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JPS6031114B2 - Manufacturing method of piezoelectric polymer composite material - Google Patents
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JPS6031114B2 - Manufacturing method of piezoelectric polymer composite material - Google Patents

Manufacturing method of piezoelectric polymer composite material

Info

Publication number
JPS6031114B2
JPS6031114B2 JP56069102A JP6910281A JPS6031114B2 JP S6031114 B2 JPS6031114 B2 JP S6031114B2 JP 56069102 A JP56069102 A JP 56069102A JP 6910281 A JP6910281 A JP 6910281A JP S6031114 B2 JPS6031114 B2 JP S6031114B2
Authority
JP
Japan
Prior art keywords
composite material
piezoelectric polymer
barium titanate
particles
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56069102A
Other languages
Japanese (ja)
Other versions
JPS57183084A (en
Inventor
泰孝 堀部
雅紀 稲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56069102A priority Critical patent/JPS6031114B2/en
Publication of JPS57183084A publication Critical patent/JPS57183084A/en
Publication of JPS6031114B2 publication Critical patent/JPS6031114B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/092Forming composite materials

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Description

【発明の詳細な説明】 本発明は、圧電性高分子複合材料の製造方法に関するも
ので従来のチタン酸バリウム圧電性高分子化合物からな
る複合材料と比較して、分極処理電圧の低い複合材料を
得ることを目的とする。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a piezoelectric polymer composite material, and the present invention relates to a method for producing a piezoelectric polymer composite material. The purpose is to obtain.

圧電材料は、フィル夕、発振子、超音波振動子表面弾性
波素子等として、広範囲に使用されている材料であるが
、その大部分は、チタン酸バリウム、チタン酸鉛、チタ
ン酸ジルコン酸鉛(PZT)等のセラミックが使用され
ている。一方、ポリフッ化ビニリデン、ポリ塩化ビニル
、ポリフツ化ビニル、ナイロン等の合成高分子化合物も
圧電特性を有することが知られている。これらの圧電性
高分子化合物は、セラミックスにない優れた加工性成形
性をもち、フィルム状として用いることが可能となるな
ど数多くの特徴をもつことから、スピーカ、ヘッドホン
、マイクロホン、超音波探鮫子、キーボード、血圧計等
多方面の応用が期待されているが、分極処理電圧が高く
、また圧電定数が大きくない等の欠点を持っている。こ
れらの問題を解決するため、近年、圧電性高分子化合物
にチタン酸バリウム粒子やPZr粒子等のセラミック微
粒子を混合したいわゆる圧電性高分子複合材料の開発が
活発に行なわれている。これらの複合材料も圧電性高分
子化合物と同様、成形性、加工性に優れ、かつ適度の可
榛性を有し、フィルム状に出来ることから、きわめて応
用面の広い材料である。セラミック粒子と圧電性高分子
化合物の複合化により、圧電定数は数倍大きくなり、ま
た分極処理電圧もかなり低下した。しかしながら、まだ
セラミック圧電材料に比べてかなり分極処理電圧が高い
ため、厚みの大きい材料の分極はかなり困難であるのが
現状である。本発明はチタン酸バリウム粒子と圧電性高
分子化合物からなる複合材料において、従来の材料と比
較して分極処理電圧の低い圧電性高分子複合材料の製造
方法を提供するものである。
Piezoelectric materials are widely used as filters, oscillators, ultrasonic transducer surface acoustic wave elements, etc., but most of them are barium titanate, lead titanate, lead zirconate titanate. Ceramics such as (PZT) are used. On the other hand, synthetic polymer compounds such as polyvinylidene fluoride, polyvinyl chloride, polyvinyl fluoride, and nylon are also known to have piezoelectric properties. These piezoelectric polymer compounds have many features such as excellent workability and formability that ceramics do not have, and can be used in film form, so they are used in speakers, headphones, microphones, and ultrasonic probes. Although it is expected to be used in many fields such as keyboards, blood pressure monitors, etc., it has drawbacks such as a high polarization voltage and a small piezoelectric constant. In order to solve these problems, in recent years, so-called piezoelectric polymer composite materials, in which ceramic fine particles such as barium titanate particles and PZr particles are mixed with a piezoelectric polymer compound, have been actively developed. Similar to piezoelectric polymer compounds, these composite materials have excellent moldability and processability, have appropriate flexibility, and can be formed into a film, making them extremely versatile materials. By combining the ceramic particles and the piezoelectric polymer compound, the piezoelectric constant increased several times and the polarization voltage decreased considerably. However, since the polarization voltage is still considerably higher than that of ceramic piezoelectric materials, it is currently quite difficult to polarize thick materials. The present invention provides a method for producing a piezoelectric polymer composite material comprising barium titanate particles and a piezoelectric polymer compound, which has a lower polarization voltage than conventional materials.

