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JPS6035316B2 - SiC-Si↓3N↓4-based sintered composite ceramics - Google Patents
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JPS6035316B2 - SiC-Si↓3N↓4-based sintered composite ceramics - Google Patents

SiC-Si↓3N↓4-based sintered composite ceramics

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Publication number
JPS6035316B2
JPS6035316B2 JP57140833A JP14083382A JPS6035316B2 JP S6035316 B2 JPS6035316 B2 JP S6035316B2 JP 57140833 A JP57140833 A JP 57140833A JP 14083382 A JP14083382 A JP 14083382A JP S6035316 B2 JPS6035316 B2 JP S6035316B2
Authority
JP
Japan
Prior art keywords
sic
si3n4
weight
composite ceramics
fibrous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57140833A
Other languages
Japanese (ja)
Other versions
JPS5930770A (en
Inventor
保夫 樋端
和夫 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57140833A priority Critical patent/JPS6035316B2/en
Publication of JPS5930770A publication Critical patent/JPS5930770A/en
Publication of JPS6035316B2 publication Critical patent/JPS6035316B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は、新規なSIC−Si3N4系競給複合セラミ
ックス材料に関し、より詳しくは、繊維状SICを分散
含有し、高い電気伝導性を備えた放電加工可能なSi3
N4締結体に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a novel SIC-Si3N4-based competitive composite ceramic material, and more specifically, the present invention relates to a novel SIC-Si3N4-based competitive composite ceramic material, and more specifically, a Si3 material containing dispersed fibrous SIC and having high electrical conductivity and capable of electrical discharge machining.
Regarding the N4 fastener.

Si3N4を主成分とする窒化ケイ素系セラミックスは
、強度、耐酸化性、耐摩耗性、耐熱衝特性等に優れてい
るので、ガスタービン用耐熱部材、熱交換器用材料等と
して、又、耐摩耗性に優れているので各種形態のダィカ
スト型村やノズル等の材料として注目されている。
Silicon nitride ceramics, whose main component is Si3N4, have excellent strength, oxidation resistance, abrasion resistance, thermal shock resistance, etc., so they are used as heat-resistant parts for gas turbines, materials for heat exchangers, etc. Because of its excellent properties, it is attracting attention as a material for various types of die-casting holes, nozzles, etc.

一般に高強度にして高密度のSi3N4セラミックスを
得る為には、熱間加圧成形法、いわゆるホットプレス法
によることが好ましいとされている。しかるに、この方
法においては、Si3N4素材を比較的単純な形状の押
し型内で加圧する為、例えば機械用歯車、ガスタービン
用翼車等の複雑な形状の部品を成形製造することは、困
難であり、この点がホットプレス法の大きな技術的制約
となっている。従って、Si3N4系セラミックスの種
々の優れた特性を有効に利用し、在来の金属材料に代え
てこれを各種の構造用材料として広範に使用する為には
、金属材料と同様に所望の形状に高精度に加工し得る技
術及び/又は新規材料の開発が必要である。例えば、ガ
スタービン用翼車の製造には、単純な切削加工のみなら
ず、三次元的加工も必要である。金属材料製のガスター
ビン用翼車や複雑な形状の型村等の製造に際しては、放
電加工による高精度の曲面加工が可能であるが、電気伝
導性の低い従来のSi3N4系セラミックスについては
、放電加工を行なうことは不可能であった。Si3N4
に電気伝導性の高い炭化ケイ素、炭化チタン等の第二成
分粉末又は粒子を添加してSi3N4焼結材料全体の電
気伝導性を改善することにより、放電加工を可能ならし
めようとする試みもなされている。しかしながら、放電
加工を可能とする程度にまでSi3N4材料の比抵抗を
低下させるには、炭化ケイ素、炭化チタン等の粉末又は
粒子をS;3N4重量の30%域いはそれ以上添加混合
する必要がある。この場合、Si3N4材料の放電加工
は可能となったとしても、Siが4凝結材料本来の優れ
た特性が損われることが多く、特に高温強度が著るしく
低下するという大きな欠点を伴う。本発明者は、公知の
Si3N4系材料の加工上の問題点を解消若しくは竪減
すべく種々研究を重ねた結果、Si3N4中に特定量の
繊維状SIC結晶(通常ひげ結晶或いはウィスカーと呼
ばれている)を分散含有する焼結複合材料が、その要求
を満足させることを見出した。
Generally, in order to obtain high-strength, high-density Si3N4 ceramics, it is preferable to use a hot pressing method, the so-called hot press method. However, in this method, the Si3N4 material is pressurized in a mold with a relatively simple shape, so it is difficult to mold and manufacture parts with complex shapes, such as mechanical gears and gas turbine impellers. This point is a major technical limitation of the hot press method. Therefore, in order to effectively utilize the various excellent properties of Si3N4 ceramics and widely use them as various structural materials in place of conventional metal materials, it is necessary to form them into desired shapes like metal materials. It is necessary to develop technology and/or new materials that can be processed with high precision. For example, manufacturing gas turbine impellers requires not only simple cutting but also three-dimensional processing. When manufacturing metal materials such as gas turbine impellers and molds with complex shapes, it is possible to process curved surfaces with high precision using electric discharge machining, but conventional Si3N4 ceramics with low electrical conductivity cannot be It was impossible to carry out any processing. Si3N4
Attempts have also been made to make electrical discharge machining possible by adding second component powder or particles such as highly electrically conductive silicon carbide or titanium carbide to the Si3N4 sintered material to improve the electrical conductivity of the entire Si3N4 sintered material. ing. However, in order to reduce the resistivity of the Si3N4 material to the extent that electrical discharge machining is possible, it is necessary to add and mix powder or particles of silicon carbide, titanium carbide, etc. in an amount of 30% or more of the weight of S;3N4. be. In this case, even if electric discharge machining of the Si3N4 material becomes possible, the excellent properties originally inherent in the Si-4 condensed material are often impaired, and in particular, there is a major drawback in that the high-temperature strength is significantly reduced. As a result of various researches aimed at solving or reducing the processing problems of known Si3N4-based materials, the present inventors discovered that a specific amount of fibrous SIC crystals (usually called whiskers or whiskers) were found in Si3N4. It has been found that a sintered composite material containing dispersed carbonaceous materials (containing 100% carbon dioxide) satisfies these requirements.

