JPS6034834B2 - gas laser equipment - Google Patents
gas laser equipmentInfo
- Publication number
- JPS6034834B2 JPS6034834B2 JP9969977A JP9969977A JPS6034834B2 JP S6034834 B2 JPS6034834 B2 JP S6034834B2 JP 9969977 A JP9969977 A JP 9969977A JP 9969977 A JP9969977 A JP 9969977A JP S6034834 B2 JPS6034834 B2 JP S6034834B2
- Authority
- JP
- Japan
- Prior art keywords
- gas laser
- voltage
- current
- discharge
- amplifier circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 230000003321 amplification Effects 0.000 claims description 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 2
- 230000007423 decrease Effects 0.000 description 5
- 230000000087 stabilizing effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 235000007516 Chrysanthemum Nutrition 0.000 description 1
- 244000189548 Chrysanthemum x morifolium Species 0.000 description 1
- 241000282373 Panthera pardus Species 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明は、複数個の放電路を有するガスレーザ管を備え
たガスレーザ装置に関し、特に前記放電路それぞれの放
電電流安定化と、それぞれの放電電流の平衛化を図った
ガスレーザ装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas laser device equipped with a gas laser tube having a plurality of discharge paths, and in particular to stabilizing the discharge current of each of the discharge paths and leveling out the discharge current of each of the discharge paths. Related to gas laser equipment.
従来、複数個の放電路を有するガスレーザ管を備えたガ
スレーザ装置では、放電路の放電電流を一定にするため
、それぞれの放電路に定電流回路を設けることが行なわ
れている。すなわち、第１図に示すように、レーザ電源
１，１′のそれぞれ一つの出力端を安定抵抗３，３′を
通してガスレーザ管４のアノード６，６′に接続し、他
端をトランジスタ１０，１０′と、電流検出抵抗１３，
１３′とを通してアースし、さらにガスレーザ管４のカ
ソード５もアース接続する。かくして、ガスレーザ管４
の放電路９，９′はそれぞれ放電し、その放電電流を電
流検出抵抗１３，１３′で検出し、その出力電圧と、基
準電源１４，１４′との差電圧はトランジスタ１０，１
０′のベース電流を供給し、差電圧が一定になるように
制御している。しかし、トランジスタ１０，１０′の周
囲温度が上昇し、トランジスタ１０，１０′の温度が上
昇した場合、トランジスター０，１０′のコレクタ飽和
電流も上昇し、前記放電電流自身の変化要因がなくとも
、この放電電流は増加し、また、トランジスタ１０，１
０′の温度特性の不均一によって、それぞれの放電電流
は不平衡状態となる。本発明の目的は、温度変化やレー
ザ電源出力電圧の変動があったも複数個の放電路のそれ
ぞれの放電電流の安定化と、平衝化が保たれるガスレー
ザ装置を提供することにある。Conventionally, in a gas laser device equipped with a gas laser tube having a plurality of discharge paths, a constant current circuit is provided in each discharge path in order to keep the discharge current of the discharge paths constant. That is, as shown in FIG. 1, one output end of each laser power source 1, 1' is connected to an anode 6, 6' of a gas laser tube 4 through a stabilizing resistor 3, 3', and the other end is connected to an anode 6, 6' of a gas laser tube 4. ', current detection resistor 13,
13', and the cathode 5 of the gas laser tube 4 is also grounded. Thus, the gas laser tube 4
The discharge paths 9 and 9' are discharged, and the discharge current is detected by the current detection resistors 13 and 13', and the difference voltage between the output voltage and the reference power supply 14 and 14' is detected by the transistors 10 and 1.
A base current of 0' is supplied and the differential voltage is controlled to be constant. However, if the ambient temperature of the transistors 10, 10' increases, and the temperature of the transistors 10, 10' increases, the collector saturation current of the transistors 0, 10' also increases, even if there is no change factor in the discharge current itself. This discharge current increases and also transistors 10,1
Due to the non-uniformity of the temperature characteristics at 0', the respective discharge currents are in an unbalanced state. SUMMARY OF THE INVENTION An object of the present invention is to provide a gas laser device in which the discharge currents of a plurality of discharge paths can be stabilized and balanced even when there are temperature changes or fluctuations in the laser power output voltage.
次に第２図について本発明を具体的に説明する。Next, the present invention will be specifically explained with reference to FIG.
