JPS603016B2 - Manufacturing method of glass for optical transmission lines - Google Patents
Manufacturing method of glass for optical transmission linesInfo
- Publication number
- JPS603016B2 JPS603016B2 JP53092311A JP9231178A JPS603016B2 JP S603016 B2 JPS603016 B2 JP S603016B2 JP 53092311 A JP53092311 A JP 53092311A JP 9231178 A JP9231178 A JP 9231178A JP S603016 B2 JPS603016 B2 JP S603016B2
- Authority
- JP
- Japan
- Prior art keywords
- oxygen gas
- glass
- evaporator
- gas
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/0128—Manufacture of preforms for drawing fibres or filaments starting from pulverulent glass
- C03B37/01282—Manufacture of preforms for drawing fibres or filaments starting from pulverulent glass by pressing or sintering, e.g. hot-pressing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/10—Forming beads
- C03B19/1005—Forming solid beads
- C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C13/00—Fibre or filament compositions
- C03C13/04—Fibre optics, e.g. core and clad fibre compositions
- C03C13/045—Silica-containing oxide glass compositions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/28—Doped silica-based glasses containing non-metals other than boron or halide containing phosphorus
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/31—Doped silica-based glasses containing metals containing germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/40—Gas-phase processes
- C03C2203/42—Gas-phase processes using silicon halides as starting materials
- C03C2203/44—Gas-phase processes using silicon halides as starting materials chlorine containing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Compositions (AREA)
Description
【発明の詳細な説明】
本発明はりん酸系光伝送線の材料である酸化物スートの
製造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing oxide soot, which is a material for phosphoric acid-based optical transmission lines.
一般に五酸化りん(P205)、酸化ガリウム(Ga2
03)、酸化ゲルマニウム(蛇02)を主成分とするり
ん酸系ガラスは、原料となる上記の酸化物をそれぞれ、
りん、ガリウム、ゲルマニウムの塩化物の形から気相化
学反応によって高純度に得られるので、光フアイバ用ガ
ラスとして適している。Generally, phosphorus pentoxide (P205), gallium oxide (Ga2
03), phosphate glass whose main component is germanium oxide (Snake 02) is made by using the above-mentioned oxides as raw materials, respectively.
It is suitable as glass for optical fibers because it can be obtained in high purity through a gas phase chemical reaction in the form of chlorides of phosphorus, gallium, and germanium.
また上誌のりん酸系ガラスは、約140前0でガラス化
し、石英を侵蝕するアルカリ金属酸化物を含有しないの
で、ガラス化のための溶融を石英るつぼを用いて行なう
ことができ不純物の混入の恐れがない等の利点を有し、
光伝送用フアィバの原料として優れた特徴を有している
。しかしこれ等の原料酸化物のうち特にりん酸化物であ
る五酸化りんは、蒸発し易いので単独に酸化物として得
ることが困難であり、ガリウムとりんの複合酸化物の形
か、ゲルマニウムとりんの後合酸化物の形で得ていたが
、この複合酸化物は酸化物の生成の温度、生成のための
成分ガスの混合濃度等に大きく影響されるので、これら
の複合酸化物を組成を制御して歩蟹よく安定に得ること
が困難であった。In addition, the above-mentioned phosphoric acid glass vitrifies at about 140° C. and does not contain alkali metal oxides that corrode quartz, so it can be melted for vitrification using a quartz crucible, which prevents contamination with impurities. It has the advantage that there is no fear of
It has excellent characteristics as a raw material for optical transmission fiber. However, among these raw material oxides, phosphorus pentoxide, which is a phosphorus oxide, is difficult to obtain as a single oxide because it evaporates easily. These composite oxides were obtained in the form of post-synthesized oxides, but since these composite oxides are greatly influenced by the temperature at which the oxide is formed, the mixed concentration of the component gases for the formation, etc., the composition of these composite oxides is It was difficult to control and stably obtain a good gait.
本発明は上記の複合酸化物を収率よく得るための方法に
関するもので以下図面を用いながら説明する。第1図は
従来の火炎加水分解法による上記複合酸化物スートを得
る方法で、酸化物スートを得るための配管系統の簡略図
及び火炎加水分解用の三重バーナの千既略図を示してい
る。The present invention relates to a method for obtaining the above-mentioned composite oxide in good yield, and will be explained below with reference to the drawings. FIG. 1 shows a method for obtaining the above-mentioned composite oxide soot by a conventional flame hydrolysis method, and shows a simplified diagram of a piping system for obtaining oxide soot and a schematic diagram of a triple burner for flame hydrolysis.
