed powder of up to 10% by weight and the balance being silicon nitride, and then firing it in a non-oxidizing atmosphere.
窒化珪素焼結体を得るには、他のセラミックスの場合と
同様にホットプレス法と成形,焼成の2段階を経る方法
(ここでは通常暁綾法という)の2種類があることは周
知である。It is well known that there are two ways to obtain a silicon nitride sintered body: the hot pressing method and the two-step method of forming and firing (usually referred to as the Akatsuki Aya method here), just as in the case of other ceramics. .
そして、一般に、ホットプレス法による方が高密度で高
強度が得られやすいが、複雑な形状のものをうるには、
ホットアィソスタツチツクプレス法の如き特殊なホット
プレス法を採用しなければならない。しかし、この方法
は、設備の点でも、操作性、量産性の点でも未だ充分な
ものはなく、未だ実験室的規模で行われているに過ぎな
い。既述の目的に窒化珪素暁緒体を応用しようとする場
合、どうしても複雑な形状のものが多く、これをホット
プレス法に依らず、高温強度、耐酸化性に満足のいくも
のを提供する方法は未だ提案されていない。In general, it is easier to obtain high density and high strength using the hot press method, but in order to obtain products with complex shapes,
Special hot pressing methods, such as hot isostatic pressing methods, must be employed. However, this method is still insufficient in terms of equipment, operability, and mass production, and is still only carried out on a laboratory scale. When trying to apply silicon nitride geometries for the purposes mentioned above, they often have complex shapes, and there is no way to provide them with satisfactory high-temperature strength and oxidation resistance without relying on hot pressing. Not proposed yet.
本発明はまさにこれらを全て解決する方法を提供するも
のである。窒化珪素に酸化アルミニウムを添加する方法
は数多くの報告があるが、酸化アルミニウムのみの添加
では焼結促進性が不十分で、このため高温強度および耐
酸化性が充分でない。The present invention provides a method to solve all of these problems. Although there are many reports on the method of adding aluminum oxide to silicon nitride, the addition of aluminum oxide alone is insufficient to promote sintering, and therefore high-temperature strength and oxidation resistance are insufficient.
しかるに、酸化アルミニウムと酸化ジルコニウムを併用
すると、暁結促進性、高温強度、耐酸化性ともに充分な
ものが得られることが見出された。即ち、酸化アルミニ
ウム3〜15重量%と酸化ジルコニウム0.5〜1の重
量%、好ましくは酸化アルミニウム5〜15重量%、酸
化ジルコニウム3〜8重量%を窒化珪素に添加、混合し
て成形し、非酸化性雰囲気中で焼成すると上記特性の優
れたものが得られることが見出された。However, it has been found that when aluminum oxide and zirconium oxide are used together, sufficient accelerating properties, high temperature strength, and oxidation resistance can be obtained. That is, 3 to 15% by weight of aluminum oxide and 0.5 to 1% by weight of zirconium oxide, preferably 5 to 15% by weight of aluminum oxide and 3 to 8% by weight of zirconium oxide, are added to silicon nitride, mixed, and shaped. It has been found that when fired in a non-oxidizing atmosphere, a product with excellent properties as described above can be obtained.
酸化アルミニウムが3重量%以下では、充分な密度が達
成されないため高い強度のものが得られず、また、15
重量%を越すと、密度は高い強度の低くなる欠点がある
。If aluminum oxide is less than 3% by weight, sufficient density cannot be achieved and high strength cannot be obtained;
If the weight percentage is exceeded, the density will be high and the strength will be low.
酸化ジルコニウムは0.5重量%より少なすぎると充分
な高密度化が達成されず、1の重量%より多すぎると、
競結体の耐酸化性および強度は不充分となる。If the amount of zirconium oxide is less than 0.5% by weight, sufficient densification will not be achieved, and if it is more than 1% by weight,
The oxidation resistance and strength of the composite will be insufficient.
実施例
窒化珪素微粉末、酸化アルミニウム微粉末、酸化ジルコ
ニウム微粉末及び結合材を第1表に示す配合割合で混合
した混合原料を、金型中で200X9/地に加圧後液圧
プレスで2000k9/cれの圧力で5伽×5伽×2肌
の立方体に成形した。Example A mixed raw material prepared by mixing silicon nitride fine powder, aluminum oxide fine powder, zirconium oxide fine powder, and binder in the proportions shown in Table 1 was pressurized to 200 x 9/base in a mold and then pressed to 2000 k9 with a hydraulic press. It was molded into a cube of 5 x 5 x 2 cubes using a pressure of /cm.
次いで、これを窒素雰囲気中で1750o0で5時間焼
成し、窒化珪素暁結体を得た。これらの試料について、
焼成後の密度,曲げ強度,耐酸化性について測定した結
果を第1表に併記する。第1表
*1 焼成後の密度と理論密度との比を100分率で示
す。Next, this was fired at 1750o0 for 5 hours in a nitrogen atmosphere to obtain a silicon nitride compact. For these samples,
The results of measuring the density, bending strength, and oxidation resistance after firing are also listed in Table 1. Table 1 *1 The ratio between the density after firing and the theoretical density is shown in 100%.
Claims (1)
ム0.5〜10重量%、残部窒化珪素よりなる混合粉末
を成形後、非酸化性雰囲気中で焼成することを特徴とす
る窒化珪素焼結体の製造方法。1. Production of a silicon nitride sintered body, characterized in that a mixed powder consisting of 3 to 15% by weight of aluminum oxide, 0.5 to 10% by weight of zirconium oxide, and the balance silicon nitride is molded and then fired in a non-oxidizing atmosphere. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54014334A JPS6022675B2 (en) | 1979-02-13 | 1979-02-13 | Method for manufacturing silicon nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54014334A JPS6022675B2 (en) | 1979-02-13 | 1979-02-13 | Method for manufacturing silicon nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55109274A JPS55109274A (en) | 1980-08-22 |
| JPS6022675B2 true JPS6022675B2 (en) | 1985-06-03 |
Family
ID=11858160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54014334A Expired JPS6022675B2 (en) | 1979-02-13 | 1979-02-13 | Method for manufacturing silicon nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022675B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4280973A (en) * | 1979-11-14 | 1981-07-28 | Ford Motor Company | Process for producing Si3 N4 base articles by the cold press sinter method |
| JPS5820782A (en) * | 1981-07-27 | 1983-02-07 | 住友電気工業株式会社 | Silicon nitride sintered body and its manufacturing method |
| JPS61127666A (en) * | 1984-11-20 | 1986-06-14 | 日立造船株式会社 | Manufacture of silicon nitride ceramics |
-
1979
- 1979-02-13 JP JP54014334A patent/JPS6022675B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55109274A (en) | 1980-08-22 |
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