JPS6034262B2 - Vacuum sealing device - Google Patents

Description

[Detailed Description of the Invention] In the present invention, a container containing parts and a lid are stacked together and heated in a vacuum, and at a predetermined temperature, a bonding agent provided in advance on the joint surface of the container and the lid is melted and sealed. This invention relates to a vacuum sealing device.

As a processing device in a vacuum sealing device, at least a heating device and a pressurizing device are required.

Conventionally, such processing equipment has been disposed inside a vacuum box, which has the drawbacks of increasing the size of the vacuum box and having poor vacuum efficiency. In particular, crystal oscillators used in watches are extremely small, and the container used to seal them is also small, for example on the order of 3 x 2 x 7 sides, and work is usually done with the container held above the holding odor. . In such vacuum processing equipment for small parts, there has been a strong demand for miniaturization of the vacuum box and improvement of vacuum efficiency. An object of the present invention is to provide a vacuum sealing device that can meet such demands.

The present invention will be explained below based on illustrated embodiments.

FIG. 1 shows a workpiece to be sealed. Work 10
It consists of a ceramic container 12 containing parts 11 and a glass lid 13 for sealing this container 12.
A bonding agent such as solder, which melts at a predetermined temperature, is applied in advance to the bonding surfaces between the container 12 and the lid 13. FIG. 2 shows a holder for holding the work 10. As shown in FIG. The holder 201 is provided with a plurality of bottomed square grooves 21 along the longitudinal direction for inserting the workpiece 10 in which the lid 13 is stacked on the container 12. Through hole 2 with a diameter larger than the short side of 21
2 is drilled. Also, at both ends of the outer periphery, collar portions 23A and 23B engage with claw portions of the magazine that stores the retained odor 20.
However, there are cutouts 24A, 248, 24C for transportation on both sides.
, 24D are provided respectively. FIG. 3 is a schematic structural explanatory diagram of the vacuum sealing device according to the present invention.

In other words, this device can be roughly divided into three vacuum generators:
A vacuum box 31 whose interior is kept in a vacuum, a supply magazine 32 which is arranged on the upper right side of the vacuum box and stores a holder 20 in which a workpiece 10 is set, and a supply magazine 32 which is also placed inside the vacuum box 31 A storage magazine 33 is disposed on the upper left side and has a similar configuration and stores a holding holder 20 in which processed workpieces are set, and a holding tool 2 disposed between the magazines 32 and 33 performs the processing. The gist of the present invention is comprised of an internal processing device 50 disposed inside a vacuum box and an external heating device 7 arranged outside the vacuum box for heating a workpiece positioned at a working position in the internal processing device. a processing device, and three supply tables 34, a work table 35, and a storage table 36 arranged at the same height below the supply magazine 32, the internal processing device 50, and the storage magazine 33, respectively; A supply device 37 that sequentially transfers the retained odor 20 from the lowest stage of the supply magazine 32 onto the supply table 34.
Then, push up the holding odor 20 of the storage stand 36 and release the storage magazine 33.
a storage device 38 for stacking and storing the storage devices from below,
A transfer device 39 that intermittently transfers the holder 20 to the processing work position and the storage position along the guide surfaces of the supply table 34, work table 35, and storage table 36, and a transfer device 39 provided outside the vacuum box for driving each of the devices described above. and a drive device (not shown). Further, a heater 40 for preparatory heating is provided on the side surface of the supply magazine 32.
is provided.

Furthermore, this device is provided with a clean air compressor 41 in order to prevent dust and the like from entering the vacuum box 31 together with outside air when the supply magazine 32 and storage magazine 33 are set in the vacuum box 31. . Next, the configurations of the internal processing device 50 and the external heating device 70, which form the gist of the present invention, will be explained. Figure 4 shows the internal processing equipment.
A is a plan view, and b is a cross-sectional side view. A workbench 35 is placed on a support 51 fixed to the vacuum side wall 31a, and a workpiece 10, which has a slight gap from the upper surface of the workpiece and is lifted up by a pressure pin to be described later, is placed on the holding odor 20 that has been transported to the processing position. A supporting plate 52 is provided. This receiving plate 52 is made of a heat-transparent material such as heat-resistant quartz glass. Further, a rotation shaft 53 is provided passing through the vacuum side wall 31a and the support body 51.

A roller at the tip of an operating lever 54 fixed to this rotation shaft 53 is engaged with an elevating member 57 that is driven up and down along guide rods 55 and 56. In this elevating part village 57, a pressure pin 58 that is biased upward and movable up and down is located in a long through groove 35a provided in the workbench 35, and is spaced at the same distance as the workpiece on the holder 20 so as to protrude upward. It is placed in direct position.
Further, a preheating device 59 made of an aluminum body with a heating element embedded therein is fixed to this elevating member 57, and the temperature of this preheating device 59 is controlled by a temperature sensor (not shown). . Further, a water channel 60 for circulating cooling water is bored in the workbench 35,
A pipe or the like is connected to an external pump (not shown).
This cooling temperature is controlled by a temperature sensor (not shown). FIG. 5 is a sectional view perpendicular to the conveyance direction of the workpiece holder, and the inside of the vacuum box is not shown. External heating device 7 and internal processing device 50'
A line-type infrared heater 72 is provided above and outside the corresponding vacuum box 31 and has a reflector plate 71 that collects heat in the direction of the workpieces 10 arranged in large numbers on the holder 20. This infrared heater 72 is controlled by a timer (not shown) and heats the workpiece 10 to a predetermined temperature through the heat-transparent glass plate 73 provided at the top of the vacuum box 31 and the receiving plate 52, and heats the workpiece 10 to a predetermined temperature between the container 12 and the lid 13 of the workpiece 10. It functions to melt the bonding agent attached to the Next, the operation of this device having such a configuration will be explained.