即ち、本発明は、Si3N4中にSi3N4重量の5〜
5の重量%の範囲内で長さ10〜500一m、太さ0.
1〜10仏肌の繊維状SIC結晶を分散含有し、IQ−
伽以下の比抵抗を有することを特徴とするSi3N4系
暁結複合セラミックスに係る。本発明においては、長さ
10〜500仏m、太さ0.1〜10山mの繊維状SI
C結晶の使用を必須とする。長さが10仏m未満の場合
には、粒状SICを加えて成形した場合と同様の結果を
生じ、Si3N4本来の高温特性を得がたい。一方、長
さが500仏mを超える場合には、成形中に互に絡まり
合って成形操作を妨げ、ち密な成形体の製造が困難とな
る。又、繊維状SICの太さが0.1仏m未満の場合に
は、成形中に繊維が破断して、粒状SICを使用する場
合と同様の結果になる。又、太さが10仏mを上回る場
合には、十分な電気伝導性を与える為には多量のSIC
を加える必要を生じ、Si3N4の特性を変化させる。
Si3N4に対する繊維状SIC結晶の量は、前者】0
の重量部に対し後者5〜50重量部とする。SICの量
がS亘3N4重量の5%未満の場合には、暁結体の電気
伝導性が十分に改善されず、一方50%を上回る場合に
は競結体の放電加工性はより向上するもののち密度が低
下する傾向がある。繊維状SIC結晶の添加量は、Si
3N4重量の10〜40%とすることがより好ましい。
本発明のSIC−Si3N4系焼結複合セラミックスは
、次の様にして製造される。
That is, in the present invention, 5 to 50% of the weight of Si3N4 is contained in Si3N4.
5% by weight, length 10-500m, thickness 0.5m.
Contains dispersed fibrous SIC crystals with a size of 1 to 10 degrees, and has an IQ-
The present invention relates to Si3N4-based composite ceramics characterized by having a resistivity of less than or equal to . In the present invention, fibrous SI having a length of 10 to 500 m and a thickness of 0.1 to 10 m
Requires use of C crystal. If the length is less than 10 m, the same result as when molding with granular SIC is produced, and it is difficult to obtain the high temperature characteristics inherent to Si3N4. On the other hand, if the length exceeds 500 mm, they will become entangled with each other during molding, hindering the molding operation, and making it difficult to produce a compact molded product. Furthermore, if the thickness of the fibrous SIC is less than 0.1 mm, the fibers will break during molding, resulting in the same result as when using granular SIC. Also, if the thickness exceeds 10 m, a large amount of SIC is required to provide sufficient electrical conductivity.
This creates the need to add 20% of Si3N4, changing the properties of Si3N4.
The amount of fibrous SIC crystals relative to Si3N4 is
5 to 50 parts by weight of the latter. If the amount of SIC is less than 5% of the weight of S-3N4, the electrical conductivity of the Akatsuki compact will not be sufficiently improved, while if it exceeds 50%, the electrical discharge machinability of the compact will be further improved. However, the density tends to decrease later. The amount of fibrous SIC crystal added is
More preferably, the content is 10 to 40% of the weight of 3N4.
The SIC-Si3N4-based sintered composite ceramic of the present invention is manufactured as follows.

‘i’粒度0.1〜5〃m程度のSi3N4粉末に所定
量の繊維状SIC結晶を添加混合し、均一に分散させた
後、混合物重量の0.1〜2%程度の粘結剤を加え、成
形及び乾燥後、焼結して、所望の複合セラミックスとす
る。
'i' Add and mix a predetermined amount of fibrous SIC crystals to Si3N4 powder with a particle size of about 0.1 to 5〃m, and after uniformly dispersing it, add a binder of about 0.1 to 2% of the weight of the mixture. In addition, after shaping and drying, it is sintered to form the desired composite ceramic.

粘結剤としては、好ましくはポリビニルアルコール、ア
クリル樹脂、セルロース、アルギン酸ソーダ等の水、ア
ルコール或いはその他の有機溶剤溶液が使用される。S
i3N4、SIC及び粘結剤からなるペーストは射出成
形、押出し成型等により所定形状に成形され、得られた
成形体は、加熱又は減圧下に予備乾燥され、次いで60
000以下に加熱して粘結剤を除去される。次いで乾燥
した成形体を加圧又は非加圧下1600〜185000
程度の温度で焼結する。‘ii’ 或いは、粒度1〜1
0仏m程度のケイ素粉末に繊維状SIC結晶を加え、更
に上記と同様に砧結剤を加えて得た均一なべーストを冷
間加圧成形等により所定形状に成形した後、乾燥し、窒
素雰囲気下1200〜140000程度で焼成して、ケ
イ素を窒化ケイ素に変化させる。
As the binder, preferably used is a solution of polyvinyl alcohol, acrylic resin, cellulose, sodium alginate, etc. in water, alcohol, or other organic solvent. S
A paste consisting of i3N4, SIC, and a binder is molded into a predetermined shape by injection molding, extrusion molding, etc., and the obtained molded product is pre-dried under heat or reduced pressure, and then dried at 60°C.
The binder is removed by heating to below 0.000C. Next, the dried molded body is heated for 1,600 to 185,000 with or without pressure.
Sinter at a temperature of about 'ii' or particle size 1-1
A uniform base obtained by adding fibrous SIC crystals to silicon powder of about 0 French m and adding a binding agent in the same manner as above is formed into a predetermined shape by cold pressing, etc., dried, and heated with nitrogen. It is fired in an atmosphere at a temperature of about 1,200 to 140,000 to convert silicon into silicon nitride.