図においてオキシ塩化りん(POC13)が収容されて
いる蒸発器1にアルゴンガス供給管2の供給バルブ3を
開いて、アルゴンガスを所定量供給して該アルゴンガス
にPOC13を担持させる。また三塩化ガリウム(Ga
C13)が収容されている蒸発器4にアルゴンガス供V
給管5の供V給バルブ6を開いてアルゴンガスを所定量
供給して該アルゴンガスにGaC13を迫特させる。こ
のとき四塩化ゲルマニウム(WC14)が収容されてい
る蒸発器7に通ずるアルゴンガス供V給管8の供給バル
ブ9は閉じておく。このようにしてPOC13およびG
aC13を担持させたアルゴンガスを三重石英バーナ1
0の導入口1 1に導き、酸素ガス供給管12より三重
石英バーナの導入口13に導かれた酸素ガスと火炎加水
分解反応を効率よく行なわせるために混合させて三重石
英バーナ10の下部Aに導くとともに、酸素ガス供競合
管12より三重石英バーナ10の導入口14に酸素ガス
を導く。また水素ガス供聯合管15より三重石英バーナ
10の導入口16に水素ガスを供給し、該水素ガス及び
酸素ガスを三重石英バーナの下部Bに導いて、上記した
GaC13、POC13を損持したアルゴンガス及び酸
素ガスと共に火炎加水分解反応を起こさせて、りんとガ
リウムの複合酸化物であるGaP04を得て収集容器1
7に収集していた。次に収集容器17を他の収集容器に
交換して、アルゴンガス供給管2の供給バルブ3を開い
てPOC13が収容されている蒸発器1にアルゴンガス
を導き該アルゴンガスにPOC13を担持させる。同時
にアルゴンガス供V給管8の供期費バルブ9を開きGe
C14が収容されている蒸発器7にアルゴンガスを導き
、アルゴンガスにGeC14を迫特させる。この時Ga
C13の蒸発器4に通じるアルゴンガスの供給管5の供
給バルブは閉じておく。このようにPOC13を坦持し
たアルゴンガス及びQC14を担持したアルゴンガスを
三重石英バーナ10の導入口11に導き、前述と同様に
してバーナの先端部で火炎加水分解反応を起こさせて、
りんとゲルマニウムの複合酸化物スート(WP207)
を収集容器に収集する。このようにして得られたりんと
ガリウムの複合酸化物スートGaP〇Z叉びりんとゲル
マニウムの複合酸化物スートWP207を、ガラスフア
イバのコア部及びクラッド層としてそれぞれ必要な屈折
率が得られるように秤取して二重石英るつぼ中に混合し
た後、加熱してガラス化してからガラスフアィバを得て
いた。In the figure, the supply valve 3 of the argon gas supply pipe 2 is opened to the evaporator 1 containing phosphorous oxychloride (POC13), and a predetermined amount of argon gas is supplied to make the argon gas support POC13. Also, gallium trichloride (Ga
Argon gas is supplied to the evaporator 4 in which C13) is housed.
The supply V supply valve 6 of the supply pipe 5 is opened to supply a predetermined amount of argon gas, and the GaC 13 is forced into the argon gas. At this time, the supply valve 9 of the argon gas supply V supply pipe 8 leading to the evaporator 7 containing germanium tetrachloride (WC14) is closed. In this way POC13 and G
Argon gas carrying aC13 is transferred to triple quartz burner 1.