すなわち同じ厚みの材料で、同じ分極電圧を印加した場
合、大きな圧電定数を得ることの出来る複合材料の製造
方法を提供しようとするものである。本発明は複合材料
の構成成分の一つであるチタン酸バリウム粒子として、
C面が発達した板状形状を有するチタン酸バリウム粒子
に着目したものである。従来チタン酸バリウム粒子は、
その出発原料となる二酸化チタンやバリウム化合物が特
定形状を有していないため、板状や針状の形状を有する
チタン酸バリウム粒子の作製は困難とされていた。しか
しながら四塩化チタンTIC14一酸素○2−窒素N2
からなる混合ガスを高温中で反応させるいわゆる気相法
により、板状形状を有するアナターゼ型結晶構造の二酸
化チタン粒子を得ることが出来る。この二酸化チタン粉
体と酸化バリウムもしくは加熱によって酸化バリウムと
なるバリウム化合物を混合し、焼成することによって第
3図に示すように、C面が発達した板状のチタン酸バリ
ウム粒子が得られる。かかる粒子とポリフツ化ビニリデ
ン、ポリ塩化ビニル等の圧電性高分子化合物を混合し、
成形した複合材料の分極処理電圧は、従来の特定形状を
有しないチタン酸バリウム粒子を用いた複合材料と比較
して低い電圧を印加するだけで分極が可能であることが
わかった。圧電性高分子複合材料を作製する場合、溶液
法と混練法が知られている。
That is, the present invention aims to provide a method for manufacturing a composite material that can obtain a large piezoelectric constant when the same polarization voltage is applied to the materials having the same thickness. The present invention uses barium titanate particles, which are one of the components of the composite material, as barium titanate particles.
This study focused on barium titanate particles having a plate-like shape with a developed C-plane. Conventional barium titanate particles are
Since titanium dioxide and barium compounds, which are the starting materials, do not have a specific shape, it has been difficult to produce barium titanate particles having a plate-like or needle-like shape. However, titanium tetrachloride TIC14 - oxygen ○ 2 - nitrogen N2
Titanium dioxide particles having an anatase type crystal structure having a plate shape can be obtained by a so-called gas phase method in which a mixed gas consisting of the following is reacted at high temperature. By mixing this titanium dioxide powder with barium oxide or a barium compound that becomes barium oxide when heated, and firing, plate-shaped barium titanate particles with developed C-planes are obtained as shown in FIG. Mixing such particles with a piezoelectric polymer compound such as polyvinylidene fluoride or polyvinyl chloride,
It was found that the molded composite material could be polarized by simply applying a lower voltage than conventional composite materials using barium titanate particles that do not have a specific shape. When producing a piezoelectric polymer composite material, a solution method and a kneading method are known.

前者は溶液中へセラミックス粒子をボ−ルミルで混合し
た後キャスティング成形によりフィルム状に成形する方
法である。一方後者は、圧電性高分子化合物とセラミッ
クス粒子をロールで濠練した後、熱プレス成形によりシ
ート化する方法である。前者の場合、板状形状を有する
チタン酸バリウム粒子は、溶媒内で自然沈降により、後
者では加圧成形により、圧電性高分子物質内において面
内記向する。配向化に伴なし・シートの厚み方向には、
第4図に示すように、チタン酸バリウム粒子の板面が揃
う。第4図は、圧電性高分子物質内における粒子の配置
図を示したものであり、シートの厚み方向にはC軸方向
が揃っている。C軸に垂直な面、すなわちC面が、一定
面内に配向した複合材料が作製される。かかる複合材料
を、シートの厚み方向に分極処理した場合、従来の特定
形状を有しないチタン酸バリウム粒子を用いた場合には
、粒子の鼠方向が無秩序であるのに対して、本発明によ
る複合材料は、粒子のC軸がシートの厚み方向に揃って
いるため、分極が容易となり、低い印加電圧で分極が可
能となる。すなわち、同一厚みのシートを、同一分極電
圧で処理した場合、大きな圧電定数を得ることが可能と
なる。以下本発明の実施例を詳細に説明する。
The former is a method in which ceramic particles are mixed into a solution using a ball mill and then formed into a film by casting. On the other hand, the latter is a method in which a piezoelectric polymer compound and ceramic particles are kneaded with a roll and then formed into a sheet by hot press molding. In the former case, barium titanate particles having a plate-like shape are oriented in-plane within the piezoelectric polymer material by natural sedimentation in the solvent, and in the latter case by pressure molding. Along with orientation, in the thickness direction of the sheet,
As shown in FIG. 4, the plate surfaces of the barium titanate particles are aligned. FIG. 4 shows the arrangement of particles within the piezoelectric polymer material, and the C-axis direction is aligned in the thickness direction of the sheet. A composite material is produced in which a plane perpendicular to the C-axis, that is, a C-plane, is oriented in a constant plane. When such a composite material is polarized in the thickness direction of the sheet, when using conventional barium titanate particles that do not have a specific shape, the grain direction is disordered, whereas the composite material according to the present invention Since the C-axes of the particles of the material are aligned in the thickness direction of the sheet, polarization is easy, and polarization can be achieved with a low applied voltage. That is, when sheets of the same thickness are treated with the same polarization voltage, it is possible to obtain a large piezoelectric constant. Examples of the present invention will be described in detail below.

く実施例 1〉 四塩化チタンTIC14一酸素02−窒素N2の各濃度
が3.Wol%、49.ルol%、47.1vol%と
なるよう配合した混合ガスを200の【/分の速度で9
8び0の加熱部を通過させ、白色粉体を得た。
Example 1> Each concentration of titanium tetrachloride TIC14 - oxygen 02 - nitrogen N2 was 3. Wol%, 49. A mixed gas of 47.1 vol% and 47.1 vol% was added at a rate of 200 [/min].
The mixture was passed through a heating section of 8 and 0 to obtain a white powder.

この粉体をX線回折により相解折を行なうとともに、そ
の粒子形状を走査型電子顕微鏡により観察した。その結
果、この粉体は、アナターゼ型の二酸化チタン粒子で一
辺が0.5〜1.岬mの板状形状を有していることがわ
かった。この二酸化チタンと平均粒経0.かm以下の微
細な酸化バリウムが等モル比となるよう配合しボールミ
ルで1拍時間混合した後、110ぴ○で1時間焼成した
。得られた粉末をX線回折で相解析を行なうとともに、
電子顕微鏡による粒子形状の観察及び電子線回折折の測
定結果から、C面が発達した板状形状のチタン酸バリウ
ム粒子であることが確認された。次にポリフツ化ビニリ
デン2重量%のジメチルホルムアミド溶液中に前述のチ
タン酸バリウム粒子をポリフッ化ビニリデンに対して7
の重量%になるよう添加し、ボールミルで17時間混合
した後、ガラス板上へ流して、65qoで溶媒を蒸発さ
せ、厚さ8呼mのポリフッ化ビニリデンーチタン酸バリ
ウムからなる圧電性高分子複合材料を作製した。このフ
ィルムの両面に金を蒸着して電極を設け分極処理をした
。なお分極条件は、50qo及び100o0中でそれぞ
れ30分間、直流電圧を50〜130kV/肌印加し、
室温まで徐冷することにより分極を行った。第1図に分
極処理後それぞれの複合材料の圧電定数d3.(cgs
esu)の測定結果を示す。なお比較のために、従来か
ら用いられている特定形状を有しないチタン酸バリウム
粒子を使用した複合材料を全く同様の条件で混合・成形
し、分極処理した後、圧電定数d3,を測定した。その
結果も第1図に示す。ここで実線は本発明による複合材
料の測定結果、破線は比較例の測定結果を示す。第1図
から明らかなように本発明による複合材料は、従来のも
のに比較して同一分極電圧を印加した場合、大きな圧電
定数が得られることがわかる。なお本発明による複合材
料と従釆の複合材料とをそれぞれ成形した後、シートの
厚み方向にX線を照射し、X線回折のピーク強度を測定
した結果、前者は後者と比べてZ1(ool)/Z1(
hkl)の値が著しく大きく、本発明による圧電性高分
子複合材料は、板状形状のチタン酸バリウム粒子が、面
内配向してし、ることが確認された。但しヱ1(ool
)は(ool)面のピーク強度の総和を、21(hkl
)は全ピーク強度の総和を示している。〈実施例 2〉 実施例1と全く同様にして作製したC面が発達した板状
形状のチタン酸バリウム粒子をポリ塩化ビニル(PVC
)に対して7の重量%になるよう添加して、熱ロールに
より200o0で混合し熱プレスで厚さ120舷mのフ
ィルムを作製した。
This powder was subjected to phase analysis using X-ray diffraction, and its particle shape was observed using a scanning electron microscope. As a result, this powder is anatase-type titanium dioxide particles with a side of 0.5 to 1. It was found that it has a plate-like shape with a cape m. This titanium dioxide and the average particle size are 0. Fine barium oxide of less than 10 mm in size was blended in an equimolar ratio, mixed in a ball mill for 1 hour, and then fired at 110 pi for 1 hour. The obtained powder was subjected to phase analysis using X-ray diffraction, and
Observation of the particle shape using an electron microscope and measurement results of electron beam diffraction confirmed that the particles were plate-shaped barium titanate particles with a developed C-plane. Next, the aforementioned barium titanate particles were added to a dimethylformamide solution containing 2% by weight of polyvinylidene fluoride.
After mixing in a ball mill for 17 hours, it was poured onto a glass plate and the solvent was evaporated at 65 qo to form a piezoelectric polymer made of polyvinylidene fluoride-barium titanate with a thickness of 8 mm. A composite material was created. Gold was vapor-deposited on both sides of this film, electrodes were provided, and polarization treatment was performed. The polarization conditions were to apply a DC voltage of 50 to 130 kV/skin for 30 minutes each at 50 qo and 100 o0,
Polarization was performed by slowly cooling to room temperature. Figure 1 shows the piezoelectric constant d3 of each composite material after polarization treatment. (cgs
esu) measurement results are shown. For comparison, a composite material using conventionally used barium titanate particles having no specific shape was mixed and molded under exactly the same conditions, and after polarization treatment, the piezoelectric constant d3 was measured. The results are also shown in FIG. Here, the solid line shows the measurement results of the composite material according to the present invention, and the broken line shows the measurement results of the comparative example. As is clear from FIG. 1, it can be seen that the composite material according to the present invention has a larger piezoelectric constant when the same polarization voltage is applied as compared to the conventional material. After molding the composite material according to the present invention and the subordinate composite material, X-rays were irradiated in the thickness direction of the sheet and the peak intensity of X-ray diffraction was measured. )/Z1(
hkl) was significantly large, and it was confirmed that in the piezoelectric polymer composite material according to the present invention, plate-shaped barium titanate particles were oriented in-plane. However, ヱ1 (ool
) is the sum of the peak intensities of the (ool) plane, 21(hkl
) indicates the sum of all peak intensities. <Example 2> Particles of barium titanate having a plate-like shape with a developed C-plane, which were produced in the same manner as in Example 1, were coated with polyvinyl chloride (PVC).
) and mixed at 200o0 using a hot roll, and a film with a thickness of 120 m in thickness was produced using a hot press.

