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JPS6034803B2 - Thermal head for thermal recording device - Google Patents
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JPS6034803B2 - Thermal head for thermal recording device - Google Patents

Thermal head for thermal recording device

Info

Publication number
JPS6034803B2
JPS6034803B2 JP52122625A JP12262577A JPS6034803B2 JP S6034803 B2 JPS6034803 B2 JP S6034803B2 JP 52122625 A JP52122625 A JP 52122625A JP 12262577 A JP12262577 A JP 12262577A JP S6034803 B2 JPS6034803 B2 JP S6034803B2
Authority
JP
Japan
Prior art keywords
thermal head
thermal
heating resistor
recording
glass layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52122625A
Other languages
Japanese (ja)
Other versions
JPS5456452A (en
Inventor
昌久 福井
利民 原
晄 新見
義章 白戸
芳興 櫨本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP52122625A priority Critical patent/JPS6034803B2/en
Priority to US05/906,359 priority patent/US4296309A/en
Priority to DE19782821950 priority patent/DE2821950A1/en
Publication of JPS5456452A publication Critical patent/JPS5456452A/en
Priority to US06/552,013 priority patent/US4545881A/en
Publication of JPS6034803B2 publication Critical patent/JPS6034803B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electronic Switches (AREA)
  • Non-Adjustable Resistors (AREA)

Description

【発明の詳細な説明】 本発明は熱記録装置に用いられるサーマルヘッドにおい
て高速記録を可能にするサーマルヘッドに関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thermal head used in a thermal recording device that enables high-speed recording.

熱記録方法は、無騒音、メンテナンスフリー、低コスト
及び印字品質が優れている等のため近年各方面から注目
され、研究開発が進められている。
Thermal recording methods have attracted attention from various quarters in recent years due to their noiseless, maintenance-free, low cost, and excellent printing quality, and research and development is progressing.

しかし、静電記録あるいは通電記録等の方法に比較し、
記録速度が小さく、ファクシミリ、電算機用プリンター
等に使用するためには一層の高速化が必要となってきて
いる。
However, compared to methods such as electrostatic recording or current recording,
The recording speed is low, and further speeding up is required for use in facsimiles, computer printers, etc.

熱記録の高速化を図るためには配線方法、電気回路等の
改良と共にサーマルヘッドの高温度使用での耐久性の改
善が必要である。
In order to increase the speed of thermal recording, it is necessary to improve the wiring method, electric circuit, etc., as well as improve the durability of the thermal head when used at high temperatures.

従来、サーマルヘッドの耐久性とグレーズ層ガラスの性
質との関係が明らかでなかったが、種々検討の結果、サ
ーマルヘッドの高温度での耐久性を向上させるためには
、発熱抵抗体の改善と共に、発熱抵抗体を形成せしめる
基板の改善が重要であることが判明した。
Until now, the relationship between the durability of the thermal head and the properties of the glaze layer glass was not clear, but as a result of various studies, in order to improve the durability of the thermal head at high temperatures, it is necessary to improve the heating resistor as well as to improve the thermal head's durability at high temperatures. It has been found that it is important to improve the substrate on which the heating resistor is formed.

本発明はこのような点に鑑み、なされたものであり、被
覆したグレーズ層のガラスの融点を高めることにより、
従来のものに比較して温度での耐久性の優れたサーマル
ヘッドを提供するものである。
The present invention was made in view of these points, and by increasing the melting point of the glass of the coated glaze layer,
The present invention provides a thermal head that is more durable at temperatures than conventional ones.

本発明において、グレーズされる基板の熱伝導性の良い
性質としては、アルミナ、ベリリア、マグネシア等の酸
化物を主成分として暁結させたものが使用される。また
、発熱抵抗体としては、棚化ジルコニウム等の棚化物系
発熱抵抗体は経時的に安定で、抵抗値調整が可能であり
、特に高固有抵抗値の設定が可能なので、耐熱性の良い
基板と組合せて使用される。
In the present invention, as the substrate to be glazed has good thermal conductivity, a substrate mainly composed of oxides such as alumina, beryllia, and magnesia is used. In addition, as heating resistors, shelved zirconium or other shelved heating resistors are stable over time, and their resistance values can be adjusted.In particular, high specific resistance values can be set, so they can be used on substrates with good heat resistance. used in combination with

第1図は本発明に係るサーマルヘッドの断面図で、アル
ミナ上にガラスを被覆した基板1上に発熱抵抗体2、電
気導体3,4、その上に保護層5,6を被覆している。
FIG. 1 is a cross-sectional view of a thermal head according to the present invention, in which a heating resistor 2, electrical conductors 3, 4 are coated on a substrate 1 made of glass coated on alumina, and protective layers 5, 6 are coated thereon. .

