JPS6039800B2 - How to give paper surface gloss - Google Patents
How to give paper surface glossInfo
- Publication number
- JPS6039800B2 JPS6039800B2 JP49079499A JP7949974A JPS6039800B2 JP S6039800 B2 JPS6039800 B2 JP S6039800B2 JP 49079499 A JP49079499 A JP 49079499A JP 7949974 A JP7949974 A JP 7949974A JP S6039800 B2 JPS6039800 B2 JP S6039800B2
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- JP
- Japan
- Prior art keywords
- polyvinyl alcohol
- parts
- paper
- weight
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Paper (AREA)
Description
【発明の詳細な説明】
近時化粧箱、本やマッチの表紙、カレンダー等において
は印刷面の上から樹脂溶液を塗布、乾燥し、ついで鏡面
板を用いてホットプレスすることにより、光沢付与、デ
ラックス感の付与を行なうことが広く行なわれている。[Detailed Description of the Invention] Nowadays, cosmetic cases, covers of books and matches, calendars, etc. are coated with a resin solution over the printed surface, dried, and then hot-pressed using a mirror plate to give gloss and deluxe appearance. It is widely practiced to give a sense of feeling.
かかるッャニス塗料の目的に用いる樹脂として以前は塩
化ビニルー酢酸ビニル共重合体が主として用いられてき
たが、該樹脂は柔らかいためバッチ式には好適であって
もステンレスのエンドレスベルトによる連続プレス法に
おいてはベルト面との剥離が円滑にいかないという欠点
があり、最近では連続法においてはもっとガラス転移点
の高い樹脂であるアクリル系共重合体が使われている。
しかしながら前記に例示した如き樹脂は作業工程におい
て溶剤溶液として用いるために、溶剤の輝散により作業
員の健康を害したり、火災の危険があったり、廃水中に
混入して公害源となったりすることがあり、法的にも規
制されつつある状況である。本発明者らはアクリル系共
重合体の水性分散液を用いて紙加工を行なえば上記の如
き問題点を解決できると考えたが、実際にアクリル系共
重合体の水性分散液を紙に塗布するとヒビ割れが起きて
均一な皮膜を得ること自体がむづかしく、又一見均一に
塗布できているように見える場合でも塗膜を指や爪でこ
すればすぐ剥れてしまうほど密着性が劣っており、到底
実用に供しうるものではなかつた。In the past, vinyl chloride-vinyl acetate copolymer was mainly used as a resin for such coatings, but since this resin is soft, although it is suitable for batch processing, it is not suitable for continuous pressing using an endless stainless steel belt. The drawback is that peeling from the belt surface is not smooth, and in recent years, acrylic copolymers, which are resins with higher glass transition points, have been used in continuous methods.
However, since the above-mentioned resins are used as a solvent solution in the work process, they can harm the health of workers due to the solvent scattering, pose a fire risk, and become a source of pollution when mixed into wastewater. This is a situation where it is becoming legally regulated. The present inventors thought that the above problems could be solved by processing paper using an aqueous dispersion of an acrylic copolymer, but in reality, an aqueous dispersion of an acrylic copolymer was applied to paper. This causes cracks, making it difficult to obtain a uniform coating, and even if it appears to be applied evenly, the adhesion is so poor that it peels off as soon as you rub your fingers or nails on the coating. Therefore, it was not something that could be put to practical use at all.
しかるに本発明者らはさらに検討を重ねた結果、アルキ
ル基の炭素数2〜4のメタクリル酸アルキルェステルを
必須成分とし、メタクリル酸メチル又はスチレンのいず
れも含まないポリマーの水性分散液にポリビニルアルコ
ール系樹脂を特定の比率で混合してなる混合物を印刷紙
に塗布するときは、密着力の大きい均一な塗膜が得られ
、その塗布面を鏡面板を用いてホットプレスすれば極め
て美麗な光沢に富んだ加工紙が得られること、しかも塗
膜の基材への接着力は粘着テープによる剥離試験で紙層
間剥離を起すほど強力であることを見出し、本発明を完
成するに至った。However, as a result of further studies, the present inventors found that polyvinyl alcohol was added to an aqueous dispersion of a polymer that contains an alkyl methacrylate having an alkyl group of 2 to 4 carbon atoms as an essential component and does not contain either methyl methacrylate or styrene. When applying a mixture of resins in a specific ratio to printing paper, a uniform coating with great adhesion can be obtained, and if the coated surface is hot-pressed using a mirror plate, it can be coated with an extremely beautiful gloss. The present inventors have discovered that a processed paper rich in oxidation can be obtained, and that the adhesion of the coating film to the substrate is so strong that it causes delamination between the paper layers in a peel test using an adhesive tape, leading to the completion of the present invention.
本発明においては水系であるので、従来問題になってい
た溶剤の輝数による公害問題は完全に解決される。本発
明においてはアルキル基の炭素数2〜4のメタクリル酸
ァルキルェステルを必須成分とし、メタクリル酸メチル
又はスチレンのいずれも含まないポリマーの水性分散液
を用いる。かかるアルキル基としてはエチル基、n−プ
ロピル基、ィソプロピル基、n−ブチル基、n−ィソブ
チル基、t−ブチル基があげられる。該メタクリル酸ア
ルキルェステルの含量はポリマーの5の重量%以上を占
めることが望ましく、それ未満ではポリマーの軟化温度
が低下してホットプレス時に鏡面板との間の剥離性が悪
くなり、又特有の表面光沢が得がたくなる。ポリマーの
構成成分として上記〆タクリル酸アルキルェステル以外
にアクリル酸ェステル類、他のメタクリル酸ェステル類
、アクリロニトリル、メタクリロニトリル、塩化ビニル
、酢酸ビニル等が含まれていてもよい。ただし本願にお
いてはメタクリル酸メチル及び/又はスチレンはポリマ
ーの構成々分として含まれない。これらのコモノマー成
分を含む場合については、すでに椿簾昭49−5762
7号として出願しているからである。かかるポリマーは
水性分散液として用いられうる。分散液中の樹脂分濃度
は目的によって広く変えうるが、通常は約20〜6の重
量%の範囲から選ばれる。ポリビニルアルコール系樹脂
としてはその重合度、ケン化度の如何にかかわらず広い
組成のもの、たとえば重合度約200〜3000ケン化
度約75モル%以上のものが使用できる。Since the present invention is water-based, the pollution problem caused by the brightness of the solvent, which has been a problem in the past, is completely solved. In the present invention, an aqueous dispersion of a polymer containing an alkyl methacrylate having an alkyl group of 2 to 4 carbon atoms as an essential component and containing neither methyl methacrylate nor styrene is used. Examples of such alkyl groups include ethyl group, n-propyl group, isopropyl group, n-butyl group, n-isobutyl group, and t-butyl group. It is preferable that the content of the alkyl methacrylate ester accounts for 5% by weight or more of the polymer; if it is less than 5% by weight, the softening temperature of the polymer will decrease and the peelability between the mirror plate and the mirror plate during hot pressing will be poor, and the specific The surface gloss becomes difficult to obtain. In addition to the above-described alkyl taacrylate esters, the polymer may also contain acrylic esters, other methacrylic esters, acrylonitrile, methacrylonitrile, vinyl chloride, vinyl acetate, and the like. However, in this application, methyl methacrylate and/or styrene are not included as constituents of the polymer. Regarding the case containing these comonomer components, it has already been reported in Tsubakiren Sho 49-5762.
This is because the application is filed as No. 7. Such polymers can be used as aqueous dispersions. The resin concentration in the dispersion can vary widely depending on the purpose, but is usually selected from a range of about 20 to 6% by weight. As the polyvinyl alcohol resin, resins having a wide range of compositions can be used regardless of their degree of polymerization and degree of saponification, such as those having a degree of polymerization of about 200 to 3000 and a degree of saponification of about 75 mol % or more.
ただ一般的には重合度が極端に高いものやケン化度が余
りに低いものは水に対する溶解性の点で制約される。な
おここで言うポリビニルアルコール系樹脂とは酢酸ビニ
ルの単独重合体のケン化物に限られず、酢酸ビニルを主
体とし、これと他の少量の共重合性モノマー、たとえば
エチレン、プロピレン、クロトン酸、アクリル酸、メタ
クリル酸、マレイン酸、或いはこれら不飽和酸のェステ
ルなどとの共重合体のケン化物をも含む。又水溶性を阻
害しない範囲でポリビエルアルコールをホルムアルデヒ
ド、アセトアルデヒド、ブチルアルデヒド等で部分アセ
タール化した変性物やウレタン化した変性物をも含む。
ポリビニルアルコール系樹脂は粉末状で或いは水溶液状
で上記ポリマーの水性分散液と混合される。However, in general, those with an extremely high degree of polymerization or those with an extremely low degree of saponification are limited in terms of solubility in water. Note that the polyvinyl alcohol resin mentioned here is not limited to saponified homopolymers of vinyl acetate, but also contains vinyl acetate as its main component, with small amounts of other copolymerizable monomers, such as ethylene, propylene, crotonic acid, and acrylic acid. , methacrylic acid, maleic acid, or saponified copolymers with esters of these unsaturated acids. It also includes modified products in which polyvinyl alcohol is partially acetalized with formaldehyde, acetaldehyde, butyraldehyde, etc., and modified products in which polyvinyl alcohol is converted into urethane, within a range that does not impede water solubility.
The polyvinyl alcohol resin is mixed with the aqueous dispersion of the above polymer in the form of a powder or an aqueous solution.
本発明においては、ポリビニルアルコール系樹脂の配合
割合は、水性分散液中の樹脂分10の重量部に対し5〜
20値重量部の範囲になければならない。In the present invention, the blending ratio of polyvinyl alcohol resin is 5 to 5 parts by weight for 10 parts by weight of resin in the aqueous dispersion.
It must be within the range of 20 parts by weight.
ポリビニルアルコール系樹脂の配合量が5重量部未満で
は基材に塗布したときヒビ割れを生ずるなど均一性に欠
け、又密着力も不足する。一方ポリビニルアルコール系
樹脂の配合量が20の重量部を越える場合は表面光沢及
び基材への密着が不充分となり、かつ後述の架橋剤の併
用によってもなお充分な耐水性が得られなくなる。ここ
でポリビニルアルコール系樹脂の配合量が上記範囲内で
比較的多い場合(約20〜3碇部以上の場合)には造膜
性がより円滑に進むという利点がある反面、耐水性が若
干損なわれることがある。If the blending amount of the polyvinyl alcohol resin is less than 5 parts by weight, the coating will lack uniformity, such as cracking when applied to a substrate, and will also lack adhesion. On the other hand, if the amount of the polyvinyl alcohol resin exceeds 20 parts by weight, the surface gloss and adhesion to the substrate will be insufficient, and sufficient water resistance will not be obtained even when a crosslinking agent described below is used in combination. Here, if the amount of polyvinyl alcohol resin blended is relatively large within the above range (approximately 20 to 3 anchor parts or more), there is an advantage that film formation progresses more smoothly, but on the other hand, water resistance is slightly impaired. It may happen.
そこで特に耐水性が要求される用途に用いるときには、
上記ポリマーの水性分散液とポリビニルアルコール系樹
脂とからなる混合物にさらにポリビニルァルコール系樹
脂の架橋剤を加えれば耐水性の点でも充分の満足が得ら
れることがわかった。かかる架橋剤としては水溶性又は
水分敵性のものでかつポリビニルアルコール系樹脂に対
し架キ樹作用のあるものであって、例示すればユリア、
メラミンなどのメチロール化物、分子内に2ケ以上のグ
リシジル基、N−メチロール基、カルボキシル基又はィ
ソシアネート基などを含有する化合物などがあげられる
。架橋剤の使用量は架橋剤の種類によっても異なり、又
目的とする耐水化の程度によっても異なるので一概に決
められないが、通常はポリビニルアルコール系樹脂に対
し約8の重量%以下、なかんづく5〜5広重量%程度と
することが多い。Therefore, when used in applications that require particularly water resistance,
It has been found that if a crosslinking agent for polyvinyl alcohol resin is further added to the mixture consisting of the aqueous dispersion of the above polymer and polyvinyl alcohol resin, sufficient satisfaction can be obtained in terms of water resistance. Such crosslinking agents are water-soluble or water-friendly and have a crosslinking effect on polyvinyl alcohol resins, examples of which include urea,
Examples include methylol compounds such as melamine, and compounds containing two or more glycidyl groups, N-methylol groups, carboxyl groups, or isocyanate groups in the molecule. The amount of crosslinking agent to be used varies depending on the type of crosslinking agent and the degree of water resistance desired, so it cannot be determined unconditionally, but it is usually about 8% by weight or less based on the polyvinyl alcohol resin, especially 5% by weight or less based on the polyvinyl alcohol resin. It is often set at about 5% by weight.
かくして得られた組成物は水性分散液と水溶液との中間
的状態にある。The composition thus obtained is in a state intermediate between an aqueous dispersion and an aqueous solution.
なお上記組成物には必要に応じエタノール、ィソプロパ
ノールなどの有機溶剤系のしべリング剤、染料、可塑剤
等公知の添加剤を加えてもよい。In addition, known additives such as organic solvent-based staining agents such as ethanol and isopropanol, dyes, and plasticizers may be added to the above composition as required.
塗布手段としてはロール塗り法、ハケ塗り法、カーテン
フローコート、スプレーコート、ドクターコートなど任
意の手段が採用される。As the application method, any method such as roll coating, brush coating, curtain flow coating, spray coating, doctor coating, etc. can be employed.
塗布後は乾燥を行なうが、それだけでは艶が劣るのでさ
らにホットプレスを行なう。After application, it is dried, but that alone will reduce the luster, so hot pressing is also performed.
ホットプレスは印刷紙の上に塗布して得られた樹脂面に
ステンレス製、アルミニウム製等の鏡面板を重ね、これ
を適当枚数交互に積んで約70〜15000でホットプ
レスするか、或いは鏡面板をエンドレスベルト状にして
ホット。ーラー間を通すことにより連続的な加工を行な
う如くする。次に実施例をあげて本発明の方法をさらに
説明する。For hot pressing, mirror plates made of stainless steel, aluminum, etc. are layered on the resin surface obtained by coating on printing paper, and an appropriate number of plates are piled up alternately and hot pressed at about 70 to 15,000 yen, or mirror plates are Hot in the form of an endless belt. It is possible to perform continuous processing by passing the material between the rollers. Next, the method of the present invention will be further explained with reference to Examples.
以下「部」、「%」とあるのは特にことわりのない限り
重量基準である。実施例 1
メタクリル酸エチル90%、及びアクリル酸ブチル10
%よりなる組成の共重合体のェマルジョン(樹脂分50
%)1の部1こ重合度500 ケン化度97モル%のポ
リピニルアルコールの20%水溶液5碇部とィソプロパ
ノ−ル1碇部を加えてよく混合し、これをハンドアプリ
ケーターを用いて厚さ0.5帆の印刷ボール紙上に12
タノで(固形分で)となるように塗布し、100℃にて
6の砂間熱風乾燥した。In the following, "parts" and "%" are based on weight unless otherwise specified. Example 1 90% ethyl methacrylate and 10% butyl acrylate
% copolymer emulsion (resin content 50
%) 1 part 1 Copolymerization degree 500 Add 5 parts of a 20% aqueous solution of polypynyl alcohol with a saponification degree of 97 mol% and 1 part of isopropanol, mix well, and apply this to a thick layer using a hand applicator. 0.5 sails printed on cardboard 12
It was coated with a powder coater (solid content) and dried with hot air at 100°C.
造膜は均一であり、爪でこすっても剥離しなかった。つ
いで塗布紙をステンレス製鏡面板に重ね合せ、温度80
00、圧力200k9/のの条件で1分間ホットプレス
した。ホットプレス後の鏡面板からの紙の剥離は極めて
円滑に進み、10の父の連続ホットプレスにおいてもト
ラブルは1件もなかった。かくして得られた化粧紙は光
沢に富み、表面から粘着テープを貼つて勢いよくはがす
粘着テープ剥離テストにおいては基材である紙層が破断
するほど密着性が大きかった。The film formation was uniform and did not peel off even when rubbed with a fingernail. Next, the coated paper was placed on a stainless steel mirror plate and heated to a temperature of 80°C.
00, and hot pressed for 1 minute at a pressure of 200 k9/. The peeling of the paper from the mirror plate after hot pressing proceeded extremely smoothly, and there were no problems even during the continuous hot pressing of 10 years. The decorative paper thus obtained was highly glossy, and in an adhesive tape peel test in which an adhesive tape was attached to the surface and then vigorously peeled off, the adhesiveness was so great that the paper layer, which was the base material, was broken.
一方対照例としてポリビニルアルコール水溶液のみを加
えなかったほかは例1と同様にして塗装を行なったとき
はヒビ割れがおきて造膜自体が均一にいかず、しかも指
で軽くこするだけで塗面が剥離し、ホットプレス後も光
沢が著しく劣る上、粘着テープテストでは紙と樹脂皮膜
面の間で剥離し、到底実用に供しうるものではなかった
。On the other hand, as a control example, when coating was carried out in the same manner as in Example 1 except that only the aqueous polyvinyl alcohol solution was not added, cracks appeared and the film formation itself was not uniform, and the coated surface could be easily rubbed with a finger. The paper peeled off, the gloss was significantly inferior even after hot pressing, and in the adhesive tape test, it peeled between the paper and the resin film surface, making it completely unusable.
実施例 2実施例1におけるメタクリル酸エチルーアク
リル酸ブチル共重合体のェマルジョン、ポリビニルアル
コール水溶液及びィソプロパノールの混合物にさらにト
リメチロールメラミン系架橋剤(スミテックスM−3、
住友化学株式会社製)2部を加えた混合物を実施例1と
同機に印刷紙に塗布、乾燥、ホットプレスしたものは良
好な光沢、密着性と共に高度の耐水性が得られた。Example 2 To the mixture of the emulsion of ethyl methacrylate-butyl acrylate copolymer, polyvinyl alcohol aqueous solution and isopropanol in Example 1, a trimethylolmelamine crosslinking agent (Sumitex M-3,
A mixture prepared by Sumitomo Chemical Co., Ltd.) was coated on printing paper using the same machine as in Example 1, dried and hot pressed, resulting in good gloss and adhesion as well as high water resistance.
実施例 3
ポリメタクリル酸ブチルのェマルジョン(50%濃度)
10碇邦、重合度500ケン化度総モル%のポリビニル
アルコールの20%水溶液15碇部、エチレングリコー
ルジグリシジルェーテル架橋剤(ェポラィト4皿、共栄
社油脂化学工業株式会社製)9部及びィソプロパノール
1碇鞠からなる混合物を実施例1と同様に印刷紙に塗布
、乾燥、ホットプレスしたものは鏡面板との剥離性、光
沢、密着性、耐水性がいずれも良好であった。Example 3 Emulsion of polybutyl methacrylate (50% concentration)
10 parts of a 20% aqueous solution of polyvinyl alcohol with a degree of polymerization of 500 and a total degree of saponification of mol %, 9 parts of an ethylene glycol diglycidyl ether crosslinking agent (Eporite 4 trays, manufactured by Kyoeisha Yushi Kagaku Kogyo Co., Ltd.) and A mixture of 1 part sopropanol and 1 part sopropanol was coated on printing paper, dried and hot pressed in the same manner as in Example 1, and the paper had good releasability from the mirror plate, gloss, adhesion, and water resistance.
実施例 4
メタクリル酸エチル60%及びアクリル酸メチル40%
よりなる組成の共重合体のェマルジョン(50%濃度)
100部、重合度1400、ケン化度96モル%のポリ
ビニルァルコールの10%水溶液10礎郭及びィソプロ
パノール1碇部からなる混合物を実施例1と同機に印刷
紙に塗布、乾燥、ホットプレスしたものは鏡面板との剥
離性、光沢、密着性及び耐水性がいずれも良好であった
。Example 4 60% ethyl methacrylate and 40% methyl acrylate
Emulsion of copolymer with composition (50% concentration)
A mixture consisting of 100 parts of a 10% aqueous solution of polyvinyl alcohol with a degree of polymerization of 1,400 and a degree of saponification of 96 mol %, consisting of 10 parts of polyvinyl alcohol and 1 part of isopropanol was applied to printing paper using the same machine as in Example 1, dried, and hot pressed. The resulting product had good releasability, gloss, adhesion, and water resistance from the mirror plate.
実施例 5
メタクリル酸ブチル70%及び酢酸ビニル30%よりな
る組成の共重合体のェマルジョン(50%濃度)10碇
部と重合度80リケン化度98モル%のポリビニルアル
コールの20%水溶液25部との混合物を実施例1と同
様に印刷紙に塗布、乾燥、ホットプレスしたものは鏡面
板との剥離性、光沢、密着性並びに耐水性がいずれも良
好であった。Example 5 10 parts of an emulsion (50% concentration) of a copolymer having a composition of 70% butyl methacrylate and 30% vinyl acetate, and 25 parts of a 20% aqueous solution of polyvinyl alcohol with a degree of polymerization of 80% and a degree of resaponification of 98% by mole. The mixture was applied to printing paper in the same manner as in Example 1, dried, and hot-pressed, and the product had good releasability from the mirror plate, gloss, adhesion, and water resistance.
対照例
実施例5で用いたメタクリル酸ブチルー酢酸ビニル共重
合体のェマルジョン10碇部、実施例5で用いたポリビ
ニルアルコール水溶液600部、ェポラィト4皿3の部
及びィソプロパノール2碇部からなる混合物を使用した
場合には鏡面板との剥離性は良好であったが、光沢、密
着性及び耐水性の点で劣っていた。Control Example A mixture consisting of 10 parts of the butyl methacrylate-vinyl acetate copolymer emulsion used in Example 5, 600 parts of the polyvinyl alcohol aqueous solution used in Example 5, 4 parts of Eporite and 3 parts of isopropanol. When used, the peelability from the mirror plate was good, but the gloss, adhesion and water resistance were poor.
Claims (1)
エステルを必須成分とし、メタクリル酸メチル又はスチ
レンのいずれも含まないポリマーの水性分散液にポリビ
ニルアルコール系樹脂を混合し、かつその際水性分散液
中のポリマー100重量部に対するポリビニルアルコー
ル系樹脂の配合量を5〜200重量部となるように選び
、ついで該混合物を印刷紙に塗布して乾燥し、さらに鏡
面板を用いてホツトプレスすることを特徴とする紙の表
面光沢付与方法。1. A polyvinyl alcohol resin is mixed with an aqueous dispersion of a polymer containing an alkyl methacrylate having an alkyl group of 2 to 4 carbon atoms as an essential component and containing neither methyl methacrylate nor styrene, and at this time, in the aqueous dispersion. The blending amount of the polyvinyl alcohol resin is selected to be 5 to 200 parts by weight based on 100 parts by weight of the polymer, and then the mixture is applied to printing paper and dried, and then hot pressed using a mirror plate. A method for imparting surface gloss to paper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079499A JPS6039800B2 (en) | 1974-07-10 | 1974-07-10 | How to give paper surface gloss |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49079499A JPS6039800B2 (en) | 1974-07-10 | 1974-07-10 | How to give paper surface gloss |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS519910A JPS519910A (en) | 1976-01-27 |
| JPS6039800B2 true JPS6039800B2 (en) | 1985-09-07 |
Family
ID=13691604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49079499A Expired JPS6039800B2 (en) | 1974-07-10 | 1974-07-10 | How to give paper surface gloss |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6039800B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6239563Y2 (en) * | 1978-04-20 | 1987-10-08 | ||
| JPS6042097A (en) * | 1983-08-19 | 1985-03-06 | Sakata Shokai Ltd | Aqueous overcoating composition and printing method using the same |
| JPS6070415A (en) * | 1983-09-28 | 1985-04-22 | Sakata Shokai Ltd | Aqueous overcoating composition and printing method using it |
| JPS6083894A (en) * | 1983-10-14 | 1985-05-13 | Sakata Shokai Ltd | Aqueous overcoating composition and printing method using the same |
| JPS60141590A (en) * | 1983-12-28 | 1985-07-26 | Sakata Shokai Ltd | Aqueous overcoating composition and printing method using the same |
| US12235144B2 (en) | 2020-09-17 | 2025-02-25 | Applied Materials, Inc.—Robotics | Micro-electromechanical device for use in a flow control apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239088B2 (en) * | 1974-05-21 | 1977-10-03 |
-
1974
- 1974-07-10 JP JP49079499A patent/JPS6039800B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS519910A (en) | 1976-01-27 |
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