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JPS6029895B2 - surface inspection equipment - Google Patents
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JPS6029895B2 - surface inspection equipment - Google Patents

surface inspection equipment

Info

Publication number
JPS6029895B2
JPS6029895B2 JP15260377A JP15260377A JPS6029895B2 JP S6029895 B2 JPS6029895 B2 JP S6029895B2 JP 15260377 A JP15260377 A JP 15260377A JP 15260377 A JP15260377 A JP 15260377A JP S6029895 B2 JPS6029895 B2 JP S6029895B2
Authority
JP
Japan
Prior art keywords
memory
defect
inspection
video signal
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15260377A
Other languages
Japanese (ja)
Other versions
JPS5484785A (en
Inventor
英雄 佐藤
茂 鈴木
祥郎 冨岡
豊史 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Steel Corp
Original Assignee
Fujitsu Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Steel Corp filed Critical Fujitsu Ltd
Priority to JP15260377A priority Critical patent/JPS6029895B2/en
Publication of JPS5484785A publication Critical patent/JPS5484785A/en
Publication of JPS6029895B2 publication Critical patent/JPS6029895B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【発明の詳細な説明】 本発明は、高速で移動する被検査体の表面性状を連続的
に検査する装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for continuously inspecting the surface quality of an object to be inspected that moves at high speed.

熱延ラインの鋼板などの高速で移動する被検査体の表面
庇検出する装置を本出願人は開発し、特藤昭51−86
387号(特公昭57−35788号)で提案した。
The applicant has developed a device for detecting the surface eaves of objects to be inspected that move at high speed, such as steel plates on a hot rolling line.
It was proposed in No. 387 (Special Publication No. 57-35788).

この表面検査装置は該出願の明細書に詳記されているが
、その概要を述べると次の如くである。即ち第1図に示
すように前記圧延鋼板などの被検査体1の表面をストロ
ボ装置などの閃光光源2で瞬間照射し、その静止像を高
解像度テレビカメラなどの撮像装置4で撮像する。カメ
ラ4の出力ビデオ信号は一方では欠陥検出回路7へ送っ
て欠陥つまり表面癖5の検出を行ない、他方ではメモリ
装置8へ入力して記憶させる。メモリ装置8は第2図に
示すように1フィールド分の画面メモリ14a〜14c
、17a〜17cと、メモリ選定回路13、出力画選定
回路15、チャンネル選定回路16を備える。カメラ4
から送られるビデオ信号はメモリ選定回路13により逐
次メモリー4a,14b,14cへ画面単位で書込まれ
、これらのメモリは書込み後、読出されてビデオ信号を
選定回路15へ送り、その後消去されて次の書込みに備
える。欠陥検出回路7はビデオ信号を信号処理し、大き
な振幅変化点として鋼板1の左右エッジを検出し、該左
右エッジ内の鋼板中よりやや狭い範囲として検査範囲を
設定し、該検査範囲内のビデオ信号振幅大変化点として
癖5を検出する。欠陥検出回路7が欠陥を検出すると、
欠陥信号が制御装置3へ送られ、該制御装置は選定回路
15へ出力指令18を与え、該選定回路は欠陥が検出さ
れた画面の信号をチャンネル選定回路16へ送り、該回
路16はメモリ17a〜17cのうちの消去が終ってい
るものへ該信号を入力する。この画像信号が書込まれた
1画面メモリは制御装置3からの指令信号19により出
力時間設定装置22にて設定された時間の間テレビモニ
タ装置9へ出力され、該モニタ装置は鋼板1の庇5のあ
る画面を表示する。この既提案の装置では上述のように
、カメラ4の出力ビデオ信号は欠陥が検出されない限り
メモリー4a〜14cへ書込まれて消去され、モニタ装
置9で表示されることはない。
This surface inspection device is described in detail in the specification of the application, and its outline is as follows. That is, as shown in FIG. 1, the surface of the object to be inspected 1 such as the rolled steel plate is momentarily irradiated with a flash light source 2 such as a strobe device, and a still image thereof is captured by an imaging device 4 such as a high-resolution television camera. The output video signal of the camera 4 is sent on the one hand to a defect detection circuit 7 for detecting defects, that is, surface irregularities 5, and on the other hand is input to a memory device 8 for storage. The memory device 8 includes screen memories 14a to 14c for one field, as shown in FIG.
, 17a to 17c, a memory selection circuit 13, an output image selection circuit 15, and a channel selection circuit 16. camera 4
The video signal sent from the memory selection circuit 13 is sequentially written into the memories 4a, 14b, and 14c screen by screen, and after writing, these memories are read and send the video signals to the selection circuit 15, and are then erased and sent to the next screen. Prepare for writing. The defect detection circuit 7 processes the video signal, detects the left and right edges of the steel plate 1 as points of large amplitude change, sets an inspection range as a slightly narrower area within the left and right edges than the inside of the steel plate, and detects the video signal within the inspection range. Habit 5 is detected as a point of large change in signal amplitude. When the defect detection circuit 7 detects a defect,
The defect signal is sent to the control device 3, which gives an output command 18 to the selection circuit 15, and the selection circuit sends the signal of the screen in which the defect is detected to the channel selection circuit 16, which circuit 16 sends the signal of the screen in which the defect is detected to the memory 17a. The signal is inputted to those of 17c whose erasure has been completed. The one-screen memory in which this image signal has been written is outputted to the television monitor device 9 for a time set by the output time setting device 22 according to the command signal 19 from the control device 3, and the monitor device Display the screen with 5. In this proposed device, as described above, the output video signal of the camera 4 is written into the memories 4a-14c and erased, and is not displayed on the monitor device 9 unless a defect is detected.

しかしながら欠陥検出回路7により検出される欠陥はあ
る程度以上大きいものにする必要があり、スレショルド
レベルを低くして小さな癖まで検出できるようにすると
庇以外のごみその他表面付着物等をも検知して泥検出信
号を発してしまい、信頼度が低下する。従ってモニタに
より表示される画面はある程度以上大きい癖を持つ画面
となり、微細な癖の検出、判定ができない難点がある。
被検査体表面を周期的にテレビモニタ装置に表示し、庇
検出を行なう方式もあるが、この方式では表面検査は選
択されたサンプルについてのみ行なわれ、全面チェック
はできないという欠点がある。
However, the defects detected by the defect detection circuit 7 need to be larger than a certain level, and if the threshold level is lowered to be able to detect even the smallest defects, it will also detect dirt and other surface deposits other than the eaves. A detection signal will be emitted, reducing reliability. Therefore, the screen displayed by the monitor becomes a screen with large irregularities beyond a certain extent, and there is a problem in that it is not possible to detect or judge minute irregularities.
There is a method in which the surface of the object to be inspected is periodically displayed on a television monitor and eaves detection is performed, but this method has the disadvantage that surface inspection is performed only on selected samples and the entire surface cannot be checked.

本発明はかかる点に鑑み、被検査体の全面検査が可能で
あり、かつ微細な癖の検出も可能である表面検査装置を
提供しようとするものである。
In view of this, the present invention provides a surface inspection device that is capable of inspecting the entire surface of an object to be inspected and also capable of detecting minute defects.

本発明は、被検査体を撮像する撮像装置と、被検査体表
面を照射する閃光光源と、該撮像装置から出力されるビ
デオ信号により被検査体の欠陥部分を検知する欠陥検出
装置と、該ビデオ信号を記憶するメモリ装置と、該メモ
リ装置の記憶情報を表示するモニタ装置を備える表面検
査装置において、前記メモリ装置は定周期検査用のメモ
リと自動検査用のメモリで構成され、そして前記撮擬装
層の出力ビデオ信号を議定周期検査用のメモリに比較的
大きな周期で書込む手段、再生出力をモニタ装置に表示
する手段、前記自動検査用のメモリに比較的短い周期で
前記ビデオ信号を書込む手段、及び欠陥検出回路が欠陥
を検出するとき自動検査用メモリへの書込み、消去を停
止する手段を備え、前記欠陥検出装置により欠陥が検出
されない期間中はビデオ信号を前記定周期検査用のメモ
リに書込みかつ議出し、その論出し出力をモニタ装置に
表示し、前記欠陥検出回路により欠陥が検出された場合
は、前記自動検査用のメモリに書込まれた該欠陥を含む
画面の情報を議出してこれをモニタ装置に優先表示する
ようにしてなることを特徴とするが、次に実施例を参照
しながらこれを詳細に説明する。第3図は本発明の実施
例を示し、2,4および9は前述のストロボ装置、テレ
ビカメラおよびモニ夕装置である。
The present invention provides an imaging device that images an object to be inspected, a flash light source that irradiates the surface of the object to be inspected, a defect detection device that detects a defective part of the object to be inspected using a video signal output from the imaging device, and In a surface inspection apparatus that includes a memory device that stores video signals and a monitor device that displays information stored in the memory device, the memory device is composed of a memory for periodic inspection and a memory for automatic inspection; means for writing the output video signal of the camouflage layer into a memory for protocol periodic inspection at relatively large cycles; means for displaying the playback output on a monitor device; writing the video signal into the memory for automatic inspection at relatively short cycles. and a means for stopping writing to and erasing from the memory for automatic inspection when the defect detection circuit detects a defect; Write and discuss in the memory, display the output on a monitor device, and when a defect is detected by the defect detection circuit, display screen information including the defect written in the automatic inspection memory. This feature is characterized in that it is prioritized and displayed on the monitor device, and this will be explained in detail below with reference to embodiments. FIG. 3 shows an embodiment of the present invention, in which numerals 2, 4 and 9 are the above-mentioned strobe device, television camera and monitor device.

8a,8bはメモリ装置であるが、本例では前者は自動
車検査用、後者は定周期検査用である。
Reference numerals 8a and 8b are memory devices, and in this example, the former is for automobile inspection, and the latter is for periodic inspection.

10は異常検出器、11はエッジ検出器、12は検出範
囲設定回路、13はアンドゲートであり、これらは前述
の欠陥検出器7を構成し、その構成および動作は本出願
人の出願に係る特磯昭51−87017号(特公昭55
−41077号)等の明細書に詳述してあり、ゲート1
3から被検査体表面の欠陥信号が出力される。
10 is an abnormality detector, 11 is an edge detector, 12 is a detection range setting circuit, and 13 is an AND gate, which constitute the aforementioned defect detector 7, the configuration and operation of which are related to the application filed by the present applicant. Special Publication No. 51-87017 (Special Publication No. 55)
-41077) etc., and gate 1
3 outputs a defect signal on the surface of the object to be inspected.

14〜17及び29はフリップフロップ、18は垂直同
期信号VDおよび水平同期信号HDを発生する同期信号
発生器、19はカウンタ等からなる周期設定器、20は
パルス生成回路、21はストロボ駆動部、22は切襖器
、そして23〜28はゲート回路、30,31はインバ
ーターである。
14 to 17 and 29 are flip-flops, 18 is a synchronization signal generator that generates a vertical synchronization signal VD and horizontal synchronization signal HD, 19 is a cycle setter consisting of a counter, etc., 20 is a pulse generation circuit, 21 is a strobe drive unit, 22 is a sliding door, 23 to 28 are gate circuits, and 30 and 31 are inverters.

第4図の波形図を参照しながらこの回路の動作を説明す
ると、同期信号発生器18が発生する垂直同期信号VD
および水平同期信号HDはテレビカメラ4へ加えられて
その垂直、水平同期を制御し、また垂直同期信号VDは
フリツプフロツプ16,17およびゲート回路28へも
加えられる。
The operation of this circuit will be explained with reference to the waveform diagram in FIG. 4. The vertical synchronization signal VD generated by the synchronization signal generator 18
A horizontal synchronizing signal HD is applied to the television camera 4 to control its vertical and horizontal synchronization, and a vertical synchronizing signal VD is also applied to flip-flops 16 and 17 and a gate circuit 28.

