JPS6035250B2 - How to bond flexible film - Google Patents
How to bond flexible filmInfo
- Publication number
- JPS6035250B2 JPS6035250B2 JP53074441A JP7444178A JPS6035250B2 JP S6035250 B2 JPS6035250 B2 JP S6035250B2 JP 53074441 A JP53074441 A JP 53074441A JP 7444178 A JP7444178 A JP 7444178A JP S6035250 B2 JPS6035250 B2 JP S6035250B2
- Authority
- JP
- Japan
- Prior art keywords
- flexible film
- filter
- hollow cylinder
- film
- bonding method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
- B29C66/45—Joining of substantially the whole surface of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/78—Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
- B29C65/7841—Holding or clamping means for handling purposes
- B29C65/7847—Holding or clamping means for handling purposes using vacuum to hold at least one of the parts to be joined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/112—Single lapped joints
- B29C66/1122—Single lap to lap joints, i.e. overlap joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
- B29C65/52—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/48—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
- B29C65/52—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive
- B29C65/526—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive by printing or by transfer from the surfaces of elements carrying the adhesive, e.g. using brushes, pads, rollers, stencils or silk screens
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Light Receiving Elements (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は可榛性フィルムの接着方法に関し、とくに、光
電変換素子例えばダイオード・マトリックスを有する固
体撮像板に、カラーフィルターを装着するに際し、操着
剤層に気泡が残らず、かつ接着剤の厚さが均一になる接
着方法を提供するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for adhering a flexible film, and in particular, when attaching a color filter to a solid-state image pickup plate having a photoelectric conversion element, such as a diode matrix, it is possible to prevent air bubbles from remaining in the adhesive layer. The object of the present invention is to provide an adhesive method in which the thickness of the adhesive is uniform.
近年、電荷転送デバイスとダイオード・マトリックスを
シリコン単結晶基板上に同時に作りこみ（以後イメージ
・センサ−と称す）これを固体撮像板として使用する試
みが工業化されつつある。In recent years, attempts have been made to manufacture a charge transfer device and a diode matrix simultaneously on a silicon single crystal substrate (hereinafter referred to as an image sensor) and use this as a solid-state imaging plate.
白黒の場合はフィルターを必要としないが、カラー化す
るためにはイメージセンサを３枚使用し、外部フィルタ
ーを各々の光学系にセットするか、もしくは１枚のイメ
ージセンサー上にドット又はマトリックス又はストライ
プ状に形成されたカラーフィルターを直俵貼りつける必
要がある。本発明は後者に関する方法に好適な方法を提
供するものであり、以後単板カラー固体撮像管デバイス
の例について従来法及び本発明の方法を説明する。従釆
の方法は第１図Ａに示す如く接着剤１を塗布したィメ−
ジセンサー２上にカラーフィルター３を載せ、位置合せ
した後、フィルター保持棒４により押圧していたため、
Ｂのごとく接着剤中に気泡５が残留し、固体撮像板とし
て使用した場合気泡５による異常光散乱のため画像欠陥
を引き起す恐れがあった。近年のイメージセンサーは極
めて微細パターンを有し気泡は極めて都合の悪いもので
ある。なお、接着時もしくは接着後、真空を用いて気泡
を抜く等の方法も考えられるが、数仏〜数１０仏の小さ
い気泡についてはほとんど効果はない。本発明は、フィ
ルター等の可孫性フィルムを凸状となし、中央部から接
着するという独特の方法を用いることを特徴とするもの
で、本発明の一美施例にかかる固体撮擬装層の製造方法
を第２図により説明する。For black and white, no filter is required, but for color, three image sensors are used and an external filter is set in each optical system, or dots, matrices, or stripes are placed on one image sensor. It is necessary to attach a color filter formed in the shape of a straight bale. The present invention provides a method suitable for the latter method, and hereinafter, the conventional method and the method of the present invention will be explained using an example of a single-plate color solid-state image pickup tube device. The following method is as shown in Fig. 1A.
After placing the color filter 3 on the sensor 2 and aligning it, the filter was pressed with the filter holding rod 4.
As shown in B, air bubbles 5 remained in the adhesive, and when used as a solid-state imaging plate, the air bubbles 5 caused abnormal light scattering, which could cause image defects. Recent image sensors have extremely fine patterns, and bubbles are extremely inconvenient. Note that a method such as using a vacuum to remove air bubbles during or after adhesion may be considered, but this method is hardly effective for small air bubbles of several to several tens of sizes. The present invention is characterized by using a unique method of forming a flexible film such as a filter into a convex shape and adhering it from the center. The manufacturing method will be explained with reference to FIG.
１１はカラー固体撮像板よりなるイメージセンサー１２
上に形成された接着剤である。Reference numeral 11 denotes an image sensor 12 consisting of a color solid-state image pickup plate.
Adhesive formed on top.
さて、中空筒１４は可操性フィルムよりなるカラーフィ
ルター１３が円形であれば、円筒形状を有し、その外壁
にフィルター１３の外周部を吸着する貫通孔１５を有し
ている。貫通孔１５は外壁部に単独の孔を複数個形成す
るかもしくは二重壁にしても良い。まずＡのごとくフィ
ル夕−１３を貫通孔１５の先端に貫通孔１５を真空排気
して吸着し、接着剤１１を塗布したイメージセンサー１
２上に仮止め（セット）する。ついで、中空筒１４をフ
ィルムが接着剤の直前にくるまで移動させ、そしてその
内部１７を外部に比べて陽圧にし、第２図Ｂに示す如く
フィルターを外向きに凸にした後、接着剤１１にわずか
に接触させる。Now, if the color filter 13 made of a flexible film is circular, the hollow cylinder 14 has a cylindrical shape, and has a through hole 15 on its outer wall to attract the outer circumference of the filter 13. The through-holes 15 may be formed by forming a plurality of individual holes in the outer wall or may have a double wall. First, as shown in A, a filter 13 is attached to the tip of the through hole 15 by vacuum evacuation, and an adhesive 11 is applied to the image sensor 1.
Temporarily fix (set) it on 2. Next, the hollow cylinder 14 is moved until the film is just in front of the adhesive, and the inside 17 is made to have a positive pressure compared to the outside, so that the filter is convexed outward as shown in FIG. 2B, and then the adhesive is removed. 11.
この時点でイメージセンサー１２とフィルター１３を位
置合せし、中空筒１４の内部の圧を減じながら押し下げ
るとよい。こうすると、フィルター１３はまず中央部の
１６で接し、その後外周部に向って接触が広がるための
気泡は全く残留しない。こうして接触がなされたのち、
フィルター１３を中空筒から第２図Ｃのごとく離脱させ
る。なお、中空筒１４の内部には位置合せ用光学系の対
物レンズ部を収納するが、又は中空筒１４を極端に薄く
して上部を透明ガラスで封止しておき、それを通して位
置合せする等の方法を用いることもできる。At this point, it is preferable to align the image sensor 12 and the filter 13 and push them down while reducing the pressure inside the hollow cylinder 14. In this way, the filters 13 first contact each other at the central portion 16, and then the contact spreads toward the outer periphery, so that no air bubbles remain at all. After this contact was made,
The filter 13 is removed from the hollow cylinder as shown in FIG. 2C. Note that the objective lens part of the alignment optical system is housed inside the hollow tube 14, or the hollow tube 14 is made extremely thin and the upper part is sealed with transparent glass, and the alignment is performed through that. The following method can also be used.
なお、本実施例として中空筒内部の圧を上げた場合を説
明したが、円筒内部は常圧とし、外部を減圧にしても全
く同じ効果が得られる。中空筒の内部の圧を高める方が
容易である。以上の方法を用いて可犠牲フィルターを接
着した場合、中心部から接着剤とフィルターの接触が始
まり、順次外周に接触が進むため、極めて不都合な気泡
の残留は全くない。なお、本発明はフィルターと撮像板
の例に限らず、可凝性フィルムの接着に広く応用できる
ものである。以上のように、本発明は可操性フィルムの
接着にすぐれた効果を発揮するものである。Although the present embodiment has been described in which the pressure inside the hollow cylinder is increased, the same effect can be obtained even if the inside of the cylinder is maintained at normal pressure and the outside is reduced in pressure. It is easier to increase the pressure inside the hollow cylinder. When a sacrificial filter is bonded using the above method, contact between the adhesive and the filter starts from the center and gradually progresses to the outer periphery, so there is no residual air bubbles, which is extremely inconvenient. Note that the present invention is not limited to the example of filters and imaging plates, but can be widely applied to adhesion of coagulable films. As described above, the present invention exhibits excellent effects on adhesion of flexible films.
第１図Ａ，Ｂは従来のカラーフィルターの接着工程図、
第２図Ａ，Ｂ，Ｃは本発明の一実施例にかかるカラーフ
ィルターの接着工程図である。
１１・・・・・・接着剤、１２・・・・・・イメージセ
ンサ−、１３・・・・・・フィルター、１４・・・・・
・中空筒、１５・・・・・・貫通孔。
繁２図
簾１図Figures 1A and B are conventional color filter bonding process diagrams.
FIGS. 2A, B, and C are color filter bonding process diagrams according to an embodiment of the present invention. 11...Adhesive, 12...Image sensor, 13...Filter, 14...
・Hollow tube, 15...through hole. Traditional 2 drawings 1 drawing
Claims (1)
止めし、前記中空筒内の気圧をこの中空筒外に比べ陽圧
として前記フイルムを外向きに凸となし、前記中空筒を
下げて前記フイルムを、主面に接着剤が塗布された基板
主面に接着することを特徴とする可撓性フイルムの接着
方法。 ２ 可撓性フイルムを外向きに凸となし、中空筒を下げ
るとともに中空筒内の気圧を下げ、前記可撓性フイルム
の中心部から外周縁に向つて接着を進行させることを特
徴とする特許請求の範囲第１項に記載の可撓性フイルム
の接着方法。 ３ 基板が固体撮像板よりなり、フイルムがカラーフイ
ルターよりなることを特徴とする特許請求の範囲第１項
に記載の可撓性フイルムの接着方法。 ４ 中空筒の壁部内に、この壁部先端に開孔部を有する
貫通孔が形成され、この貫通孔を真空系に接続し、前記
壁部先端にて可撓性フイルムを保持することを特徴とす
る特許請求の範囲第１項に記載の可撓性フイルムの接着
方法。[Claims] 1. A flexible film is temporarily attached to the tip of a hollow cylinder that moves up and down, and the air pressure inside the hollow cylinder is set to be a positive pressure compared to the outside of the hollow cylinder, so that the film is made to convex outward. . A flexible film bonding method, characterized in that the hollow cylinder is lowered and the film is bonded to a main surface of a substrate whose main surface is coated with an adhesive. 2. A patent characterized in that the flexible film is made outwardly convex, the hollow tube is lowered and the air pressure inside the hollow tube is lowered, and the adhesion progresses from the center of the flexible film toward the outer periphery. A flexible film bonding method according to claim 1. 3. The flexible film bonding method according to claim 1, wherein the substrate is made of a solid-state imaging plate and the film is made of a color filter. 4. A through hole having an opening at the tip of the wall is formed in the wall of the hollow cylinder, the through hole is connected to a vacuum system, and the flexible film is held at the tip of the wall. A flexible film bonding method according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53074441A JPS6035250B2 (en) | 1978-06-19 | 1978-06-19 | How to bond flexible film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53074441A JPS6035250B2 (en) | 1978-06-19 | 1978-06-19 | How to bond flexible film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS552020A JPS552020A (en) | 1980-01-09 |
| JPS6035250B2 true JPS6035250B2 (en) | 1985-08-13 |
Family
ID=13547315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53074441A Expired JPS6035250B2 (en) | 1978-06-19 | 1978-06-19 | How to bond flexible film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6035250B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4316757A (en) * | 1980-03-03 | 1982-02-23 | Monsanto Company | Method and apparatus for wax mounting of thin wafers for polishing |
| DE10052293A1 (en) * | 2000-10-20 | 2002-04-25 | B L E Lab Equipment Gmbh | Method for depositing a thin-walled, flat wafer substrate onto a mounting carrier with a level protective layer like wax brings the substrate into contact with the protective layer through making a gap and arching. |
-
1978
- 1978-06-19 JP JP53074441A patent/JPS6035250B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS552020A (en) | 1980-01-09 |
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