Work 1 is supplied to the supply section from the entrance part (not shown) of the vacuum box 31.
A supply magazine 32 in which holders 20 holding zeros are stacked and stored is attached. Similarly, an empty storage magazine 33 is attached to the storage section. Next, the closing portion is closed, and the inside of the vacuum box 31 is brought to a predetermined vacuum pressure by the vacuum generator Mikawa before starting. Therefore, the supply device 37 causes the supply magazine 32 to
The post-beating retained odor 20 is reloaded onto the supply stand 34 from the open bottom end of the holder 3, and is transferred by the transfer device 39 onto the workbench 35 to the processing device. Next, the elevating member 57 is raised by the rotation of the rotation shaft 53 of the internal processing device 50, and each workpiece 10 of the retained odor 20 placed on the workbench 35 is moved to its respective pressure pin 5.
8 abuts from below and is pushed out from the holding odor 20, the spring force presses against the receiving plate 52 with a constant force, and the elevating member 57
stops at the position where it contacts the workbench 35.

When the heat from the preheating device 59 is transmitted to the workpiece and the sensor on the workbench 35 detects that the predetermined temperature has been reached, the infrared heater 72 of the external heating device 70 heats the workpiece at a high temperature for a predetermined period of time. As a result, work 1
The bonding agent on the bonding surfaces of the container 12 and the lid 13 of No. 0 melts, and the two are bonded together while being pressed with a predetermined pressure. Therefore, the infrared heater 72 of the external heating device 70 is turned off, and the workbench 3
Cooling water is circulated through channels 6 and 5, and the workpiece is cooled.

When the workpiece is cooled to a predetermined temperature, the circulation of cooling water is stopped. Thereafter, the elevating member 57 is lowered and the work piece 1 is returned to its original position on the holder 20 on the workbench 35. In this way, the predetermined heat treatment processing work is carried out, and the transport layer 39 transports it again to the storage position on the storage table 36.
The storage device 38 stacks and stores them in the storage magazine 33 from below.

This series of operations is repeated in sequence, and when all the works 10 of the retained odor 20 in the supply magazine are processed and stored in the storage magazine 33, the drive of the apparatus is stopped.

Then, the clean air compressor 41 is operated, and the empty supply magazine 32 and the storage magazine 33 in which processed workpieces are stored are taken out from the opening in the vacuum box 31, and the supply magazine 32 in which a new workpiece is stored and the empty supply magazine 32 are removed. Replace it with the storage magazine 33. In this case, since the pressure inside the vacuum box 31 is maintained at atmospheric pressure or higher than the atmospheric pressure by the clean air compressor 41, rubber or the like is not drawn into the vacuum box from the outside. As is clear from the above description, according to the vacuum sealing device of the present invention, the heating device, which constitutes the main part of the processing device, is disposed outside the vacuum box. Vacuum efficiency can be improved. Also, since the heating device is installed externally,
Installation adjustment, replacement, etc. become easier.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing an example of a work to be sealed, Fig. 2 is an example of a holder for holding the work;
is a plan view, b is a cross-sectional side view, FIG. 3 is a schematic configuration explanatory diagram showing an embodiment of the vacuum sealing device according to the present invention, FIG. 4 is an internal processing device, a is a plan view, and b is a plan view. A cross-sectional view, FIG. 5 is a cross-sectional view perpendicular to the conveying direction of the external heating device section. 10...Work, 11...Parts, 12...Container, 13.
...Lid, 20...Holder, 21...
Square groove part, 30... Vacuum generator, 31...
...Vacuum box, 35...Workbench, 50...Internal processing device, 52...Reception plate, 57...
Lifting member, 58... processing pin, 70... heating device, 72... infrared heater. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5

Claims (1)

[Claims] 1. In a vacuum sealing device that heats a workpiece consisting of a container containing parts and a lid in a vacuum and seals it by melting a bonding agent pre-applied to the joint surface of the container and lid at a predetermined temperature, the inside is sealed. A vacuum box that is kept in a vacuum, a workbench that is placed inside the vacuum box and holds a holder on which a work is placed in a working position, and a receiver made of a heat-transparent material that is placed above the workbench. a plate, a vertically movable lifting member equipped with a pressure pin for pressurizing the workpiece from below on the receiving plate, and a heating device disposed outside the vacuum box for heating the pressurized workpiece through the receiving plate. Vacuum sealing equipment consisting of: