JPS6042637B2 - Rod-shaped piezoelectric micro-movement element - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric fine movement element in which a large number of thin plate-shaped piezoelectric elements are stacked to form a row body and electrically connected in parallel.

Linear piezoelectric micro-movement elements, which are made by laminating a large number of piezoelectric elements each having a conductive layer on one or both sides of a plate-shaped piezoelectric body, have the advantage of extremely fast response and withstand large surface pressure, but the displacement is small. Therefore, its uses were limited.

The present invention solves the above-mentioned drawbacks and provides a linear piezoelectric micro-movement element whose position can be increased by using a booster or the like.

The gist of the present invention is that the electrode layer of the piezoelectric element is formed with a certain deviation from the central axis of the piezoelectric element laminated rod-like body. To explain based on this, 1 is a piezoelectric element, and a terminal protrusion 3 for connecting lead wires is formed on the upper left side of a lead titanate zirconate-based quadrilateral piezoelectric ceramic plate 2 by silver baking, leaving a corner 21 on the upper half of the surface. and A, and a conductive layer 3 is formed, and a terminal protrusion 4A for connecting lead wires is formed on the upper right side of the back upper half, and a back conductive layer 4 corresponding to the front conductive layer 3 is formed.

The piezoelectric element 10 is made by baking silver on the front and back surfaces of the same piezoelectric ceramic plate 2 as the piezoelectric element 1, and has a terminal protrusion 30A for connecting lead wires and a front conductive layer 30 on the upper right, and a terminal protrusion 40A and a back conductive layer 40 on the upper left. has. The row piezoelectric fine movement element 5 is the piezoelectric element 1
and 10 are alternately bonded with an adhesive 6 such as an epoxy resin, and a notch 2 is provided at the upper edge of the elements 1 and 10.
It has a structure in which the lead wire 7 is attached to a groove formed by 3 and 23. The row piezoelectric micro-movement element 5 according to the present invention has a central axis A that passes through the center a of the piezoelectric elements 1 and 10, and a central axis A that passes through the center of the conductive layer 3 and the back conductive layer 4.
When a voltage is applied to the lead wire 7, a voltage is applied between the front and back conductive layers of the piezoelectric elements 1 and 10, and the piezoelectric ceramic plate 2 mainly When a certain upper half expands or contracts, for example, when it expands, the thickness of each piezoelectric ceramic plate 2 in the portion of the central axis B of the conductive layer is increased, and the piezoelectric ceramic plate on the side not having the conductive layer 3 and the back conductive layer 4 is increased. Since the thickness of the ceramic plate 2 does not change, the central axis A of the row piezoelectric fine movement elements 5 curves and deforms toward the side that does not have the conductive layer 3 and the back conductive layer 4.

As shown in FIG. 4, when one end of the row piezoelectric micro-movement element 5 is fixed and a voltage is applied through the lead wire 7, the free end is displaced in the axial direction by an amount d, and the displacement in the direction perpendicular to the axis is a peak. =
The size is about 5 to 10 d.

The present invention has the above configuration, and since the electrode layer of each piezoelectric element of the piezoelectric element stacked row body has a certain deviation with respect to the central axis of the rod-shaped body, a predetermined deviation occurs in the amount of expansion of the piezoelectric element, Therefore, the rod-shaped piezoelectric fine movement element is curved and a large displacement can be obtained. Since the rod-shaped piezoelectric fine movement element of the present invention has a larger displacement than conventional products, it can be used in measurement fields other than drive displacement control elements for fine movement of workpieces in NC machine tools, fine movement adjustment of samples in electron microscopes, etc. can also be used effectively.

BRIEF DESCRIPTION OF THE DRAWINGS FIGS. 1 and 2 are perspective views of a piezoelectric element constituting a rod-shaped piezoelectric fine movement element according to the present invention.

FIG. 3 is a partially enlarged perspective view of the rod-shaped piezoelectric fine movement element according to the present invention, and FIG. 4 is a front view showing the state when voltage is applied. 1, 10... Piezoelectric element, 3, 4...
・Conductive layer, 5... Rod-shaped piezoelectric fine movement element.

Claims (1)

[Claims] 1. In a piezoelectric element laminated rod-like body in which a large number of piezoelectric elements are laminated as electrodes with a conductive layer on one or both sides of a plate-shaped piezoelectric body, the central axis of the conductive device of each piezoelectric element is the center of the rod-like body in the stacking direction. A rod-shaped piezoelectric micro-movement element characterized by having a constant deviation with respect to an axis and being able to curve as a result of expansion and contraction of the piezoelectric element.