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JPS6025915B2 - Ion laser oscillator - Google Patents
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JPS6025915B2 - Ion laser oscillator - Google Patents

Ion laser oscillator

Info

Publication number
JPS6025915B2
JPS6025915B2 JP744877A JP744877A JPS6025915B2 JP S6025915 B2 JPS6025915 B2 JP S6025915B2 JP 744877 A JP744877 A JP 744877A JP 744877 A JP744877 A JP 744877A JP S6025915 B2 JPS6025915 B2 JP S6025915B2
Authority
JP
Japan
Prior art keywords
prism
ion laser
output
laser
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP744877A
Other languages
Japanese (ja)
Other versions
JPS5392692A (en
Inventor
昇 田口
幹夫 古本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP744877A priority Critical patent/JPS6025915B2/en
Publication of JPS5392692A publication Critical patent/JPS5392692A/en
Publication of JPS6025915B2 publication Critical patent/JPS6025915B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08004Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/086One or more reflectors having variable properties or positions for initial adjustment of the resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Description

【発明の詳細な説明】 この発明はガスレーザ発振器に関し、とくに波長選択素
子をふくむイオンレーザ発振器に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser oscillator, and particularly to an ion laser oscillator including a wavelength selection element.

ィオンレ−ザ発振器はガスレーザの中でも、もっとも大
きな可視域の発振出力を提供するもので、出力の高輝度
性から眼底の治療用光源やラマン分光器の光源、ホログ
ラフィの光源等に用いられている。
Among gas lasers, the ion laser oscillator provides the largest oscillation output in the visible range, and due to its high brightness, it is used as a light source for treatment of the fundus of the eye, a light source for Raman spectrometers, a light source for holography, etc.

イオンレーザの発振線には複数個の近接した発振線があ
り、単にエネルギーを利用する眼底の治療用等ではこれ
らの発振線が同時に存在しても差支えない。しかしラマ
ン分光器やホログラフィの光源としては発振線の単色性
が要求されるから、1対のミラーで構成される光共振器
内部にプリズムを挿入し多くの発振可能なスペクトルの
中から注目する一つの発振線に対してのみ共振をとり、
単色のレーザ出力を得ることが行なわれている。しかし
、イオンレーザではしーザ管に数1船もの電流を流し、
数kWもの電力を入力するからしーザ管の発熱量が極め
て多く、水冷しても除去し得ない発熱がミラーの保持機
構を熱変させミラーの対向性を損ないレーザ出力を低下
せしめる。
The ion laser has a plurality of adjacent oscillation lines, and for purposes such as fundus treatment that simply utilizes energy, these oscillation lines may exist simultaneously. However, as light sources for Raman spectrometers and holography require monochromaticity of the oscillation line, a prism is inserted inside an optical resonator consisting of a pair of mirrors to select one of the many possible oscillation spectra. It resonates only with one oscillation line,
It has been attempted to obtain monochromatic laser output. However, with an ion laser, a current of several magnitudes is passed through the laser tube,
Since several kilowatts of power is input, the amount of heat generated by the Laser tube is extremely large, and the heat that cannot be removed even by water cooling causes thermal changes in the mirror holding mechanism, impairs the facing nature of the mirror, and lowers the laser output.

加えて光共振器の内部にプリズムを設けて、レーザ煤質
の生みだす発振可能の多くのスペクトルの中から注目す
る唯一の波長に対してのみ共振をとり単一波長発振を行
なわせる場合には、このプリズムの保持機構の熱変形に
よってプリズムが微少回転し光路に変化がおこり、レー
ザ出力の変動がおこる。さらに最も大きな問題となるの
はプリズム材料の屈折率の温度特性に関するものである
。すなわち、プリズムの屈折率の温度変化によりプリズ
ムを通過する際に光路が変化し、延し、ては光軸変化に
よる出力変動と同様の現象が生ずる。このようにプリズ
ムを光共振器内に配置したレーザ発振器では通常のレー
ザ発振器に〈らべ変動要素が多く、レーザ発振器の信頼
度という観点から大きな問題点があった。従って本発明
の目的は、プリズムをふくむ光共振器を用いたレーザ発
振器における、プリズムがあるために生ずるレーザ出力
の変動を除去し、安定な単一波長発振のイオンレーザ装
置を提供することにある。
In addition, if a prism is installed inside the optical resonator to resonate only the one wavelength of interest from among the many possible oscillation spectra produced by the laser soot, single-wavelength oscillation can be performed. This thermal deformation of the prism holding mechanism slightly rotates the prism, causing a change in the optical path and causing a fluctuation in laser output. Furthermore, the biggest problem concerns the temperature characteristics of the refractive index of the prism material. That is, the optical path changes when passing through the prism due to a temperature change in the refractive index of the prism, which in turn causes a phenomenon similar to the output fluctuation due to a change in the optical axis. In this way, a laser oscillator in which a prism is placed inside an optical resonator has a large number of fluctuation factors compared to a normal laser oscillator, and this poses a major problem in terms of the reliability of the laser oscillator. Therefore, an object of the present invention is to eliminate fluctuations in laser output caused by the presence of a prism in a laser oscillator using an optical resonator including a prism, and to provide a stable single-wavelength oscillation ion laser device. .

次に本発明を図面を参照して説明する。Next, the present invention will be explained with reference to the drawings.

第1図は単一波長発振を行なわせるために共振器内部に
プリズムを挿入した従来のイオンレーザ発振器の断面図
である。
FIG. 1 is a sectional view of a conventional ion laser oscillator in which a prism is inserted inside a resonator to perform single wavelength oscillation.

第1図において1はイオンレーザ管、24出力ミラー、
3はその支持体、4は徴調ネジ5の調整具合によりミラ
ー支持体3の傾きをさだめる際の基準板、6は波長選択
用のプリズム、7はその支持体、8は支持体7を光共振
器へ設置する部品、9は全反射ミラー、10はその支持
体、11は徴調ネジ12の調整具合によりミラー支持体
10の傾きをさだめる際の基準板である。2枚の基準板
4と11、および部品8は熱膨脹率の4・さし、石英等
の棒状の材料13と共にやぐら状に1体に組立てられた
基準板4と11の相互の位置関係は熱的に変化を受けな
いようになっている。
In Fig. 1, 1 is an ion laser tube, 24 output mirrors,
3 is its support, 4 is a reference plate used to correct the inclination of the mirror support 3 by adjusting the tuning screw 5, 6 is a prism for wavelength selection, 7 is its support, and 8 is the support 7. Components installed in the optical resonator include a total reflection mirror 9, its support 10, and a reference plate 11 for correcting the inclination of the mirror support 10 by adjusting the tuning screw 12. The two reference plates 4 and 11 and the component 8 have a coefficient of thermal expansion of 4. The mutual positional relationship of the reference plates 4 and 11, which are assembled into a tower shape together with a rod-shaped material 13 such as quartz, is determined by the thermal expansion coefficient. It is designed not to undergo any changes.

プリズム6の入射面は光軸に対しプリュースタ角度をな
すように配置されている。ある温度で図に一点鎖線で示
すような光軸がつくられていたとしても、7の熱変形が
あれば矢印のようにプリズムには例えば回転Aが与えら
れた光軸が変化することが考えられる。この回転Aは例
えばレーザ管の発熱がケ−ス(図には省略されている)
内にこもり、発振器の上部は温度が高く、下部は温度が
低いために7および8が熱変形する場合に想定される。
The entrance surface of the prism 6 is arranged to form a Prewster angle with respect to the optical axis. Even if an optical axis as shown by the dashed-dotted line in the figure is created at a certain temperature, if there is thermal deformation in 7, the optical axis will change as shown by the arrow, for example when rotation A is given to the prism. It will be done. This rotation A is caused by heat generation in the laser tube, for example (not shown in the figure).
It is assumed that 7 and 8 are thermally deformed because the upper part of the oscillator has a high temperature and the lower part has a low temperature.

このためしーザ管の発熱や環境温度の変化によってプリ
ズムを通過後の光路が変化し、レーザ出力が変化する事
態にいたる。しかし全反射ミラー9の支持体1川こおい
ても同様の理由により回転Bとして図示したような回転
が生じるから、この2つの回転A,Bの量がひとしけれ
ば光路の変化はあっても全反射ミラー9への光軸の直交
性はくずれることがなくしーザ出力に変化は生じない。
しかしこのようなことはプリズム支持体7と全反射ミラ
ーの支持体10との構造からは一般には期待できず回転
A,Bのいずれかの回転がまさり光路の変化による出力
の変化は避けられない。それにもまして前述したように
プリズムの屈折率の変化による光軸の変化が出力の変動
の最大の要因なのである。温度上昇とともに屈折率が小
さくなる一般の光学材料の特性を考えてみるとこの温度
上昇によって生ずる光軸の変化は、回転AとBとが同方
向であり光路変化が出力の変動に結びつきにくかったの
にくらべ全く独立して全反射ミラーと光軸の直交性を損
う方向であり、レーザ出力の安定性に大きな影響を与え
る。この欠点を解消するため本発明においては膨脹率の
異る材料を用いて光学系を支持し温度変化によって生ず
る出力変動要素を補償し、安定な発振出力を得ている。
For this reason, the optical path after passing through the prism changes due to the heat generated by the laser tube or changes in the environmental temperature, leading to a situation where the laser output changes. However, the rotation shown as rotation B occurs in the support body 1 of the total reflection mirror 9 for the same reason, so if the amounts of these two rotations A and B are equal, even if there is a change in the optical path. The orthogonality of the optical axis to the total reflection mirror 9 is not disrupted, and no change occurs in the laser output.
However, such a thing cannot generally be expected from the structure of the prism support 7 and the total reflection mirror support 10, and changes in output due to changes in the optical path are unavoidable due to either rotation A or B. . Moreover, as mentioned above, the change in the optical axis due to the change in the refractive index of the prism is the biggest factor in the fluctuation in output. Considering the characteristics of general optical materials, where the refractive index decreases as the temperature rises, the change in the optical axis caused by this temperature rise means that rotations A and B are in the same direction, making it difficult for changes in the optical path to lead to changes in output. This is a direction that completely independently impairs orthogonality between the total reflection mirror and the optical axis, and has a large impact on the stability of the laser output. In order to overcome this drawback, the present invention uses materials with different expansion coefficients to support the optical system, compensate for output fluctuation factors caused by temperature changes, and obtain stable oscillation output.

次に本発明の実施例を第2図を用いて説明する。Next, an embodiment of the present invention will be described using FIG. 2.

第2図において1はイオンレーザ管、2は出力ミラー、
3はその支持体、4は徴調ネジ5の調整の具合によりミ
ラー支持体3の懐きをごだめる際の基準板、6は波長選
択用のプリズム、7はその支持体、9は全反射ミラー、
20は全反射ミラーの支持体であると同時にプリズム支
持体をも収容する構造体、11は徴調ネジ12の調整具
合により構造体20の傾きをさだめる際の基準板で、2
板の基準板4と11は石英あるいは結晶化ガラスなどの
膨脹率の小さな棒状の材料13により1体化されている
が、前記の構造体20は熱風彰脹率の互いに異るネジ状
の部材25,26を介して板27に保持されており、2
8は固定用のナットである。第2図において部材25,
26が本発明の主要素であるが、従来図1において2ケ
所に分離して配置されていたプリズムと全反射ミラーと
を図2にみるように構造体20を用いて1体化さている
ことも、レーザ発振器の小形化のために実用上大きな効
果が得られる点で、本発明の主張する第2の要素になっ
ている。
In Fig. 2, 1 is an ion laser tube, 2 is an output mirror,
3 is its support, 4 is a reference plate used to adjust the appearance of the mirror support 3 by adjusting the tuning screw 5, 6 is a prism for wavelength selection, 7 is its support, and 9 is total reflection. mirror,
20 is a structure that accommodates a prism support as well as a support for the total reflection mirror; 11 is a reference plate used to correct the inclination of the structure 20 by adjusting the adjusting screw 12;
The reference plates 4 and 11 are integrated by a rod-shaped material 13 having a small expansion coefficient such as quartz or crystallized glass, but the structure 20 is made of a screw-shaped member having a different hot air expansion coefficient. It is held on a plate 27 via 25 and 26, and 2
8 is a fixing nut. In FIG. 2, member 25,
26 is the main element of the present invention, and as shown in FIG. 2, the prism and total reflection mirror, which were conventionally arranged in two separate locations in FIG. 1, are integrated using the structure 20. This is also the second element claimed by the present invention in that a large practical effect can be obtained for downsizing the laser oscillator.

本発明は、もっとも大きな出力変動要素であるプリズム
の屈折率の変動によって生ずる光路変動を補償すること
ができることを以下にのべる。
It will be described below that the present invention can compensate for optical path fluctuations caused by fluctuations in the refractive index of the prism, which is the largest output fluctuation factor.

便宜上図1の回転A、回転Bとして示した回転量はひと
しいとして取扱う。第3図は、第2図の構造体20を調
整する光路温度補償機構の原理を示す図であり、a,b
両図ともに6は波長選択用プリズム、9は全反射ミラー
である。両図において構造体201こ固定された6,9
両者の相対的位置関係にちがし、はない。a図である温
度で光軸調整が最適に調整されたときの光路30は、プ
リズムの入射面との角度Qをもって入射しY全反射ミラ
ー9と光軸とは直交し、反射光はもとの光路をたどって
もどる。ここで周囲の温度変化のためプリズムの温度が
上昇するとプリズムの屈折率の減少によって光路は31
のように変化し、光軸はもはや全反射的ミラー9に直交
することはなくしーザ発振に必要な正のフィードバック
が損われ、レーザ出力は減少する。しかしこの温度上昇
に応じて横造体20が第3図aにCとして示した回転が
おこっているなら、第3図bに示ようなプリズムの入射
面と角度8(8<Q)をもって入射する光は屈折率の低
下はあっても全反射ミラー9とは直交を保つから、レー
ザ出力には何等の変化も生じない。なお第3図に関して
述べた回転Cが生ずるようにするには当然のことである
がネジ状の都材25には膨脹率の小さな材料を26には
膨脹率の大きな材料を使用してある。また25,26の
有効長を変化させることによって温度補償量は可変でき
るが、25,26をネジ状にしておき図2に示すように
固定のためのナット28の位置を適当に動かせば、試行
鎖謀法によってセート毎に最適温度補償量を見出すこと
ができる。本発明は、プリズムと全反射ミラーとを一体
化しても構造体20のみを互いに膨脹率の異る部材で保
持することによって、温度変化による各部材の長さの変
化に伴う構造体20の回転運動を利用してレーザ出力の
温度変化を補償することができる理由であり、波長選択
器の小形化ともに出力の高度の安定化が得られる。
For convenience, the rotation amounts shown as rotation A and rotation B in FIG. 1 are treated as being equal. FIG. 3 is a diagram showing the principle of the optical path temperature compensation mechanism for adjusting the structure 20 in FIG.
In both figures, 6 is a wavelength selection prism, and 9 is a total reflection mirror. In both figures, the structure 201 is fixed to 6 and 9.
There is no difference in the relative positional relationship between the two. When the optical axis is optimally adjusted at the temperature shown in Figure a, the optical path 30 enters the prism at an angle Q to the incident surface, the Y total reflection mirror 9 and the optical axis are orthogonal, and the reflected light is Follow the light path. When the temperature of the prism increases due to changes in the surrounding temperature, the optical path changes to 31
As a result, the optical axis is no longer orthogonal to the total internal reflection mirror 9, and the positive feedback necessary for laser oscillation is lost, resulting in a decrease in laser output. However, if the horizontal structure 20 undergoes the rotation shown as C in Figure 3a in response to this temperature rise, then the light will enter the prism at an angle of 8 (8<Q) as shown in Figure 3b. Even though the refractive index of the emitted light is decreased, it remains orthogonal to the total reflection mirror 9, so that no change occurs in the laser output. In order to cause the rotation C described in connection with FIG. 3, it is a matter of course that the screw-shaped capital 25 is made of a material with a small expansion coefficient, and the screw-shaped capital 26 is made of a material with a large expansion coefficient. Furthermore, the amount of temperature compensation can be varied by changing the effective lengths of 25 and 26, but if 25 and 26 are screwed and the position of the fixing nut 28 is moved appropriately as shown in Figure 2, it is possible to The optimal temperature compensation amount can be found for each set by the chain strategy method. In the present invention, even if the prism and the total reflection mirror are integrated, only the structure 20 is held by members having different expansion coefficients, so that rotation of the structure 20 as the length of each member changes due to temperature changes. This is the reason why the temperature change in the laser output can be compensated for by using motion, and the wavelength selector can be made smaller and the output can be highly stabilized.