このフィルムの両面に金を蒸着し、電極を設け分極した
。分極条件は、90午0中で30分間直流電圧を50〜
120kV/cの印加し、室温まで徐冷した。第2図に
分極処理した複合材料の圧電定数d3,を測定した結果
を示す。なお、比較のために、従来から用いられている
特定形状を有しないチタン酸バリウム粒子を使用した複
合材料を全く同様の条件で混合・成形し分極処理した後
、圧電定数d3.を測定した結果を第2図に示す。ここ
で実線は本発明のもの、破線は従来のものの特性を示す
。第2図から明らかなように、本発明による複合材料は
、従来のものに比較して分極処理電圧が低いことがわか
る。なお実施例1と同様に、本発明による複合材料と従
来の複合材料をそれぞれ成形後にX線回折測定を行った
結果、前者の方が21(ool)/21(hkl)の値
が大きくシートの厚み方向に、C面が発達した板状形状
のチタン酸バリウム粒子が面内に配同していることが確
認された。以上の結果から明らかなように、C面が発達
した板状形状を有するチタン酸バリウム粒子と圧電性高
分子化合物を混合し、成形した本発明による圧電性高分
子複合圧電材料は、従来用いられてきた特定形状を有し
ないチタン酸バリウム粒子からなる複合材料に比べて、
低い印加電圧で分極が可能となり、生産性が向上する等
その工業的価値はきわめて大きいものがある。
Gold was vapor-deposited on both sides of this film, and electrodes were provided to polarize it. The polarization conditions were to apply a DC voltage of 50~30 minutes at 90 o'clock.
A voltage of 120 kV/c was applied and the mixture was slowly cooled to room temperature. FIG. 2 shows the results of measuring the piezoelectric constant d3 of the polarized composite material. For comparison, a composite material using conventionally used barium titanate particles having no specific shape was mixed and molded under exactly the same conditions and polarized, and then the piezoelectric constant d3. Figure 2 shows the measurement results. Here, the solid line shows the characteristics of the present invention, and the broken line shows the characteristics of the conventional one. As is clear from FIG. 2, the composite material according to the present invention has a lower polarization voltage than the conventional composite material. As in Example 1, X-ray diffraction measurements were performed on the composite material according to the present invention and the conventional composite material after molding, and the results showed that the former had a larger value of 21 (ool)/21 (hkl), indicating that the sheet It was confirmed that plate-shaped barium titanate particles with developed C-planes were distributed in-plane in the thickness direction. As is clear from the above results, the piezoelectric polymer composite piezoelectric material according to the present invention, which is formed by mixing and molding barium titanate particles having a plate-like shape with a developed C-plane and a piezoelectric polymer compound, is different from conventionally used piezoelectric polymer composite piezoelectric materials. Compared to composite materials made of barium titanate particles that do not have a specific shape,
Its industrial value is extremely large, as it enables polarization with a low applied voltage and improves productivity.