本方法においては、晩結体中のSi3N4とSICとの
割が所定の範囲となる様に、ケイ素粉末を繊維状SIC
結晶とを予め配合しておく。尚、上記{i〕及び(ii
}のいずれの場合にも、必要に応じMg○、A夕203
、Zr02並びにY203、い203等のランタニド配
化物等の酸化物、AそN、BeN2等の窒化物等の糠結
助剤の併用を妨げない。
In this method, silicon powder is mixed into fibrous SIC so that the ratio of Si3N4 and SIC in late consolidation is within a predetermined range.
Mix the crystals in advance. In addition, the above {i] and (ii)
} In either case, Mg○, A203 as necessary.
, Zr02 and oxides such as lanthanide coordinations such as Y203 and I203, and nitrides such as ASON and BeN2.

本発明のSIC−Sj3N4系焼緒複合セラミックスは
、高い電気伝導性を有しているので、放電加工性に優れ
ている。SICを粉末又は粒子として使用する場合には
、各粒子成分が非電導性のSi3N4成分により取り囲
まれ、孤立した状態となりやすいので、電気伝導性を十
分に高める為には、多量の使用が必要になり、前述の如
く、暁結体の特性を低下させる。しかるに、本発明にお
いては、繊維状SIC結晶がS言3N4焼結体の補強材
としても機能するので、常温及び高温におけるSi3N
,焼結体の機械的特性をも改善するという効果も奏され
る。この様な本発明のSIC−Si3N4系暁縞体は、
高温で使用される複雑な形状の機械部分の製造を可能と
し、又大型の焼絹体から多量の小型部品を効率良く製造
することをも可能とするものである。実施例 1Si3
N4粉末(0.5〜2ムm)10の重量部に暁結助剤と
してのMg05重量部、よく分散したSICウィスカー
(太さ0.1〜5仏m、長さ50〜500仏m)5重量
部及び粘結剤としてポリビニルアルコール2重量部を加
え、十分に混合してペーストとした。
The SIC-Sj3N4-based composite ceramics of the present invention has high electrical conductivity, and therefore has excellent electrical discharge machinability. When SIC is used as powder or particles, each particle component is surrounded by non-conductive Si3N4 components and tends to become isolated, so a large amount must be used in order to sufficiently increase electrical conductivity. As mentioned above, the characteristics of the dawn concretion are reduced. However, in the present invention, since the fibrous SIC crystal also functions as a reinforcing material for the Si3N4 sintered body, the Si3N
, it also has the effect of improving the mechanical properties of the sintered body. Such a SIC-Si3N4-based Akatsuki body of the present invention is
This makes it possible to manufacture complex-shaped mechanical parts that are used at high temperatures, and also makes it possible to efficiently manufacture large quantities of small parts from large sintered silk bodies. Example 1Si3
10 parts by weight of N4 powder (0.5-2mm), 5 parts by weight of Mg0 as a coagulation aid, and well-dispersed SIC whiskers (thickness 0.1-5mm, length 50-500mm) 5 parts by weight and 2 parts by weight of polyvinyl alcohol as a binder were added and thoroughly mixed to form a paste.

得られたペーストを減圧ろ過法により薄板状に成形し、
13030で1幼時間乾燥した後、300k9/c鰭の
加圧下180000で煉結して100%相対密度の焼結
体を得た。得られた競結体の比抵抗、室温強度、高温強
度(1300℃)及び硬度を第1表に示す。本発明焼結
体の電気伝導性は、放電加工可能な程度に高く、又特に
高温における機械的特性に優れていることが明らかであ
る。
The obtained paste is formed into a thin plate shape by vacuum filtration method,
After drying at 13,030 for one hour, the material was brined at 180,000 under the pressure of a 300k9/c fin to obtain a sintered body with a relative density of 100%. Table 1 shows the specific resistance, room temperature strength, high temperature strength (1300°C), and hardness of the obtained composite. It is clear that the electrical conductivity of the sintered body of the present invention is high enough to allow electrical discharge machining, and it also has excellent mechanical properties, especially at high temperatures.