即ち、熱伝導の良い材料に低アルカリガラス層を被覆し
た基板、該基板上に発熱抵抗体、電気配線部及び絶縁性
保護膜を付着させた感熱記録装置用サーマルヘッドであ
る。本発明は上記ガラス層として、その組成中K20十
Na20≦1.0重量%で、かつその軟化温度が745
00以上である組成物で被覆するものである。
That is, the thermal head for a heat-sensitive recording device includes a substrate made of a material with good thermal conductivity and coated with a low-alkali glass layer, and a heating resistor, an electric wiring section, and an insulating protective film attached to the substrate. The present invention provides the above-mentioned glass layer whose composition has K20 and Na20≦1.0% by weight, and whose softening temperature is 745%.
00 or more.

このガラス層は厚すぎると蓄熱が生じて高速記録に好ま
しくなく、逆に薄すぎると基板側への熱伝導による熱損
失で消費電力を大きく設定せねばならず、発熱抵抗体の
負担が大きくなり寿命が短かくなる。従って厚さの範囲
は10〜90仏で特に好ましい範囲は25〜60〃であ
る。本発明の実施の態様を実施例によて説明すると次の
通りである。
If this glass layer is too thick, heat will accumulate, which is unfavorable for high-speed recording.On the other hand, if it is too thin, power consumption will have to be set high due to heat loss due to heat conduction to the substrate side, and the burden on the heating resistor will increase. Life expectancy will be shortened. Therefore, the thickness range is 10 to 90 mm, and a particularly preferable range is 25 to 60 mm. The embodiments of the present invention will be explained below using examples.

実施例 1〜7 研摩した0.63柳のアルミナ基板上に種々の組成をも
つガラスを約50仏肌被覆したグレーズドセラミックス
を用意した。
Examples 1 to 7 Glazed ceramics were prepared by coating approximately 50 layers of glass of various compositions on a polished 0.63 willow alumina substrate.

それらのガラス層の分析値(重量%)を表−1に示した
。表−I (注)表一1中Tsはガラス軟化点である。
The analytical values (weight %) of those glass layers are shown in Table-1. Table I (Note) Ts in Table I is the glass softening point.

この基板上にアルゴン中高周波スパッタリング法で約6
00Aのジルコニウム棚化物(ZrB2)、さらに電子
ビーム法で、Ti及びAuを50△及びlrの蒸着した
。これを選択エッチング法でサーマルヘッド発熱抵抗体
及び電気導体をパタ−ニングした。
Approximately 60% of
A zirconium shelf (ZrB2) of 00A was deposited, and Ti and Au were evaporated to a thickness of 50△ and lr by an electron beam method. This was patterned into a thermal head heating resistor and an electric conductor using a selective etching method.

この上にアルゴン中高周波スパッタリング法で酸化シリ
コン(SIC2)を1.5山肌酸化タンタル(Ta20
5)を5山肌保護層として付着させた。このようにして
作ったサーマルヘッドの分解能は4本/柳であった。な
お、このサーマルヘッドを50HZのサイクルで650
〃sのパルス中、1ドット当り3.2Wの電力を1時間
印放したときの発熱抵抗体の抵抗変化率は表−2に示す
通りであった。
On top of this, 1.5 mounds of tantalum oxide (Ta20) was applied using argon medium high frequency sputtering method.
5) was attached as a 5-mount skin protective layer. The resolution of the thermal head made in this way was 4 lines/willow. In addition, this thermal head is operated at 650 Hz at a cycle of 50 Hz.
Table 2 shows the rate of change in resistance of the heating resistor when a power of 3.2 W per dot was applied for 1 hour during the pulse of s.

表‐2 (注) 抵欄胸こ幹。Table-2 (note) Railing chest trunk.

柳R。Willow R.

:テスト前抵抗値R:テスト後抵抗値 なお、上記の印加電力で実用的な印字濃度が得られた。:Resistance value before test R:Resistance value after test Note that a practical printing density was obtained with the above applied power.

表−2に示されるように、ガラス層の軟化点及びアルカ
リ成分(K20十Na20)の含有量がサーマルヘッド
の高温度での耐久性に著しい影響を与えていることが判
明し、Na20十K20SI.0%、軟化点745oo
以上で好結果を得た。表−2中No.6のサーマルヘッ
ドを上記条件で50脚時間の耐久試験を行ったところ抵
抗値変化は3.5%以下であった。
As shown in Table 2, it was found that the softening point of the glass layer and the content of alkaline components (K20 + Na20) have a significant effect on the durability of the thermal head at high temperatures. .. 0%, softening point 745oo
Good results were obtained with the above. No. in Table-2. When the thermal head No. 6 was subjected to a durability test for 50 hours under the above conditions, the change in resistance value was 3.5% or less.

