JPS6029092B2 - two-dimensional optical scanner - Google Patents
two-dimensional optical scannerInfo
- Publication number
- JPS6029092B2 JPS6029092B2 JP51085937A JP8593776A JPS6029092B2 JP S6029092 B2 JPS6029092 B2 JP S6029092B2 JP 51085937 A JP51085937 A JP 51085937A JP 8593776 A JP8593776 A JP 8593776A JP S6029092 B2 JPS6029092 B2 JP S6029092B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- scanning
- optical scanner
- light
- scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
【発明の詳細な説明】
本発明は光を主走査及び副走査させる二次元の光走査器
に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a two-dimensional optical scanner that performs main scanning and sub-scanning of light.
従来、光を二次元走査する方法としては、光の一次元の
走査器により主走査をさせ、幅走査に関してはこれら一
次元走査を主走査方向に対し垂直な方向に機械的に移動
させるか、または主走査器は固定したままで走査される
対象物を主走査方向に対し垂直な方向に機械的に移動さ
せる方法が一般的である。Conventionally, as a method for two-dimensional scanning with light, main scanning is performed using a one-dimensional optical scanner, and for width scanning, these one-dimensional scanning is mechanically moved in a direction perpendicular to the main scanning direction, or Alternatively, the main scanner generally remains fixed and mechanically moves the object to be scanned in a direction perpendicular to the main scanning direction.
例えば、一次元の光走査器としては、多数の光学繊維の
一端を直線状に配列し、他端を円形に配列した円−直線
変換器の円形端で回転走査して直線状端で直線の走査を
行なう走査器や、フライングスポット管等の種々の走査
機構がある。For example, in a one-dimensional optical scanner, one end of a large number of optical fibers is arranged in a straight line, and the other end is arranged in a circular manner.The circular end of a circular-to-linear converter is used to rotate and scan, and the linear end is used to convert the optical fibers into a straight line. There are various scanning mechanisms such as scanners and flying spot tubes that perform scanning.
これらの走査機構は主走査においても機械的な回転また
は移動部分を有する上、副走査においても機械的移動を
行なうので動力を必要とする他機構が複雑で大型になり
、寿命が短い等の匁点がある。本発明の目的は機械的運
動をできるだけ少なくし、小型で安価な二次元の光走査
器を提供せんとするものである。本発明光走査器は薄膜
光導波路を構成する薄膜上に超音波振動子を設け、この
超音波振動子が発する音東城で光東を回折させて薄膜の
幅方向に偏向させることにより主走査を行なうようにし
た薄膜光走査器を臭え、この薄膜光走査器の走査側闇口
を薄膜の厚さ方向に振動させて副走査を行なうようにし
たことを特徴とするものである。These scanning mechanisms have mechanical rotating or moving parts even in the main scan, and also mechanically move in the sub-scan, making other mechanisms that require power complicated and large, resulting in short lifespans, etc. There is a point. An object of the present invention is to provide a small and inexpensive two-dimensional optical scanner that requires as little mechanical movement as possible. The optical scanner of the present invention provides an ultrasonic transducer on a thin film constituting a thin-film optical waveguide, and performs main scanning by diffracting the light emitted by the ultrasonic transducer and deflecting it in the width direction of the thin film. The present invention is characterized in that the scanning side dark hole of the thin film optical scanner is vibrated in the thickness direction of the thin film to perform sub-scanning.
次に図面を参照して本発明をさらに詳細に説明する。第
1図aは本発明の二次元の光走査器に用いる一次元の薄
膜光走査器の一例を示す平面図、第1図bは同じくその
断面図である。Next, the present invention will be explained in more detail with reference to the drawings. FIG. 1a is a plan view showing an example of a one-dimensional thin film optical scanner used in the two-dimensional optical scanner of the present invention, and FIG. 1b is a sectional view thereof.