フリップフロップ16,17は2段縦続穣線されて1/
4分周を行ない、アンドゲート23はフリツプフロツプ
16,17のQ端子出力を入力されるので信号VDの4
個に1つの割合で1となる出力を生じる。この出力信号
S2はパルス生成回路20へ加えられてストロボ装置2
の発光を制御し、従って発光は第4図9に示すように同
図1の垂直同期信号VDの4個に1回の割合で行なわれ
る。発光の周期は、発光の度に作動するテレビカメラ4
が被検査体の全面を撮像できるように選定する。信号S
2はまた書込み用のアンドゲート24および消去用のイ
ンヒビツトゲート25のインヒピツト端子に加わり、こ
れらのゲー24,25の他方の端子に入力するフリップ
フロツブ15のQ出力は今は“1”であるので、信号S
2が1になる1フィールド期間の間アンドゲート24は
第4図3に示すように書込み信号WP,を出力し、1フ
ィ−ルド分の容量を持つ自動検査用画面メモリ8aへ、
画像A、画像B・・・…を逐次書込ませる。書込み周期
の次の3フィールド期間の間は第4図2に示すようにゲ
ート25が消去信号EP,を出力し、これにより画面メ
モリ8aは消去され、従って該画面メモリは単に書込み
、消去を繰り返している。周期設定回路19は適当な分
周比でS2信号を分周し、任意の周期Tの該回路19の
出力S3および上記信号S2が共に1になるときアンド
ゲート26は第4図5に示すように書込み信号WP2を
生じ、1フィールド分の容量を持つ定周期検査用画面メ
モリ8bヘビーデオ信号S,を書込ませる。
The flip-flops 16 and 17 are arranged in two stages with 1/
The frequency is divided by 4, and the AND gate 23 receives the Q terminal outputs of the flip-flops 16 and 17, so the signal VD is divided by 4.
produces an output that is 1 at a rate of 1 for each. This output signal S2 is applied to the pulse generation circuit 20 and the strobe device 2
Therefore, as shown in FIG. 4, the light emission is performed once every four vertical synchronizing signals VD in FIG. 1. The period of light emission is determined by the television camera 4 that operates every time light is emitted.
be selected so that the entire surface of the object to be inspected can be imaged. Signal S
2 is also applied to the inhibit terminals of AND gate 24 for writing and inhibit gate 25 for erasing, and the Q output of flip-flop 15 input to the other terminals of these gates 24 and 25 is now "1". Therefore, the signal S
During one field period when 2 becomes 1, the AND gate 24 outputs a write signal WP, as shown in FIG. 4, to the automatic inspection screen memory 8a having a capacity for one field.
Image A, image B, etc. are written sequentially. During the next three field periods of the write cycle, the gate 25 outputs the erase signal EP, as shown in FIG. ing. The period setting circuit 19 divides the S2 signal by an appropriate frequency division ratio, and when the output S3 of the circuit 19 with an arbitrary period T and the signal S2 become 1, the AND gate 26 divides the signal S2 as shown in FIG. A write signal WP2 is generated to cause a heavy video signal S to be written into the fixed periodic inspection screen memory 8b having a capacity for one field.

書込みパルスWP2はやはり1フィールド分の中を持ち
、従ってメモリ8bへのビデオ信号書込みは1画面(1
フィールド)分行なわれる。本例ではメモリ8bへ書込
まれた画面は画像Aとした。メモリ8bは次の垂直同期
信号周期以降では繰り返し読出され、その読出し出力は
切換器22を通ってモニタ装置9へ入力され、ここで第
4図8に示すように画像Aを表示する。消去は信号S2
,S3を入力させるインヒビツトゲート27の出力EP
2により、第4図4に示すように書込みが行なわれる前
の3フィールド期間の間に行なわれ、次は周期T後の画
像本例ではEがメモリ8bに書込まれ、欠陥が検出され
なければこの画像Eがモニタ装置9により次に表示され
る。第4図6に示すように欠陥が検出されてアンドゲー
ト13が欠陥信号S4を出力すると、フリップフロツプ
14はセットされ、フリツプフロツプ14のQ出力を受
けるフリップフロップ15は第4図1川こ示す信号の立
下りでこれを読込んでリセットされ、Q出力信号S5を
第4図7に示すように0にする。
The write pulse WP2 also has one field, so the video signal writing to the memory 8b is for one screen (1 field).
field). In this example, the screen written to the memory 8b is image A. The memory 8b is repeatedly read from the next vertical synchronizing signal period onwards, and the read output is inputted to the monitor device 9 through the switch 22, where the image A is displayed as shown in FIG. 4. Erasing is signal S2
, S3 is input to the output EP of the inhibit gate 27.
2, as shown in FIG. 4, during the three field periods before the writing is performed, the next is the image after the period T. In this example, E is written to the memory 8b and the defect must be detected. The image E of the cigarette is then displayed by the monitor device 9. When a defect is detected and the AND gate 13 outputs a defect signal S4 as shown in FIG. This is read and reset at the falling edge, and the Q output signal S5 is set to 0 as shown in FIG. 7.

