JPS6037529B2 - Method for manufacturing magnetic recording media - Google Patents
Method for manufacturing magnetic recording mediaInfo
- Publication number
- JPS6037529B2 JPS6037529B2 JP7104180A JP7104180A JPS6037529B2 JP S6037529 B2 JPS6037529 B2 JP S6037529B2 JP 7104180 A JP7104180 A JP 7104180A JP 7104180 A JP7104180 A JP 7104180A JP S6037529 B2 JPS6037529 B2 JP S6037529B2
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- magnetic recording
- support
- hearth
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims description 23
- 230000005291 magnetic effect Effects 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000001704 evaporation Methods 0.000 claims description 30
- 230000008020 evaporation Effects 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 8
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 7
- 238000001771 vacuum deposition Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- -1 ferrous metals Chemical class 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229920002284 Cellulose triacetate Polymers 0.000 description 2
- 229910017112 Fe—C Inorganic materials 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020710 Co—Sm Inorganic materials 0.000 description 1
- 229910020514 Co—Y Inorganic materials 0.000 description 1
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- 229910002544 Fe-Cr Inorganic materials 0.000 description 1
- 229910002549 Fe–Cu Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】
本発明は、連続して移送されている可榛性帯状支持体に
磁性薄膜を真空蒸着して磁気記録媒体を製造する方法に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic recording medium by vacuum depositing a magnetic thin film onto a continuously transported flexible strip support.
近年、高密度磁気記録に対する要求が一段と強まるとも
に、従来のバインダー型磁性液を可榛性帯状支持体上に
塗布、乾燥させる塗布型製造方法に代わり、真空蒸着、
スパッタリング・イオンプレーティング・等の方法によ
りバインダーを使用せずに前記前記支持体上に強磁性金
属薄膜を層設する非塗布型の製造方法が、種々研究、実
用化されつつある。In recent years, as the demand for high-density magnetic recording has become stronger, vacuum deposition, vacuum deposition, and
Various non-coating manufacturing methods are being studied and put into practical use in which a ferromagnetic metal thin film is layered on the support without using a binder by methods such as sputtering and ion plating.
これら非塗布型製造方法の内でも磁性金属の蒸発ビーム
を支持体表面に対し斜めに入射させて蒸着させる斜方入
射真空蒸着方法は、処理工程、装置等も比較的コンパク
トであると同時に、良好な磁気特性を有した薄膜が得ら
れるため実用的であつた。Among these non-coating manufacturing methods, the oblique incidence vacuum evaporation method, in which the evaporation beam of the magnetic metal is directed obliquely to the support surface, is relatively compact in terms of processing steps and equipment, and is highly efficient. It was practical because a thin film with good magnetic properties could be obtained.
従来の斜方入射真空蒸着方法は、一般に、前記支持体を
前記蒸発源上方で直線状あるいはシリンダー状キャンの
外周面に沿って曲線状に移動せしめ、前記蒸発源におけ
る極めて限られた斜方入射角の蒸発金属流によって前記
支持体表面に強磁性金属薄膜を一度に所定厚さまで蒸着
することを特徴とするものであるが、前記支持体表面と
蒸発金属流が相対的に斜めに位置しているので、前記入
射角が零（支持体表面に対し直角に入射するもの。Conventional oblique incidence vacuum evaporation methods generally move the support above the evaporation source in a straight line or in a curved manner along the outer circumferential surface of a cylindrical can, thereby achieving very limited oblique incidence at the evaporation source. The method is characterized in that a ferromagnetic metal thin film is deposited on the support surface to a predetermined thickness at once using a corner evaporated metal flow, but the support surface and the evaporated metal flow are located obliquely relative to each other. Therefore, the incident angle is zero (the incident is perpendicular to the support surface).
）であるものと比較しその蒸着膜厚は糸弦（Ｃｏｓｊ股
）倍となり、前記入射角が大きくなるに従って蒸着効率
が著しく低下することは避けられず、又、前記支持体と
蒸発源との幾何学的配置からその入射角が大になると、
前記支持体と蒸発源間の距離が大となるので、蒸着効率
は一層低下するものであった。前述した蒸着効率の低下
は、比較的高価は非鉄金属例えばＣｏ，Ｃｏ合金等を使
用する場合、大幅なコストダウンを図ることに支障を来
たし、実用化上解決すべき重要な謀題であった。), the thickness of the deposited film is twice as high as the Cosj. As the incident angle increases, the deposition efficiency inevitably decreases significantly. When the angle of incidence becomes large due to the geometrical arrangement,
Since the distance between the support and the evaporation source becomes large, the evaporation efficiency is further reduced. The aforementioned decrease in vapor deposition efficiency is an impediment to achieving significant cost reductions when relatively expensive non-ferrous metals such as Co and Co alloys are used, and was an important problem to be solved for practical use. .
その課題の解決策として、例えば、袴関昭５４−９６０
７号公報に、前記蒸発源を前記キャンの直下からずらし
て蒸発金属流の高密度部分のみが前記キャン外周面上の
支持体表面に入射するように改良し、２０％の蒸着効率
を得る方法が提案されている。As a solution to this problem, for example, Hakama Sekisho 54-960
No. 7 discloses a method of obtaining 20% evaporation efficiency by shifting the evaporation source from directly below the can so that only the high-density portion of the evaporated metal flow is incident on the support surface on the outer peripheral surface of the can. is proposed.
しかしながら、この方法は前記キャン外周面上の支持体
に対する最適な蒸着入射角範囲を広く設定することが困
難であるので、前記蒸発源１基当りの蒸着効率向上には
限界があり、大幅な効率向上のためには多くの改良を必
要とするものであった。However, with this method, it is difficult to set a wide range of optimal evaporation incident angles with respect to the support on the outer peripheral surface of the can, so there is a limit to improving the evaporation efficiency per evaporation source, and there is a limit to the improvement of the evaporation efficiency per evaporation source. In order to improve it, many improvements were required.
本発明は前述した従来の斜方入射真空蒸着方法の蒸着効
率に関する問題点を解消し、かつ高抗磁力及び高角型比
を有した磁気記録媒体の製造方法を提供することを目的
とするものである。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a magnetic recording medium having a high coercive force and a high squareness ratio, while solving the above-mentioned problems regarding the deposition efficiency of the conventional oblique incidence vacuum deposition method. be.
本発明のか）る目的は、
可操性帯状支持体を略一定の速度で蒸発源上方を通過す
るように移送しながら、前誌蒸発源におけるハース内の
金属熔融体蒸発面を凹状に蟹曲、維持して、前記支持体
表面に強磁性金属薄膜を真空蒸着することを特徴とする
磁気記録媒体の製造方法により達成される。An object of the present invention is to bend the metal melt evaporation surface in the hearth of the evaporation source into a concave shape while transporting the movable belt-shaped support to pass above the evaporation source at a substantially constant speed. This is achieved by a method of manufacturing a magnetic recording medium, characterized in that a ferromagnetic metal thin film is vacuum-deposited on the surface of the support while maintaining the same.
以下、添付した図面に基づき、本発明方法の一実施態様
について詳述する。Hereinafter, one embodiment of the method of the present invention will be described in detail based on the attached drawings.
第１図は本発明方法を実施するための装置を夫々示した
ものである。FIG. 1 shows an apparatus for carrying out the method of the invention.
第１図において、１は可榛性帯状支持体（以下、「ウェ
ブ」と称する。In FIG. 1, 1 is a flexible strip-shaped support (hereinafter referred to as "web").
）の幅方向に沿って延在せしめた水冷鋼ハーフ２内で、
電子ビームの走査、加熱により熔融された金属蒸発体で
あり、該蒸発体１はその蒸発面中央点０を矢印３で夫々
示した方向に各蒸発金属流線をもって蒸発、拡散してい
るが、従来方法では、前記蒸発体１の蒸発面が平坦なた
めその蒸発分布域４が本発明方法のそれ５と比べ可成り
拡散している。本発明方法の蒸発分布域５は、前記蒸発
面が第２図に示した如く凹状に轡曲しているので、前記
中央点０を中心とする前記蒸発金属流線３が狭い分布範
囲内に集中される。) in the water-cooled steel half 2 extending along the width direction.
It is a metal evaporator melted by scanning and heating with an electron beam, and the evaporator 1 evaporates and diffuses with each evaporated metal streamline in the direction indicated by the arrow 3 from the center point 0 of its evaporation surface. In the conventional method, since the evaporation surface of the evaporator 1 is flat, the evaporation distribution area 4 is considerably more diffused than that 5 in the method of the present invention. In the evaporation distribution area 5 of the method of the present invention, since the evaporation surface is concavely curved as shown in FIG. be concentrated.
第２図は本発明方法を実施するための装置の要部を示し
たものであり、矢印Ａ又はＢの方向に回転駆動される円
筒状キャン６の外周面に沿って走行案内される前記支持
体Ｗの轡曲面に対し、下方より前記ハース２を配設し、
かつ該ハース２を支持している縦軸７を介し駆動部（図
示せず、）から前記ハース２を矢印Ｃの方向に回転可能
なように構成されている。FIG. 2 shows the main parts of an apparatus for carrying out the method of the present invention, in which the support is guided along the outer circumferential surface of the cylindrical can 6 which is rotationally driven in the direction of arrow A or B. The hearth 2 is arranged from below on the curved surface of the body W,
The hearth 2 is also configured to be rotatable in the direction of arrow C from a drive section (not shown) via a vertical shaft 7 that supports the hearth 2.
前記ハース２が矢印Ｃの方向に回転すると、前記ハース
２内の蒸発体１に遠心力が作用し、その蒸発面は中央点
０のレベルが低下し、その反面前記ハース２の内壁近傍
のレベルは上昇して、凹状の轡曲蒸発面８が形成される
。When the hearth 2 rotates in the direction of arrow C, centrifugal force acts on the evaporator 1 in the hearth 2, and the level of the evaporation surface at the center point 0 decreases, while the level near the inner wall of the hearth 2 decreases. is raised to form a concave curved evaporation surface 8.
前記轡曲蒸発面８の形成条件の一例を示せば、次の通り
である。An example of the conditions for forming the curved evaporation surface 8 is as follows.
前記蒸発体１としてＣｏを内径１５ｃ双の前記ハース２
内で電子ビームにより加熱、熔融しながら、前記ハース
２を１０仇．ｐ．ｍ．の回転駆動すると、前記蒸発体１
の轡曲蒸発面８は約５ｍ／肌の高低差をもって凹曲化す
る。Co is used as the evaporator 1 in the hearth 2 with an inner diameter of 15c.
The hearth 2 was heated for 10 minutes while being heated and melted by an electron beam in a chamber. p. m. When the evaporator 1 is rotated, the evaporator 1
The curved evaporation surface 8 is concave with a height difference of about 5 m/skin.
前述した如く凹状に轡曲した蒸発面８によって狭い分布
範囲内に集中された蒸発金属流線３を、前記支持体Ｗの
轡曲面上で比較的同一の入射角が得られ易い個所（通常
、前記キャン６の法線より左右何れかに偏俺した個所、
）を適宜選択し、必要に応じてマスク９を介在させるこ
とにより、前記蒸発体１の蒸着対果を大幅に向上させる
ことが可能になった。As mentioned above, the evaporated metal streamlines 3 concentrated within a narrow distribution range by the concavely curved evaporation surface 8 are placed on the curved surface of the support W at a location where it is easy to obtain a relatively uniform incident angle (usually, A location that is biased to either the left or right of the normal line of Can 6,
) and by interposing a mask 9 as necessary, it has become possible to significantly improve the performance of vapor deposition of the evaporator 1.
例えば、前記ハース２の非回転時と回転時の蒸着効果と
磁気特性について比較実験すると、下記に示した通りの
結果が確認されている。For example, when comparing the vapor deposition effect and magnetic properties when the hearth 2 is not rotated and when it is rotated, the following results were confirmed.
表一】
なお、前記比較実験は、１２一ｍの厚さのポリエステル
フルムを前記キャン６により他ｈ／分の速度で走行、案
内しながら前記フィルム上にＣｏの薄膜を斜方入射真空
蒸着法に基づいて屑設することを共通条件としたもので
ある。[Table 1] In the comparative experiment, a thin film of Co was deposited on a polyester film having a thickness of 121 m by an oblique incidence vacuum evaporation method while being guided by the can 6 at a speed of 1 h/min. The common condition is that the waste be disposed of based on the following.
なお、本発明の真空蒸着法によって磁気記録媒体を製造
する場合、磁性薄膜を形成させるための強磁性金属とし
てはＦｅ，Ｃｏ，Ｎｉ等の金属あるいはＦｅ−Ｃ。In addition, when manufacturing a magnetic recording medium by the vacuum evaporation method of the present invention, the ferromagnetic metal for forming the magnetic thin film is metal such as Fe, Co, Ni, or Fe-C.
，Ｆｅ一Ｎｉ，Ｃ。−Ｎｉ，Ｆｅ一Ｃ。−Ｎｉ，Ｆｅ−
Ｒｈ，Ｆｅ−Ｃｕ，Ｃｏ−Ｃｕ，Ｃｏ−Ａｕ，Ｃｏ−Ｙ
，Ｃｏ−Ｌａ，Ｃｏ−Ｐｒ，Ｃｏ−Ｇｄ，Ｃｏ−Ｓｍ，
Ｃｏ−Ｐｔ，Ｎｉ−Ｃｕ Ｍｎ−Ｂｉ，Ｍｎ−Ｓｂ，Ｍ
ｎ−Ｎ，Ｆｅ−Ｃｒ，Ｃｏ−Ｃｒ，Ｎｉ−Ｃｒ，Ｆｅ−
Ｃｏ−Ｃｒ，Ｆｅ−Ｃｏ−Ｎｉ−Ｃｒ等のような強磁性
合金が用いられる。磁性膜の厚さは、磁気記録媒体とし
て充分な出力を与え厚さおよび高密度記録の充分行なえ
る薄さを必要とすることから一般には約０．０２〃ｍか
ら５．０山ｍ、好ましくは０．０５山ｍから２．０ｒｍ
である。又、前記支持体Ｗはとしては、ポリエチレンテ
レフタレート、ポリィミド、ポリアミド、ポリ塩化ビニ
ル、三酢酸セルロース、三酢酸セルロース、ポリカーボ
ネート、ポリエチレンナフタレートのようなプラスチッ
クベース、のようなものが使用できる。更に、本発明に
おける蒸発源加熱方法としては抵抗加熱法、レーザービ
ーム加熱法、高周波加熱方法、電子ビーム加熱法等いず
れの方法も用いうる。, Fe-Ni, C. -Ni, Fe-C. -Ni,Fe-
Rh, Fe-Cu, Co-Cu, Co-Au, Co-Y
, Co-La, Co-Pr, Co-Gd, Co-Sm,
Co-Pt, Ni-Cu Mn-Bi, Mn-Sb, M
n-N, Fe-Cr, Co-Cr, Ni-Cr, Fe-
Ferromagnetic alloys such as Co-Cr, Fe-Co-Ni-Cr, etc. are used. The thickness of the magnetic film is generally about 0.02 m to 5.0 m, preferably about 0.02 m to 5.0 m, because it needs to be thick enough to provide sufficient output as a magnetic recording medium and thin enough to perform high-density recording. is 0.05 m to 2.0rm
It is. The support W may be a plastic base such as polyethylene terephthalate, polyimide, polyamide, polyvinyl chloride, cellulose triacetate, cellulose triacetate, polycarbonate, or polyethylene naphthalate. Further, as a method for heating the evaporation source in the present invention, any method such as a resistance heating method, a laser beam heating method, a high frequency heating method, an electron beam heating method, etc. can be used.
蒸発物質の供給方法として線状材料を加熱源に送り出す
方法も使用できる。A method of sending a linear material to a heating source can also be used as a method of supplying the vaporized substance.
第１図は従釆及び本発明方法における蒸発源の説明図、
第２図は本発明方法を実施するための装置の要部を示す
略図である。
１は蒸発体、２はハース、３は蒸発金属流線、７は縦軸
、Ｗは支持体である。
第１図
第２図FIG. 1 is an explanatory diagram of the substructure and the evaporation source in the method of the present invention,
FIG. 2 is a schematic diagram showing the main parts of an apparatus for carrying out the method of the present invention. 1 is an evaporator, 2 is a hearth, 3 is an evaporated metal streamline, 7 is a vertical axis, and W is a support. Figure 1 Figure 2
Claims (1)
過するように移送しながら、前記蒸発源におけるハース
内の金属熔融体蒸発面を凹状に彎曲、維持して、前記支
持体表面に強磁性金属薄膜を真空蒸着することを特徴と
する磁気記録媒体の製造方法。1. While transporting the flexible band-shaped support so as to pass above the evaporation source at a substantially constant speed, the metal melt evaporation surface in the hearth in the evaporation source is curved and maintained in a concave shape, so that the surface of the support is 1. A method for manufacturing a magnetic recording medium, comprising vacuum-depositing a ferromagnetic metal thin film on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7104180A JPS6037529B2 (en) | 1980-05-28 | 1980-05-28 | Method for manufacturing magnetic recording media |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7104180A JPS6037529B2 (en) | 1980-05-28 | 1980-05-28 | Method for manufacturing magnetic recording media |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56169228A JPS56169228A (en) | 1981-12-25 |
| JPS6037529B2 true JPS6037529B2 (en) | 1985-08-27 |
Family
ID=13449035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7104180A Expired JPS6037529B2 (en) | 1980-05-28 | 1980-05-28 | Method for manufacturing magnetic recording media |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6037529B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2588971B2 (en) * | 1989-07-06 | 1997-03-12 | 株式会社豊田中央研究所 | Laser deposition method and apparatus |
-
1980
- 1980-05-28 JP JP7104180A patent/JPS6037529B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56169228A (en) | 1981-12-25 |
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