抵抗変化率が10%を超えれば寿命が来たと判定される
ので、M.6のサーマルヘッド‘ま500時間以上の寿
命を持ち、本発明に該当しないNo.1,2,5の寿命
は1時間以内であった。実施例 8〜15 次に、前記ジルコニウム棚化物の発熱抵抗体に変えて、
他の棚化物発熱抵抗体を使ったサーマルヘッドもこつい
て示す。
If the resistance change rate exceeds 10%, it is determined that the life has come to an end. No. 6 thermal head has a lifespan of more than 500 hours and does not fall under the scope of the present invention. The lifespan of samples 1, 2, and 5 was within 1 hour. Examples 8 to 15 Next, instead of the heating resistor of the zirconium shelf,
Thermal heads using other shelved heating resistors are also demonstrated.

このときのガラス層は表−1中のNo.4を用いた。そ
の他の構成は前記ジルコニウム側化物のサーマルヘッド
と同じである。このサーマルヘツド‘こ対して、50H
Zのサイクル、パルス中650一s、ドット当り3.2
Wの電力を1時間印加した後の抵抗変化率を表−3に示
す。やはり、本発明にかかるガラス層の効果が認められ
た。表−3 また発熱抵抗体をニクロム、窒化タンタル(TaN)と
した場合にもK20十Na20≦1.0%,TSZ74
500で効果が認められた。
The glass layer at this time was No. 1 in Table-1. 4 was used. The rest of the structure is the same as that of the zirconium compound thermal head. For this thermal head, 50H
Z cycle, 650 s during pulse, 3.2 per dot
Table 3 shows the resistance change rate after applying W power for 1 hour. Again, the effect of the glass layer according to the present invention was recognized. Table 3 Also, when the heating resistor is made of nichrome or tantalum nitride (TaN), K20 + Na20≦1.0%, TSZ74
The effect was recognized at 500.

第2図に示した結線図を有する本発明によるサーマルヘ
ッドで、m=24,n=64とし、A4判の有効記録中
192肌に153針固の発熱抵抗体(R,.〜Rmn)
を一列に配列した。
In the thermal head according to the present invention having the wiring diagram shown in Fig. 2, m = 24, n = 64, and the heating resistor (R, . - Rmn) has 192 needles and 153 needles during the effective recording of A4 size.
were arranged in a line.

主走査8本/側の分解能をもつファクシミリ用サーマル
ヘッド‘こおいて、例えば左よりり印字すると、上部共
通電極のA,と下部共通電極を記録信号に応じ、通電印
字し、順次A2〜Amと下部共通電極を通電印字して、
A4判有効記録中192側を印字し、さらにパルスモー
ターで紙を送り、又、上述の印字をくり返しA4判記録
長さ30比肋を副走査8本/収の分解能で80W/ゆで
記録するとき、印字パルス中を650仏s、紙送り分軌
hsとするA4判を印字するのに約1分である。
For example, when printing from the left using a facsimile thermal head with a resolution of 8 main scan lines/side, the upper common electrode A and the lower common electrode are energized and printed according to the recording signal, and sequentially from A2 to A2 to Am. energize and print the lower common electrode,
When printing on the 192 side during A4 size valid recording, further feeding the paper with a pulse motor, and repeating the above printing to record A4 size recording length 30 ratios at a resolution of 8 sub-scans / 80 W / boiling. It takes about 1 minute to print an A4 size sheet with a print pulse of 650 French seconds and a paper feed distance of 1 minute.

すなわち、熱記録ファクシミリ装置において、王、副走
査館8本/側の分解能で1分機が実現できるものであり
、本発明提供のサーマルヘッドは熱記録装置の高速化を
図るうえで、極めて有用なものである。
In other words, in a thermal recording facsimile device, a one-minute machine can be realized with a resolution of 8 sub-scanning lines per side, and the thermal head provided by the present invention is extremely useful in increasing the speed of thermal recording devices. It is something.

又、上述のサーマルヘッドで信号分配を2系列に分け、
例えばA,〜A,.とA,2〜A24を併用して記録す
るよう設計すれば記録速度は約2倍となり、A4判を3
硯砂で印字することも可能である。
In addition, the signal distribution is divided into two systems using the above-mentioned thermal head,
For example, A, ~A, . If designed to record in combination with A,2 to A24, the recording speed will be approximately doubled, and A4 size can be recorded by 3 times.
It is also possible to print with inkstone sand.