この信号S5は切換器22を切換えて自動検査用1フィ
ールド画面メモリ8aとモニタ装置9が接続されるよう
になし、また書込み、消去用ゲート24,25を閉じる
。従ってメモリ8aの書込み、消去は行なわれず、記憶
している癖検出がなされた画面のビデオ信号を謙出され
、これを切換器22を通してモニタ装置9へ入力し、該
モニタ装置で該癖画面を表示する。オペレータはこれを
みて癖判定を行ない、記録警報等適当な処置をとり、か
かる処理が済んだのちスイッチSWを閉じるとフリツプ
フロツブ29は第4図10に示す信号の立上りでリセッ
トされ、フリップフロップ14も直ちにリセットされる
。その後、第4図1川こ示す信号の立下りでフリツプフ
ロツプ15のQ出力は1となり、切換器22をメモリ8
b側に切換え、ゲート24,25をあげ、最初の定常状
態に戻る。以上説明したように本発明では常時は一定周
期で被検査体の像がモニタ装置に表示され、オペレータ
はこれを目視観察して微細な庇その他を発見することが
でき、また表面検査装置の少なく共ビデオ系は正常動作
していることを確認することができる。
This signal S5 switches the switch 22 so that the one-field screen memory 8a for automatic inspection is connected to the monitor device 9, and also closes the writing and erasing gates 24 and 25. Therefore, writing and erasing of the memory 8a is not performed, and the stored video signal of the screen where the habit has been detected is outputted and inputted to the monitor device 9 through the switch 22, and the habit screen is displayed on the monitor device. indicate. The operator looks at this, determines the habit, takes appropriate measures such as a recording alarm, and after completing such processing, closes the switch SW, the flip-flop 29 is reset at the rising edge of the signal shown in FIG. 4, and the flip-flop 14 is also reset. It will be reset immediately. Thereafter, at the falling edge of the signal shown in FIG.
Switch to the b side, raise the gates 24 and 25, and return to the initial steady state. As explained above, in the present invention, the image of the object to be inspected is displayed on the monitor device at regular intervals, and the operator can visually observe this to discover minute eaves and other defects. It can be confirmed that the shared video system is operating normally.

また庇が検出されると直ちにその庇画面が表示され、こ
の際例えば警報を伴なうようにしておけばオペレータは
これに気付いてすぐ目視観察することができる。定周期
検査系だけでは、該系の画面切換えは比較的ゆっくりし
た周期で行われているから(余り速い周期では目視観察
が困難である)癖画面がサンプルされない恐れがあり、
またサンプルされたとしてもその画面表示が遅れる恐れ
がある。この点、定周期検査系と自動検査系とを併用す
ると、癖画面の迅速表示、自動検出困難な微細癖発見、
表面検査装置の正常、異常判定可能などの効果が得られ
る。
Further, as soon as an eaves is detected, the eaves screen is displayed, and if this is accompanied by an alarm, the operator can visually observe it as soon as he/she notices it. If only a regular periodic inspection system is used, there is a risk that irregular screens may not be sampled because the system's screen switching is performed at a relatively slow cycle (visual observation is difficult if the cycle is too fast).
Furthermore, even if the sample is sampled, there is a risk that the screen display may be delayed. In this regard, if you use a periodic inspection system and an automatic inspection system together, you can quickly display the habit screen, discover minute habits that are difficult to detect automatically,
Effects such as being able to determine whether the surface inspection device is normal or abnormal can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は既提案の表面検査装置の構成を示
すブロック図、第3図は本発明の実施例を示すブロック
図、第4図は第3図の動作説明図である。 図面で、4は撮像装置、1は被検査体、2は閃光光源、
7は欠陥検出器、8はメモリ装置、9はモニタ装置、8
aは自動検査用メモリ、8bは定周期検査用メモリであ
る。 第1図 第2図 第3図 図 寸 船
1 and 2 are block diagrams showing the configuration of a previously proposed surface inspection apparatus, FIG. 3 is a block diagram showing an embodiment of the present invention, and FIG. 4 is an explanatory diagram of the operation of FIG. 3. In the drawings, 4 is an imaging device, 1 is an object to be inspected, 2 is a flash light source,
7 is a defect detector, 8 is a memory device, 9 is a monitor device, 8
A is a memory for automatic inspection, and 8b is a memory for periodic inspection. Figure 1 Figure 2 Figure 3 Figure Dimensions