この薄膜光走査器1は3層の薄膜2,3,4からなる光
導波路5を備え、中間用蓑膜3は少なくとも光透過性の
ある薄膜としてある。This thin-film optical scanner 1 includes an optical waveguide 5 made up of three layers of thin films 2, 3, and 4, and the intermediate cover film 3 is a thin film that is at least transparent to light.
中間薄膜3の屈折率は両側の薄膜2及び4の屈折率より
大きくなっているため、開ロ6または7から中間薄膜3
内へ入射した光線は両薄膜の境界面で反射をくり返し、
薄膜3中を伝播することができるものである。このよう
な薄膜光導波路5は中間薄膜3の膜厚を一部厚くするこ
とにより、この厚膜を変えた位置に実質的に一般のレン
ズを置いた場合と同じ効果をもたせることができる。レ
ンズ系8,9,10はこのようにして形成したレンズ系
である。光走査のために、例えば関口6から第1図aの
様に入射した光線を偏向させるために超音波励振子11
を薄膜2上に設け、この超音波励振子11へ適当な信号
を供給することによって、超音波励振子が発する音東域
12が入射光東を回折させる。この回折角の大小は超音
波励振子11へ供給する信号の周波数変化によって音東
城12の格子定数が変化することにより変化させること
ができる。この超音波励振子11及びそのリード線13
は蒸着法により形成することができる。前述のレンズ系
9,1川ま関口6より人射光線を集光して超音波励振子
11の音東場13へ収束させ、レンズ系8は音東場13
での回折光を集光し偏向角度変化を増幅して閉口7へ収
束させるためのものである。この光走査器は光の伝播に
関して可逆的である。第2図は本発明の二次元の光走査
器の一例を示す斜視図である。Since the refractive index of the intermediate thin film 3 is higher than the refractive index of the thin films 2 and 4 on both sides, the intermediate thin film 3
The incoming light rays are reflected repeatedly at the interface between the two thin films,
It can propagate through the thin film 3. By partially increasing the thickness of the intermediate thin film 3, such a thin film optical waveguide 5 can have substantially the same effect as when a general lens is placed at a position where the thick film is changed. Lens systems 8, 9, and 10 are lens systems formed in this manner. For optical scanning, for example, an ultrasonic exciter 11 is used to deflect the light beam incident from Sekiguchi 6 as shown in FIG. 1a.
is provided on the thin film 2, and by supplying an appropriate signal to the ultrasonic exciter 11, the sound field 12 emitted by the ultrasonic exciter diffracts the incident light. The magnitude of this diffraction angle can be changed by changing the lattice constant of the sound castle 12 by changing the frequency of the signal supplied to the ultrasonic exciter 11. This ultrasonic exciter 11 and its lead wire 13
can be formed by a vapor deposition method. The aforementioned lens systems 9 and 1 converge the human rays from the Sekiguchi 6 and converge them onto the sound field 13 of the ultrasonic exciter 11.
This is for condensing the diffracted light at the aperture 7, amplifying the change in the deflection angle, and converging it on the closed aperture 7. This optical scanner is reversible with respect to light propagation. FIG. 2 is a perspective view showing an example of a two-dimensional optical scanner of the present invention.
本例は可焼性の光走査器1の関口7側を走査方向に対し
垂直方向に振動させ、二次元の走査を行なうものである
。振動させる装置としては機械的な振動装置が考えられ
るが磁気的な振動装置の方が好適である。この場合の振
幅は1咳欧側程度であり、小型の走査器ができる。超音
波励振子へは電極を兼ねた支持部材20,21から信号
を供給する。第3図は本発明の二次元の光走査器のさら
に別の一例を示す図である。In this example, the sekiguchi 7 side of the burnable optical scanner 1 is vibrated in a direction perpendicular to the scanning direction to perform two-dimensional scanning. Although a mechanical vibrator can be considered as the vibrating device, a magnetic vibrator is more suitable. In this case, the amplitude is about 1 mm, making it possible to use a compact scanner. Signals are supplied to the ultrasonic exciter from support members 20 and 21 which also serve as electrodes. FIG. 3 is a diagram showing still another example of the two-dimensional optical scanner of the present invention.