レーザ電源１，１′のそれぞれ一つの出力端を安定抵抗
３，３′を通してガスレーザ管４のアノード６，６′に
接続し、池端を電流制御素子であるトランジスタ１０，
１０′と、電流検出抵抗１３，１３′とを通して、ガス
レーザ管４のカソード５と同電位のアースに接続すると
、ガスレーザ管４の放電路９，９′はそれぞれ放電し、
ミラー７，７′が構成する光共振器と相互作用を発振し
、レーザ光８を発生する。そして、放電路９，９′の放
電電流は電流検出抵抗１３，１３′の両端の出力電圧Ｖ
ｊ，Ｖｉ′となる。通常、出力電圧Ｖｉ，Ｖｉ′と基準
電源１４の出力電圧Ｖｓとを比較増幅器１２，１２′で
増幅し、Ｖｏ，Ｖひとして、比較増幅器１１，１１′に
供給される。また、出力電圧ＶｉとＶｉ′との差電圧を
比較増幅器１６で増幅し、次式のＶｉ″となる。Ｖｉ″
＝Ｋ（Ｖｉ−Ｖｉ′）；Ｋは増幅係数このＶｉは比較増
幅器１１と、ィンバータ１５を通じて比較増幅器１１′
とに供給される。One output terminal of each of the laser power supplies 1 and 1' is connected to the anode 6 and 6' of the gas laser tube 4 through a stabilizing resistor 3 and 3', and the terminal end is connected to a transistor 10, which is a current control element.
10' and current detection resistors 13, 13', and are connected to the ground having the same potential as the cathode 5 of the gas laser tube 4, the discharge paths 9, 9' of the gas laser tube 4 are discharged, respectively.
The laser beam 8 is generated by interacting with the optical resonator formed by the mirrors 7 and 7'. The discharge current in the discharge paths 9 and 9' is determined by the output voltage V across the current detection resistors 13 and 13'.
j, Vi′. Normally, the output voltages Vi, Vi' and the output voltage Vs of the reference power supply 14 are amplified by comparison amplifiers 12, 12', and are supplied as Vo, V to the comparison amplifiers 11, 11'. Further, the difference voltage between the output voltages Vi and Vi' is amplified by the comparator amplifier 16, and becomes Vi'' of the following formula.Vi''
=K(Vi-Vi'); K is the amplification coefficient; Vi is the comparison amplifier 11 and the comparison amplifier 11' through the inverter 15.
and will be supplied.
比較増幅器１ １，１１′はＶｏとＶｉ″との差電圧と
、Ｖｏ′とＶｉ″との差電圧とをそれぞれ増幅し、トラ
ンジスタ１０，１０′のベースに供給し、差電圧が０に
なるように制御している。ここで、トランジスタ１０，
１０′の周囲温度が上昇し、トランジスタ１０，１０′
の温度が上昇した場合や、レーザ電源１，１′の出力電
圧が上昇した場合に、ガスレーザ管４の放電路９，９′
の電流は増加し、電流検出抵抗１３，１３′の出力電圧
ｙｉ，Ｖｊ′も負電圧が増加する。Comparison amplifier 1 1, 11' amplifies the difference voltage between Vo and Vi'' and the difference voltage between Vo' and Vi'', respectively, and supplies them to the bases of transistors 10 and 10', so that the difference voltage becomes 0. It is controlled as follows. Here, the transistor 10,
10' ambient temperature increases, transistors 10, 10'
When the temperature of the gas laser tube 4 increases, or when the output voltage of the laser power supplies 1 and 1' increases, the discharge paths 9 and 9' of the gas laser tube 4
The current increases, and the negative voltages of the output voltages yi and Vj' of the current detection resistors 13 and 13' also increase.
前言己出力電圧Ｖｉ，Ｖｉ′の負電圧が増加すると比較
増幅器１２，１２′の出力電圧Ｖｏ，Ｖｏ′の負電圧は
増加し、比較増幅器１１，１１′の出力の負電圧が減少
し、トランジスタ１０，１０′のベース、エミッタ電流
を減少させ、前記それぞれの放電電流の増加を阻止する
ことによりその放電電流を安定化する。また、前記それ
ぞれの放電電流に差が生じた場合電流検出抵抗１３，１
３′の出力電圧Ｖｉ，Ｖｉ′にも差が生じる、そこでＶ
ｉの負電圧がＶｉ′の負電圧より大きくなった場合、比
較増幅器１６の出力電圧の負電圧は増加し、比較増幅器
１１の出力電圧の負電圧は減少し、トランジスタ１０の
べ−ス電流を減少させＶｉの負電圧を減少させる。一方
ィンバータ１５の出力の負電圧は減少し、比較増幅器１
１′の出力電圧は増加し、トランジスタ１０′のベース
電流を増加させ、Ｖｒを増加させ、前記のそれぞれの放
電電流を平衛化する。よって、本発明のガスレーザ装置
は、周囲温度やレーザ電源出力電圧が変動しても、前記
のそれぞれの放電電流安定化と、それぞれの放電電流の
平衝化が得られる。When the negative voltages of the output voltages Vi, Vi' increase, the negative voltages of the output voltages Vo, Vo' of the comparison amplifiers 12, 12' increase, the negative voltages of the outputs of the comparison amplifiers 11, 11' decrease, and the output voltages of the transistors 12, 12' decrease. The base and emitter currents of 10 and 10' are reduced to prevent the respective discharge currents from increasing, thereby stabilizing the discharge currents. In addition, when a difference occurs between the respective discharge currents, the current detection resistors 13 and 1
A difference also occurs in the output voltages Vi and Vi' of 3', so V
When the negative voltage of i becomes larger than the negative voltage of Vi', the negative voltage of the output voltage of the comparison amplifier 16 increases, the negative voltage of the output voltage of the comparison amplifier 11 decreases, and the base current of the transistor 10 increases. and decrease the negative voltage of Vi. On the other hand, the negative voltage at the output of the inverter 15 decreases, and the comparator amplifier 1
The output voltage of 1' increases, increasing the base current of transistor 10', increasing Vr, and normalizing the respective discharge currents. Therefore, in the gas laser device of the present invention, even if the ambient temperature or the laser power supply output voltage fluctuates, the above-mentioned stabilization of each discharge current and equalization of each discharge current can be achieved.