Claims (1)

【特許請求の範囲】[Claims] 1 被検査体を撮像する撮像装置と、被検査体表面を照
射する閃光光源と、該撮像装置から出力されるビデオ信
号により被検査体の欠陥部分を検知する欠陥検出装置と
、該ビデオ信号を記憶するメモリ装置と、該メモリ装置
の記憶情報を表示するモニタ装置を備える表面検査装置
において、前記メモリ装置は定周期検査用のメモリと自
動検査用のメモリで構成され、そして前記撮像装置の出
力ビデオ信号を該定周期検査用のメモリに比較的大きな
周期で書込む手段、再生出力をモニタ装置に表示する手
段、前記自動検査用のメモリに比較的短い周期で前記ビ
デオ信号を書込む手段、及び欠陥検出回路が欠陥を検出
するとき自動検査用メモリへの書込み、消去を停止する
手段を備え、前記欠陥検出装置により欠陥が検出されな
い期間中はビデオ信号を前記定周期検査用のメモリに書
込みかつ読出し、その読出し出力をモニタ装置に表示し
、前記欠陥検出回路により欠陥が検出された場合は、前
記自動検査用のメモリに書込まれた該欠陥を含む画面の
情報を読出してこれをモニタ装置に優先表示するように
してなることを特徴とした表面検査装置。
1. An imaging device that images an object to be inspected, a flash light source that illuminates the surface of the object to be inspected, a defect detection device that detects a defective part of the object to be inspected using a video signal output from the imaging device, and a defect detection device that detects a defective part of the object to be inspected using a video signal output from the imaging device. In a surface inspection apparatus that includes a memory device for storing information and a monitor device for displaying information stored in the memory device, the memory device includes a memory for periodic inspection and a memory for automatic inspection, and the output of the imaging device means for writing the video signal into the memory for fixed periodic inspection at a relatively large cycle; means for displaying the playback output on a monitor device; means for writing the video signal into the memory for automatic inspection at a relatively short cycle; and means for stopping writing to and erasing from the automatic inspection memory when the defect detection circuit detects a defect, and writing the video signal to the periodic inspection memory during a period in which the defect detection device does not detect a defect. and displaying the readout output on a monitor device, and when a defect is detected by the defect detection circuit, reading screen information including the defect written in the automatic inspection memory and monitoring it. A surface inspection device characterized in that priority display is given to the device.
JP15260377A 1977-12-19 1977-12-19 surface inspection equipment Expired JPS6029895B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15260377A JPS6029895B2 (en) 1977-12-19 1977-12-19 surface inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15260377A JPS6029895B2 (en) 1977-12-19 1977-12-19 surface inspection equipment

Publications (2)

Publication Number Publication Date
JPS5484785A JPS5484785A (en) 1979-07-05
JPS6029895B2 true JPS6029895B2 (en) 1985-07-13

Family

ID=15544010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15260377A Expired JPS6029895B2 (en) 1977-12-19 1977-12-19 surface inspection equipment

Country Status (1)

Country Link
JP (1) JPS6029895B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105479U (en) * 1988-09-30 1990-08-22
WO2020196369A1 (en) 2019-03-26 2020-10-01 株式会社フジミインコーポレーテッド Polishing composition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2535257B2 (en) * 1991-05-07 1996-09-18 新日本製鐵株式会社 Strip surface defect inspection system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02105479U (en) * 1988-09-30 1990-08-22
WO2020196369A1 (en) 2019-03-26 2020-10-01 株式会社フジミインコーポレーテッド Polishing composition

Also Published As

Publication number Publication date
JPS5484785A (en) 1979-07-05

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