Oxygen gas introduced into the inlet 1 1 of the triple quartz burner 10 from the oxygen gas supply pipe 12 and mixed with the oxygen gas introduced into the inlet 13 of the triple quartz burner 10 in order to efficiently carry out the flame hydrolysis reaction. At the same time, oxygen gas is introduced from the oxygen gas supply pipe 12 to the inlet 14 of the triple quartz burner 10. Further, hydrogen gas is supplied from the hydrogen gas supply joint pipe 15 to the inlet 16 of the triple quartz burner 10, and the hydrogen gas and oxygen gas are guided to the lower part B of the triple quartz burner, and the argon gas that has damaged the GaC 13 and POC 13 described above is introduced. A flame hydrolysis reaction is caused together with gas and oxygen gas to obtain GaP04, which is a composite oxide of phosphorus and gallium, and the collection container 1 is
It was collected on 7th. Next, the collection container 17 is replaced with another collection container, the supply valve 3 of the argon gas supply pipe 2 is opened, and argon gas is introduced into the evaporator 1 in which the POC 13 is accommodated, and the POC 13 is supported on the argon gas. At the same time, open the supply valve 9 of the argon gas supply V supply pipe 8.
Argon gas is introduced into the evaporator 7 containing C14, and GeC14 is forced into the argon gas. At this time Ga
The supply valve of the argon gas supply pipe 5 leading to the C13 evaporator 4 is kept closed. The argon gas carrying POC 13 and the argon gas carrying QC 14 are introduced into the inlet 11 of the triple quartz burner 10, and a flame hydrolysis reaction is caused at the tip of the burner in the same manner as described above.
Composite oxide soot of phosphorus and germanium (WP207)
into a collection container. The composite oxide soot of phosphorus and gallium GaP〇Z and the composite oxide soot of germanium WP207 obtained in this way were used as the core and cladding layers of the glass fiber so as to obtain the necessary refractive index, respectively. After weighing and mixing in a double quartz crucible, it was heated and vitrified to obtain a glass fiber.
しかしこのような火炎加水分解法で上記の複合酸化物を
収率よくかつ複合酸化物の組成が一定になるように製造
するためには、火炎の温度及び原料ガスの流量を一定の
値に制御する必要がある。However, in order to produce the above-mentioned composite oxide in high yield and with a constant composition using such flame hydrolysis method, it is necessary to control the flame temperature and the flow rate of the raw material gas to a constant value. There is a need to.
しかし石英バーナの先端が上記の酸化物によって目づま
りを起こすため、原料ガス流量の制御が困難であり、ま
た火炎の温度の制御も困難である等の欠点があった。本
発明は生成される上記の酸化物スートの組成を安定にし
かつ収率の向上を目的としたものであり、りん酸系ガラ
スフアイバの原料酸化物スートを製造する場合において
、ガラス原料の塩イM物と酸素ガス及び水蒸気とを反応
管に導入すると共に、該反応管を加熱し、管内における
気相化学反応によりガラス形成用酸イ扮物スートを生成
する新規な光伝法線用ガラスの製造法を提供せんとする
ものである。However, since the tip of the quartz burner is clogged with the above-mentioned oxides, it is difficult to control the flow rate of the raw material gas, and it is also difficult to control the temperature of the flame. The purpose of the present invention is to stabilize the composition of the above-mentioned oxide soot produced and to improve the yield. Manufacture of a new glass for optical transmission line by introducing M substance, oxygen gas and water vapor into a reaction tube, heating the reaction tube, and producing an acid imitation soot for glass formation through a gas phase chemical reaction inside the tube. It is intended to provide law.
以下本発明の−実施例につき図面を用いて詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第2図に本発明に係る光フアィバ用ガラスの酸イ扮物ス
ートの製造装置の布概略図を示す。FIG. 2 shows a schematic diagram of an apparatus for producing an acid suiting suit for optical fiber glass according to the present invention.
図においてキャリアガスとして酸素ガス供給管21の供
給バルブ22を開き、0.6夕/Minの流量で酸素ガ
スを40℃の温度に保たれたPOC13を収容した蒸発
器23に導き、酸素ガスにPOC13を迫特させる。ま
た同時に別の酸素ガス■給管24の供給バルブ25を開
き、0.12そ/Minの流量で酸素ガスを40qoの
温度に保たれたWC14を収容した蒸発器26に導き、
酸素ガスにWC14を担持させる。このときGaC13
を収容した蒸発器27に通ずる供給管28の供野合バル
ブ29は閉じておく。このようにしてPOC13、QC
14をそれぞれ担持させた酸素ガスを反応管30の導入
口31に導く。反応管の先端Cは酸化物スートが飛散す
るのを防ぐため絞って細くする。また他の酸素供聯合管
32より酸素ガスを20〜30の‘/Min蒸発器33
に導く。蒸発器33中には純水が収容され、加熱ヒ−夕
34によって煮沸されて水蒸気を発生させている。した
がって水蒸気を担持した酸素ガスが反応管30の他の導
入管35へ導かれる。反応管30は加熱炉36によって
約1200℃の温度に保たれている。このようにして導
入されたPOC13、QC14をそれぞれ担持した酸素
ガス及び水蒸気によって反応管内でPOC13、QC1
4の加水分解反応が生じて、WP207の複合酸化物ス
−トが生成され、下部の酸化物スートの収集容器37に
収集される。In the figure, the supply valve 22 of the oxygen gas supply pipe 21 is opened as a carrier gas, and oxygen gas is introduced at a flow rate of 0.6 m/min to the evaporator 23 containing the POC 13 kept at a temperature of 40°C, and the oxygen gas is converted into oxygen gas. Bringing POC13 into focus. At the same time, the supply valve 25 of another oxygen gas supply pipe 24 is opened, and oxygen gas is introduced at a flow rate of 0.12 so/min to the evaporator 26 containing the WC 14 maintained at a temperature of 40 qo.
WC14 is supported on oxygen gas. At this time, GaC13
The supply valve 29 of the supply pipe 28 leading to the evaporator 27 containing the gas is kept closed. In this way, POC13, QC
Oxygen gas supporting each of 14 is introduced into the inlet 31 of the reaction tube 30. The tip C of the reaction tube is narrowed to prevent the oxide soot from scattering. In addition, oxygen gas is supplied to the evaporator 33 at a rate of 20 to 30'/Min from another oxygen supply joint pipe 32.
lead to. Pure water is stored in the evaporator 33 and is boiled by the heater 34 to generate water vapor. Therefore, the oxygen gas carrying water vapor is guided to the other introduction pipe 35 of the reaction tube 30. The reaction tube 30 is maintained at a temperature of about 1200° C. by a heating furnace 36. POC13 and QC1 introduced in this way are transported inside the reaction tube by oxygen gas and water vapor supporting POC13 and QC14, respectively.
The hydrolysis reaction of No. 4 occurs to produce a composite oxide soot of WP207, which is collected in the lower oxide soot collection container 37.
次に反応管30及び収集容器37を他の反応管及び収集
容器にそれぞれ交換して、酸素ガス供尊台管21の供g
溝△バルブ22を開き、0.6ク′Minの流量で上記
したPOC13を収容した蒸発器23に酸素ガスを導き
、該酸素ガスにPOC13を担持させる。同時に酸素ガ
ス供尊簿管28の供g舎バルブ29を開いて0.4夕/
Minの流量で酸素ガスを、140℃の温度に保たれた
GaC13を収容した蒸発器27に導き、酸素ガスにG
aC13を損持させる。この時QC14の蒸発器26に
通じる酸素ガス供恩情管24の供v給バルブ25は閉じ
ておく。このようにPOC13及びGaC13を迫持し
た酸素ガスを反応管30の導入口31に導く。同時に前
述したごとく水蒸気を燈持した酸素ガスを20〜30の
【/Minの流量で前述した加熱した反応管30の他の
導入口35より導き、反応管内で上記の酸素ガス、水蒸
気によってPOC13及びGaC13を加水分解して、
GaP04の複合酸化物スートを収集容器37に収集す
る。このようにして生成されたGaP04、GeP20
7の酸化物スートを収集し、ガラスフアィバのコア部及
びクラツド層としてそれぞれ必要な屈折率が得られるよ
うに秤取して、こ蚤石英るつぼ中に混合した後、加熱し
てガラス化してからガラスフアイバとする。Next, the reaction tube 30 and collection container 37 are replaced with other reaction tubes and collection containers, respectively, and the supply of oxygen gas to the oxygen gas supply pipe 21 is performed.
The groove Δ valve 22 is opened, and oxygen gas is introduced into the evaporator 23 containing the above-mentioned POC 13 at a flow rate of 0.6 min, so that the oxygen gas carries the POC 13. At the same time, open the supply valve 29 of the oxygen gas supply pipe 28 and
Oxygen gas is introduced into the evaporator 27 containing GaC13 kept at a temperature of 140°C at a flow rate of Min, and the oxygen gas is
aC13 is damaged. At this time, the supply valve 25 of the oxygen gas supply pipe 24 leading to the evaporator 26 of the QC 14 is closed. In this way, the oxygen gas containing the POC 13 and GaC 13 is introduced into the inlet 31 of the reaction tube 30. At the same time, as described above, oxygen gas containing water vapor is introduced from the other inlet 35 of the heated reaction tube 30 at a flow rate of 20 to 30 [/Min, and the oxygen gas and water vapor are used to generate POC13 and By hydrolyzing GaC13,
GaP04 complex oxide soot is collected in a collection container 37. GaP04, GeP20 generated in this way
Collect the oxide soot of No. 7, weigh it to obtain the refractive index required for the core and cladding layers of the glass fiber, mix it in a quartz crucible, heat it to vitrify it, and then glass it. Fiber.
このようにして生成される酸化物ス−トは、一部反応管
内の管壁にガラス状となって付着することもあるが、こ
の量は僅少であって問題とはならない。また反応管の寸
法は内径を20〜30肋0、長さを300〜60仇岬こ
すれば管内で反応が充分に起こり、未反応ガスが外部に
逃げることもない。以上述べたように本発明の製造法に
よれば水蒸気、酸素ガス、ガラス原料の塩化物によって
加熱反応炉内で気相化学反応を起こさせて酸化物スート
を製造することにより、従来の火炎加水分解反応の時の
ように、バーナーの下端で目づまり等による原料ガスの
流量変動がなく、また加熱炉の温度制御が精度良くでき
るので、生成された酸イ枕物スートの組成が安定しかつ
収率よく酸化物スートが製造できる利点が生じる。Some of the oxide soot produced in this manner may adhere to the walls of the reaction tube in a glassy state, but this amount is so small that it does not pose a problem. If the dimensions of the reaction tube are such that the inner diameter is 20 to 30 mm and the length is 300 to 60 mm, the reaction will occur sufficiently within the tube, and unreacted gas will not escape to the outside. As described above, according to the production method of the present invention, an oxide soot is produced by causing a gas phase chemical reaction in a heating reactor using water vapor, oxygen gas, and chloride of the glass raw material. Unlike the decomposition reaction, there is no fluctuation in the flow rate of the raw material gas due to clogging at the lower end of the burner, and the temperature of the heating furnace can be controlled with high accuracy, so the composition of the acid chloride soot produced is stable and This has the advantage that oxide soot can be produced with good yield.
また生成された酸化物スートは多少水分を含有する恐れ
もあるが、二重石英るつぼを用いて溶融してガラスフア
イバを製造する過程で、乾燥ガスを吹きこむことによっ
て水分が除去できるので、ガラスフアィバの原料として
使用する際に問題にはならない。In addition, the generated oxide soot may contain some moisture, but the moisture can be removed by blowing dry gas during the process of manufacturing glass fiber by melting it using a double quartz crucible. There is no problem when using it as a raw material.
第1図は従来の火炎加水分解法による酸化物スートを製
造するための原料ガスの配管系統図及び三重石英バーナ
を示す系統図、第2図は本発明による酸化物スートの製
造装置を説明するための系統図である。
1:M℃13蒸発器、2:アルゴンガス供給管、3:供
給用バルブ、4:GaC13蒸発器、5:アルゴンガス
供給管、6:供給用バルブ、7:GeC14蒸発器、8
:アルゴンガス供艶溝管、9:供聯合用バルブ、10:
三重石英バーナ、11:導入口、12:酸素ガス供給管
、13,14:導入口、15:水素ガス供9台管、16
:導入口、17:収集容器、21:酸素ガス供孫給管、
22:供給用バルブ、233POC13蒸発器、24:
酸素ガス供給管、253供給用バルブ、26:WC14
蒸発器、27:GaC13蒸発器、28:酸素ガス供給
管、29:供給用バルブ、30:反応管、31:導入口
、32:酸素ガス供給管、33:純水蒸発器、34:加
熱ヒータ、35:導入口、36:加熱炉、37:収集容
器、A,B:バーナ下端、C:反応管先端。
第1図
第2図Fig. 1 is a piping system diagram for raw material gas and a system diagram showing a triple quartz burner for producing oxide soot by the conventional flame hydrolysis method, and Fig. 2 explains the oxide soot production apparatus according to the present invention. This is a system diagram for 1: M°C13 evaporator, 2: Argon gas supply pipe, 3: Supply valve, 4: GaC13 evaporator, 5: Argon gas supply pipe, 6: Supply valve, 7: GeC14 evaporator, 8
: Argon gas supply groove pipe, 9: Supply joint valve, 10:
Triple quartz burner, 11: Inlet, 12: Oxygen gas supply pipe, 13, 14: Inlet, 15: 9 hydrogen gas supply pipes, 16
:Inlet, 17: Collection container, 21: Oxygen gas supply pipe,
22: Supply valve, 233POC13 evaporator, 24:
Oxygen gas supply pipe, 253 supply valve, 26: WC14
Evaporator, 27: GaC13 evaporator, 28: Oxygen gas supply pipe, 29: Supply valve, 30: Reaction tube, 31: Inlet, 32: Oxygen gas supply pipe, 33: Pure water evaporator, 34: Heater , 35: Inlet, 36: Heating furnace, 37: Collection container, A, B: Lower end of burner, C: Reaction tube tip. Figure 1 Figure 2
Claims (1)
する場合において、ガラス原料の塩化物と酸素ガス及び
水蒸気とを反応管に導入すると共に、該反応管を加熱し
管内における気相化学反応により、ガラス形成用酸化物
スートを生成しその後ガラス化することを特徴とする光
伝送線用ガラスの製造法。1. When manufacturing oxide soot, which is a material for phosphoric acid-based optical transmission lines, chloride as a glass raw material, oxygen gas, and water vapor are introduced into a reaction tube, and the reaction tube is heated to produce gas phase chemistry inside the tube. A method for producing glass for optical transmission lines, characterized in that a glass-forming oxide soot is generated by a reaction and then vitrified.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53092311A JPS603016B2 (en) | 1978-07-27 | 1978-07-27 | Manufacturing method of glass for optical transmission lines |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53092311A JPS603016B2 (en) | 1978-07-27 | 1978-07-27 | Manufacturing method of glass for optical transmission lines |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5520243A JPS5520243A (en) | 1980-02-13 |
| JPS603016B2 true JPS603016B2 (en) | 1985-01-25 |
Family
ID=14050845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53092311A Expired JPS603016B2 (en) | 1978-07-27 | 1978-07-27 | Manufacturing method of glass for optical transmission lines |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS603016B2 (en) |
-
1978
- 1978-07-27 JP JP53092311A patent/JPS603016B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5520243A (en) | 1980-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH04317431A (en) | Method of manufacturing optical fiber transmission path | |
| JPH0637311B2 (en) | Method for producing sodium-containing glass or ceramic article | |
| CN101363940A (en) | Capillary optical fiber with ring waveguide layer and its manufacturing method | |
| JPS603016B2 (en) | Manufacturing method of glass for optical transmission lines | |
| CN1111514C (en) | A kind of method of making large prefabricated optical fiber bar | |
| JPS603017B2 (en) | Manufacturing method of glass for optical transmitters | |
| JPS5858294B2 (en) | Method for manufacturing glass for optical transmission bodies | |
| EP0371629A1 (en) | Optical fibre manufacture | |
| JPS593942B2 (en) | Manufacturing method of glass fiber base material | |
| JPH053416B2 (en) | ||
| JPS6150888B2 (en) | ||
| JPS6129893B2 (en) | ||
| JPS5815448B2 (en) | Method for manufacturing phosphoric acid glass | |
| JPS56100148A (en) | Manufacture of glass fiber for optical transmission | |
| JPH01126236A (en) | Production of optical fiber preform | |
| JPS6156172B2 (en) | ||
| JPS6126504B2 (en) | ||
| JPS569239A (en) | Manufacture of glass for optical transmission line | |
| JPS60221332A (en) | Manufacture of optical fiber base material | |
| JPS5913453B2 (en) | Method for manufacturing multicomponent glass fiber matrix | |
| JPS61158836A (en) | Production of parent material for optical glass | |
| JPS6144725A (en) | Method of treating quartz porous glass layer | |
| JPS59184735A (en) | Transparent vitrification of optical porous glass | |
| JPS581051B2 (en) | Manufacturing method for optical transmission materials | |
| JPH0460930B2 (en) |