第１図は従来のガスレーザ装置を示す概略ブロック図、
第２図は本発明のガスレーザ装置を示す概略ブロック図
である。
１，１′……レーザ電源、４……ガスレーザ管、５……
カソード、６，６′……アノード、７，７′…・・・光
共振器、８…・・・レーザ出力、９，９′……放電路、
１０，１０′・・・…電流制御素子（トランジスタ）、
１１，１１′，１２，１２′，１６…・・・比較増幅器
、１３，１３′・・・・・・電流検出抵抗、１４，１４
′・・・・・・基準電源、１５・…・・ィンバータ。
豹’図
菊そ図Figure 1 is a schematic block diagram showing a conventional gas laser device.
FIG. 2 is a schematic block diagram showing the gas laser device of the present invention. 1, 1'... Laser power supply, 4... Gas laser tube, 5...
Cathode, 6, 6'... Anode, 7, 7'... Optical resonator, 8... Laser output, 9, 9'... Discharge path,
10, 10'... Current control element (transistor),
11, 11', 12, 12', 16... Comparison amplifier, 13, 13'... Current detection resistor, 14, 14
'...Reference power supply, 15...Inverter. Leopard's chrysanthemum
Claims (1)
ザ管用のレーザ電源１，１′と、該放電路の放電電流を
別々に検出する電流検出抵抗１３，１３′と、一定の電
圧を発生する基準電源１４と、基準電源１４の電圧と電
流検出抵抗１３，１３′のそれぞれの出力電圧との差電
圧を増幅する増幅回路１２，１２′と、電流検出抵抗１
３，１３のそれぞれの出力電圧の差電圧を増幅する増幅
回路１６と、増幅回路１６の出力電圧を反転するインバ
ータ１５と、増幅回路１２′の出力電圧とインバータ１
５の出力電圧の差電圧を増幅する増幅回路１１′と、増
幅回路１２の出力電圧と増幅回路１６の出力電圧との差
電圧を増幅する増幅回路１１と、増幅回路１１，１１′
の出力電圧により制御される前記レーザ電源の電流制御
素子１０，１０′とを具備し、この制御により前記放電
電流を一定に維持するようにしたガスレーザ装置。1. A gas laser tube having a plurality of discharge paths, laser power supplies 1 and 1' for this laser tube, current detection resistors 13 and 13' that separately detect the discharge current of the discharge paths, and generating a constant voltage. A reference power supply 14, amplification circuits 12 and 12' that amplify the difference voltage between the voltage of the reference power supply 14 and the respective output voltages of the current detection resistors 13 and 13', and a current detection resistor 1
an amplifier circuit 16 that amplifies the difference between the output voltages of the amplifier circuits 3 and 13; an inverter 15 that inverts the output voltage of the amplifier circuit 16;
an amplifier circuit 11' that amplifies the difference voltage between the output voltages of the amplifier circuit 12 and the output voltage of the amplifier circuit 16;
A gas laser device comprising current control elements 10 and 10' of the laser power source controlled by the output voltage of the gas laser device, the discharge current being maintained constant through this control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9969977A JPS6034834B2 (en) | 1977-08-19 | 1977-08-19 | gas laser equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9969977A JPS6034834B2 (en) | 1977-08-19 | 1977-08-19 | gas laser equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5432997A JPS5432997A (en) | 1979-03-10 |
| JPS6034834B2 true JPS6034834B2 (en) | 1985-08-10 |
Family
ID=14254289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9969977A Expired JPS6034834B2 (en) | 1977-08-19 | 1977-08-19 | gas laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6034834B2 (en) |
-
1977
- 1977-08-19 JP JP9969977A patent/JPS6034834B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5432997A (en) | 1979-03-10 |
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