本例に用いる薄膜光走査器は可焼性である必要がない。
薄膜走査器30へ走査方向と平行に軸を取り付けその軸
を電極に兼ねた軸受31,32で回転可能なように支持
する。薄膜走査器30を磁気的な振動装置等で走査方向
に対して垂直方向に振動させて二次元の走査を行なう。
本発明は上述した例に限られるものではなく幾多の変更
が可能である。The thin film optical scanner used in this example does not need to be flammable.
A shaft is attached to the thin film scanner 30 parallel to the scanning direction, and the shaft is rotatably supported by bearings 31 and 32 which also serve as electrodes. Two-dimensional scanning is performed by vibrating the thin film scanner 30 in a direction perpendicular to the scanning direction using a magnetic vibrator or the like.
The present invention is not limited to the above-mentioned example, but can be modified in many ways.
例えば、本発明走査器は、光源からの光を走査器の閉口
6で受光し、その光を走査して記録紙に記録することも
、また原画を照明する光線の原画での反射光あるいは透
過光を走査器の開□7より受光し反対側の閉口6にて光
電変換素子で受光して原画を走査した信号を得ることも
できる。For example, the scanner of the present invention can receive light from a light source with the scanner closure 6, scan the light and record it on a recording paper, or can receive light from a light beam that illuminates an original image by reflecting or transmitting it on the original image. It is also possible to obtain a signal by scanning the original image by receiving light through the opening □7 of the scanner and receiving the light with a photoelectric conversion element through the closed opening 6 on the opposite side.
また、超音波励振子11の音東場12と。開口7との間
の光路中に、例えば等価屈折率の異なる二種の層を交互
に形成してなるハーフミラーを設け、この装置を用いた
開□6側に入射させた一定強度の照明光を走査させて閉
口7に当接した原画に照射し、この反射光を関口7から
受光して再び薄膜光導波路内を伝播させ前述したハーフ
ミラーで反射させて照明光の光路から分離させ、これを
集光するために設けた薄膜レンズ系で集光し、この光束
を外部へ導出させるための手段、例えば薄膜導波路の表
面に接合したプリズムまたは表面に形成した格子等によ
り外部へ取り出し、さらに光電変換素子で受光して読み
取り走査器とすることも可能である。さらに上述した例
では三層構造の薄膜光導波路を用いたが、これに限らず
本発明を光東を伝播することが可能な二層構造の薄膜導
波路で構成することもできる。さらに薄膜光導波路5の
閉口6から光を入射・出射させる代りに表面にプリズム
または格子を設け、これを経て光を入射・出射させるこ
ともできる。上述したように、本発明の二次元光走査器
は、薄膜上に設けた超音波振動子が発する音束城におい
て光東を回折偏向させることによって主走査を行ない、
薄膜光導波路の走査側開口を膜厚方向に振動させること
によって副走査を行なうように構成したものであり、主
走査には何んら機械的な手段を必要としないと共に薄膜
光導波路は小形、軽量であるため、副走査を行なうため
の機械的駆動手段も小形・軽量とすることができ、全体
として構成を簡単かつ小形とすることができると共に低
価格とすることができる。Also, the sound field 12 of the ultrasonic exciter 11. For example, a half mirror formed by alternately forming two types of layers with different equivalent refractive indexes is provided in the optical path between the aperture 7 and the illumination light of a constant intensity incident on the aperture □6 side using this device. The reflected light is scanned and irradiated onto the original image in contact with the closing opening 7, and this reflected light is received from the Sekiguchi 7, propagates through the thin film optical waveguide again, is reflected by the aforementioned half mirror, and is separated from the optical path of the illumination light. The light is collected by a thin film lens system provided to collect the light, and the light is taken out to the outside by a means for guiding the light flux to the outside, such as a prism bonded to the surface of the thin film waveguide or a grating formed on the surface, and then taken out to the outside. It is also possible to receive the light with a photoelectric conversion element and use it as a reading scanner. Further, in the above example, a three-layer thin film optical waveguide is used, but the present invention is not limited to this, and the present invention can also be configured with a two-layer thin film waveguide that is capable of transmitting optical signals. Furthermore, instead of allowing the light to enter and exit through the closure 6 of the thin film optical waveguide 5, a prism or grating may be provided on the surface and the light may enter and exit through this. As described above, the two-dimensional optical scanner of the present invention performs main scanning by diffracting and deflecting the optical beam in the sound beam generated by the ultrasonic transducer provided on the thin film.
It is configured to perform sub-scanning by vibrating the scanning-side aperture of the thin-film optical waveguide in the film thickness direction, and does not require any mechanical means for main-scanning, and the thin-film optical waveguide is small. Since it is lightweight, the mechanical drive means for performing sub-scanning can also be made small and lightweight, and the overall structure can be made simple and compact, and the cost can be reduced.
第1図aは薄膜光導波路を用いた一次元の光走査器の一
例を線図にて示す平面図、第1図bは同じくその断面図
、第2図は本発明二次元の光走査器の一例を示す斜視図
、第3図は本発明二次元の光走査器の他の一例を示す斜
視図である。
1,30・・・・・・薄膜光走査器、5・・・・・・薄
膜光導波路、6,7……閉口。
第1図
第2図
第3図FIG. 1a is a plan view diagrammatically showing an example of a one-dimensional optical scanner using a thin film optical waveguide, FIG. 1b is a sectional view thereof, and FIG. 2 is a two-dimensional optical scanner of the present invention. FIG. 3 is a perspective view showing another example of the two-dimensional optical scanner of the present invention. 1, 30... Thin film optical scanner, 5... Thin film optical waveguide, 6, 7... Closed. Figure 1 Figure 2 Figure 3
Claims (1)
け、この超音波振動子が発する音束域で光束を回折させ
て薄膜の幅方向に偏向させることにより主走査を行なう
ようにした薄膜光走査器を具え、この薄膜光走査器の走
査側開口を薄膜の厚さ方向に振動させて副走査を行なう
ようにしたことを特徴とする二次元の光走査器。1 A thin film in which an ultrasonic transducer is provided on a thin film constituting a thin film optical waveguide, and main scanning is performed by diffracting a light beam in the sound flux range emitted by the ultrasonic transducer and deflecting it in the width direction of the thin film. A two-dimensional optical scanner comprising an optical scanner, the scanning side aperture of the thin film optical scanner being vibrated in the thickness direction of the thin film to perform sub-scanning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51085937A JPS6029092B2 (en) | 1976-07-21 | 1976-07-21 | two-dimensional optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51085937A JPS6029092B2 (en) | 1976-07-21 | 1976-07-21 | two-dimensional optical scanner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5312342A JPS5312342A (en) | 1978-02-03 |
| JPS6029092B2 true JPS6029092B2 (en) | 1985-07-09 |
Family
ID=13872664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51085937A Expired JPS6029092B2 (en) | 1976-07-21 | 1976-07-21 | two-dimensional optical scanner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6029092B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4294507A (en) * | 1980-01-25 | 1981-10-13 | International Business Machines Corporation | Controllably deformed elastic waveguide elements |
| JPS5897027A (en) * | 1981-12-04 | 1983-06-09 | Omron Tateisi Electronics Co | Thin film type two dimensional optical deflector |
| JPS58125023A (en) * | 1982-01-20 | 1983-07-25 | Omron Tateisi Electronics Co | Two-dimensional optical deflector |
-
1976
- 1976-07-21 JP JP51085937A patent/JPS6029092B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5312342A (en) | 1978-02-03 |
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