実施例 2 Si3N4に対するSICウィスカーの量を4の重量部
とした以外は実施例1と同様にして暁結体を得た。
Example 2 An Akatsuki compact was obtained in the same manner as in Example 1, except that the amount of SIC whiskers relative to Si3N4 was changed to 4 parts by weight.

得られた糠結体の物性を第1表に併せて示す。比較例
1SICゥィスカーを使用しない以外は実施例1と同様
にして焼結体を得た。
The physical properties of the obtained bran aggregates are also shown in Table 1. Comparative example
A sintered body was obtained in the same manner as in Example 1 except that 1SIC whiskers were not used.

競結体の物性は第1表に示す通りである。第1表The physical properties of the composite are shown in Table 1. Table 1

Claims (1)

【特許請求の範囲】[Claims] 1 Si_3N_4中にSi_3N_4重量の5〜50
%の範囲内で長さ10〜500μm、太さ0.1〜10
μmの繊維状SiC結晶を分散含有し、1Ω−cm以下
の比抵抗を有することを特徴とするSiC−Si_3N
_4系焼結複合セラミツクス。
1 Si_3N_4 contains 5 to 50% of the weight of Si_3N_4
Length 10-500 μm, thickness 0.1-10 within the range of %
SiC-Si_3N characterized by containing μm fibrous SiC crystals dispersed therein and having a specific resistance of 1Ω-cm or less
_4 series sintered composite ceramics.
JP57140833A 1982-08-12 1982-08-12 SiC-Si↓3N↓4-based sintered composite ceramics Expired JPS6035316B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57140833A JPS6035316B2 (en) 1982-08-12 1982-08-12 SiC-Si↓3N↓4-based sintered composite ceramics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57140833A JPS6035316B2 (en) 1982-08-12 1982-08-12 SiC-Si↓3N↓4-based sintered composite ceramics

Publications (2)

Publication Number Publication Date
JPS5930770A JPS5930770A (en) 1984-02-18
JPS6035316B2 true JPS6035316B2 (en) 1985-08-14

Family

ID=15277769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57140833A Expired JPS6035316B2 (en) 1982-08-12 1982-08-12 SiC-Si↓3N↓4-based sintered composite ceramics

Country Status (1)

Country Link
JP (1) JPS6035316B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627672A (en) * 1985-07-04 1987-01-14 株式会社 香蘭社 Manufacture of fiber reinforced silicon nitride ceramic
JPS6270266A (en) * 1985-09-20 1987-03-31 日本特殊陶業株式会社 Production of composite sintered body
JPS62230680A (en) * 1986-03-31 1987-10-09 住友電気工業株式会社 Manufacture of ceramic composite body
DE3662872D1 (en) * 1986-11-25 1989-05-24 Battelle Memorial Institute Pulverulent silicon nitride composition reinforced with silicon carbide whiskers and its use for the manufacturing of sintered parts
JPS63265864A (en) * 1987-04-22 1988-11-02 Yoshida Kogyo Kk <Ykk> High strength Si3N4-SiC whisker composite
DE3869483D1 (en) * 1987-06-09 1992-04-30 Sandvik Ab CERAMIC CUTTING TOOL REINFORCED WITH WHISKERS.
JPS6432003A (en) * 1987-07-28 1989-02-02 Mazda Motor Apex seal of rotary piston engine and manufacture thereof
EP0419150B1 (en) * 1989-09-18 1994-12-07 Ngk Insulators, Ltd. Sintered ceramic composite body and method of manufacturing same
CA2025425C (en) * 1989-09-18 1996-01-23 Yutaka Furuse Sintered ceramic composite body and method of manufacturing same
CA2058075C (en) * 1990-12-26 1996-07-02 Akira Yamakawa Composite ceramic powder and production process thereof

Also Published As

Publication number Publication date
JPS5930770A (en) 1984-02-18

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