なお、本発明によるプリズムとミラーの1体化による唯
一の欠点は図1に示した温度変化時に生ずる回転Aと回
転Bによってひきおこされる光路の変動によるレーザ出
力の変動に対しては補償は不可能であるということであ
る。しかし冒頭に述べたように回転AとBは同方向であ
りその差による出力変動は設計時に配慮することによっ
て影響を小さくすることができるから、イオンレーザ装
置の小形化、プIJズムとミラーの1体化によって生み
だされる部品減少による信頼性向上に〈らべれば無視し
得る。実験例によれば土10qoの温度変化で50%の
レーザ出力変化がこの補償効果によって10%に減少し
た。本発明により、装置の小形化としーザ出力の安定化
が行なわれプリズムを用いた波長選択形イオンレーザの
実用上の性能を大きく向上させるとができた。
The only drawback of integrating the prism and mirror according to the present invention is that there is no compensation for fluctuations in laser output due to fluctuations in the optical path caused by rotations A and B that occur when the temperature changes as shown in Figure 1. This means that it is possible. However, as mentioned at the beginning, rotations A and B are in the same direction, and the output fluctuation due to the difference can be minimized by considering it at the time of design. This can be ignored when compared to the reliability improvement due to the reduction in parts produced by integration. According to an experimental example, a 50% change in laser output due to a temperature change of 10 qo of soil was reduced to 10% by this compensation effect. According to the present invention, the device can be downsized and the laser output can be stabilized, and the practical performance of a wavelength selective ion laser using a prism can be greatly improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の波長選択形イオンレーザの断面図、第2
図は本発明の1実施例を示す波長選択形イオンレーザの
断面図、第3図a,bは本発明の原理を示す図1はイオ
ンレーザ管、2は出力ミラー、3は出力ミラー支持体、
4は基準板、5は徴調ネジ6はプリズム、7はプリズム
支持体、8はプリズム支持体を保持する部品、9は全反
射ミラー、10は全反射ミラー支持体、11は基準板、
12は徴調ネジ、13はロッド、20はミラーとプリズ
ムの1体化のための構造体、25,26は温度補償用ネ
ジ状部材、27は構造体20の支持体、28はナット、
30,31,32は光路を示す線。 多ノ図多Z図 多3図
Figure 1 is a cross-sectional view of a conventional wavelength-selective ion laser;
The figure is a sectional view of a wavelength-selective ion laser showing an embodiment of the present invention, and Figures 3a and 3b illustrate the principle of the invention. Figure 1 is an ion laser tube, 2 is an output mirror, and 3 is an output mirror support. ,
4 is a reference plate, 5 is a tuning screw 6 is a prism, 7 is a prism support, 8 is a part that holds the prism support, 9 is a total reflection mirror, 10 is a total reflection mirror support, 11 is a reference plate,
12 is a tuning screw, 13 is a rod, 20 is a structure for integrating a mirror and a prism, 25 and 26 are threaded members for temperature compensation, 27 is a support for the structure 20, 28 is a nut,
Lines 30, 31, and 32 indicate optical paths. Many diagrams, many Z diagrams, many 3 diagrams

Claims (1)

【特許請求の範囲】[Claims] 1 イオンレーザ管と、その両側に配置された一対のミ
ラーと、光軸上且つ一のミラーの近傍に配置された波長
選択用プリズムとを含むイオンレーザ発振器において、
一のミラーと前記プリズムが一つの構造体に取付けられ
且つ、前記構造体の角度を調整する角度調整機構に前記
構造体を取付ける少くとも1個の支持部材は熱膨張率が
異なる材料で構成されていることを特徴とするイオンレ
ーザ発振器。
1. In an ion laser oscillator including an ion laser tube, a pair of mirrors arranged on both sides of the tube, and a wavelength selection prism arranged on the optical axis and near the one mirror,
One mirror and the prism are attached to one structure, and at least one support member attaching the structure to an angle adjustment mechanism that adjusts the angle of the structure is made of materials having different coefficients of thermal expansion. An ion laser oscillator characterized by:
JP744877A 1977-01-25 1977-01-25 Ion laser oscillator Expired JPS6025915B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP744877A JPS6025915B2 (en) 1977-01-25 1977-01-25 Ion laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP744877A JPS6025915B2 (en) 1977-01-25 1977-01-25 Ion laser oscillator

Publications (2)

Publication Number Publication Date
JPS5392692A JPS5392692A (en) 1978-08-14
JPS6025915B2 true JPS6025915B2 (en) 1985-06-20

Family

ID=11666111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP744877A Expired JPS6025915B2 (en) 1977-01-25 1977-01-25 Ion laser oscillator

Country Status (1)

Country Link
JP (1) JPS6025915B2 (en)

Also Published As

Publication number Publication date
JPS5392692A (en) 1978-08-14

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