本発明は上記の実施例に限定されるものでなく、I A
I203の代りに、ベリリア、サファイア等のセラミッ
クス及び金属の熱伝導率の大きいもので良い。
The present invention is not limited to the above embodiments, but IA
Instead of I203, ceramics such as beryllia and sapphire, and metals with high thermal conductivity may be used.

2 保護層はSi02,Ta205,N203,Mg0
,Zの2等の酸化物又はSIC等でも良い。
2 Protective layer is Si02, Ta205, N203, Mg0
, Z2, etc. or SIC may be used.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明によるサーマルヘッドの断面による説明
図であり、第2図は本発明によるサーマルヘッドを使用
する時の結線図を示すものである。 1・・・・・・ガラスを被覆した基板、2・・・・・・
発熱抵抗体、3,4……電気導体、5,6……保護層、
A,〜Am・・・・・・上部共通リード部、{R,.〜
R,n,R2,〜R2n, Rm,〜Rmn}・・・・
・・発熱抵抗体(m×n個)、Y・・・・・・分離ダイ
オード、B〜Bn・・・・・・下部共通リード部。 第1図 第2図
FIG. 1 is an explanatory cross-sectional view of a thermal head according to the present invention, and FIG. 2 is a wiring diagram when using the thermal head according to the present invention. 1...Substrate coated with glass, 2...
Heat generating resistor, 3, 4... Electric conductor, 5, 6... Protective layer,
A, ~Am... Upper common lead part, {R, . ~
R, n, R2, ~R2n, Rm, ~Rmn}...
... Heating resistor (m x n pieces), Y ... Separation diode, B - Bn ... Lower common lead part. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】 1 熱伝導性の良い物質の基板と、該基板上に被覆され
ていて軟化点が745℃以上で、その含有する酸化ナト
リウムと酸化カリウムの合量が1.0重量%以下の低ア
ルカリガラス層と、該低アルカリガラス層上に配された
発熱抵抗体とを有することを特徴とする熱記録装置用サ
ーマルヘツド。 2 低アルカリガラス層の厚さが10〜90μmである
特許請求の範囲第1項記載のサーマルヘツド。 3 発熱抵抗体が硼化ジルコニウムである特許請求の範
囲第1項ないし第2項記載のサーマルヘツド。
[Claims] 1. A substrate made of a material with good thermal conductivity, which is coated on the substrate and has a softening point of 745°C or higher, and contains a total amount of sodium oxide and potassium oxide of 1.0% by weight. 1. A thermal head for a thermal recording device, comprising the following low alkali glass layer and a heating resistor disposed on the low alkali glass layer. 2. The thermal head according to claim 1, wherein the low alkali glass layer has a thickness of 10 to 90 μm. 3. The thermal head according to claims 1 and 2, wherein the heating resistor is zirconium boride.
JP52122625A 1977-05-19 1977-10-13 Thermal head for thermal recording device Expired JPS6034803B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP52122625A JPS6034803B2 (en) 1977-10-13 1977-10-13 Thermal head for thermal recording device
US05/906,359 US4296309A (en) 1977-05-19 1978-05-15 Thermal head
DE19782821950 DE2821950A1 (en) 1977-05-19 1978-05-19 Head for thermal printing with stable resistance - obtd. by sputtering a metal boride resistance heating element onto a glazed substrate
US06/552,013 US4545881A (en) 1977-05-19 1983-11-16 Method for producing electro-thermal transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52122625A JPS6034803B2 (en) 1977-10-13 1977-10-13 Thermal head for thermal recording device

Publications (2)

Publication Number Publication Date
JPS5456452A JPS5456452A (en) 1979-05-07
JPS6034803B2 true JPS6034803B2 (en) 1985-08-10

Family

ID=14840586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52122625A Expired JPS6034803B2 (en) 1977-05-19 1977-10-13 Thermal head for thermal recording device

Country Status (1)

Country Link
JP (1) JPS6034803B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297636U (en) * 1989-01-24 1990-08-03

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841738A (en) * 1981-09-04 1983-03-11 Narumi China Corp Glaze composition for ceramic base plates

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE TRANSACTIONS ON PARTS,HYBRIDS,AND PACK-AGING *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297636U (en) * 1989-01-24 1990-08-03

Also Published As

Publication number Publication date
JPS5456452A (en) 1979-05-07

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