本発明の実施例では、圧電性高分子化合物として、ポリ
フツ化ビニリデンと塩化ビニルを使用したが、ポリフッ
化ビニル、ポリカーボネート、ナイロン、ポリ塩化ビニ
リデン等の圧電性高分子化合物を用いても同様の効果が
得られることは言うまでもないことである。
In the examples of the present invention, polyvinylidene fluoride and vinyl chloride were used as piezoelectric polymer compounds, but similar effects can be obtained by using piezoelectric polymer compounds such as polyvinyl fluoride, polycarbonate, nylon, and polyvinylidene chloride. It goes without saying that this can be obtained.

本発明による複合材料は、優れた成形性、加工性、可操
性を有し、容易にシート化が可能であることから、スピ
ー力、ヘッドホン、マイク。
The composite material according to the present invention has excellent moldability, processability, and maneuverability, and can be easily formed into a sheet, so it can be used for speech power, headphones, and microphones.

ホン等への応用が期待出来る。It can be expected to be applied to phones etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は本発明による圧電性高分子複合材
料および従来の複合材料の分極電圧と圧電定数の関係の
一例を示した図、第3図は本発明に用いたチタン酸バリ
ウム粒子の結晶軸方向を示す図、第4図は圧電性高分子
物質内における粒子の配置を示す図である。 第1図 第2図 第3図 第4図
Figures 1 and 2 are diagrams showing an example of the relationship between polarization voltage and piezoelectric constant of the piezoelectric polymer composite material according to the present invention and a conventional composite material, and Figure 3 is a diagram showing the barium titanate particles used in the present invention. FIG. 4 is a diagram showing the arrangement of particles in a piezoelectric polymer material. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 1 C面が発達した板状形状を有するチタン酸バリウム
粒子と圧電性高分子化合物を混合し、成形した後、分極
処理することを特徴とする圧電性高分子複合材料の製造
方法。 2 特許請求の範囲第1項において、チタン酸バリウム
粒子として、気相法より生成した板状形状を有する二酸
化チタンとバリウムを含有する化合物を混合し、焼成す
ることにより得られるC面が発達した板状形状を有する
チタン酸バリウム粒子を用いることを特徴とする圧電性
高分子複合材料の製造方法。
[Claims] 1. A piezoelectric polymer composite material characterized in that barium titanate particles having a plate-like shape with a developed C-plane and a piezoelectric polymer compound are mixed, molded, and then polarized. Production method. 2. In claim 1, barium titanate particles have developed C-planes obtained by mixing titanium dioxide having a plate-like shape produced by a gas phase method and a barium-containing compound and firing the mixture. A method for producing a piezoelectric polymer composite material, the method comprising using barium titanate particles having a plate-like shape.
JP56069102A 1981-05-07 1981-05-07 Manufacturing method of piezoelectric polymer composite material Expired JPS6031114B2 (en)

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Application Number Priority Date Filing Date Title
JP56069102A JPS6031114B2 (en) 1981-05-07 1981-05-07 Manufacturing method of piezoelectric polymer composite material

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JPS57183084A JPS57183084A (en) 1982-11-11
JPS6031114B2 true JPS6031114B2 (en) 1985-07-20

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001253770A (en) * 2000-03-13 2001-09-18 Otsuka Chem Co Ltd Composite plate-like metal titanate and its manufacturing method
CN109880260A (en) * 2019-02-02 2019-06-14 哈尔滨理工大学 A two-dimensional barium titanate filler doped polyvinylidene fluoride-based composite dielectric film and preparation method thereof

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JPS57183084A (en) 1982-11-11

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